Brooks 8600 User manual

4 Copyright 2013, Brooks Automation Inc Part Number 8040743, Revision A, 01/11/2013 ECO Number 63723 Brooks Automation www.brooks.com Printed in U.S.A 1
800-367-4887 USA
978-262-2400 International
Startup the Compressor in Local Mode
See 8040707, 8600 Compressor Installation, Operation, and Maintenance Instructions, for details.
1. Ensure that the power is connected to the compressor. Turn it on and start cryopump operation.
2. Use the allen wrench provided with the compressor (part number 7024020P001) to press the RST switch.
The indicator lights cycle from STS 1 through STS 8 continuously.
3. When the STS 4 indicator lights, press the RST switch.
This switches the compressor to Local mode. You can now control it manually.
The PWR LED and RDY LED indicators light up (Figure 2) and the alarm buzzer stops, indicating the
compressor is ready for operation.
Figure 2: Operation Ready
NOTE: If the alarm does not stop and all STS indicators (8) light up, you might be using the reverse phase of input power
cable. In this case, rewiring of the input power cable is required. See 8040707 for troubleshooting information.
4. After the second stage temperature for the cryopumps is below 17K, record the compressor pressure gauge
reading as the normal system operating pressure.
Product Information and Technical Support
Please visit the Brooks Automation website at www.brooks.com or email to [email protected].
8600 Compressor
Quick Installation Guide
Part Number 8040743, Revision A, 01/11/2013
ECO Number 63723
8600
Compressor
CTI-CRYOGENICS
HELIX TECHNO LOGY CORPO RATION
1
2
3
4
5
6
7
8
RSTCOM
PWR
RDY
Ch1
RUN
STS
C30PVRT
8600 Compressor Specifications
Cooling Water General Electrical
Maximum Inlet Temperature: < 101 psig
(0.7MPA (gauge)
Minimum Inlet Temperature: 40º F (5º C)
Flow Rate: 1.0~3.3 gpm (5~15L/min)
Pressure Drop (Inlet-to-outlet): 2.9 - 24.6
psi (0.02~0.17MPa). Refer to Water Flow
Rate chart in product manual, 8040707.
Maximum Inlet Pressure: < 101 psig (< 0.7
MPa (gauge))
Part Number: 8175001G003
Input Power Cable: Supplied
Static Helium Pressure: 200 psig ± 6 psi
(1.4 ± 0.04MPa)
Interface: Cryopump power receptacle
mates with CTI-Cryogenics-supplied
cryopump power cable for single pump use.
Gas Supply And Return Connectors: 1/2-
inch Aeroquip® Self-sealing Couplings
Remote Control Receptacle: Supplied
Adsorber Service Schedule: 24,000 Hours
Inclination Angle: < 5º
Ambient Operating Temperature: 50 - 100º
F (10 ~ 38º C)
Must be installed in a dust-free and moisture-
free area
Power Source: 190 - 220 VAC 50Hz and
200 - 230 VAC 60Hz
Phase: 3
Power (Normal Operation): 5.2kW @ 50 Hz
and 6.8kW@60 Hz
Minimum Electrical Service: 30 AMPS

2 Copyright 2013, Brooks Automation Inc Part Number 8040743, Revision A, 01/11/2013 ECO Number 63723 Printed in U.S.A 3
Before You Start
1. Ensure the Cryo-Torr®20HP Cryopump is installed according to the appropriate Cryo-Torr 20HP Cryopump
Quick Installation Guide.
2. Read and follow all safety notices in this guide and in the appropriate compressor guides.
Compressor Safety
Ensure the compressor operates safely and dependably by adhering to all safety notices when you use or service the
compressor or cryopump attached to it.
High Voltage Electric Shock Hazard
1. To avoid electric shock, all electrical work must be performed by qualified personnel, in
accordance with all applicable electrical codes.
2. Before servicing the compressor, ensure it is locked out and tagged out.
3. Disconnect1
1. Disconnected is when the power entry module is OFF, or the power cord is detached from the power entry
module.
Tipover Hazard
Over-Temperature Shutdown and Equipment Damage
1. To avoid an over-temperature shutdown due to built up dust and scale in the cooling water line,
which raises the helium temperature, ensure you install a water filter between the cooling water
main valve and the compressor.
2. To avoid an over-temperature shutdown or damage to the heat exchanger, monitor the cooling water
for the following:
• Temperature below 41°F (5°C).
• Temperature above 89.6°F (32°C).
• An overflow rate that may damage the compressor. See the Installation section of 8600
Compressor Installation, Operation, and Maintenance Instructions, part number 8040707.
3. To avoid damaging the input and output connector threads, do not over tighten the ferrules.
4. To avoid damaging the compressor, ensure the helium pressure is not in the red zone of the gauge
(too little pressure), or above 260 psig (too much pressure).
the cryopump from all power sources before making electrical connections between
system components, and before performing troubleshooting or maintenance procedures. This includes
setting the switch at the power entry module to the OFF position.
NOTE: To avoid loss of helium, do not modify or remove the pressure relief valves. Always connect and disconnect
helium flex lines with the method illustrated in Figure 1 Inset.
Compressor Connections
See the following numbered steps in Figure 1 compressor installation connections.
Figure 1: 8600 Compressor Basic Connections
To avoid injury from the compressor suddenly moving or tipping, lock all of the casters after you finish
moving the compressor.
WATER OUT
WATER IN
SUPPLYGASRETURNGAS
REMOTE
RESPONSE
INPUT POWER
NO.3NO.2NO. 1
COLD HEAD POWER

Look for any shipping damage and verify
shipping pressure between 200 psig ± 6 psi
(1.4 ± 0.04mpA, not shown).
Remove dust cap and connect helium supply
line (Figure 1 Inset A).
Remove dust cap and connect helium return
line (Figure 1 Inset A).
Verify appropriate helium pressure (gauge on
front of compressor, Front View). See instruc-
tion 8 on this page.
Connect cooling water inlet (3/8 FPT, Figure
1 Inset B).
Connect cooling water outlet (3/8 FPT, Figure
1 Inset B). Flowrate = 1.0 - 3.3 gpm (5 - 15 L/
min).
Connect On-Board IS Remote keypad, if you
communicate directly with compressor.
Connect network cables (Front View). See
8040648, On-Board IS Controller Quick
Installation Guide.
Remove cap and connect Network Cable
.
Connect cryopump. See Cryo-Torr 20HP
Quick Installation Guide.
See 8040707, 8600 Compressor Installation,
Operation, and Maintenance Instructions, for
additional details and operating procedures.
(Not shown.)
1
2
3
4
5
6
7
82
6
7
910
5
TO TIGHTEN
TO LOOSEN
Turn with 3/16 inch wrench
Hold with 1 inch wrench
Hold with 1 1/8 inch wrench
Turn with 1 3/16 inch wrench
Inset A: Helium Flex Line Connections
3
9
10
11
Inset B: Water Line Connections
Turn with 7/8 inch wrench
Apply thread sealant
Apply thread sealant
3/8 FPT
8600 Compressor, Back View
8600
Compressor
CTI-CRYOGENICS
HELIX TECHNOLO GYCORPORA TION
1
2
3
4
5
6
7
8
RSTCOM
PWR
RDY
Ch1
RUN
STS
C30PVRT
1
2
3
4
5
6
7
8
RSTCOM
PWR
RDY
Ch1
RUN
STS
C30PVRT
8600 Compressor, Front View
4 8