Brooks Instrument SLA6900 Series User manual
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Brooks® Delta Class
SLA6900 Series UHP and
SLA6800 Series Metal Seal
Mass Flow Controllers and Meters
Model SLA6950A
Analog I/O
Mass Flow Controller
Model SLA6950D
Digital I/O DeviceNetTM
Mass Flow Controller
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
ESD (Electrostatic Discharge)
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
HandlingProcedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
THIS PAGE WAS
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
i
Contents
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope ............................................................................................................................................... 1-1
1-2 Purpose............................................................................................................................................ 1-1
1-3 Description ....................................................................................................................................... 1-1
1-4 Specifications ................................................................................................................................... 1-2
Section 2 Installation
2-1 General ............................................................................................................................................ 2-1
2-2 Receipt of Equipment....................................................................................................................... 2-1
2-3 Recommended Storage Practice ..................................................................................................... 2-2
2-4 Return Shipment .............................................................................................................................. 2-2
2-5 Removal from Storage ..................................................................................................................... 2-2
2-6 Gas Connections.............................................................................................................................. 2-3
2-7 Installation ........................................................................................................................................ 2-3
2-8 In-Line Filter ..................................................................................................................................... 2-4
2-9 Electrical Interface............................................................................................................................ 2-4
2-10 Operation Check Procedure............................................................................................................. 2-5
Section 3 Operation
3-1 Overview .......................................................................................................................................... 3-1
3-2 Theory of Operation ......................................................................................................................... 3-1
3-3 Features ........................................................................................................................................... 3-2
3-4 Adaptive Valve Control ..................................................................................................................... 3-4
3-5 Analog Mode of Operation ............................................................................................................... 3-4
Section 4 Maintenance & Troubleshooting
4-1 Overview .......................................................................................................................................... 4-1
4-2 Troubleshooting................................................................................................................................ 4-2
4-3 Gas Conversion Factors .................................................................................................................. 4-6
4-4 Orifice Sizing .................................................................................................................................... 4-7
4-5 Restrictor Sizing .............................................................................................................................. 4-10
Section A CE Certification
A-1 CE Certification of Mass Flow Equipment........................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
ii
Contents Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Figures
Figure Page
Number Number
1-1 Model SLA6950/SLA6850 Series MFC Dimensions ........................................................................ 1-5
1-2 Model SLA6960/SLA6860 Series MFM Dimensions ........................................................................ 1-6
1-3 Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC's ....................................................... 1-7
2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions ............................................ 2-6
2-2 Common Electrical Hookups............................................................................................................ 2-6
3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown) ............................................. 3-2
3-2 ExternallyAccessibleAdjustment..................................................................................................... 3-3
3-3 Flow Control System Block Diagram (MFC Only) ............................................................................ 3-6
4-1 Bench Troubleshooting Circuit ......................................................................................................... 4-4
4-2 Model SLA6950 Orifice Sizing Nomograph..................................................................................... 4-14
4-3 Example Nomograph ...................................................................................................................... 4-15
Tables
Table Page
Number Number
2-1 Recommended Filter Size................................................................................................................ 2-4
3-1 Typical Resistor Values for Calibration Select.................................................................................. 3-5
4-1 Bench Troubleshooting for MFC/MFM ............................................................................................. 4-4
4-2 SensorTroubleshooting ................................................................................................................... 4-5
4-3 Orifice Capacities ............................................................................................................................. 4-6
4-4 Conversion Factors (Nitrogen Base) ............................................................................................... 4-11
4-5 Model SLA6900/SLA6800 Series Standard Restrictors .................................................................. 4-16
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-1
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
1-1 Description
Thank you for purchasing a Brooks Instrument Delta Class Metal-Sealed
Mass Flow Product. This manual, X-TMF-SLA6900-SLA6800-MFC-eng is a
complete installation and operation manual for your instrument.
1-2 Purpose
The Brooks®SLA6900/SLA6800 Series are mass flow measurement devices
designed for accurately measuring (MFM's) and rapidly controlling (MFC's)
flows of gases. This instruction manual is intended to provide the user with all
the information necessary to install, operate and maintain these products.
This manual is organized into the following sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance
SectionA CE Certification
It is recommended that this manual be read in its entirety before attempting to
operate or repair the SLA6900/SLA6800 Series.
1-3 Description
The Brooks SLA6960/SLA6860 Series Mass Flow Meters (MFM) are high
precision gas flow measuring devices. The SLA6950/SLA6850 Mass Flow
Controllers (MFC) are a complete, closed-loop system for controlling flow.
They are designed for use in advanced, ultra-clean gas handling systems
requiring deterministic performance, superior accuracy, and diagnostic
capabilities.These instruments feature ultra-polished internal surfaces
(SLA6900 Series) and all metal inboard and outboard seals (SLA6900 &
SLA6800 Series).
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-2
Section 1 Introduction Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
1-4 Specifications
Physical:
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Models SLA6950, SLA6960, SLA6850 & SLA6860
Any range from 0-3 sccm to 0-30,000 sccm N2 eq.
Models SLA6951, SLA6961, SLA6851 & SLA6861
Any range from 20-100 slpm N2eq.
Up to 200 slpm H2flows possible (consult factory)
*Standard: 0° and 101kPa (760 Torr). Per SEMI Guideline E12-96. For full scale flow rates
greater than 50 sccm Nitrogen equivalent.
Control Range
(50:1) - elastomeric valve seat
(33:1) - metal valve seat
Accuracy
±1.0% of rate, including linearity (20% to 100% F.S.), ±0.2% of F.S. (below
20% full scale)
Repeatability
±0.20% of rate
Temperature Sensitivity
Zero: Less than 0.075% F.S. per °C
Span: Less than ±1% F.S. shift over 10-50°C range
Settling Time
Less than 800 ms to within ±2% full scale of final value for a 0-100% step per
SEMI Guideline E17-91.
(Refer to Figure 1)
RATINGS:
Operating Pressure
1500 psig maximum
150 psi (10.35 bar) maximum operating pressure
recommended for optimal performance
Pressure Equipment Directive (PED) 97/23/EC
Sound Engineering Practice
Pressure Differential Range
Model SLA6950, SLA6850
5-50 psid (3.45 bar max.)
Model SLA6951, SLA6851
10-50 psid (3.45 bar max.)
Minimum and Maximum pressure drop depends on
gas and FS flow rate (consult factory)
Do not operate this instrument in excess of the specifications
listed below. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
WARNING
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-3
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Leak Integrity
Inboard to Outboard: 1x10-10 atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 60°C (32°F to 140°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Maximum Fluid Operating Temperature
0°C to 65°C (32°F to 149°F)
PHYSICAL:
Materials of Construction (SLA6900 Series)
316L VacuumArc Remelt (VAR), 316L, and high-alloy ferritic stainless steel.
External/internal seals: Nickel
Valve seat: 316L stainless steel - standard
Internal wetted surface finish 5 Ra
Materials of Construction (SLA6800 Series)
316L VacuumArc Remelt (VAR), 316L, and high-alloy ferritic stainless steel.
External/internal seals: Nickel
Valve seat: 316L stainless steel - standard
Internal Wetted Surface Finish: 32 Ra
Outline Dimensions
Refer to Figures 2-9.
Process Connections (SLA6900 Series)
1/4" male VCRTM
CS Seal (SEMI spec. 2787.5 4/98)
C Seal (SEMI spec. 2787.1 4/98)
Process Connections (SLA6800 Series)
1/4" male VCRTM
CS Seal (SEMI spec. 2787.5 4/98)
C Seal (SEMI spec. 2787.1 4/98)
ELECTRICAL CHARACTERISTICS:
Electrical Connections
Analog I/O option: 15-pin D-Connector, male
DeviceNet I/O option: 5-pin Micro-Connector, male
EMC Directive 89/336/EC
per 61326
Power Supply Voltage
Analog I/O option: +15 Vdc, ±5%
(traditional -15 Vdc pin is ignored)
DeviceNet I/O option: nominal = 11-25 Vdc
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-4
Section 1 Introduction Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Power Requirements
Watts, typ. Watts, max.
Analog I/O option, no valve: 1.80
Analog I/O option, with valve: 2.60 4.00
DeviceNet I/O option, no valve: 3.80
DeviceNet I/O option, with valve: 4.90 7.60
Command-Setpoint Input (Analog I/O option only)
0-5 Vdc: Input will accept signals to 5.5 Vdc (110% F.S.).
Input resistance: 360 k ohm min.
Flow Output (Analog I/O option only)
0-5 Vdc into 2K ohm minimum load.
Output will indicate process variable up to 6 Vdc
(120% F.S.).
Valve Override Signal (Analog I/O option only)
Left floating/unconnected – instrument controls valve to command setpoint
Connected to signal at or above 5.0 Volts
– valve is forced open
Connected to signal at or below 0.0 Volts
– valve is forced closed
5 Volt Reference Signal (Analog I/O option & 15 PIN only)
For use with potentiometer command setpoint input
±0.2%, into 1 K ohm (minimum load)
Calibration-Select Signal (15 Pin Only)
Select one of ten gases and P.I.D. tuning settings in analog mode.
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-5
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Figure 1-1 SLA6950/SLA6850 Series Analog I/O MFC Dimensions.
Anaolg I/O D Connector
1/4" VCR Connections
Analog I/O D-Connector
Downport Connections
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-6
Section 1 Introduction Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Figure 1-2 SLA6960/SLA6860 Series Digital I/O DeviceNet MFM Dimensions.
Digital I/O DeviceNet
Downport Connections
Digital I/O DeviceNet
1/4" VCR Connections
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-7
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Figure 1-3 Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC Dimensions
Digital I/O, DeviceNet
1/4" VCR Connections
Digital I/O DeviceNet
Downport Connections
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-8
Section 1 Introduction Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
2-1
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-1 General
This section provides installation instructions for the Brooks®SLA6950/
SLA6850 Series MFC's and SLA6960/SLA6860 Series MFM's.
Figure 1-1 shows the SLA6950/SLA6850 Series dimensions, gas connections
and electrical connection locations for the MFC's, refer to Figure 1-2 ('D"
Connector) for the SLA6960/SLA6860 Series MFM's .
2-2 Receipt of Equipment
When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should immediately be notified regarding his
liability. Areport should be submitted to the Product Service Department,
Brooks Instrument, 407 West Vine Street, Hatfield, Pennsylvania 19440.
Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare
parts are not discarded with the packing material. Inspect for damaged or
missing parts.
The SLA6900/SLA6800 UHP Series devices have been assembled,
calibrated and double-vacuum bagged in a Class 100 clean room. In your
semi-clean area, remove the outer bag only. Pass Ultra-Clean Metal Seal
Mass Flow Device into your clean area. Remove the second clean room
compatible bag only when the equipment is ready to be tested and/or installed
in your clean system.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: BrooksAm@BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
2-2
Section 2 Installation Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-3 Recommended Storage Practice
If intermediate or long-term storage is required for equipment, as supplied by
Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:
a. In the original vacuum bag and shipping container.
b. In a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum and
7°C (45°F) minimum.
2. Relative humidity 45% nominal, 60% maximum and 25% minimum.
2-4 Return Shipment
Prior to returning any Brooks equipment to the factory, contact the factory for
a Return MaterialsAuthorization Number (RMA#). This can be obtained at
Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, PA19440, or call toll free 1-888-554-FLOW (3569).
Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at the
locations listed below.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: BrooksAm@BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
2-5 Removal from Storage
Upon removal from storage, a visual inspection should be conducted to verify
the condition of the equipment is “as received.” If the equipment has been in
storage in conditions in excess of those recommended (See Section 2-3), the
device should be subjected to a pneumatic pressure test in accordance with
applicable vessel codes. To maintain the ultra-clean integrity, this service
should be performed by the factory or one of the authorized service centers.
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
2-3
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-6 Gas Connections
Standard inlet and outlet connections supplied on the SLA6900/SLA6800
Series are 1/4"(M) VCR. Prior to installation ensure all piping is clean and
free from obstructions. Install piping in such a manner that permits easy
access to the instrument if removal becomes necessary.
2-7 Installation
Recommended installation procedures:
a.The SLA6900/SLA6800 Series MFM should be located in a clean, dry
atmosphere relatively free from shock and vibration.
b.Leave sufficient room for access to Self-zero function push-button.
c.Install in such a manner that permits easy removal if the instrument
requires servicing.
d.The SLA6900/SLA6800 Series MFM can be installed in any position.
However, mounting in orientations other than the original factory calibration
(see calibration data sheet supplied with the instrument) can result in a
±0.5% maximum full scale shift after re-zeroing.
e.When installing a mass flow controller or meter with full scale flow rates of
10 slpm or greater, be aware that sharp, abrupt angles in the system piping
directly upstream of the controller may cause a small shift in accuracy. If
possible, have at least ten pipe diameters of straight tubing upstream of the
mass flow controller or meter.
Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.
CAUTION
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
2-4
Section 2 Installation Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve (MFC). The filtering element should
be replaced periodically or ultrasonically cleaned.
Table 2-1. Recommended Filter Size.
Maximum Flow Rate Recommended Filter
100 sccm 1 micron
500 sccm 2 microns
1 to 5 slpm 7 microns
10 to 30 slpm 15 microns
2-9 Electrical Interface
The SLA6900/SLA6800 Series MFM's are controlled using analog 0-5 Vdc
signals. The minimum set of connections which must be made to the Model
SLA6950/SLA6850 MFC and Model SLA6960/SLA6860 MFM include +15
Vdc, supply common, and a setpoint signal. The setpoint signal is supplied as
a
0 to 5 Vdc analog signal.All signals are supplied via the 15-pin ‘D’ connector.
The SLA6900/SLA6800 Series MFM's electrical interface is designed to
facilitate low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply.
These commons are electrically connected together on the SLA6900/
SLA6800 Series MFM's PC board.
Voltage I/O Version
• Chassis Ground
• Signal Common
• Signal Output
• +15 Vdc Supply
• -15 Vdc Supply (not used by SLA6950 MFC)
• Setpoint Input
• Setpoint Common
• Supply Common
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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
2-5
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-10 Operation Check Procedure
a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately one hour for the
instrument to warm up and stabilize its temperature.
c. Do NOT supply gas to the MFC/MFM. Ensure that the differential pressure
across the MFC/MFM is zero.
d. Check the MFC/MFM zero.
e. The analog output signal should be 0.000 Vdc ± 0.2%. If the zero exceeds
one of these limits, follow the re-zeroing procedure in Section 3-5 (analog
mode).
f. Turn on the gas supply.A positive flow signal may be present due to valve
leak-thru (MFC only). Leak-thru may be significant (3.0%) with metal valve
seats.
g. Supply a setpoint voltage between 1 and 5 Vdc.
h. Check the analog output signal. The output voltage signal should match the
setpoint voltage (± 20mV) within 10 seconds after the setpoint is changed.
The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.
Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.
NOTICE
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