Cost Effective Equipment Apogee 450 User manual

1. INTRODUCTION .............................................................................................................................................................................4
1.1. CONFIDENTIALITY STATEMENT................................................................................................................................................................4
1.2. WARRANTY ........................................................................................................................................................................................4
1.3. RETURNED MATERIALS .........................................................................................................................................................................4
1.4. MODEL AND REVISIONS ........................................................................................................................................................................4
1.5. ENVIRONMENTAL CONSIDERATIONS ........................................................................................................................................................5
1.6. GENERAL SAFETY HAZARDS /PRECAUTIONS..............................................................................................................................................5
1.7. ELECTRICAL.........................................................................................................................................................................................5
1.8. MECHANICAL......................................................................................................................................................................................5
1.9. CHEMICAL ..........................................................................................................................................................................................5
1.10. LOCKOUT/TAGOUT PROCEDURES AND INFORMATION ...............................................................................................................................6
1.11. INTENDED USE OF MACHINE................................................................................................................................................................6
2. EQUIPMENT DESCRIPTION.............................................................................................................................................................8
2.1. USER CONTROLS..................................................................................................................................................................................8
2.2. DIMENSIONS.......................................................................................................................................................................................8
2.3. FEATURES AND PROGRAMMABILITY.........................................................................................................................................................9
2.4. PRECISION..........................................................................................................................................................................................9
2.5. RELIABILITY.........................................................................................................................................................................................9
2.6. BOWL DESIGN.....................................................................................................................................................................................9
2.7. UTILITIES............................................................................................................................................................................................9
3. INSTALLATION .............................................................................................................................................................................10
3.1. CLEARANCE REQUIREMENTS ................................................................................................................................................................10
3.2. FACILITIES REQUIREMENTS ..................................................................................................................................................................11
3.3. ENVIRONMENT..................................................................................................................................................................................11
3.4. UNPACKAGING &INSPECTION..............................................................................................................................................................11
3.5. SYSTEM INSTALLATION &SETUP ...........................................................................................................................................................12
3.6. START UP.........................................................................................................................................................................................12
3.7. SYSTEM CHECKS ................................................................................................................................................................................12
4. DATASTREAM™TECHNOLOGY.....................................................................................................................................................14
4.1. SYSTEM PARAMETERS.........................................................................................................................................................................14
4.2. MANUAL CONTROLS –APOGEE™450 SPIN DEVELOPER...........................................................................................................................14
4.3. RUNNING RECIPES .............................................................................................................................................................................18
4.4. EDITING RECIPES ...............................................................................................................................................................................20
4.5. EDITING DISPENSE SELECTION ..............................................................................................................................................................20
4.6. TOOL SPECIFIC SETTINGS -APOGEE™450 SPIN DEVELOPER ......................................................................................................................20
5. APOGEE™450 SPIN DEVELOPER USE & OPERATION ....................................................................................................................22
5.1. SPIN CHUCK INSTALLATION AND/OR REMOVAL........................................................................................................................................22
5.2. LID ADJUSTMENT...............................................................................................................................................................................22
6. DEVELOPER CONFIGURATIONS....................................................................................................................................................23
6.1. PUDDLE/STREAM DISPENSE.................................................................................................................................................................23
6.2. SIDE SPRAY DISPENSE .........................................................................................................................................................................23
6.3. DIRECT SPRAY DISPENSE .....................................................................................................................................................................23
7. PREVENTATIVE MAINTENANCE....................................................................................................................................................24
7.1. SERVICE AND REPAIRS.........................................................................................................................................................................24
7.2. FAULT CONDITION .............................................................................................................................................................................24
7.3. SAFETY CHECKS .................................................................................................................................................................................24

7.4. MECHANICAL/UTILITIES CHECKLIST .......................................................................................................................................................24
7.5. CLEANING ........................................................................................................................................................................................25
8. TABLE OF REVISIONS ...................................................................................................................................................................26

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1. Introduction
1.1. Confidentiality Statement
Information supplied is for the use in the operation and/or maintenance of Cee® equipment. Neither
this document nor the information it contains shall be disclosed to others for manufacturing or any other
purpose without written authorization from, Cost Effective Equipment, LLC.
1.2. Warranty
Cost Effective Equipment, LLC warrants to the original purchaser (Buyer) that equipment is free from
defects in material and workmanship under normal use and service in accordance with Cee®
instructions and specifications. Buyer shall promptly notify Cee® of any claim against this warranty, and
any item to be returned to Cee® shall be sent with transportation charges prepaid by Buyer, clearly
marked with a Return Authorization (RMA) number obtained from Cee® Customer Support. Cee’s
obligation under this warranty is limited to the repair or replacement, at Cee® option, of any equipment,
component or part which is determined by Cee® to be defective in material or workmanship. This
obligation shall expire one (1) year after the initial shipment of the equipment from Cee®. This warranty
shall be void if:
▪Any failure is due to the misuse, neglect, improper installation of, or accident to the equipment.
▪Any major repairs or alterations are made to equipment by anyone other than a duly authorized
representative of Cee®. Representatives of Buyer will be authorized to make repairs to the
equipment without voiding warranty, on completion of the Cee® training program.
▪Replacement parts are used other than those made or recommended by Cee®.
CEE® MAKES NO OTHER WARRANTIES, EXPRESSED OR IMPLIED, WITH RESPECT TO
EQUIPMENT. NO WARRANTY IS MADE AS TO THE MERCHANTABILITY OF THE EQUIPMENT
NOR ITS FITNESS FOR ANY PARTICULAR PURPOSE. In no event shall Cee® be liable for
consequential loss or damages, however caused. No person or representative of Cee® is authorized to
assume for Cee® any liability in connection with equipment nor to make any change to this warranty
unless such change or modification is put in writing and approved by an authorized representative of
Cee® in writing.
This warranty shall be governed by the laws of the state of Missouri, U.S.A.
1.3. Returned Materials
Any materials, parts, or equipment returned to Cost Effective Equipment, LLC must be clearly labeled
with a Return Material Authorization (RMA) number.
To obtain an RMA number, contact:
Cee® Customer Support
Telephone........................................+1-573-466-4300
[e-mail]
Web Address....................................www.costeffectiveequipment.com
1.4. Model and Revisions
The model and serial number information for the Cee® Apogee™450 Spin Developer are located on
the rear panel. Software version information can be found on the About screen. See DataStream™
Manual for screen shots and a detailed explanation of the system software.

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1.5. Environmental Considerations
1.6. General Safety Hazards / Precautions
Read this manual in its entirely before operating or servicing the machine
The unit is very heavy and proper precautions should be taken to when handling the machine to
minimize the risk of injury. Labels are placed on the machine to identify areas where caution is
needed during operation.
Sound pressure measurements greater than 80dB(A) are considered hazardous. The following
sound pressure measurements were obtained from the Cee® Apogee™450 Spin Developer at
a distance of 3 ft (0.9 m) from the system:
Stand-by Mode..................... 54dB(A)
Normal Operations ............... 70dB(A)
1.7. Electrical
High voltage is present in the machine. Disconnect power before servicing.
Stored electrical energy is present in the machine. Before servicing allow sufficient time for
discharge. The servo amp contains a charge light. Do not service the machine until this light has
been extinguished.
This unit must be connected to an outlet with proper grounding.
1.8. Mechanical
This machine may contain compressed gases which can provide motive force for components
and can expand violently upon decompression. Disconnect N2or CDA before removing any
panels.
Developers are capable of very high-speed rotation. Ensure all lids and panels are in place
before rotating these devices.
Ensure that all panels are on and in their correct locations before powering up or operating.
When opening lids be aware of the pinch point at the hinge cover. Open lids only by using the
handles on the lids.
1.9. Chemical
Cee® does not supply or dictate chemicals to be used in conjunction with the Cee® Apogee™450
Spin Developer. Enclosure material data will be reviewed during equipment design and configuration to
ensure compatibility with the customer’s proprietary process.
Prior to introducing new chemicals, refer to your chemical supplier’s factory specifications and MSDS.
Material Safety Data Sheets (MSDS) contain crucial information regarding chemical safety, including
details about hazardous components, physical properties, spill and leak procedures, waste disposal
guidelines, and personal protective equipment requirements for handling.
Ensure chemical compatibility of all chemicals and materials being used inside the machine.
This includes all wetted parts of the storage, supply, dispense, and waste systems.

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All dispensed materials are held in one common waste storage tank. Ensure chemical
compatibility and verify potential for negative interactions between chemicals before use.
Flammable Chemicals. No open flames/sparks.
Avoid the use of materials with an auto-ignite point ≤30°C.
Relieve pressure before opening canisters, tanks, cartridges, or syringes to refill.
Relieve pressure and shut off chemical valves before servicing supply lines, dispense valves or
other components such as EBR/BSR tubes, dispense nozzles, spray tips, or developer lid.
Flush tubing and valves with an appropriate solvent and drain system before servicing.
When draining waste tank, use appropriate containers and connection methods.
Ensure proper ventilation/exhaust is always used.
Always wear appropriate Personal Protective Equipment. This includes safety glasses, gloves,
and other equipment, as needed, to protect from mechanical and chemical hazards.
Exhaust and fume management is important to prevent the release of hazardous materials and ensure
a safe working environment. Users should assume that all fumes are hazardous and take appropriate
precautions to ensure system exhaust is functional per the guidelines outlined in section 7 of this
operations manual.
1.10. Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting the plug where
it enters the machine.
Note: There are no LOTO (Lock Out/Tag Out) facilities supplied with the Cee® Apogee™450 Spin
Developer. It is the responsibility of the customer/installer/end-user to ensure that the suitable LOTO
devices are provided on utilities being supplied to the Cee® Apogee™450 Spin Developer in
accordance with applicable laws, regulations, and/or company policies.
For more information, please contact Cee® Customer Support.
1.11. Intended Use of Machine
The Cee® Apogee™450 Spin Developer is intended for use as a semiconductor/optical application
machine.
The Cee® Apogee™450 Spin Developer is not intended for use in food or medical applications or for
use in hazardous locations.
The Cee® Apogee™450 Spin Developer is intended for use only by trained personnel wearing the
proper personal protective equipment. Anyone not trained in the proper use of the Cee® Apogee™450
Spin Developer and having not fully read this manual, should not operate the equipment.
The Cee® Apogee™450 Spin Developer is intended for use in a cleanroom environment to provide the
proper processing conditions for the substrates. If it is used outside of a cleanroom environment,
substrate cleanliness may be compromised.

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The Cee® Apogee™450 Spin Developer is not intended for use in a hazardous or explosive
environment.
Normal Operating Conditions
The Cee® Apogee™450 Spin Developer is designed for indoor use only.
Ambient Temperature.................................................10°C - 30°C
Relative Humidity........................................................≤80%
Altitude........................................................................up to 3000 m
Pollution Degree.........................................................2
Overvoltage Category.................................................II
Permissible Voltage Fluctuations ...............................208-230VAC ±10%
If the Cee® Apogee™450 Spin Developer is used in a manner not specified by Cee® or
with accessories not provided by Cee®, the protection provided by the equipment may be
impaired.

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2. Equipment Description
The Cee® Apogee™450 Spin Developer delivers track-quality performance, with revolutionary interface
capabilities and the utmost in chemical compatibility, in an efficient and space-saving design. The heavy-
duty-drive spin developer combines precision spin speed control and a high torque drive for rapid
acceleration of 300mm and larger LCD squares up to 14”x14” (355.6mm x 355.6mm).
Fully programmable and user-friendly, this precision developer features the accuracy and repeatability
needed to eliminate processing variability from critical experiments. With its convenient compact footprint,
wide array of chemical compatibility, and durability, this easy-to-use benchtop system will provide years of
high-performance operation, making the Cee® Apogee™450 Spin Developer purchase a smart and cost-
effective decision.
2.1. User Controls
Figure 1: Cee® Apogee™450 Spin Developer User Controls
1. power button.............................. used to turn the tool off and on
2. local presence button
1
................ used for remote access
3. lid sensor.................................... detects when the lid is closed
4. lid handle.................................... used to safely open and close the lid
5. developer lid............................... cover for the spin bowl
6. dispense bracket........................ used to hold dispense nozzles
2.2. Dimensions
•27 5/8” (701.7mm) W x 30 ¾” (781.1mm) D x 24 ¾” (628.7mm) H
2
•machine weight................................................. 115lb (52.2kg)
1
Refer to the DataStream™Manual for more detailed information.
2
H is with lid closed. Open H: 36” (914.4mm)

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2.3. Features and Programmability
•vacuum and lid interlock
•full-color, alphanumeric-capable, touchscreen graphical user interface (GUI)
•supports unlimited user-defined program steps for each recipe
•0.1 second step time resolution (9,999.9 seconds maximum step time)
•spin speeds up to 6000rpm (max rpm varies with substrate size)
•spin speed acceleration
- 0 to 30,000 rpm/s unloaded
- 0 to 23,000 rpm/s with a typical 200mm substrate
- 0 to 3,000 rpm/s with a 6” x 6” x 0.250” photomask in a recessed chuck
- 0 to 400 rpm/s with a 14” x 14” x 1.1mm photomask in a recessed spin chuck
•bidirectional speed control/oscillating chuck
•up/download process parameters using DataStream™technology via native USB/Ethernet ports
•multiple simultaneous automated dispense capability
•in-process dynamic speed & acceleration control
2.4. Precision
Spin Speed Repeatability........................................ 0.2rpm (per standard developer module)
Spin Speed Resolution............................................ 0.2rpm (per standard developer module)
Substrate Sizes ...................................................... < 10mm to 450mm round; 14” x 14” square (max)
2.5. Reliability
•indirect drive system protects the spin motor from contact with process chemicals and solvents
•industry-leading reliability and uptime
•low maintenance design
•one-year full warranty on parts and labor
•complimentary remote technical support for the life of the product
•application process assistance for life of the product
2.6. Bowl Design
•high-density polyethylene (HDPE) spin bowl for material compatibility
•optional polyethylene disposable liners available
•optional closed or open lid design for process flexibility and repeatability
•direct fan-jet spray, side angle puddle, and stream dispense options
•optional nitrogen blow-off nozzle
•integrated drain and exhaust ports
•optional automatic drain separator (aqueous/solvent)
2.7. Utilities
voltage ranges ........................................................ 208-230 VAC, Single Phase, 50/60Hz
power requirements................................................ 1440 watts (6A)
drain port................................................................. ¾” OD
exhaust port............................................................ 1 ½” OD, 20-50cfm @ 0.2” water
vacuum................................................................... <33kPa abs
DI water
3
................................................................. < 30psi (206.8kPa)
3
for developer spray and backside rinse (if hard-plumbed)

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3. Installation
3.1. Clearance Requirements
The Cee® Apogee™450 Spin Developer is a benchtop unit requiring a table or benchtop for location.
In most cases the supporting structure will be larger than the unit itself.
Clearance Requirements
Adherence to these requirements ensures adequate spacing, ventilation, and access to the detachable
MAINs
4
supply cords as needed.
Device Rear
5
........................................................... 12” (304.8mm)
Device Sides........................................................... 3” (76.2mm)
Figure 2: Cee® Apogee™450 Spin Developer Rear Clearance Requirements
Figure 3:Cee® Apogee™450 Spin Developer Side Clearance Requirements
4
The tool should only be operated with the MAINs supply cord provided by Cee®.
5
When equipped with optional Programmable Exhaust, rear clearance requirement is 18” (457.2mm).

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3.2. Facilities Requirements
The Apogee™450 Spin Developer requires the following utilities for operation.
Figure 4: Cee® Apogee™450 Spin Developer Facilities Connections
1. USB port
6
................................... facilitates software updates and log file downloads
2. programmable exhaust............... (optional) M8, 4pin female port, 24VDC
3. light tree..................................... (optional) light tree port, M12 4pin, female, 24VDC
4. spin bowl exhaust port................ exhaust port for spin bowl vapors (20-50cfm @ 0.2” water)
5. backside rinse (BSR).................. (optional) dispense material fitting for backside rinse
6. fuses.......................................... system protection fuses (Replacement: BK/MDA-15-R)
7. nitrogen/CDA.............................. (optional) system nitrogen/CDA 70psi (482 kPa)
8. system vacuum
7
......................... ¼” NPT port <33kPa abs
9. AC power in ............................... single phase 208-230 VAC, 6A
10. Ethernet ..................................... facilitates remote recipe writing and remote device control
11. accessory port............................ as needed, M12 4pin, male, 24VDC
12. dispense trigger.......................... (optional) connection for automated dispense control box
13. spin bowl drain........................... port via which liquid waste is removed from the tool
3.3. Environment
The Cee® Apogee™450 Spin Developer should be operated in a clean, climate-controlled
environment.
3.4. Unpackaging & Inspection
1. Lifting from the bottom of the unit, carefully remove from the packing crate. Do not lift by any of the
top covers or protrusions. Do not roll or turn the unit on its sides.
2. Remove packing foam and plastic wrap.
3. Place the Cee® Apogee™450 Spin Developer on a table of proper height and strength so that the
controls and spin chuck are at the proper ergonomic height.
6
see DataStream™Manual for more information
7
Tools through July 2022 include ¼” barb connect as standard/ post-July 2022 tools are supplied with a ¼”
push connect fitting as standard. Your connection fitting may vary based on customer request.

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4. Thoroughly check machine for shipping damage. If physical damage is seen, DO NOT APPLY
POWER! Contact Cee® Customer Support immediately.
The following items are included with shipment:
•Cee® Apogee™450 Spin Developer
•temperature & humidity sensor
•power cord
•operators manual (USB)
Optionally included items:
•dispense systems and related components
•spin chucks with screws
•programmable exhaust
•substrate centering equipment
•waste systems
3.5. System Installation & Setup
*Please refer to the quick reference card supplied with the tool.
1. Using the adjustable feet, adjust the Cee® Apogee™450 Spin Developer so that it is level from
side-to-side and front-to-back.
2. Thoroughly clean the spin bowl and spin chuck.
3. Connect utilities per the reference diagram in Figure 4: Cee® Apogee™450 Spin Developer Facilities
Connections.
4. Connect the temperature & humidity sensor to the CAN terminal.
5. Connect the vacuum supply to the vacuum fitting. (System vacuum <33kPa abs)
6. Connect the drain to the drain port.
7. Connect exhaust lines to the exhaust port. (System exhaust flow rate of 20-50cfm)
8. Connect the (optional) dispense box (if equipped) to the dispense triggers.
9. Connect the (optional) programmable exhaust (if equipped) to the programmable exhaust terminal.
10. Connect any dispense as indicated on the supplied USB dispense diagrams.
11. Plug in the machine using the supplied Cee® shielded cables and note that only the cooling fan
should be powered, not the display.
3.6. Start Up
Turn the machine on by pressing the lighted power switch. The display will cycle through a series of
boot screens before arriving at the main login screen.
Enter default administrative login credentials:
Username: ...................................................... admin
Password: ....................................................... admin2
3.7. System Checks
On the Process screen, navigate to Tools>Manual Control and perform the following system checks
for initial validation of the Cee® Apogee™450 Spin Developer.
Vacuum:
Turn the vacuum on and verify that vacuum is pulling through the hole of the spin shaft. Turn
the vacuum off and verify that vacuum ceased at the hole of the spin shaft.

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Spin Speed:
Close the lid and set spin speed to 1000rpm. Verify that the shaft spins and that the tool reads
1000rpm.
Lid Interlock:
Open the spin bowl lid to evaluate the lid interlock functionality. If properly functioning the tool
will stop spinning.
Temperature & Humidity Sensor:
On the left side of the Process screen, confirm that temperature and humidity readings are
present.
Automated Dispense (optional):
If equipped with automated dispenses, navigate to Tools>Manual Control>Dispenses,tap
Dispense 1 to select, then hit Apply to validate that Dispense Triggers are operational.
Repeat as needed for additional dispense triggers.
Programmable Exhaust (optional):
If equipped with programmable exhaust, ensure that it is working properly
Spin Chuck(s):
Aligning the spin chuck slot with the pin or key on the spin shaft, firmly press the chuck onto
the shaft ensuring the pin or key is fully engaged. If equipped, insert chuck screw, and tighten.
Place substrate on the spin chuck.
Navigate to Tools>Manual Control>Vacuum and set vacuum threshold to 64kPa.
If the vacuum is less than 64kPa, the chuck passes inspection.
Turn off the vacuum and remove the substrate. Spin chuck removal is reverse of installation.
Once operations have been validated, the Cee® Apogee™450 Spin Developer is ready for use. Begin
by creating a recipe. See DataStream™Manual for more information.
*In the event of a fault condition, power cycle the tool to restore function.

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4. DataStream™Technology
This section covers information specific to Apogee™450 Spin Developers and is intended as a companion
to the DataStream™Technology Software Manual. Please review the DataStream™Operations Manual
for detailed guidance on software usage.
4.1. System Parameters
Spin Speed---------------------
measured rotational speed of the spin chuck in revolutions per
minute (rpm)
Spin Acceleration8-----------
dictates how fast the spin chuck will accelerate in revolutions per
minute per second (rpm/s)
Percent Exhaust-------------
displays the valve opening percentage of the optionally equipped
programmable exhaust module
Active Dispenses------------
indicates which dispenses are enabled
Dispense Source Empty---
indicates when dispense sources are low or empty
Chuck Vac----------------------
measurement of the vacuum pressure holding the substrate against
the spin chuck in kPa
Waste Bottle Full-------------
indicates whether the sensors detect a full waste bottle
Ambient Temperature------
the air temperature of the environment where the equipment is
housed
Humidity9----------------------
the ambient relative humidity in the environment where the
equipment is housed
Vibration------------------------
unitless measurement of g-forces at the spindle block; can be used
to detect off-center substrates at high speeds
4.2. Manual Controls –Apogee™450 Spin Developer
The Manual Control activity is an advanced feature that allows users to run most operating processes
outside of a recipe. This mode is useful for tasks such as prototyping processes, verifying equipment
operation, and recovering from aborted processes. To access the activity, navigate to Tools > Manual
8
Spin Acceleration settings are dependent on the presence of a Spin Speed set point.
9
Both Ambient Temperature and Humidity are measured via a custom sensor board mounted next to a
ventilation inlet inside the tool. If sensor is disconnected, default of -1.1 is displayed.

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Control. Actual and set point parameter values are displayed on the left. A drop-down menu of
available controls is located on the right.
If using remote feature, the user must confirm local presence to execute manual commands. Refer to the
DataStream™Manual for guidance on the Local Presence feature.
Centering Routine
Select a Control of Centering Routine and the Action will default to Center Wafer.
Select an option from the Title dropdown menu.
Select an option from the Body dropdown menu.
Click APPLY
Allows users to assess and view configuration of the Centering Routine Display window outside of the Advanced
Recipe Editor Activity.

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Spin Speed:
Select a Control of Spin Speed
The Action will default to Set.
Close the developer lid and enter desired values for spin speed, acceleration, and oscillation
within the supported range for each setting:
Speed
1-12,000 rpm (standard developer)
1-6,000 rpm (450 Spin Developer)
Acceleration
1-30,000 rpm/s
Oscillation10
0-99 seconds
Click APPLY
Note that the actual and set point values have populated on the system values list.
10
reverses spin direction for the period specified

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Dispense (*if equipped)
Select a Control of Dispense
The Action will default to Enable Dispenses.
Check the box for the desired dispenses - selections are rendered in green
Click APPLY
Note that the actual and set point values for enabled dispenses have populated on the system values list.
Chuck Vac *ensure source vacuum is on
Select a Control of Chuck Vac
The Action will default to Set.
Set Vacuum to On or Off.
Set Threshold to the desired value in kPa.

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Click APPLY
Note that the actual and set point values have populated on the system values list.
4.3. Running Recipes
1. Navigate to the Recipes page.
2. Click Load to access the recipes list.
3. Search for, identify, & select the preferred recipe.
4. Click Run.

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5. Click Start to initiate the recipe process.
6. Use the centering activity to center the substrate.
1. spin chuck rotates slowly with vacuum on then stops rotation & vents vacuum
2. toggle chuck vacuum on
3. toggle chuck vacuum off
4. resume recipe
7. Recipe execution.
*Users may be required to follow prompts on the screen during recipe execution.

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4.4. Editing Recipes
Developer recipes may enlist an unlimited number of steps, each capable of defining spin speed,
acceleration, spin time, percent exhaust opening, and dispense triggers. Users can easily insert new
steps, reorder existing steps, and/or delete a selected step via the Step Context Menu.
Name-----------------------------
recorded in log files and used as criteria when searching for recipes
Enable Chuck Vac11---------
used when the substrate requires vacuum to remain on the spin
chuck; the user must center the substrate prior to spinning
Step Velocity12----------------
speed in rpms the spin chuck will achieve on a given step
Step Ramp---------------------
rate in rpm/s the spin chuck will ramp on a given step
Step Time-----------------------
the duration in seconds for a given step
Exhaust13-----------------------
percent of exhaust opening
Dispense------------------------
the dispense triggered during a given step
4.5. Editing Dispense Selection
Enabled dispenses are rendered in green and display a checkmark. Multiple dispenses may be
selected within the same step.
4.6. Tool Specific Settings - Apogee™450 Spin Developer
Vac Threshold (kPa)-----------------------
Minimum vacuum threshold that must be reached before
spinning a substrate.
Centering Speed (rpm) -------------------
How fast the substrate spins during a centering routine
11
Only available to users with ARE permissions.
12
preconditions default to ± 5% of the target speed
13
field is only present on tools equipped with optional programmable exhaust