Brooks 8600 User manual

8600 Compressor
Installation, Operation and
Maintenance Manual
8040707 Revision A

8600 Compressor
Installation, Operation and Maintenance Manual
Brooks Automation
8040707 Revision A
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner™, Align™, AquaTran™, AutoTeach™, ATR™, AXM™, Basic Blue™, BiSymmetrik™, 
CenterSmart™, Cool Solutions™, Crate to Operate™, e-RMA™, e-Spares™, e-Volution™, FastRegen™, 
FIXLOAD™, FrogLeg™, InLigner™, InCooler™, Interface™, Jet Engine™, LowProfile™, M2 Nano™,
Mini-Ion™, PASIV™, PowerPak™, PerformanceBlue™, PowerPak™, PowerTools™, QuadraFly™, Radius™,
Radient™, Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™, 
SPOTLevel™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal 
Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Ultimate Blue™, VAC-407™, VacuTran™,
Vacuum Quality Monitor™, VQM™, Vacuum Quality Index™, VQI™, and the Brooks logo are trademarks of
Brooks Automation, Inc. 

AcuTran®, AquaTrap®, Conductron®, Convectron®, the Cool Solutions logo, Cryodyne®, Cryotiger®,
Cryo-Torr®, Fusion®, GOLDLink®, Granville-Phillips®, Guardian®, GUTS®, Helix®, Jet®, Leapfrog®, 
MagnaTran®, MapTrak®, Marathon®, Marathon 2®, Marathon Express®, Micro-Ion®, MiniConvectron®,
On-Board®, Polycold®, Razor®, Simplicity Solutions®, the Simplicity Solutions logo, Stabil-Ion®, TrueBlue®,
TurboPlus®, Vision®, Zaris®, and the Brooks Automation logo are registered U.S. trademarks of Brooks 
Automation, Inc. 

All other trademarks are properties of their respective owners.
© 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary
Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot
be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
This information may be incorporated into the user’s documentation, however any changes made by the user
to this information is the responsibility of the user.
For Technical Support:
Visit us online: www.brooks.com
January 11, 2013 Part Num 8040707 Revision A
This technology is subject to United States export Administration Regulations and authorized to the destination
only; diversion contrary to U.S. law is prohibited.
Printed in the U.S.A.
Location GUTS®Contact Number
North America +1-800-FOR-GUTS (1-800-367-4887)
[phone]
Europe +49-1804-CALL-GUTS ([phone])
Japan [phone]
China [phone]
Taiwan [phone]
Korea [phone]
Singapore [phone]

8600 Compressor Contents
Installation, Operation and Maintenance Manual
Brooks Automation 8040707
Revision A i
Contents
Figures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
Safety
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Signal Word Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Safety Shape Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Compressor Description
BROOKS-Cryogenics Helium Refrigeration System . . . . . . . . . . . . . . . . . . . . . . . .2-3
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
Cooling Water. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11
Controller Front Panel Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14
Controller Back Panel Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-17
Fuse Panel, Type 01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19
Cooling Water INLET . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20
Cooling Water OUTLET . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-21
Cryopump Electrical Outlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-21
Helium Gas Charge Control Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-21

Contents 8600 Compressor
Installation, Operation and Maintenance Manual
8040707 Brooks Automation
ii Revision A
Helium Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-21
Helium Return Line Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-22
Helium Supply Line Coupling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-22
Power Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-22
Unpacking and Inspection
Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Compressor Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Compressor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Static Helium System Pressure Verification. . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Shipping Carton Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3
Installation
Installation Tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Environmental Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Supply and Return Water Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
Prerequisites to Installing Supply and Return Water Line Connections. .4-4
Installing Hard Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Installing Flexible Water Lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
Electrical Connections for Type 01 8600 Compressor . . . . . . . . . . . . . . . . . . . . . . .4-7
Electrical Connections for Type 02 8600 Compressor . . . . . . . . . . . . . . . . . . . . . . .4-8
Wiring Procedure for Remote Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
Connecting and Disconnecting Helium Flex Lines. . . . . . . . . . . . . . . . . . . . . . . . . .4-11
Connecting Flexible Helium Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11
Disconnecting Helium Flex Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-13
Cryo-Torr 20HP Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-14
Pre-operation Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-16
8600 Compressor Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-18
Operation
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
"OFF" Condition Helium System Pressure Verification. . . . . . . . . . . . . . . . . . . . . .5-3
Compressor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Turn On the Type 01 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5

8600 Compressor Contents
Installation, Operation and Maintenance Manual
Brooks Automation 8040707
Revision A iii
Turn On the Type 02 Compressor (Use Local Mode). . . . . . . . . . . . . . . . . .5-5
Turn Off the Type 02 Compressor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Return the Type 02 Compressor to Remote Mode. . . . . . . . . . . . . . . . . . . .5-6
Document Compressor Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Secondary Power: CP1 Breaker and Troubleshooting Diagnostic Problems . . . .5-8
Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Maintenance
Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Adsorber Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
Reducing Helium Pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
Increasing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-9
Appendices
Appendix A: Customer Brooks Automation Technical Support Information. . .7-2
Appendix B: Flow Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Appendix C: Troubleshooting Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
Technical Inquiries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
8600 Compressor Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
Troubleshooting when the NORMAL/C20 Switch is Set to NORMAL . .7-7
Troubleshooting when the NORMAL/C20 Switch is Set to C/20 . . . . . . .7-8
Appendix D: Troubleshooting Procedures, Type 02 Only . . . . . . . . . . . . . . . . . . .7-13
Alarm Sounds Continuously When Compressor is Turned On . . . . . . . . .7-13
Alarm Code Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14
Appendix E: Electrical Schematic for the 8600 Compressor . . . . . . . . . . . . . . . . . .7-17
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17
Remote/Response Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-18
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1