
ii
Brooks Instrument Model 5866 Mass Flow Controller
Section 6
Calibration Page
Calibration Procedure..................................................................6-1
Gas Conversion Factors..............................................................6-2
Section 7
Parts List General........................................................................................7-1
Appendix A
CE Certification CE Certification for Mass Flow Equipment................................A-1
Figures 1-1 Model 5866 Pressure Transducer.................................1-2
1-2 Model 5866 Silicon Chip Configuration.........................1-2
1-3 Model 5866 System Block Diagram..............................1-2
1-4 Model 5866 Dimensions...............................................1-3
1-5 Model 5866 Upstream Controller..................................1-4
1-6 Model 5866 Downstream Controller.............................1-4
1-7 Typical Application of Downstream Controller...............1-5
1-8 Typical Application of Upstream Controller...................1-6
2-1 Customer Connections and Settings............................2-4
3-1 Error Signal Step Response.........................................3-1
3-2 Proportional Control......................................................3-3
3-3 Integral Control.............................................................3-3
3-4 P.I.Control.....................................................................3-4
5-1 Torque Sequence for the Valve Retainer Plate.............5-6
5-2 Adjustment Test Setup..................................................5-7
5-3 Valve Adjusting Spacer Locations.................................5-9
5-4 Valve Adjusting Spacer Locations, Normally Open
(N.O.) Valve..................................................................5-11
5-5 Application Configuration.............................................5-12
5-6 Example Application of Orifice Sizing Procedure........5-14
7-1 Model 5866E Parts Drawing.........................................7-2
7-2 Model 5866M Parts Drawing.........................................7-4
Tables 2-1 D-Connector Pin Arrangement......................................2-5
5-1 BenchTroubleshooting..................................................5-3
5-2 SensorTroubleshooting.................................................5-3
5-3 Minimum Flow Values..................................................5-10
5-4 Model 5866 Orifice Selection.......................................5-14
6-1 Conversion Factors.......................................................6-4
7-1 Model 5866E Parts List.................................................7-3
7-2 Troubleshooting Aids and Spare Parts Kit for
Model 5866...................................................................7-3
7-3 Model 5866M Parts List................................................7-5