CTI-Cryigenics 8500 User guide

CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
8500™
COMPRESSOR
(FOR USE WITH CRYO-TORR® HIGH-VACUUM
PUMPING SYSTEMS)
Installation,
Operation
and
Servicing
Instructions
M8040251
Rev.
B/1
(10/91)
Reprinted
October
1991
Copyright©
1991,
Helix
Technology
Corporation.
Printed
in
U.S.A.
-----------------------------
266 SECOND AVENUE POST OFFICE BOX
9171
WALTHAM, MA 02254-9171 (617) 622-5000

Manual
Contents
This
manual
provides
installation,
operation
and
servicing instructions
by
major
system
component
(cryopump
and
compressor)
to
simplify
getting
the
world's finest
high-vacuum
pump
into
operation
quickly
and
efficiently,
meeting
its
designed
capabilities,
Technical
Inquiries
CTI-CRYOGENICS
has
a
world
wide
system
of
customersupportcenters available
to
answer
technical
questions,
or
to
assist
you
with
installation,
operation
and
maintenance
of
your
high-vacuum
equipment
All
customer supportcenters
have
"rapid
response"
capa-
bilities providing
24-hour
technical
support.
In
the
Continental
U.S.A.
and
Canada
you
may
call
toll
free
for
assistance
24
HOURS A DAY, 7DAYS A WEEK.
U.S.
AND
CANADA
DIAL
TOLL
FREE:
1-800-FOR-GUTS
367-4887
~
CTI-CRYOGENICS
266
Second
Avenue
Waltham,
Massachusetts
02254-9171,
U.S.A.
Telephone
(617)
622-5000
Telecopier/Fax
(617)
622-5222
Western
CTI-CRYOGENICS
3350
Montgomery
Drive
Santa
Clara,
California
95054,
U.S.A.
Telephone
(408)
727-8077
Telecopier/Fax
(
408)
988-6630
EUROPE
Germany
CTI-CRYOGENICS,
GmbH
Haasstrasse
15
D-6100
Darmstadt
Germany
Tel:
49-6151-86377
Fax:
49-6151-891635
ii
Eralli:ll
CTI-CRYOGENICS,
SA
4,
rue
Rene
Raze!
Saclay
F
-91892
ORSAY
CEDEX
France
Tel:
311-6985-3900
Fax:
311-6985-3725
England
CTl-CRYOGENICS,Ltd.
Unit 4,
Avenue
Two
Station
Lane
Industrial Estate
Wilney,
Oxford
OX8
6YD
England
Tel:
44-993-776436
Fax:
44-993-772067
FAR
EAST
lap.an
Daido
Sanso
K.K.
6-40
2-cho,
Chikko
Shinmachi
Sakai
City
Osaka
Pref.
592JAPAN
Tel:
81-722-44-3011
Fax:
81-722-44-8135
Kllmi
Zeus
Company,
Ltd.
4th
Floor,
Zeus
Bldg.,
512-8,
Dogok-Dong,
Sucho-ku
Seoul,
Korea
Mailing
Address:
Youngdong
P.O.
Box
992
Seoul,
Korea
Tel:
82-2-577-3181/6
Fax:
82-2-576-3199
Your
high-vacuum
equipment
is
designed
and
manufactured
to
ensure
a
minimum
of
maintenance.
However,
should
your
unit
require
service
or
if
you
need
technical
assistance, contact
the
nearest
customer
support
center.
Have
the
following
information
available
when
placing
the
call
so
we
may
assist
you
quickly.
• Equipment
Type
•
Product
Application
o Product Serial
No.
o
Hours
of
Operation
e Product Part
No.
o
Specific
Problem
Area

iii/iv
CTI-CRYOGENICS
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HELIX TECHNOLOGY CORPORATION
Contents
Section
1.
Introduction
2.
Inspection
3.
lnstallatlon
4.
Maintenance Procedures
Appendices
A.
Troubleshooting Procedures
B.
Electrical Schematicfor
8500
Compressor
C.
Components
In
the Electrical
Control Module
of
8500
Compressor
D.
8500
Compressor
Flow Diagram
E.
MultlpleCryopump Installation
F.
Remote Cryo-Torr High-Vacuum
Pump Operation Using
8500
Compressor


)
Illustrations
1.1
8500™
Compressor
. . . . • . . • . . • . • • .
1-4
3.1
Block
diagram
for
8500
Compressor
installation.
. • • . • . . . . . . •
3-1
3.2
Removing
compressor
pump
shipping
supports
. , , , , , , , , , , , , , , ,
3-2
3.3
Stripping
compressor
input-power
cable
insulation
. , , , , ,
..
, , , , , , , , ,
3-2
3.4
Input
power
cable
receptacle
plug
• • . . . • . • . . . • • • . • •
3-3
3.5
Wiring
diagram
for
compressor-
receptacle
plug.
. • . • . . • . . . . . • • . • .
3-3
3.6
Preparing
the
8500
Compressor
control
module
••..•.•..•.
3-5
3.7
8500
Compressor
installation
....•.••
, • . • • . . • . • • .
3-7
4.1
Disconnecting
the
adsorber
self-sealing
couplings
••
, , . . • . , , . . . .
4-1
4.2
Connecting
self-sealing
couplings
• , , , . . •
4-2
B.l Electrical
schematic
for
8500
Compressor,
P/N
8031351.
••.•.••.•..
B-3
C.
l
Components
in
the
electrical
control
module
of
8500
Compressor.
,
.••••..•.
C-3
D.
l
Flow
diagram
of
8500
Compressor
. . . • . . . . • . . . . . • . • . .
D-1
E.
l
Typical
multiple
cryopump
installation
with
8500
Compressor
• . . . • . . . . . . • •
E-1
F.
l
Remote
high-vacuum
pump
switching
schematic.
. . . . . . . • . • . • . .
F-2
v/vi
CTI-CRYOGENICS
HEifX--fEcHNOLciGY"
·c-OR"PORATJON
Tables
1.1
8500™
Compressor
Specifications. , , , , , ,
1-2
A.
l
Compressor
Troubleshooting
Procedures
•.....•.•.••.•..•...
A-2


)
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Section 1:
Introduction
1.1
·
General.
. . . . . . . . . . . • • • • • • • • • • • • • • .
1-1
1.2
Installation,
Operation
and
Servicing
Instructions.
. . . . . . . . . . . . . . . . . .
1-1
1.1
General
The
manual
provides
instructions
for
installing,
oper-
ating
and
servicing
the
8500™
Compressor.
If
you
are
installing
or
operating
a
Cryo-Torr®
High-Vacuum
System
you
should
also
have
available
the
high-vacuum
manual
that
applies
to
your
particular
system:
M8040240:
Cryo-Torr
100,
7,
8
and
SF
High·
Vacuum
Pumps
M8040252:
Cryo-Torr
IO
High-Vacuum
Pump
1.2
Installation,
Operation
and
Servicing
Instructions
Installation,
Operation
and
Servicing
Instructions
for
your
8500
Compressor
provide
easily
accessible
inform-
ation.
All
personnel
with
installation,
operation,
and
servicing
responsibilities
should
become
familiar
with
the
contents
of
these
instructions
to
ensure
high
quality,
safe,
reliable
performance.
)
M8040259:
Cryo·
Torr
400
High·
Vacuum
Pump
M8040266:
Cryo-Torr
500
High-Vacuum
Pump
The
manuals
for
a
system
cover
two
basic
components:
the
high-vacuum
pump
and
the
compressor.
Each
manual
outlines
the
details
necessary
for
installation,
operation
and
servicing
of
that
component.
A
manual
is
shipped
with
each
system
component
(high-vacuum
pump
and
compressor).
When
you
purchase
a
system,
you
will
receive
the
two
manuals
necessary
for
system
installation,
plus
a
loose-
leaf
binder
with
index
tab
separators,
allowing
you
to
compile
a
complete
indexed
notebook.
1-1

CTI-CRYOGENICS
-- --
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_,,
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~~!:l_~_!~<:!j_NQ_~9~'.!:'_
CQ~£Q_Rp_T_~/\i
Table
1.1
8500™ Compressor Specifications
Dimensions
COMPRESSOR
DIMENSION
LOCATION
INCHES(MM)
A 19.52max.
(496mm)
B 21.50max.
(546mm)
A I• B
·I
r
CB
CB
c
c 24.24max.
(616mm)
D 2.30 l
0
(55mm)
FRONT
VIEW
r
SIDE
VIEW
Weight
340lbs (154 kg) approximate
Weight
(shipping)
445 lbs (202 kg) approximate
Powerrequirements (steady-state
conditions)
MAXIMUM
FULL
PHASE
LOAD
OPERATING
RUN
CURRENT
VOLTAGE
RANGE
CURRENT
COMPRESSOR
VOLTS
HZ
PHASE (AMPS) (VOLTS) (AMPS)
8500, PartNo. 208/230
60
3 22 198-250 26
80313480001 200 50 3 22 190-230 26
8500, Part No. 460 60 3
10
395-506
13
80313480002 380 50 3 12 342-457 16
1-2

)
)
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Table
1.1
8500™
Compressor
Specifications
(Cont.)
Power
consumption
5kw,
nominal
operating
power,
5.75
kW
maximum
Nominal
power
factor
0.8:
7
.6
kVA
max.
Compressor
input-power
cable
(customer
supplied)
Recommended
type
S0-4
conductor,
600V,
neoprene
jacket
and
10-gauge
wire
Install
per
Figure
B.1,
electrical
schematic
diagram,
ensuring
compliance
with
all
national,
state
and
local
standards.
Helium
pressure
Static:
195
-
205
psig
(1345
-
1415
kPa)
at
70
to
80"F
(21to21'C)
Return:
normal
operation:
75-85
psig
(517-590
kPa)
at
operating
temperature
Ambient
operating
temperature
range
50
to
IOO"F
(10
to
38°C)
Interface
Cold-Head
power
receptacles
(3):
Mates
with
plugs
on
cold-head
power
cables.
Compressor
input-power
receptacle:
Mates
with
Hubbel
twist
lock
plug
No.
2723
(for
Model
GOO!).
For
Model
8500
Model
G002,
Part
No.
2433.
Gas-supply
connector:
1/2-inch
self-sealing
coupling
Gas-return
connector:
1/2-inch
self-sealing
coupling
Remote
control
receptacle
(24
VAC):
mates
with
PS
connector
P/N
MS3106A-14,
supplied
by
CTI-CRYOGENICS.
Adsorber
service
schedule
Replace
every
three
years.
Cooling
water
requirements
70"F
water
supply,
2.5
gpm,
14
psid
(pressure
drop:
water
inlet
to
water
outlet).
The
pressure
value
does
not
consider
discharge
back-pressure
conditions.
Maximum/minimum
water
requirements
Maximum
outlet
temperature
90"F
(32°C)
Minimum
inlet
temperature
40"F
(
4°C)
Nominal
inlet
pressure,
maximum
100
psig
This
compressor
has
been
designed
to
operate
with
water
having
a
pH
value
of
6.0
to
8.0
and
a
calcium
carbonate
concentration
of
less
than
75
parts
per
million
(typical
municipal
drinking
water
quality).
For
applications
of
lower
pH
or
greater
hardness,
water
conditioning
may
be
necessary.
1-3

Legend
I.
Power ONindicator lamp.
2.
Oil sightglass.
3.
Cooling wateroutput.
4. Cooling water input.
5.
Helium gas-return connector self-sealing coupling,
6.
Helium gas-supply connector self-sealing coupling.
7.
Compressor overload reset.
8. Voltage selector switch (S2).
9.
Voltage selector switch (S3).
10. Elapsed-time meter (ETM).
11. Cold-headpowercircuitbreakers (CB2 andCB3).
12, Cold-head powercablereceptacles (J2,
J3
andJ4).
13. Input power cable receptacle (Jl).
14. Helium gas chargefitting and valve.
15. Helium return pressuregauge.
16.
Safetyinterlock.
17. System powerON/OFF switch circuit breaker (CB
1).
18. System remote control receptacle
(JS).
(Jumper
plug installed)
1-4
FRONT
PANEL
REAR
PANEL
CTl-CRY(XjENICS
-----------
HELIX TECHNOLOGY CORPORATION
--
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Figure
1.1
8500™
Compressor

)
0·1-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Section
2:
Inspection
2.1
Packaging
of
the
System.
2.2
The
Compressor
. . . . . .
2.1
Packaging
of
the
System
The
Cryo-Torr
High-Vacuum
Pump
System
is
packaged
in
three
separate
cartons.
Listed
below
are
the
contents
of
each
carton,
depending
upon
which
cryopump
is
included
in
the
system.
Note
that
an
Installation,
Operation
and
Servicing
Manual
is
included
in
the
carton
for
the
high-vacuum
pump
and
for
the
compressor;
each
manual
covers
the
component
packaged
in
that
carton.
• •
• • • • • • • •
•
2-1
2·1
When
installing
a
Cryo-Torr
High-Vacuum
Pump
System,
CTI
recommends
that
as
you
unpack
a
component,
you
perform
an
inspection
and
the
necessary
tasks
for
system
installation
for
the
component
according
to
the
manual
included
with
the
component.
Final
system
installation
and
operation
will
be
performed
following
procedures
in
the
high-vacuum
pump
manual
that
applies
to
your
particular
system.
CRYO-TORR
lllGH-VACUUM
PUMP
SYSTEM
CARTON
MANUAL
LABEL
SYSTEM
COMPONENT
INCLUDED
Cryo-Torr®
Cryo-Torr
100,
7,
8
and
SF
Cryopump
M8040240
Cryo-Torr®
Cryo-Torr
10
Cryopump
M80402S2
Cryo-Torr®
Cryo-Torr
400
Cryopump
M8040259
Cryo-Torr®
Cryo-Torr
500
Cryopump
M8040266
Compressor
8500™Compressor
M8040251
Accessories
Installation
and
Scheduled
Maintenance
Tool
None
Kit
and
Accessories,
PIN
80320400009
for
0001
compressor
or
P/N
803204000!0
for
G002
compressor.
2.2
The
Compressor
On
receipt,
remove
the
8500
Compressor
from
its
shipping
carton
and
inspect
the
compressor
for
evidence
of
damage
as
described
in
this
Section.
1.
Unpackage
and
remove
the
compressor
from
its
shipping
carton.
2.
Check
the
carton
contents.
It
should
contain:
a.
8500
Compressor.
2-1/2-2
b.
Two
barbed
fittings
for
compressor
cooling
water
connections.
c.
Compressor
remote
start
connector.
d.
Input
power
connector.
e.
Oil
prime
manifold,
PIN
8018129.
f.
8500
Compressor
Manual,
P/N
M8040251.


)
)
CTl-CRYOCiENICS
HELIX TECHNOLOGY CORPORATION
Section 3:
Installation
3.1
CompressorInstallation . . • . . . . . • • • • • • . • •
3-2
3.2
Connecting the Compressor to the Cryopump. • • .
3-6
3.3
Electrical Connection
of
Compressor. . • • . . • • . •
3-6
3.4
Multipump Installation
......•...•...••..
3-7
PREPARING
THE
COMPRESSOR
INSTALLING
THE
COMPRESSOR
CRYOPUMP
CONNECTION
TO
COMPRESSOR
SECTJQN
•
REMOVING
COMPRESSOR
PUMP
3.1
SHIPPING
SUPPORTS
e
SETTING
VOLTAGE
TAP
SWITCH(ES)
•
COOLING
WATER:
-
CONNECTIONS
TO
COMPRESSOR
-
PH
FACTORS
AND
CONSERVATION
-
FLOW
AND
PRESSURE
REQUIREMENTS
-
TEMPERATURERJSE
•
OIL
CIRCUIT
STABILIZATION
•
MAKING
HELIUM
GAS
RETURN
AND
3.2/3.3
SUPPLY
CONNECTIONS
e
VERIFYING
HELIUM
STATIC
PRESSURE
•
MAKING
ELECTRICAL
CONNECTIONS
Figure
3.1
Blockdiagram for8500 Compressor installation
3-1

3.1
Compressor
Installation
Installation of
your
compressor
requires
no
special
tools
other
than
those
supplied
in
the
Installation
and
Scheduled
Maintenance
Tool
Kit.
Preparing
the
Compressor
I.
After
removing
the
compressor
front
panel, refer
to
Figure
3.2
and
remove
the
front
two
compressor
pump
shipping
supports.
a.
Remove
the
front
two
nuts
and
red
flat
washers
that
secure
the
compressor
pump
tightly
in
position.
Note:
Retain
the
two
red
flat
washers
for
use
during
shipment.
b.
Remove
the
two
rubber
grommets
that
are
in
the
package
attached
to
the
compressor:
install
them,
flat
side
up,
onto
the
front
two
mounting
posts.
c.
Reinstall
the
two
nuts
and
screw
them
down
flush
with
the
tops
of
the
mounting
posts.
d.
Replace
the
compressor
front panel.
HEX-HEAD
NUT
Figure
3.2
Removing
compressor
pump
shipping
supports
3-2
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
------
- -
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-
---
---
-
Assembling
the
Compressor
Input-Power
Cable
ACAUTION
Use
round
cable
(diameter
0.595"
to
1.50")
with
the
CTI-supplied
compressor
receptacle
plug.
Do
not
tin
the
conductor
leads.
Assemble
the
compressor
input-power
cable
using
the
CTI-supplied
compressor
receptacle
plug
and
a
600-volt
power
cable
that
has
aS0-4
conductor,
600-volt rating
neoprene
jacket
and
IO-gauge
wire
as
follows.
I. Prepare
the
input
power
cable
by
stripping
wires
and
jacketof
the
cable
as
shown
in
Figure
3.3.
INSULATING
JACKET\
L
CONDUCTOR
LEADS
Figure
3.3
Stripping
compressor
input-power
cable
insulation
2.
Disassemble
the
receptacle
plug.
See
Figure
3.4.
a.
Loosen
the
two
assembly
screws
(1)
securing
the
receptacle
plug
face
(2)
to
the
cover
(3)
until
plug
face
can
be
removed
from
cover.
b.
Open
cord
clamp
(5)
by
loosening
the
two
clamp
screws
(4)
securing
the
clamp
to
the
cover.
Note:
If
you
are
using
cable
with
a
diameter
greater
than
0.895
inch,
remove
the
auxiliary
insert (6)
from
the
cover.
c.
Insert
the
stripped
end
of
the
power
cable into
the
cover
opening
by
starting
from
clamp
end
(6)
until
the
stripped
conductor
ends
are
exposed.
d.
Loosen
and
back
off
all
terminal
screws
on
receptacle
plug
face
(2).

)
"X"
TERMINAL
7
1.
Assembly
Screw
(2)
2. PlugFace
3.
Cover
4.
Clamp
Screw
(2)
KEYWAY
GROUND
TERMINAL
{GREEN
SCREW!
5.
Cord
Clamp
6
6.
Auxiliary
Insert
7.
Key
8.
Tenninal
Screw
(4)
CTI-CRYOGENICS
-_,,,,,,_ - - -
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---
___
,,__
- - -------
HELIX TECHNOLOGY CORPORATION
Figure
3.4
Input
power
cable
receptacle
plug
e.
Insert all
conductors
into
their
proper
wire
entrance
holes
on
receptacle
plug
face.
See
Figure
3.5.
Check
that
there
are
no
bare
conductors
exposed.
Tighten tenninal
screws
to
9-12
in.-lbs
torque,
PHASE
A x
PHASE
B y
PHASE
C z
GROUNO
G
~
COMPRESSOR-
RECEPTACLE
PLUG
{CTI
SUPPLIED)
Figure
3.5
Wiring
diagram
for
compressor-receptacle
plug
3-3
3.
Assemble
the
receptacle
plug
by
sliding
the
cover
over
the
wire
assembly
noting
key
(7).
Align
the
key
on
the
cover
to
the
keyway
on
the
plug
face
and
tighten
the
two
assembly
screws
(1)
to
secure
the
cover
and
plug
face.
Alternately
tighten
the
clamp
screws
(4)
to
8-10
in.-lbs
torque.
AWARNING
Insure
that
the
ground
wire
is returned
to
asuitable
ground
in
a
non-interrupting
manner.
Do
not
connect
the
compressor
to
the
powersource
at
this
time.
All
of
the
preparation
must
be
completed
and
all
the
panels
reinstalledbefore electtically
connecting
the
compressor.

Electrical
preparation
of
compressor
control
module
1.
Refer
to
Table
1.1,page 1-2,forelectricalpower
requirements.
Then,
using
a
voltmeter,
measure
the
phase-to-phase voltage
from
the
power
source.
2.
Prepare
the
compressor
voltage
selector
switch(s)
S2
and
S3
as
required
in
accordance
with
Figure
3.6.
Cooling
Water:
Preparation
If
flexible
water
hose
connections
are
used,
install
the
barbed
fittings
supplied
with
the
compressor
on
the
input
and
output
connections:
1.
Apply
a lightcoating ofstandard
plumbing
thread
sealant
on
the
barbed
fitting
threads.
2.
Tighten
fittings
on
1/2-inch
FPT
input
and
output
connections.
DO
NOT
OVERTIGHTEN.
3.
Connect flexible
hoses
to
the
fittings
and
secure
with
hose
clamps.
If
hard
piping
is
desired,
apply
alight coating of
plumbing
thread
sealant
on
threads
and
install
the
water
lines
directly
onto
the
compressor
1/2-inch
FPT
input
and
output
connections.
DO
NOT
OVERTIGHTEN.
A
CAUTION
Check
water
connections
for
leaks.
3-4
CTl-CRYCXJENICS
HELIX TECHNOLOGY CORPORATION
--
-·-----
---
--
-------------
-
---
--------
Cooling
Water:
General
Considerations
For
Your
Information
••
Adjust
your
water
flow
to
maintain
an
optimum
discharge
water
temperature
of
80°F
with
a
minimum
input
pressure
of7
psi.
For
detailed
cooling
water
requirements,
see
Table
1.1,
page
1-3.
Cooling
water
having
a
pH
value
of6.0
to
8.0
and
acalcium-carbonate concentration of
less
than
75
ppm,
the
quality of
typical
municipal
drinking
water,
is
acceptable.
If
the
cooling
water
has
a
pH
value
lower
than
6.0 ora calcium-carbonate concentration
higher
than
75
ppm,
water
conditioning
may
be
required.
1.
The
cooling
water
must
meet
the
following
flow,
pressure,
and
temperature
requirements.
•
Maximum
outlet
temperature
90°F
(32°C).
•
Minimum
inlet
temperature
40°F
(4°C).
•
Maximum
inlet
pressure
100
psig.
A
system
with
nominal
cooling
water
conditions
would
have
a 70°F
water
supply,
2.5
gpm,
14
psid
(pressure
drop:
water
inlet or
water
outlet).
The
pressure
value
does
not
consider
discharge
back-
pressure
conditions.
2.
To
conserve
water
adjust
the
water
flow
to
maintain
80°F
discharge
temperature. Shutoff
cooling
water
when
the
compressor
is
not
running.
A
CAUTION
If
cooling
water
below
40°F
(4°C)
is
allowed
torun
through
the
compressor
while
the
compressor
is
not
operating,
the
compressor
oil
will
change
viscosity
and
thicken,
causing
the
compressor
to
overheat
and
shut
off
at
startup.
In
this
event,
repeatedly restart
the
compressor
and
allow
it
to
run
until
is
has
shut off
several
times.
The
oil
temperature
will
rise
and
thereby
allow
continuous
compressor
operation.

VOLTAGE
SELECTOR
SWITCH
(S2)
VOLTAGE
I []jJ 2
VOLTAGE
SELECTOR
3 4
SWITCH
lS3l-~-----tDiil
SYSTEM
REMOTE
CONTROL
RECEPTACLE
(J5)
COMPRESSOR
CONFIGURATION
P/N
80313480001
208/230
VAC,
50/60
Hz
P/N
80313480002
31!0
V
AC,
50
Hz
460
V
AC,
60
Hz
*Factory Setting
e
REMOTE
FREQUENCY
(Hz)
50
60
50
60
ELAPSED-TIME
METER
(ETM)
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
COLO-HEAD
POWER
CIRCUIT
BREAKERS
(CB2
ANO
CB3l
:
=:-_;co~LO~H~EA~D
~--rsYSTEM
POWER
ON/OFF
SWITCH
8
0
1
COLDHEAD
CIRCUIT
BREAKER
(CB
ll
SYSTEM
POWER
LINE
VOLTAGE
190-210
210-230
198-230
230-250
342-400
400-457
395-460
460-506
/J?.;~'\--::--'T---t-COLO-HEAO
3
SETTINGS
S2 S3
2 3
2• 4•
2 3
2•
4*
2 3
2*
4*
2 3
2*
4*
POWER
CABLE
RECEPTACLES
(J2, J3
AND
J4l
COLD-HEAD
VOLTAGE
137-153
131-144
145-169
144-158
126-147
125-143
145-169
144-158
Figure
3.6
Preparing
the
8500
Compressor
control
module
3-5

3.
Drain
and
purge
water
from
the
compressor
before
shipping
it
back
to
the
factory
or
subjecting it
to
freezing
conditions.
Purge
water
from
the
com-
pressor
by
blowing
compressed
air,
regulated
to
30
to
40
psig
(200
to
275
kPa)
into
the
compressor
output
connection
and
allowing
water
to
exit
from
the
water
input
connection.
Oil
Circuit Stablllzatlon
I.
Check
to
insure
that
the
cover
and
all
panels
are
properly
installed
on
the
compressor.
2.
With
the
system
power
ON/OFF
switch
in
the
OFF
position, connect
the
input-power
cable
to
the
power
source.
If
necessary,
refer
to
Table
1.1,
page
1-2,
for
electrical
requirements.
3.
Place
the
system
power
switch
to
the
ON
position
and
allow
the
compressor
to
run
15
minutes
to
stabilize
the
oil
circuit.
If
the
compressor
shuts
down,
oil
system
priming
may
be
necessary.
Refer
to
Section 4.2.5,
page
4-5,
for
priming
procedures.
3.2
Connecting
the
Compressor
to
the
Cryopump
For
Your
Information··
If
your
application
requires
the
use
of
multiple
com-
pressors
on
a single
gas
manifold,
you
must
install
an
external
check
valve
on
each
compressor.
Order
CTI
Kit
No.
8080275K004
and
contact
the
Product
Service
Department
for
installation
guidance
on
manifolding
compressors.
Make
the
connections
between
the
cryopump
and
compressor.
See
Figure
3.7.
1.
Remove
all
dust
plugs
and
caps
from
the
supply
fittings
and
return
lines,
compressor,
and
cryopump
cold
head.
Check
all
fittings.
2.
Connect
the
helium-gas
return
line
from
the
gas-return
connector
on
the
rear
of
the
compressor
to
the
gas-
return
connector
on
the
cryopump
cold
head.
3.
Connect
the
helium-gas
supply
line
from
the
gas-supply
connector
on
the
rear
of
the
compressor
to
the
gas-
supply
connector
on
the
cryopump
cold
head.
4.
Attach
the
supply
and
return
line identification
decals
(CTI
supplied)
to
their respective
connecting
piping
ends.
3-6
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Verify
proper
helium
supply static pressure
by
con-
firming
that
the
helium
pressure
gauge
reads
195
-
205
psig
(1345
-
1415
kPa),
in
an
ambient
temperature
range
of
50
to
lOO°F
(10
to
38°C).
If
the
indicated
pressure
is
higher
than
205
psig
(1415
kPa),
reduce
the
pressure
as
follows:
I.
Remove
the
flare
cap
from
the
gas
charge
fitting
located
on
the
rear of
the
compressor.
2.
Open
the
gas
charge
valve
very
slowly.
Allow
a
slight
amount
of
helium
gas
to
escape
until
the
helium
pressure
gauge
reads
200
psig
(1380
kPa).
3.
Close
the
gas
charge
valve
and
reinslall
the
flare
cap.
If
the
indicated
pressure
is
lower
than
195
psig
(1345
kPa),
add
helium
gas
as
described
in
Section
4.2.1,
page4-3.
3.3
Electrical
Connection
of
Compressor
AWARNING
The
system
power
switch
on
the
rear of
the
com-
pressor
must
be
in
the
OFF
position
before
making
any
and
all
electrical
connections.
1.
Connect
the
power
cable
to
the
rear panel of
the
compressor
and
the
other end
to
the
electrical
power
connector
on
the
cryopump.
2.
Plug
the
compressor
input
power
cable
into
the
power
source.
3.
Turn
the
system
power
switch
on
the
rear of
the
compressor
to
the
ON
position.
4.
If
the
compressor
does
not
start
the
most
likely
cause
is
that
the
main
power
input
phasing
is
incorrect.
To
correct
the
phasing,
interchange
any
two
of
the
three
phase
wires
at
the
compressor
input
power
receptacle
plug.
See
Figure
3.5,
page
3-3.

)
3.4
Multipump
Installation
Your
8500
Compressor
can
be
connected
to
more
than
one
high-vacuum
pump
at a
time.
For
example,
three
Cryo-Torr
8
vacuum
pumps
can
be
connected
to
a
single
8500
Compressor.
For
detailed
instructions
on
multiple
cryopump
installation,
refer
to
Appendix
E.
ELECTRICAL
:f1_..t
POWER
~
SOURCE
INPUT
POWER
CABLE
(CUSTOMER
SUPPLIED)
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
If
a
remote
switching
system
is
desired,
refer
to
Appendix
F
for
fabrication
ofa
remote
switching
circuiL
Remove
the
supplied
jumper
plug
connected
to
the
compressor
remote
connector
J5
and
connect
the
switching
circuit
to
J5
connector.
If
the
remote
switching
circuit
is
to
be
discontinued,
then
simply
disconnect
the
remote
switching
circuit
from
the
J5
connector
and
reinstall
the
jumper
plug.
Note:
The
compressor
will
not
operate
if
the
jumper
plug
is
not
reinstalled.
ROUGHING
VALVE
USER'S
VACUUM
CHAMBER
PURGE
VALVE
1 "'-""'_,l
l_Jfv'!Ji:.J:'U
Hl-VAC
VALVE
CRYOPUMP
HELIUM-
GAS
SUPPLY
UNE
...
(TO
COLO
HEAD)
-===,;?'
8500
COMPRESSOR
ELECTRICAL
POWER
FROM
COMPRESSOR
Figure
3.7
8500
Compressor
installation
3-7(3-8

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