Brooks SLA5810 User manual

Installation and Operation Manual
X-PR-SLA5800-PC-eng
PartNumber:541B091AAG
July,2010 Models SLA5810 and SLA5820
Brooks®Digital
Elastomer Sealed Pressure Controllers
Models SLA5810 and SLA5820
Model SLA5810A
Analog I/O
Pressure Controller
Model SLA5820D
Digital I/O DeviceNet
Pressure Controller Model SLA5810F
Digital I/O
FOUNDATION Fieldbus
Pressure Controller

Installation and Operation Manual
X-PR-SLA5800-PC-eng
PartNumber:541B091AAG
July,2010
Models SLA5810 and SLA5820
ESD(ElectrostaticDischarge)
CAUTION:Thisinstrumentcontainselectroniccomponentsthataresusceptibletodamagebystaticelectricity.Properhandlingproceduresmustbeobserved
duringtheremoval,installationorotherhandlingofinternalcircuitboardsordevices.
HandlingProcedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or
adjusted.
3. Printed circuitcardsmustbe transported in a conductivecontainer.Boardsmustnot be removed fromprotectiveenclosureuntilimmediately before
installation. Removedboardsmustimmediatelybeplacedinprotectivecontainerfortransport,storageorreturntofactory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that
utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices.
Damagedcomponents,even though theyappearto functionproperly,exhibitearlyfailure.
BrooksInstrumentdesigns,manufacturesandtests its products to meet many national and internationalstandards.Theseproductsmustbeproperly
installed,operatedand maintainedtoensure they continuetooperate within theirnormalspecifications. Thefollowinginstructionsmustbe adheredtoand
integratedintoyour safetyprogramwhen installing,operatingand maintainingBrooksInstrument products.
• Toensureproperperformance, use qualifiedpersonnelto install,operate,update, program andmaintaintheproduct.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for
local sales office contact information. Save this instruction manual for future reference.
WARNING:DonotoperatethisinstrumentinexcessofthespecificationslistedintheInstructionandOperationManual.Failuretoheedthiswarningcanresultin
seriouspersonalinjuryand/ordamagetotheequipment.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Followallwarnings, cautionsandinstructionsmarked onandsupplied with theproduct.
• Installyourequipment asspecifiedin the installationinstructionsof theappropriateinstruction manual andperapplicable local andnationalcodes.
Connectallproducts totheproperelectrical andpressuresources.
• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and
outlet connections. If no leaks are present, bring the system up to the operating pressure.
• Pleasemakesure thattheprocessline pressureisremoved prior toservice.When replacement partsarerequired, ensure thatqualifiedpeople use
replacementpartsspecified byBrooksInstrument.Unauthorized partsandprocedures can affecttheproduct's performance andplacethesafe operation
of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensurethatall equipment doors areclosedandprotective covers are inplaceto prevent electrical shockandpersonalinjury, exceptwhenmaintenanceis
beingperformed byqualifiedpersons.
WARNING:Forliquidflowdevices,iftheinletandoutletvalvesadjacenttothedevicesaretobeclosedforanyreason,thedevicesmustbecompletelydrained.
Failuretodosomayresultinthermalexpansionoftheliquidthatcanrupturethedeviceandmaycausepersonalinjury.
Allpressureequipmentwithaninternalpressuregreaterthan0.5bar(g)andasizelargerthan25mmor1"(inch)fallsunderthePressureEquipmentDirective(PED).
• The Specifications Section of this manual contains instructions related to the PED directive.
• Metersdescribedinthis manual are in compliance withENdirective97/23/EC.
• AllBrooksInstrumentFlowmetersfall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
• Metersof25mmor1"(inch)orsmallerareSoundEngineeringPractice(SEP).
TheBrooksInstrument(electric/electronic)equipmentbearing the CE mark has been successfullytestedtotheregulationsof theElectroMagnetic
Compatibility(2004/108/EC (EMCdirective89/336/EEC)).
Specialattentionhowever is requiredwhenselecting thesignalcableto beusedwithCE markedequipment.
Qualityofthesignalcable,cableglandsandconnectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D”or“Circular”type connectors used shouldbeshieldedwitha metal shield. Ifapplicable,metalcable glands must be usedprovidingcablescreenclamping.
Thecablescreenshould be connected to themetalshellor gland and shielded atbothendsover 360 Degrees.
Theshieldshould beterminatedto an earthground.
CardEdgeConnectorsarestandardnon-metallic.Thecablesusedmustbe screened with 100% shield to comply with CE certification.
Theshieldshould beterminatedto an earthground.
Forpinconfiguration:Pleaserefertothe enclosed Instruction Manual.
EuropeanPressure EquipmentDirective (PED)
EuropeanElectromagneticCompatibility (EMC)
Essential Instructions
Read before proceeding!

Installation and Operation Manual
X-PR-SLA5800-PC-eng
PartNumber:541B091AAG
July,2010 Models SLA5810 and SLA5820
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yourssincerely,
Brooks Instrument

Installation and Operation Manual
X-PR-SLA5800-PC-eng
PartNumber:541B091AAG
July,2010
Models SLA5810 and SLA5820
THIS PAGE WAS
INTENTIONALLY
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i
Contents
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010 Models SLA5810 and SLA5820
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope .........................................................................................................................................1-1
1-2 Purpose......................................................................................................................................1-1
1-3 Description .................................................................................................................................1-1
1-4 Specifications .............................................................................................................................1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-2
2-5 Transit Precautions ....................................................................................................................2-2
2-6 Removal from Storage ...............................................................................................................2-2
2-7 Gas Connections........................................................................................................................2-2
2-8 In-Line Filter ...............................................................................................................................2-3
2-9 Installation ..................................................................................................................................2-3
2-10 Electrical Interface......................................................................................................................2-4
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Theory of Operation for Flow Measurement ..............................................................................3-1
3-3 Features .....................................................................................................................................3-1
3-4 Analog I/O Mode of Operation....................................................................................................3-4
3-5 Communications Features .........................................................................................................3-6
3-5-1 DeviceNet Communications Features........................................................................................3-6
3-5-2 FOUNDATION Fieldbus Communications Features ......................................................................3-6
Section 4 Maintenance & Troubleshooting
4-1 Overview ....................................................................................................................................4-1
4-2 Troubleshooting..........................................................................................................................4-1
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Figures

ii
Contents Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Models SLA5810 and SLA5820
Figure Page
Number Number
1-1 D-Connector Electrical Pin Connections ....................................................................................1-5
1-2 Typical Configuration..................................................................................................................1-5
1-3 Models SLA5810A and SLA5820AAnalog I/O Pressure Controllers .......................................1-6
1-4 Model SLA5810D and SLA5820D Digital I/O DeviceNet Pressure Controllers .........................1-6
1-5 Model SLA5810F and SLA5820F Digital I/O FOUNDATION Fieldbus Pressure Controllers ........1-7
2-1 D-Connector Shielded Cable Hookup Diagram Voltage I/O Version ..........................................2-5
2-2 Common Electrical Hookups Voltage I/O Version ......................................................................2-5
3-1 Model SLA5810/20 Pressure Controller.....................................................................................3-2
3-2 Model SLA5810/20 Silicon Chip Configuration...........................................................................3-2
3-3 Model SLA5810/20 System Block Diagram (Downstream version) ...........................................3-3
3-4 ExternallyAccessibleAdjustment for all Meters/Controllers.......................................................3-3
4-1 Bench Troubleshooting Circuit ...................................................................................................4-2
Tables
Table Page
Number Number
1-1 Flow Ranges and Pressure Ratings...........................................................................................1-3
2-1 Recommended Filter Size..........................................................................................................2-4
3-1 Typical Resistor Values for Calibration Selction .........................................................................3-5

1-1
Models SLA5810 and SLA5820
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
1-1 Scope
Thank you for purchasing a Brooks Instrument Digital Pressure Product. This
manual, X-PR-SLA5800-PC-eng is an installation and operation manual for
your instrument.
If you have purchased a Digital Pressure Product with DeviceNet
Communications, a separate DeviceNet Instruction Manual shall also be
provided as part of the operating documentation.
1-2 Purpose
The Brooks SLA5810 and SLA5820 are pressure measurement devices
designed for accurately measuring and rapidly controlling the upstream or
downstream pressure in a flow system. This instruction manual is intended to
provide the user with all the information necessary to install, operate and
maintain the Brooks®PC.This manual is organized into four sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance & Troubleshooting
It is recommended that this manual be read in its entirety before attempting to
operate or repair these Digital products.
1-3 Description
Brooks Instrument’s digital elastomer sealed pressure measurement and
control product line offers unparalleled flexibility and performance. The
SLA5800 Series of Elastomer Seal pressure measurement and control is the
most accurate, repeatable, and responsive controller on the market today!
Brooks®offers a traditional 0-5 volt analog option . Brooks also offers control
interface via digital network protocols like DeviceNet, a high-speed (up to
500k baud) digital communication network, or FOUNDATION®Fieldbus.
Brooks’communication capabilities and device-profiles have been certified by
the ODVA(Open DeviceNet Vendor’sAssociation) and the ITK Interoperability
Test Kit. Other network protocols are in development. Talk to your Brooks
representative about your specific needs.
The process and command data may be 'wired' either using traditional 5 volt
analog connections or digital communications networks;The measurement
and control performance is the same!
The SLA5800 Series microprocessor uses a multi-point calibration to deal
with any residual integral sensor non-linearity, yielding a highly accurate
process signal.
The SLA5800 Series family of products utilizes a modular system in both it's
mechanical and electrical construction. This modularity allows for simplified
customer ordering and factory configuration, enabling Brooks to easily meet
the ever changing needs of our global customers.

1-2
Models SLA5810 and SLA5820
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
This flexibility yields products for pressure measurement and control, using
either traditional analog connections or leading edge network-communication
protocols.
Brooks SLA5800 Series of controllers can directly replace existing analog
products with the advantage of improved digital accuracy. Both analog and
digital applications will see settling time and accuracy improvements.
1-4 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Models SLA5810/SLA5820 -Any FS range from 0-3 sccm to 0-30 slpm (N2eq.)
*Standard: 0°C and 101kPa (760 Torr).
Accuracy
Integral Pressure products: ±0.5% of F.S. including linearity and hysteresis
Repeatability
Integral Pressure products: ±0.1% of F.S.
RATINGS:
Temperature Sensitivity
Integral Pressure products: ±0.1% of F.S. per °C
Zero Stability
Integral Pressure products: ±0.001% of FS per 30 days
Pressure Ratings:
Maximum Pressure: 1450 psia
(Optional)Maximum Pressure: 4350 psia
All devices pressure tested without fittings to a minimum of 1.5 times the transducer
pressurerating.
Transducer Pressure Ratings:
21.75 psia for 0 - 14.5 psia full scale
108.5 psia for 14.5 - 72.5 psia full scale
435 psia for 72.5 - 290 psia full scale
1450 psia for 290 - 1450 psia full scale
4350 psia for 1450 - 4350 psia full scale
Pressure Equipment Directive (PED) 97/23/EC:
Equipmentfalls under SoundEngineering Practice (SEP)

1-3
Models SLA5810 and SLA5820
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Leak Integrity
Inboard to Outboard: 1x10-9 atm scc/sec Helium max.
Helium leak test performed without fittings
Maximum Fluid Operating Temperature
0°C to 65°C (32°F to 149°F)
Ambient Temperature Limits
Operating: 0°C to 60°C (32°F to 140°F)
Non-operating: -25°C to 100°C (-13°F to 212°F)
PHYSICAL:
Materials of Construction
Wetted parts - stainless steel
Viton®fluoroelastomers
Optional:
Buna-N
Kalrez®
Teflon®/Kalrez
Outline Dimensions
Refer to Figures 1-3 to 1-5
Process Connections
Refer to Figures 1-3 to 1-5
ELECTRICAL CHARACTERISTICS:
Electrical Connections
Analog option: 15-pin D-Connector, male (See Figure 1-1)
DigitalI/O:
DeviceNet:5-pin Micro-Connector, male
FOUNDATION Fieldbus: one 4-Pin M8 connector for power and
one 4-Pin M12 connector for communications
Power Supply Voltage
Analogoption: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored) or
+24 Vdc ±5%
Digital I/O:
DeviceNet I/O: 11-25 Vdc
FOUNDATION Fieldbus I/O: 14-27 Vdc
Power Requirements:
Watts, typical Watts, max.
Analog I/O option, no valve: 1.6 1.8
Analog I/O option, with valve: 3.6 4.0
Digital I/O option, n.v.: 3.6 4.0
Digital I/O option, w.v.: 6.9 7.6

1-4
Models SLA5810 and SLA5820
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Command-Setpoint Input (Analog I/O option only)
Current Setpoint Input Specifications
Nominal Range: 4-20 mA or 0-20 mA
Full Range: 0-22 mA
Input Impedence: 125 Ω
Voltage Setpoint Input Specifications
Nominal Range: 0-5 Vdc
Full Range: 0-5.5 Vdc
Input Impedence: >990 kΩ
Pressure Output (Analog I/O option only)
Pressure Output (Voltage) Specifications
Nominal Range: 0-5 Vdc, 1-5 Vdc
CalibratedAccuracy:+0.1% of F.S.
Full Range: -0.5-5.5 Vdc(@0-5 Vdc);
0.6-5.5 Vdc(@1-5 Vdc)
Minimum Load Resistance: 2 kW
Pressure Output (Current) Specifications
Nominal Range: 4-20 mA or 0-20 mA
CalibratedAccuracy:±0.1% of F.S.
Full Range: 0-22 mA(@ 0-20 mA);
3.8-22 mA(@ 4-20 mA)
Maximum Load: 380 Ω (for supply voltage < 16 Vdc)
580 Ω (for supply voltage > 16 Vdc)
Valve Override Signal (Analog I/O version only)
Left floating/unconnected – instrument controls valve to command setpoint
Connected to signal at or above 5.0 Volts – valve is forced open
Connected to signal at or below 0.0 Volts – valve is forced closed
5 Volt Reference Signal (Analog I/O version only)
For use with potentiometer command setpoint input
±0.2%, into 1K ohm (minimum load)
Configuration Select Signal (Analog I/O version Only)
Select one of ten gases and P.I.D. tuning settings in analog mode.
Requires external connection of resistors between PIN # 13 and PIN # 10
PC-based Support Tools
Brooks Instrument offers a variety of PC-based process control and service
tools to meet the needs of our customers. SmartDDE may be used with any
unit supporting RS-485 in a multidrop configuration, thus allowing users to
control and monitor their Brooks devices. The Brooks Service ToolTM (BST)
may be used to monitor, diagnose, tune and calibrate Brooks devices
equipped with DeviceNet or FOUNDATION Fieldbus communications. The
Brooks Service ToolTM interfaces with Brooks products via a special service
port.

1-5
Models SLA5810 and SLA5820
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Model SLA5820
Upstream Application
Flow Determined by a Mass
Flow Controller on the inlet
of the vessel
Model SLA5810
Downstream Application
Flow Determined by
Characteristics of
Vacuum Pump
Figure 1-2 Typical Configurations
Figure 1-1 D-Connector Electrical Pin Connections
Analog I/O Pin Connections:
PIN # FUNCTION
1Setpoint Command Input (-)
2Signal, 0(1)-5 volt, Output (+)
3 Not Connected
4
5Power Supply, +15 Vdc or +24 Vdc (+)
6
7
8
9Power Supply, Common (-)
10 Signal, Common, Output, (-)
11 Reference, +5 Vdc, Output, (+)
12 Valve Override, Input
13 Calibration Select, Input
14 Chassis Ground
15 External Sensor, Input
Signal, 0(4)-20 mA, Output (+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 volt, Input (+)

1-6
Models SLA5810 and SLA5820
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Figure 1-3 Models SLA5810A and SLA5820AAnalog I/O Pressure Controllers
Figure 1-4 Models SLA5810D and SLA5820D Digital I/O DeviceNet Pressure Controllers
FITTING "X" DIMENSION
1/8 Tube Comp. 4.83 [122.7]
1/4 Tube Comp. 5.03 [127.8]
3/8 Tube Comp. 5.15 [130.8]
1/4 Male VCR 4.88 [124.0]
1/4 Male VCO 4.63 [117.6]
3/8-1/2 Male VCR 5.47 [138.9]
3/8-1/2 Male VCO 5.07 [128.8]
1/4 Female NPT 4.94 [125.5]
6mm Tube Comp. 5.03 [127.8]
10mm Tube Comp. 5.17 [131.3]
* OVERALL LENGTH FINGER TIGHT
CONNECTION OPTIONS
1.95
49.5
5.46
138.8
NORM OPEN
VALVE
3.67 [93.2]
NORM CLOSED
VALVE
3.95 100.3
.50
12.7
3.07 77.9
"X"
"ZERO"
BUTTON
.50
12.7
1.48
37.7
4.56
115.9
.99
25.1
NOTES:
1. WIRE SIZE: AWG #14-24
2. PINS 1, 9, & 10 ARE
INTERNALLY CONNECTED ON
THE PRINTED CIRCUIT ASSEMBLY.
3. VALVE OVERRIDE REFERENCED TO
SETPOINT COMMON.
.18 4.4
2.72 69.0
.35 9.0 .71 18.0
INCH/[MM]
8-32 UNC X 17/64 DEEP
MOUNTING HOLES (2 PLCS)
STAT
15 PIN MALE "D"
CONNECTOR DETAIL
D-CONNECTOR CONNECTIONS
PIN # FUNCTION
1Setpoint Command Input (-)
2Signal, 0(1)-5 volt, Output (+)
3Not Connected
4
5Power Supply, +15 Vdc or +24 Vdc (+)
6
7
8
9Power Supply, Common (-)
10 Signal, Common, Output, (-)
11 Reference, +5 Vdc, Output, (+)
12 Valve Override, Input
13 Calibration Select, Input
14 Chassis Ground
15 External Sensor, Input
15 9
81
Signal, 0(4)-20 mA, Output (+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 volt, Input (+)

1-7
Models SLA5810 and SLA5820
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Figure 1-5 Models SLA5810F and SLA5820F Digital I/O FOUNDATION Fieldbus Pressure Controllers
DIMENSIONS ARE INCH
[MM]
DETAIL
A
DETAIL
B
4 PIN PICOFAST CIRCULAR
CONNECTOR W/ M8 X 0.5 THREAD
SEE DETAIL B
4 PIN MALE MICRO
FOUNDATION FIELDBUS CONNECTOR,
M12 X 1 OUTSIDE THREAD
SEE DETAIL A
"ZERO"
BUTTON
4.56
115.9
.98
25.0
.36
9.1
1.48
37.7
.50
12.7
5.55
141.1
NORM OPEN
VALVE
3.67 [93.2]
NORM CLOSED
VALVE
3.95 100.3
3.07 77.9
"X"
1.06
26.8 2.63
66.8
KEY
1
23
4
SIGNAL
SIGNAL N/C
DRAIN
1
2
3
4
N/C
POWER + POWER -
N/C
4.56
115.8
.50
12.7
.35 9.0
.71 18.0
.18 4.4 2.72 69.0
8-32 UNC X 17
64 DEEP
MOUNTING HOLES
2 PLCS
FITTING "X" DIMENSION
1/8" TUBE COMP. *4.83 [122.7]
1/4" TUBE COMP. *5.03 [127.8]
3/8" TUBE COMP. *5.15 [130.8]
1/4" MALE VCR 4.88 [124.0]
1/4" MALE VCO 4.63 [117.6]
3/8"-1/2" MALE VCR 5.47 [138.9]
3/8"-1/2" MALE VCO 5.07 [128.8]
1/4" FEMALE NPT 4.94 [125.5]
6mm TUBE COMP. *5.03 [127.8]
10mm TUBE COMP. *5.17 [131.3]
* OVERALL LENGTH FINGER TIGHT
INLET OUTLET
KEY
BUS DEV

1-8
Models SLA5810 and SLA5820
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
THIS PAGE WAS
INTENTIONALLY
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2-1
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
2-1 General
This section contains the procedures for the receipt and installation of the
instrument. Do not attempt to start the system until the instrument has been
permanently installed. It is extremely important that the start-up procedures
be followed in the exact sequence presented.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability. A
report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-mail: [e-mail]
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]
2-3 Recommended Storage Practice
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the following:
a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. Ambient temperature of 70° F (21° C) nominal, 109° F (43° C) maximum,
45° F (7° C) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.
Upon removal from storage a visual inspection should be conducted to
verify the condition of equipment is "as received".

2-2
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
2-4 Return Shipment
Prior to returning any instrument to the factory, contact your nearest Brooks
location for a Return MaterialsAuthorization Number (RMA#). This can be
obtained from one of the following locations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-mail: [e-mail]
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]
Any instrument returned to Brooks requires completion of Form RPR003-1,
Brooks Instrument Decontamination Statement, as well as, a Material Safety
Data Sheet (MSDS) for the fluid(s) used in the instrument. This is required
before any Brooks Personnel can begin processing. Copies of the form can
be obtained from any Brooks Instrument location listed above.
2-5 Transit Precautions
To safeguard against damage during transit, transport the instrument to the
installation site in the same container used for transportation from the factory
if circumstances permit.
2-6 Removal from Storage
Upon removal from storage, a visual inspection should be conducted to verify
the condition of the equipment is “as received.” If the equipment has been in
storage in conditions in excess of those recommended
(See Section 2-3), the device should be subjected to a pneumatic pressure
test in accordance with applicable vessel codes.
2-7 Gas Connections
Prior to installation ensure all piping is clean and free from obstructions.
Install piping in such a manner that permits easy access to the instrument if
removal becomes necessary.

2-3
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
pressure controller to prevent the possibility of any foreign material entering
the sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
2-9 Installation
Recommended installation procedures:
a.The Digital PC should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b.Leave sufficient room for access to Self-zero function push-button.
c.Install in such a manner that permits easy removal if the instrument
requires servicing.
d.The Digital PC can be installed in any position.
Maximum Flow Rate Recommended Filter
100 sccm 2 micron
500 sccm 2 micron
1 to 5 slpm 10 micron
10 to 30 slpm 40 micron
10 to 30 slpm 40 micron
30 slpm to 100 slpm 40 micron
> 100 slpm Consult Factory

2-4
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
2-10 Electrical Interface
The setpoint signal is supplied as a 0(1) to 5 Vdc or 0(4)-20 mA analog
signal.All signals are supplied via the 15-pin D-Connector. For an analog
unit the minimum set of connections which must be made to the device
includes +13.5 - 27 Vdc, supply common, and a setpoint signal.
The Brooks Digital electrical interface is designed to facilitate
low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply.
These commons are electrically connected together on the PC board.
Analog I/O Versions
• Signal Common
• Signal Output (Voltage or Current)
• +15 or +24 Vdc Supply
• Setpoint Input (Voltage or Current)
• Setpoint Common
• Supply Common
• Chassis Ground (via unit body)
Refer to Figure 2-1 for pin connections
Refer to Figures 2-2, 2-3 and 2-4 for electrical I/O connections
(The Brook’s Pressure Controller acts as a current sink to a setpoint input
signal. The 0/4-20 mA setpoint signal should be “driven” into the MFC input
by a controlled current source. Reference Brook’s device specifications for
the setpoint input impedance.)
(The Brook’s Pressure Controller acts as the current source when
providing a 0/4-20 mA output signal to the load. The output signal is
“driven” by the MFC into the customer load. Reference Brook’s device
specifications for maximum load capacity.)

2-5
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Figure 2-2 Common Electrical Hookups Voltage I/O Version
Figure 2-1 D-Connector Shielded Cable Hookup Diagram - Analog I/O Options.
Analog I/O Pin Connections:
PIN # FUNCTION
1Setpoint Command Input (-)
2Signal, 0(1)-5 volt, Output (+)
3 Not Connected
4
5Power Supply, +15 Vdc or +24 Vdc (+)
6
7
8
9Power Supply, Common (-)
10 Signal, Common, Output, (-)
11 Reference, +5 Vdc, Output, (+)
12 Valve Override, Input
13 Calibration Select, Input
14 Chassis Ground
15 External Sensor, Input
Signal, 0(4)-20 mA, Output (+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 volt, Input (+)
Notes:
1. The commons for the setpoint and signal output are not isolated from power supply common.
2. The cable shields should connect to chassis ground at one end only (Pressure Controller only).
3. Input impedence of setpoint input is >990K . Maximum allowable input signal is 20 Vdc.
4. Minimum load resistance of voltage output is 2K .
or +24 Vdc

2-6
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)
Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)