BRONKHORST M+W Instruments SW-10n Series User manual

ATTENTION
Please read this Instruction Manual carefully before installing and operating the instrument.
Not following the instructions could result in personal injury and/or damage to the equipment.
Instruction Manual
Vapor Delivery Module
Doc. no.: 9.17.079A Date: 15-10-2014

Vapor Delivery Module 9.17.079
Disclaimer
The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is assumed for
inaccuracies. The material in this manual is for information purposes only.
Bronkhorst High-Tech B.V.
October 2014
Symbols
Important information. Discarding this information could cause injuries to people or damage to the Instrument or
installation.
Helpful information. This information will facilitate the use of this instrument.
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Additional info available on the internet or from your local sales representative.
Receipt of equipment
Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local carrier must
be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales
representative.
Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the
equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a
report should be submitted to your local sales representative.
Check the packing list to ensure that you received all of the items.
Do not discard spare or replacement parts with the packing material and inspect the contents for damage.
Refer to "Removal and return instructions" about return shipment procedures.
Equipment storage
The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to subject the
equipment to excessive temperatures or humidity.
Copyright
© 2014 Bronkhorst High-Tech B.V.
All rights reserved. This documentation is protected by copyright.
Subject to technical and optical changes as well as printing errors.
The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V.
reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular
persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this
document.
Bronkhorst®
2

Warranty
Bronkhorst products are warranted against defects in material and workmanship for a period of three years from the date of
shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage.
Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted
for one year or the balance of the original warranty, whichever is the longest.
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See also paragraph 9 of the Conditions of sales:
http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf
The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is performed under
warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to our factory or service
center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid by
the customer.
Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables,
test leads, cracks, or breaks before each use.
The module and accessories must be used in accordance with its specifications and operating instructions otherwise the safety of
the equipment may be impaired.
If required, replace fuses with the same type and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. In case of a defect please return the equipment to Bronkhorst High-Tech.
The symbol on the module indicates that the user should refer to the operating instructions in the manual.
Surfaces near the symbol may be hot.
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst High-Tech B.V..
Standard fuses, with applicable national safety approvals, may be used if the rating and type are simular. Other components that
are not safety related may be obtained from other suppliers as long as they are equivalent to the original component. (Note that
selected parts should be obtained only through Bronkhorst® to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call your local Bronkhorst® representative for support.
Bronkhorst®
Vapor Delivery Module 3
9.17.079

Bronkhorst®
Vapor Delivery Module 9.17.0794
Table of contents
...................................................................................................................................................................... 6
Scope of this manual 1
...................................................................................................................................................................... 61.1 Introduction and intended use
...................................................................................................................................................................... 61.2 References to other applicable documents
...................................................................................................................................................................... 6Related documents 1.2.1
...................................................................................................................................................................... 6Software tooling 1.2.2
...................................................................................................................................................................... 7
Starting up 2
...................................................................................................................................................................... 72.1 Check properties
...................................................................................................................................................................... 72.2 Rated pressure test inspection
...................................................................................................................................................................... 72.3 Install module
...................................................................................................................................................................... 72.4 Model key
...................................................................................................................................................................... 8
Technical specification 3
...................................................................................................................................................................... 83.1 Physical dimensions
...................................................................................................................................................................... 83.2 Environmental conditions
...................................................................................................................................................................... 83.3 Ingress protection class
...................................................................................................................................................................... 83.4 Fluidic connections
...................................................................................................................................................................... 8General 3.4.1
...................................................................................................................................................................... 8Flow ranges of used components 3.4.2
...................................................................................................................................................................... 9Capacities 3.4.3
...................................................................................................................................................................... 9Pressure rating 3.4.4
...................................................................................................................................................................... 93.5 Piping
...................................................................................................................................................................... 93.6 Electrical connections
...................................................................................................................................................................... 9Mains 3.6.1
...................................................................................................................................................................... 10Tracing 3.6.2
...................................................................................................................................................................... 10Pt100 tracing sensor 3.6.3
...................................................................................................................................................................... 10Communication 3.6.4
....................................................................................................................................................................... 10RS232 / Propar 3.6.4.1
....................................................................................................................................................................... 10FLOW-BUS 3.6.4.2
...................................................................................................................................................................... 113.7 Connector specifications
...................................................................................................................................................................... 11Hook-up diagram 3.7.1
...................................................................................................................................................................... 12
Installation 4
...................................................................................................................................................................... 124.1 Mounting
...................................................................................................................................................................... 124.2 Fluid connections
...................................................................................................................................................................... 124.3 Supply pressure
...................................................................................................................................................................... 124.4 Leak check
...................................................................................................................................................................... 124.5 Seals
...................................................................................................................................................................... 134.6 Purging / filling
...................................................................................................................................................................... 13Startup without using vacuum 4.6.1
....................................................................................................................................................................... 13To fill the system 4.6.1.1
....................................................................................................................................................................... 14To start the process 4.6.1.2
....................................................................................................................................................................... 14To stop the process 4.6.1.3
....................................................................................................................................................................... 14How to leave system overnight 4.6.1.4
....................................................................................................................................................................... 14To empty and purge the system 4.6.1.5
...................................................................................................................................................................... 15Startup with using vacuum 4.6.2
....................................................................................................................................................................... 15To fill the system 4.6.2.1
....................................................................................................................................................................... 15To start the process 4.6.2.2

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Vapor Delivery Module 5
9.17.079
....................................................................................................................................................................... 16To stop the process 4.6.2.3
....................................................................................................................................................................... 16How to leave system overnight 4.6.2.4
....................................................................................................................................................................... 16To empty and purge the system 4.6.2.5
...................................................................................................................................................................... 17
Operation 5
...................................................................................................................................................................... 175.1 Power- and warm-up
...................................................................................................................................................................... 175.2 User interface
...................................................................................................................................................................... 17Buttons 5.2.1
...................................................................................................................................................................... 17Display 5.2.2
...................................................................................................................................................................... 18Select Instrument 5.2.3
...................................................................................................................................................................... 19Temperature and flow setpoint 5.2.4
...................................................................................................................................................................... 195.3 Operating settings
...................................................................................................................................................................... 20Operation example 5.3.1
...................................................................................................................................................................... 21Vaporpressure of water 5.3.2
...................................................................................................................................................................... 22
Troubleshooting and service 6
...................................................................................................................................................................... 226.1 Troubleshooting
...................................................................................................................................................................... 236.2 Maintenance
...................................................................................................................................................................... 236.3 Service
...................................................................................................................................................................... 24
Removal and return instructions 7

Bronkhorst®
Vapor Delivery Module 9.17.0796
1 Scope of this manual
1.1 Introduction and intended use
The Vapor Delivery Module is a compact integrated system to realize mass flow control of vapor. The Vapor Delivery Module is
intended to generate a predefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately
controlled carrier gas flow with subsequent evaporation inside a temperature controlled chamber.
1.2 References to other applicable documents
Manuals and guides for digital instruments are modular. General instructions give information about the functioning and
installation of instruments. Operational instructions explain the use of the digital instruments features and parameters. Field bus
specific information explains the installation and use of the field bus installed on the instrument.
1.2.1 Related documents
- Instruction manual FLOW-BUS interface (document nr. 9.16.024)
- Instruction manual RS232 interface with FLOW-BUS protocol (document nr. 9.16.027)
- Instruction manual E-8000 Readout and Control System (document nr. 9.17.076)
These documents Contain information for basic and advanced operation, more detailed product information and instructions
for troubleshooting.
1.2.2 Software tooling
For RS232 or FLOW-BUS operation the following Bronkhorst software is available.
FlowDDE Software tool to interface between digital instruments and windows software
FlowView Software tool to operate Bronkhorst digital instruments
Flowfix Software tool for fieldbus connection of digital instruments
FlowPlot Software tool for monitoring and optimizing digital instruments parameters
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Manuals and Software tooling can be found at: http://www.bronkhorst.com/en/downloads

Bronkhorst®
Vapor Delivery Module 7
9.17.079
2 Starting up
2.1 Check properties
Before installing a Vapor Delivery Module it is important to read the attached labels
and check:
Model key
Pressure rate
Temperature (ambient)
Power supply
Power
2.2 Rated pressure test inspection
Each Vapor Delivery Module is pressure tested to at least 1.5 times the working pressure of the process conditions stipulated by the
customer, with a minimum of 8 [bar]. Each Module is helium leak tested to at least 2•10-9 [mbar l/s] Helium outboard.
The tested pressure is stated on the module with a RED COLOURED sticker.
Before installation, make sure that the test pressure is in accordance with
normal safety factors for your application.
If there is no Pressure Testing Sticker on the module or if the test pressure is
not complying with your pressure requirements, the equipment should not
be mounted in the process line and be returned to the factory.
2.3 Install module
See chapter 4 for detail installation instructions.
Before switching on power, please check if all external electrical and communication (if necessary) connections are properly
connected.
2.4 Model key

Bronkhorst®
Vapor Delivery Module 9.17.0798
3 Technical specification
3.1 Physical dimensions
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For overall dimensions please consult supplied dimensional drawing 7.05.901. This documents is available on:
http://www.bronkhorst.com/en/downloads or can be obtained by contacting our local sales & service
representatives
3.2 Environmental conditions
• Ambient temperature : 5°C - 40°C.
• Relative humidity : Maximum relative humidity 80%, for temperatures up to 31°C decreasing linearly
to 50% relative humidity at 40°C.
• Height altitude : Up to 2000 [m].
3.3 Ingress protection class
IP20, according IEC standard 60529.
3.4 Fluidic connections
3.4.1 General
The Vapor Delivery Module gas and liquid supply are equipped with compression type or face-seal-fittings. Normally these fittings
are BSP parallel threads types which have to be used in combination with elastomeric O-rings to seal to the Vapor Delivery Module.
Occasionally fittings are orbital welded to the VDM-Series.
For leak tight installation of compression type fittings be sure that the tube is inserted to the shoulder in the fitting body and that
no dirt or dust is present on tube, ferrules or fittings.
For exact information on the fitting, please contact Swagelok for further instructions or documentation.
Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other dangerous
fluids are used.
3.4.2 Flow ranges of used components
Model
Heater
model
Thermal
power
Max. capacity1
Max temp.
SW-10n
W-100A
10 [W]
1...30 [g/h] liquid
0.1...4 [ln/min] gas
200°C
SW-20n
W-200A
100 [W]
10...120 [g/h] liquid
0.2...10 [ln/min] gas
200°C
1 Depends on liquid and process pressure; table based on water at 1 atmosphere.
For other liquids or pressure conditions please consult the manufacturer or your local sales representative.

Bronkhorst®
Vapor Delivery Module 9
9.17.079
3.4.3 Capacities
Figure 1: Capacity SW-100 Vaporizer Figure 2: Capacity SW-200 Vaporizer
3.4.4 Pressure rating
• Gas supply = max. 10 bar(g)
• Liquid supply = max. 10 bar(g)
• Vapor pressure = atmospheric
3.5 Piping
For optimal performance of the system it is recommend to have at least 10 pipe diameters distance between the angle and the
equipment inlets. The purge is rarely used in production environments, except for installation.
Be sure that piping is absolutely clean!
CAUTION - DO NOT install small diameter piping on high flow rates.
CAUTION - DO NOT mount abrupt angles directly to the inlet or outlet, especially for high flow rates.
3.6 Electrical connections
3.6.1 Mains
Model
Power supply
[Vac]
Maximum power
(included tracing §3.6.2)
Fuse primary
heater
Fuse secondary
heater
Fuse main
SW-10n-n-50-a-nn-a
110 … 120
250 [VA] | 50-60 [Hz]
T2[A]
T4[A]
T2[A]
SW-10n-n-51-a-nn-a
110 … 120
550 [VA] | 50-60 [Hz]
T2[A]
T4[A]
T2[A]
SW-20n-n-50-a-nn-a
110 … 120
250 [VA] | 50-60 [Hz]
T2[A]
T4[A]
T2[A]
SW-20n-n-51-a-nn-a
110 … 120
550 [VA] | 50-60 [Hz]
T2[A]
T4[A]
T2[A]
SW-10n-n-30-a-nn-a
220 … 240
250 [VA] | 50-60 [Hz]
T1[A]
T4[A]
T1[A]
SW-10n-n-31-a-nn-a
220 … 240
550 [VA] | 50-60 [Hz]
T1[A]
T4[A]
T1[A]
SW-20n-n-30-a-nn-a
220 … 240
250 [VA] | 50-60 [Hz]
T1[A]
T4[A]
T1[A]
SW-20n-n-31-a-nn-a
220 … 240
550 [VA] | 50-60 [Hz]
T1[A]
T4[A]
T1[A]
For mains connection, use appropriate cabling with IEC 60320-1/C19 connector:
• Power cable with Euro Plug (EU) – Schurter #6051.2043 (art.nr.1.15.242)
• Power cable with Switzerland Plug (CH) (art.nr.1.15.243)
• Power cable with North America Plug (USA) – Schurter #6051.2041 (art.nr.1.15.244)
• Power cable with United Kingdom Plug (UK) – Schurter #6051.2048 (art.nr.1.15.245)

Bronkhorst®
Vapor Delivery Module 9.17.07910
3.6.2 Tracing
Optionally, the Vapor Delivery Module can be provided with a trace temperature control. In this case, the VDM-Series is provide
with a tracing output IEC 60320-2-2 / C13 female connector. This connector is intended for connecting tracing tape, which is not
supplied. The voltage at this tracing output is equal to the supply voltage of the Vapor Delivery Module.
For tracing connection, use appropriate cabling with IEC 60320-2-2/C14 plug (art.nr. 1.09.594). Make sure cabling is double
isolated.
The table below shows the maximum tracing power and the fuse amperage for the various models.
Model
Power supply [Vac]
Maximum tracing power
Fuse tracing heater
SW-10n-n-51-a-nn-a
110 … 120
300 [VA] | 50-60 [Hz]
T2,5[A]
SW-20n-n-51-a-nn-a
110 … 120
300 [VA] | 50-60 [Hz]
T2,5[A]
SW-10n-n-31-a-nn-a
220 … 240
300 [VA] | 50-60 [Hz]
T1,25[A]
SW-20n-n-31-a-nn-a
220 … 240
300 [VA] | 50-60 [Hz]
T1,25[A]
3.6.3 Pt100 tracing sensor
Optionally, the Vapor Delivery Module can be provided with a trace temperature control. In this case, the VDM-Series is provide
with a Pt100 inlet 4-pin M12 A-coded male connector. This connector is intended for connecting a two, three or four-wire Pt100.
Measurement current through the sensor is 0,5 [mA].
For Pt100 connection, use appropriate cabling with M12 4-pin female connector (art.nr. 1.09.593).
Warning! Be sure that the temperature sensor is properly mounted with the tracing wire,
otherwise no temperature control is possible and hazardous situations may occur.
3.6.4 Communication
3.6.4.1 RS232 / Propar
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For further instructions about the RS232 interface see manual 9.17.027 Manual 'RS232 interface with FLOW-BUS
protocol for digital instruments'. This manual is available at the download section of our website:
http://www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf
3.6.4.2 FLOW-BUS
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For further instructions about the FLOW-BUS interface see manual 9.17.024 Manual 'FLOW-BUS interface for digital
instruments'. This manual is available at the download section of our website:
http://www.bronkhorst.com/files/downloads/manuals_english/917024manual_flowbus_interface.pdf