CKD RAPIFLOW FSM-H-A Series User manual

F2-463099-A
INSTRUCTION MANUAL
RAPIFLOW® microflow type
FSM-H-A series
Please read this instruction manual carefully before using this product,
particularly the section describing safety.
Retain this instruction manual with the product for further consultation
whenever necessary.
1.CAUTION
①The product can not be used as a business mater. Not conformed to
the Measurement Law, do not use the product for the commercial
purpose. Use the product as an industrial sensor.
②In installation, please be sure to hold the product’s main body to
prevent any impact to body and stress to the flying lead.
③Do not use the product with other than applicable working fluids, or the
accuracy can not be guaranteed.
④Install a filter, an air dryer and an oil mist filter (micro alescer) onto the
primary side(upstream) of the sensor since the compressed air from
the compressor contains drain(water, oil oxide and foreign material,
etc.) Mesh(wire net) in a sensor is used to rectify the flow in the pipe.
Always install a filter since this mesh is not a filter to remove foreign
materials, etc.
⑤Even if twice as much as overflow as each series measuring range is
applied to the sensor, it is no problem, however, if dynamic pressure is
applied near to the maximum working pressure, (when the pressure
applied to the primary side with the secondary side released.), the
sensor may fail. When feeding workpieces during leakage inspection, if
dynamic pressure is applied, always provide a by-pass circuit or a
needle valve to avoid dynamic pressure applying to the sensor.
2. Specifications
Analog output type
Indicator type
Descriptions FSM-H-A-□※１ML-□※２
005 0.25 to 5
010 0.5 to 10
050 2.5 to 50
Flow rate range
(m

/min) Note１※１
100 5 to 100
6A Stainless steel, Rc1/8Body material
Port size ※２ 6G Stainless steel, G1/8
Working fluid Note２Clean air (JIS B 8392-1.1.1 to5.6.2),
compressed air(JIS B 8392-1.1.1 to1.6.2), and nitrogen gas
Maximum working pressure 1.0MPa
Minimum working pressure -0.09MPa
Withstanding pressure 1.5MPa
Ambient temperature/humidity 0 to 50℃, 90%RH or less
Working conditions
Working fluid temperature 0 to 50℃
Linearity (display/analog output) ±3%F.S. or less (0.1Mpa, 25℃, flow rate range 5 to 100%F.S.)
Pressure characteristics ±3%F.S. or less(-0.09 to 1.0 Mpa, 0.1Mpa criteria)
Temperature characteristics ±０．２％F.S.／℃以下(15 to 35℃, 25℃criteria)
Accuracy
Repeatability (F.S.) ±0.5% F.S. or less
Response time Note３50mS or less
Display Power display (green）
Analog output 1 to 5V (connected load impedance 50kΩand over)
Power supply voltage DC12/24V(10.8 to 26.4V)
Current consumption 50mA or less
Lead wire φ3.7 0.2mm3×3-conductor 1ｍ
Functions Analog output
Installation attitude Both vertical and horizontal
Strait piping section Not required
Protective structure IP40
Protective circuit Note４Power supply reverse protections
EMC directive EN55011, EN61000-6-2,EN61000-4-2/3/4/6/8
Mass 140g
Note1: Converted to volumetric flow at 20℃and 1 atmospheric pressure (101kPa)
Note2: Consult with CKD for usage with a gas other than air and N2.
Note3: The response time may change depended with piping condition.
Note4: The protective circuit of this product is effective for the special incorrect wiring and load short
circuits, but can not protect the product from all wrong connections.
Separate indicator
Separate indicator
Descriptions
*1 *2
FSM-H-D NP - R0005 ML
005 0〜5
010 0〜10
050 0〜50
Flow rate range
: mL/min *2
100 0〜100
Display Flow rate display (7 segments 3 digits, orange),
operation and switch output (orange)
N
2 points
(NPN open collector output, load current 50mA or less,
voltage drop 2.4V)
Switch output *1
P
2 points
(PNP open collector output, load current 50mA or less,
voltage drop 2.4V)
Switch output
response time Appx. 5ms
Analog output Output 1 point
(1 to 5 V voltage output, and connected load impedance 50 kΩand over)
Power supply voltage DC12／24V （10.8〜26.4V）
Current consumption 50mA or less (indicator only)
Lead wire φ3.7 0.2mm2×5-conductor (1m)
Functions Flow rate display, flow rate-peak hold, switch output, analog output
Ambient
temperature/humidity 0 to 50℃, 85%RH or less (to be no dew condition)
Protective structure IEC standards IP 40
Mass Approximate 70g (including lead wire 1m)
3. Wiring
Analog output type (FSM-H-A)
Line color Content
Brown Power supply DC12 to
24V
Blue 0V(GND)
Black Analog output
(1 to 5V)
Brown
Black
Blue
Load
＋
−
Main circuit
Separate indicator (FSM-H-D Ｎ/Ｐ）
<Connection of display unit and sensor>
11mm
Electrical connection of sensor controller is made with terminal
stand.
Insert the wire while yellow jaw is pushed.
Refer to the spec. below if other wires than those for the products
are used.
Single-wire 0.14 to 0.5mm２
Twisted-wire 0.14 to 0.5mm２
AWG 26 to 20
<Separate indicator>
FSM-H-DN (separate indicator: NPN output）
Black (out1)
White (out2)
Gray (analog output)
Blue (power supply -)
Brown (power supply +)
←MAX 50mA
←MAX 50mA
Load2Load1
Main circuit
+
-
DC12 to
24V
FSM-H-DP(separate indicator: PNP output)
Black (out1)
White (out2)
Gray (analog output)
Blue (power supply-)
Brown (power supply+)
MAX50mA→
MAX50mA→
Main circuit
DC12 to
24V
Load1 Load2
+
-
(Precautions for wiring)
Wiring
For wiring, turn off the power supply. Discharge static electricity built
in body, tool and equipment before and during work. Use a wire
elasticity as wire for robot connection in the movable part.
Wiring installation
This product and wiring must be installed as far away as possible
from noise source such as strong electric line, etc. Take other
countermeasures for a surge on the power supply line.
Power voltage
Do not use the product put of power supply voltage range. If voltage
more than usage range is applied, or if alternating current
power(AC100V) applied, causing damage or burn.
Short-circuiting
Do not short-circuit a load, otherwise, or causing damage or burn.
Incorrect wiring
Connect wires to the correct poles or terminals, otherwise, wires may
be damaged or burned.
Separate indicator ;
By connecting display unit (FSM-A-D*) and flow sensor (analog output
type: FSM-A), digital display and switch setting of flow rate is possible.
The controller has been designed exclusively for FSM. Be sure to
combine the controller and the sensor for the same flow rate. Never
combine the other flow sensor, FSM for other flow rate or pressure
sensor.
FG connection
Use DC safety power supply thoroughly insulated from the AC
primary side for a power supply for the metal body type, while
connecting either + or – side on the power supply to F.G. High
potential and insulation resistance tests between the inside power
circuit of metal body type and the metal body must not be done.
4.Analog output voltage – flow rate characteristics
FSM-□-□-□
0
F.S.
1
2
3
4
5
Analog
output
(V)
Flow rate
(

/min)
(Precautions)
Output accuracy is affected by
self exoergics caused by
energizing other than
temperature characteristics.
When using, stand-by time
(5 minutes and over after
energizing) must be provided.
If out of flow rate range, the
output will reach up to max 8V.
5.Piping
(Precautions for piping)
This product must be piped, while matching the flow direction and
direction specified on the body.
When a valve is used in the primary side of the sensor, an oil-prohibited
valve must be used. The sensor may malfunction or be destroyed by
splash of grease and oil, etc.
When piping in a resin tube, fix the piping as much as possible. When
the piping moves during the flow control, abnormality of the flow output
is caused as internal gas moves.
When piping, apply a spanner on the metal section not to apply forces
onto the resin section.
・Never hold the plastic case for tightening.
・When piping, care must be taken that
sealing tape and adhesive must not enter
into the inside.
・During the piping work, be sure that
any excessive screw-in torque and/or
load torque will be applied to the piping port.
Set screw Tightening torque Ｎ・ｍ
Rc1/8 3 to 5
G1/8 3 to 5
6.Installation
The length of
stripping-wire
Recommend
length ：11mm
・Analog type
・
Separate indicator
Separate indicator
Analog
output
type
Blue (power supply-)
Brown (power supply+)
Black (signal conductor)
How to connect analog output type
to separate indicator
V
S
G
・This product is designed for air and compressed dry air and N2. Do
not use it with combustible gases.
・Do not touch electric wiring connections (exposed live parts): this
will cause an electric shock. During wiring, keep the power off. Also,
do not touch these live parts with wet hands.
Precaution
!
Horizontal
(through hole)
Vertical
(female thread on the bottom)
Bracket installation
(* bracket use)
* Bracket(separate sales)
is provided.
(model no.: FSM-LB1)
<Separate indicator>
Bracket/kit (optional) are provided to install a separate indicator.
Bracket model no.：PPD3-KL-D
：single foot bracket (radical installation)
Bracket model no.：PPD3-KD-D
：both sides foot brackets(parallel)
Bracket model no.：PPD3-KHS-D
：panel mount bracket set with panel cover
Bracket model no.：PPD3-KC
：operation protective cover
7.External dimensions
<Analog output type>
55
15.5
17
27
9.5
32
Rc1/8 or G1/8
2-φ3.4
2-M3 depth 5
4.6
<Separate indicator type>
22
32
□
30
Sensor grand
2-φ2.7 depth 7
8. How to order
<Analog output type>
FSM – H – A - 005 ML- 6A - K
Symbol Content
Flow rate r ange
005
0.25〜5 mＬ/min
010
0.5〜10 mＬ/min
050
2.5〜50 mＬ/min
100
5〜100 mＬ/min
Port si ze
6A
Rc1/8 (stainless steel)
6G
G1/8 (stainless steel)
Opti on
Blank
None
K
Company Certification attached
T
Traceability attestation attached.
3 pieces; traceability attestation,
company certification and traceability
system configuration are attached.
<Separate indicator>
FSM – H –D N - 050 ML
Symbol
Content
Outp ut type
N
NPN output
P
PNP output
Flow rate rang e
005
0.25 to 5 mL/min
010
0.5 to 10 mL/min
050
2.5 to 50 mL/min
100
5 to 100 mL/min
<Bracket for separate indicator>
PPD3 - KL - D
Symbol
Content
Bracket k it
KL-D Single foot bracket (radial)
KD-D
Both sides foot brackets (parallel)
KHS-D
Panel mount bracket set with cover
KC
Operation protective cover
Mounting hole
machining dimensions
2-nominal 3
P tight
2-M3
18
4-M3
18
50
□33.5±0.3
Protective cover
Protective cover holder
FSM-H-A- ML-6A/6G
FSM-H-D０５０
Mounting hole
machining dimensions
2-nominal 3
P tight
Mounting panel cutout
2-250, Ouji，2-Chome，Komaki，Aichi，485-8551, Japan
http://www.ckd.co.jp/
2006.12.13

<Separate indicator>
RUN display
key
MODE
MODE
RUN OUT1OUT2 
F S M
C K D     m l /m i n
１ ２
key
▲
１
key
▼
２
･
U
sed when entering various setting modes.
･Used when advancing setting mode.
･Used when returning to flow rate display.
･Used when releasing peak hold operation.
：
Lighting
 ：Flashing
LED
：
Lights turned on when displaying flow rate.
：Flash when peak hold operation.
OUTPUT display
(OUT1,OUT2)
：Lights turned on when the output is turned ON.
：Flash when overcurrent detected.
･
Flow rate, various switches
setpoints,
etc or status are
displayed.
3-digit LED
･
Data of CH
1 is displayed in turn when
displaying
flow rate.
･
The maximum value is displayed during peak hold
operation.
･Determines the mode when selecting the mode.
･Used for count-up when setting each data.
･
Data of CH2 is displayed in turn when displaying flow rate.
･
The maximum value is displayed during peak hold
operation.
･Determine a mode when selecting the mode.
･Used for count-down when setting each data.
Switching mode Note:
1.Maintain intervals more than 3% F.S. between two setpoints during window operation.
Hysteresis of 1% F.S. is provided on each ON and OFF sides automatically.
2.Maintain intervals more than 1% F.S. between two setpoints when hysteresis operation.
3.If the differential between above 2 setpoints is not satisfied, it may result in not operated
or unstable operation. If a switch is activated in unstable flow rate state such as a fluid
pulsation, etc., unstable operation may be provided. In this case, maintain the difference
between two setpoints satisfactorily, use the product after checking that switching is
stabilized.
4.In operation waveform, left side shows minus side, while, right shows plus side.
5.If waveform pattern is decided, magnitude of ON and OFF setpoints is decided, and the
reverse magnitude is not allowed. However, in this product, operation with specified
operation pattern has precedence over all things. When the two setpoints are inputted, the
magnitude is identified automatically, processing the proper identification as ON and OFF
setpoints. As result, even if ON and OFF setpoints are inputted reversely, re-recognized as
correct ON and OFF setpoints, always operating with the specified operation pattern.
CH Waveform ON setpoint OFF setpoint
1 200 350
2 300 250
If each key in flow rate display state is
pressed down, switch data ON and OFF
setpoints, operation waveform, zero adjust
value and models are displayed to check.
Switching is not affecte
d during this
operation.
Data display
▲
１
Being held down
▼
２
Operation waveform display ON setpoint display
OFF setpoint display Operation waveform display
OFF side
flash
ON side
flash
▲
１
▼
２
Press simultaneously
Zero adjustment value/
Model No. display
Zero adjustment value displayADJ display
Zero point adjustment value and model
number display are displayed
alternately.
Switching is not affected even during
operation.
Model No. display
Being held down
Maximum and minimum values indicated with flow rate value can be read during the specified period. Use this function when checking
instantaneous flow rate change. Also, peak hold operation never affects the basic function of this prod
uct such as switching and flow rate
display, etc.
Peak hold operation start
(RUN light flash)
▼
２
Press simultaneously
MODE
Flow rate display
condition [460] displayed.
Bottom value displayed
▼
２
Bottom value [453]
Peak magnitude displayed
Flash
Peak magnitude [475]
▲
１
Being held down Flash Being held down
Flash
Flash
Flash
Flash
Flash
1
Data return
1
2
1
MODE
Press simultaneously
Basic key operation
Data setting of switch output function
It is effective in the switching pattern setting/ ON/ OFF setpoint/ 0 adjustment mode.
Count-
up
Count-
down
Data reading
1
2
Switch CH1
ＯＮ/OFF data setting
MODE
Switch CH1
Operation mode
change.
Channel 1 display
MODE
I
f key operation is not done more than 2 seconds before confirming
mode, the display will be returned to flow rate display for safety. If
switching off during operation (state of each setting mode), the
display will be returned to flow rate display when the
product is
switched on again.
MODE
Being held
down
If key is further pushed,
the display will be returned to
flow rate display.
MODE
MODE
Separate
ON point waveform
display
OFF point
waveform display
Setpoint display
Alternate
display
Operation mode
display Setpoint display
Determination
An operation mode
change by up/down key Number change by
up/ down key
Switch CH2
Operation mode change
0 point adjustment mode
Switch output forcible ON mode
CH1 output ON CH2 output ON
Adjusted value
reading
1
Being held down
2
Being held down
MODE
1
2
MODE
MODE
Switch CH2
ON/OFF data setting
Set same as a switch
CH1.
[ADJ] display
0 point adjustment value display
MODE
MODE
MODE
MODE
1
1
Press once
To flow rate display
Determination
Press simultaneously
Press simultaneously
Determination
Press once
Press once
Press once
Press once
Press once
Press once
Press once Press once
Press once
Press once
To flow rate display
To flow rate display
Press once
Alternate
display
Alternate
display
Alternate
display
Caution Adjust 0 point in the state that a fluid never flows.
MODE
Press once
Switch function
Setpoint verification method
Name and
function
s
of display/controls
Peak hold function
Switch output function/forcible output function/0 point adjustment operation
Set example
O p er a t i on p a t t er n n a m e
and LE D di s pla y Oper a tio n w a vef o r m
W ind ow o per a ti on 1
(R a n ge in s i de O N )
W ind ow o per a ti on 2
( R an g e o u t O N )
Hyste r e si s o pe r a tio n 1
( F lo w r at e s m a ll s id e
ON)
Hyste r e si s o pe r a tio n 2
(Fl o w rat e l a r ge s id e
ON)
Sw it c h ou t p u t OF F
ON
OFF
1%F.S. 3%F.S. or more 1%F.S.
ON
OFF
The output is turned off not depending
on ON and OFF setpoint.
ON
OFF
1%F.S. or more
0OFF setpoint ON setpoint flow rate
ON
OFF
3%F.S. or more
0ON setpoint OFF setpoint flow rate
0OFF setpoint ON setpoint flow rate
0 ON setpoint OFF setpoint flow rate
1%F.S. 3%F.S. or more 1%F.S.
ON
OFF
0 flow rate