COXEM EM-30PLUS User manual

Scanning Electron Microscope
EM-30PLUS Operating Manual
COXEM Co., Ltd.

Scanning Electron Microscope EM-30PLUS Operating Manual
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Contents
1. Introduction.................................................................................................................. 7
1.1 Descriptions on Product Parts ..................................................................................................7
1.1.1 Main Body of EM-30PLUS ....................................................................................................................... 7
1.1.2 Back and Inside of EM-30PLUS............................................................................................................. 8
1.2 Operational Procedure of Equipment ......................................................................................9
1.3 Cautions before Use..................................................................................................................10
1.3.1 Handling.........................................................................................................................................................10
1.3.2 Permission by Operation........................................................................................................................11
1.3.3 Safety Precautions .....................................................................................................................................12
2. Screen Composition.................................................................................................. 14
2.1 Main Screen of NS.....................................................................................................................14
2.2 Explanations on Buttons ..........................................................................................................15
2.2.1 E-Gun Power Button.................................................................................................................................15
2.2.2 Vacuum State Buttons .............................................................................................................................16
2.2.3 Selection of Detector Mode .................................................................................................................17
2.3 Display Mode..............................................................................................................................18
2.4 Image Mode................................................................................................................................20
2.5 Stage & Holder Information....................................................................................................20
2.5.1 Maximum Tilt Angle .................................................................................................................................21
2.6 Right Function Tap ....................................................................................................................22
2.6.1 Function..........................................................................................................................................................22
2.6.2 Magnification ...............................................................................................................................................23
2.6.3 Image Viewer Setting...............................................................................................................................24
2.7 Top Function Tap........................................................................................................................25
2.7.1 Setup................................................................................................................................................................26
2.7.2 Option .............................................................................................................................................................33
2.7.3 Help..................................................................................................................................................................36
2.8 Image Viewing............................................................................................................................37
2.8.1 Screen for Image Viewing .....................................................................................................................37
2.8.2 Image Tools ..................................................................................................................................................37
2.8.3 Image Correction .......................................................................................................................................38
2.8.4 Image Shift....................................................................................................................................................38
2.9 Other Buttons .............................................................................................................................39
2.9.1 Delete All .......................................................................................................................................................39

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2.9.2 Wobble ...........................................................................................................................................................39
3. Specimen Preparation .............................................................................................. 40
3.1 Summary .....................................................................................................................................40
3.2 Types of Stub..............................................................................................................................41
3.2.1 Basic Components of Stub ....................................................................................................................41
3.2.2 Directions for Multi Holder ...................................................................................................................42
3.2.3 Stub Cleaning ..............................................................................................................................................43
3.3 Types of Materials .....................................................................................................................44
3.3.1 Classification by Height ..........................................................................................................................44
3.3.2 Classification by Material .......................................................................................................................44
3.4 Production of Specimen ...........................................................................................................46
3.4.1 Checklist before Specimen Preparation ..........................................................................................46
3.4.2 Material Preparation .................................................................................................................................46
3.4.3 Measurement of WD................................................................................................................................48
3.4.4 Specimen Mounting on Stub ...............................................................................................................49
3.5 Specimen Mounting ..................................................................................................................51
3.5.1 Preparation and Mounting of Specimen ........................................................................................51
3.5.2 Specimen Storage......................................................................................................................................53
4Preparation for Taking Photos ............................................................................... 54
4.1 Power ON/OFF............................................................................................................................54
4.1.1 Turning on the Main Body of EM-30PLUS.....................................................................................54
4.1.2 Turning off EM-30PLUS...........................................................................................................................55
4.2 Setting up of Electron Beam ...................................................................................................56
4.2.1 Turning on the Electron Beam.............................................................................................................56
4.2.2 Filament Optimization .............................................................................................................................57
4.3 Location Movement of Specimen...........................................................................................59
4.3.1 Use of Multi Holder..................................................................................................................................59
4.3.2 Use of Stub Except Multi Holder........................................................................................................60
4.3.3 Use of Tilt Function...................................................................................................................................62
4.3.4 Adjustment of Minimum Magnification..........................................................................................64
4.3.5 Specimen Selection and Moving using Mouse ...........................................................................65
4.3.6 Driving Mode...............................................................................................................................................66
5Image Acquisition ..................................................................................................... 69
5.1 Setting Observation Mode.......................................................................................................70

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5.1.1 RED & Focus Mode ..................................................................................................................................70
5.1.2 Fast Mode......................................................................................................................................................70
5.1.3 Slow Mode....................................................................................................................................................71
5.1.4 Photo Mode .................................................................................................................................................71
5.2 Setting Acceleration Voltage ...................................................................................................72
5.2.1 Summary of Acceleration Voltage .....................................................................................................72
5.2.2 Setting Acceleration Voltage ................................................................................................................76
5.3 Setting Observation Magnification/Spot size ......................................................................78
5.3.1 Methods for Magnification Selection...............................................................................................79
5.3.2 Setting Spot size ........................................................................................................................................80
5.4 Focus Adjustment ......................................................................................................................81
5.4.1 Focus Setting ...............................................................................................................................................83
5.5 Fine Movement of Images .......................................................................................................89
5.5.1 Use of Image Shift ....................................................................................................................................89
5.5.2 Use of Beam Rotation..............................................................................................................................90
5.6 Control of Contrast and Brightness .......................................................................................91
5.6.1 Control of Contrast/Brightness............................................................................................................91
5.7 BSE Mode ....................................................................................................................................92
5.7.1 Precautions for Using BSE Sensor......................................................................................................93
5.7.2 BSE Setting....................................................................................................................................................94
5.7.3 Directions for BSE Mode ........................................................................................................................94
5.8 LV Mode (Low Vacuum Mode) - Optional................................................................................98
6Wobble Operation for Aperture ..........................................................................100
6.1 Structure of Aperture............................................................................................................. 100
6.2 Wobble (Procedure of Aperture Alignment) ..................................................................... 101
6.2.1 Wobble Operation 1.............................................................................................................................. 102
6.2.2 Wobble Operation 2.............................................................................................................................. 106
6.2.3 Methods for Aperture Setting .......................................................................................................... 110
6.2.4 Aperture Alignment (Resetting) ....................................................................................................... 112
7Image Save ...............................................................................................................113
7.1 Management of Image Information ................................................................................... 113
7.2 Use of Image Tools................................................................................................................. 114
7.2.1 Addition of Figures ................................................................................................................................ 114
7.3 Image Save Function .............................................................................................................. 120
7.3.1 Image Save ................................................................................................................................................ 120

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8Alignment Operation.............................................................................................. 121
8.1 Summary of E-Gun Alignment ............................................................................................. 121
8.2 Method for E-Gun Alignment .............................................................................................. 122

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Before using the product, please read this manual carefully and understand the
directions. Be sure to keep the manual in a conspicuous place.
Some devices or functions in manual may not be provided and they can be different
depending on optional items or options.
Images on the cover or in the manual are for illustration, which may be different from
actual products.
The functions and performance of this product and manual can be changed without
prior notification.

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1. Introduction
1.1 Descriptions on Product Parts
It describes the names and functions of the parts of EM-30PLUS.
1.1.1 Main Body of EM-30PLUS
No.
Items
Descriptions
①
E-Gun cover
It is a cover for protecting e-gun.
②
LED Display for vacuum
Its vacuum state is displayed with LED lamp.
③
Pump/Vent button
It cancels or set up the state of vacuum by
force.
④
Chamber door
It is a door for chamber in which a specimen is
placed.
⑤
Variable Aperture
It is a handle used when controlling aperture.
⑥
Power switch
It is used for turning on the power.
①
②
③
④
⑤
⑥

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1.1.2 Back and Inside of EM-30PLUS
No.
Items
Descriptions
①
Electronic board and
radiator
It is an electronic board and a radiator.
②
Vacuum gage
It measures the vacuum state.
③
Turbo molecular pump
It keeps vacuum state high.
④
HV power tank
It provides the power of high voltage.
⑤
Damper
It absorbs vibrational energy.
⑥
Auto Stage
It moves X axis, Y axis, and T axis Stage.
⑦
Chamber
It is a vacuum chamber in which a specimen is
placed.
⑧
SE Detector
It detects SE.
⑨
Condenser lens
It is a lens condensing electron beam.
⑩
Main vent pipe
It is a vacuum vent pipe.
⑪
E-Gun
It radiates electronic beams.
⑫
BSE Board
It is a BSE electronic board.
①
②
③
④
⑫
⑪
⑩
⑨
⑧
⑦
⑥
⑤

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1.2 Operational Procedure of Equipment
Operational procedures of EM-30PLUS electron microscope (EM) are as follows.
Stages
Detailed performances
1
Specimen Preparation
3.2.2 Assembling Method for Stub
3.4.2 Preparation of Materials
3.4.3 Measurement of Specimen Height
3.5.2 Specimen Mounting on Equipment
2
Power ON
4.1.1 Turning on the Main Body of EM-30PLUS
3
Preparation for Taking
Photos
4.3.1 Use of Multi Holder
4.3.2 Use of Stub Except Multi Holder
4.3.5 Specimen Selection and Moving Using Mouse
4
Image acquisition
5.1 Setting up Observation Mode
5.2 Setting Acceleration Voltage
5.3 Setting up Observation Magnification/Spot Size
5.4 Focus Adjustment
5.5 Fine Movement of Image
5.6 Control of Contrast & Brightness
5
Image save
7. Image Save

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1.3 Cautions before Use
1.3.1 Handling
If fine dust or debris gets into electron microscope (EM), the equipment performance can
be degraded. Therefore, be sure to handle the equipment with plastic gloves.
Example of Plastic Gloves

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1.3.2 Permission by Operation
When operating electron microscope (EM), it should be managed with permission according
to the operations.
Division of operations
Detailed performances
General operation and taking
photos
System operator
Calibration
Agent or person that completed calibration training.
Hardware replacement
Agent or person that completed maintenance training.
Upgrade and installation of
software
Agent or person that has knowledge on software
installation.
Disassembly and maintenance
of hardware
Agent or person that completed maintenance training.

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1.3.3 Safety Precautions
The precautions you should know before using EM-30PLUS are as follows.
Items
Descriptions
WARNING
If the instructions were not followed, it can cause severe injuries or
death of users.
CAUTIONS
If the instructions were not followed, users can be injured or suffer
property damage.
WARNING
Since e-gun part is in the state of high acceleration voltage, touching with hands
without wearing any safety device causes electric shock or burn. Make sure you do not
connect or disconnect the cables during the operation.
Do not touch the e-gun that is turned on with hands. When malfunction appears in e-
gun, please apply for the service.
When electric cables get mechanical pressure, electric shock or fire can be occurred.
Never pull, bend or twist the cables.
When the chamber of e-gun falls off due to loosen clamping screw, it can cause injuries.
Be sure to fasten the screw of e-gun alignment tightly before opening the chamber of
e-gun.
If you touch the hot surface of cartridge of electron gun with hands, you can have a
burn. Do not touch the cartridge with hands until the surface cools completely.
CAUTIONS
If the product is exposed to excessively high temperature or its heating is too high, it
can be the causes of defects or malfunction. Please maintain a proper indoor
environment so as to prevent breakdown(Normal operation environment: temperature
20±5°C, humidity below 70%)
If the product is stored in excessively low temperature, the oil viscosity of Rotary Pump
may change greatly and affect the vacuum performance of equipment and the
electronic parts inside the board. Be sure to keep the product above the optimum
temperature. (Normal operating temperature 20±5°C)
Do not install or store the product in a place where excessive vibration can occur on
the floor. (Recommended vibration level below 35dB, below 50dB is OK for medium or
low magnification below 50K)
When the rotary pump of product operates, its surface temperature rises. Fire can break
out due to rotary pump at a high heat. Be sure not to place ignitable or combustible

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substances near the rotary pump during operation.
Be careful when you suddenly stand up or sit down near the projections such as
detector or the aperture of the product. You can get hurt if you hit it or damage the
parts.
When opening and closing the specimen chamber or e-gun chamber, open and close
slowly with both hands so as not to get hurt.
Follow the directions when using equipment. If not, defects can occur on the equipment
or it can be broken down.
Apply for the service when moving the equipment. Arbitrary moving or installing can
cause failure or damage of equipment.
Failure caused by arbitrary moving or installing will result in additional expenses for
after-sales service.
Do not revise or remodel the hardware or software arbitrarily. Arbitrary remodeling can
result in fire or electric shock.
Failure caused by arbitrary revising or remodeling by users will result in additional
expenses for after-sales service.
When connecting the equipment using PC-USB, execute virus inspection periodically.
When it is infected with the virus, malfunction of S/W can be occurred.
(If the malfunction resulted from computer virus, the service is provided at a cost.)

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2. Screen Composition
2.1 Main Screen of NS
The composition of main screen of NS is as follows.

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2.2 Explanations on Buttons
2.2.1 E-Gun Power Button
It is used for turning on or off the e-gun.
Buttons
Names
Descriptions
E-Gun
Power Button
It is a button for turning on or off the e-gun.
※Notice: if you turn off the equipment with e-gun on,
it can affect filaments. Be sure to turn off the e-gun
first and then turn off the equipment.
When turned OFF: Gray
When turned ON: Purple
USB
Disconnect
State
Communications between EM-30PLUS and PC are bad.
1) Confirm the connection state of the USB cable.
2) Change the USB cable to the USB connector of PC.
3) There are communications-related problems in
various boards. ->A/S required
※When the communications are in a good condition,
the icon doesn’t appear.

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2.2.2 Vacuum State Buttons
It is used when making inside the chamber vacuum state during specimen observation or
when converting it to air pressure state in taking the specimen out. You can select the
vacuum degree according to observation purpose or specimens. The buttons below show
the state of current equipment.
buttons
names
explanations
Vacuum ON
/
Vacuum OFF
button
It is a button for converting the inside of the chamber
into vacuum state or air pressure state.
Vacuum ON: It indicates it is vacuum state at
present.
(When pressing Vacuum ON button, it is converted
into Vacuum OFF button, which is air pressure
state.)
Vacuum OFF: It indicates it is air pressure state
at present.
(When pressing Vacuum OFF button, it is
converted into Vacuum ON button, which is
vacuum state.)
Setup
-
Vacuum
Toggle
button
It is a button for controlling the vacuum degree of
chamber inside.
HIGH VACUUM: It indicates current state is
ready for high vacuum. Keep the vacuum state
of chamber inside at the level of below 10-4
torr.
LOW VACUUM: It indicates current state is
ready for low vacuum..
Keep the inside vacuum state at the level of
10-1~10-2 torr. (optional)
Low Vacuum mode is used when observing uncoated specimens including wood,
semiconductor, and biopsy specimens or nonconductive specimens.
For reference, observing in BSE mode when it is Low Vacuum makes it possible to
observe the specimen efficiently due to the decreased charge-up effect
* You can see the Vacuum Toggle button after clicking the Setup screen, and a
conversion of vacuum degree is available only in the Vent state. (Selection and
conversion are impossible in the Pump state)

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Example: When observing non-coated FPCB specimen in SE mode.
High Vacuum
Low Vacuum
2.2.3 Selection of Detector Mode
It is a button for selecting the detector mode of electron microscope (EM).
SE Mode: Mode: It receives the signal of Secondary Electron (SE) and displays the image,
which is mainly used for observing specimen surface.
(It is changed into SE Mode if you press BSE Mode button)
BSE Mode: It receives the signal of Back Scattered Electron (BSE) and displays the image,
with which you can observe the element composition of specimen.
(It is changed into BSE Mode if you press SE Mode button)
SE/BSE Mode: It compares and observes two images of SE and BSE at the same time.
SE+BSE Mode: It displays the composed images of SE and BSE.

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2.3 Display Mode
The following SCAN RATE display icons appear on the screen.
RED Mode & Focus Mode (Resolution 480x320, 160x80)
It is the mode whose reaction velocity is the fastest due to low resolution and high
scanning speed.
It is used for focusing and aperture alignment when observing specimens.
When it is set in RED Mode, a small enlargement window appears on image window as
shown in the figure below, fast focusing is possible while viewing this window.
To move the RED window, drag the screen until you find the position you want.
(If you press RED Mode button one more time, it is changed into Focus Mode which
provides the faster reaction velocity.)
Fast Mode (Resolution 800x600)
It is a basic display mode. FAST Mode is mainly used for moving wide area when observing
specimen. Its scanning speed is slower than that of RED Mode and it is used for controlling
Stage.

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Slow Mode (Resolution 800x600)
It scans a specimen slower than Fast Mode, which enables images to be observed more
clearly.
Photo Mode (Resolution 1280x960)
It is a mode for taking photos of quality images, which takes about 1 minute. It is used
when saving images.

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2.4 Image Mode
Image button is used when saving scanned images.
When pressing image button, images are saved temporarily and displayed in small images
on the bottom of the screen, and saved automatically in the specified path at the same
time.
When using Image Mode, images are saved in the specified path in the image folder of
Option Tap, and the file name is set and saved as the saved time.
The basic saving path when shipping the product is C:\Snap Image.
2.5 Stage & Holder Information
It provides information on the current location of coordinates of Stage and information on
the kind of Holder.
Stage information
Holder information