EBARA ETC76 User manual

Document No. ME_CT_ETC76_(CN)_R0
Instructions Manual
Controller
ETC76
Be sure to read and understand all warnings in this manual before
using the product.
Keep this manual readily available for reference.
EBARA Corporation

Document No. ME_CT_ETC76_(CN)_R0
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Safety
This section provides important safety information. Be sure to read this section
thoroughly before using the compound molecular pump EBT70F-20 and the
controller ETC76, and follow all instructions.
Note that the scope of the cautions and warnings in this manual are limited to the
range of our expectation. For your safety, follow all general rules (laws and
regulations) in addition to the instructions provided herein.
EBARA reserves the right to make changes to the product specifications without
notice, so as to maintain and improve the quality of the product. For this reason,
the contents of this manual may not match exactly with the actual product.
Symbols and Definitions
The following symbols and definitions are used for the warnings and cautions in
this manual.
Warning
Important information for preventing serious bodily injuries.
Failure to follow instructions labeled with this symbol may
result in death or serious injury.
Caution
Important information for safe use of the controller.
Failure to follow instructions labeled with this symbol may
result in injury and/or property damage.
Information
Information that may be useful when using the controller.

Document No. ME_CT_ETC76_(CN)_R0
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Warning
Instructions Manual
This instructions manual (hereinafter, "this manual")
provides safety notes, operation procedures, and
maintenance and inspection procedures for the controller.
All personnel must read and understand the contents of this
manual, and handle the controller appropriately.
Warning
Input power
Input power voltage is AC100-230V.
Supply the power excluding noise, surge and voltage
fluctuation to the controller.
Warning
Combination of the controller and the pump.
Match the controller with the correct pump.
The nameplate is stuck on the side panel of the controller at
shipping from our company.
Controller model
⇒
Pump model
ETC76
⇒
EBT70F-20
When requesting our company for repair or making other
inquiries on the product, please do not forget to tell us the
serial number.
Warning
Earth
Be sure to connect the earth line of the INPUT connector to
EARTH/GROUND.
Caution
Connections of cables
Do not disconnect the cables or connectors of the
controller in operation.
Caution
Disassembly and modification
Do not disassemble or modify the controller, the controller
and the cable.
It may result in failures or accidents and fails safety.
Warning
Electric shock
Do not touch the inside of the alive controller.
Do not touch the inside of the controller within 5 minutes
after turning the input power off, or you may get electric
shock.

Document No. ME_CT_ETC76_(CN)_R0
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Warning
Ambient temperature and humidity
Do not use the controller in an area of high temperature
or high humidity
Warning
Water drop
Do not use the controller where water drips.
Caution
Dust, flammable gas and corrosive gas
Do not use the controller in an area exposed to dust,
flammable gas or corrosive gas.
Caution
Magnetic field and electric field
Do not use the controller in a strong magnetic field or
electric field.
Caution
Radiation
Do not use the controller in an area exposed to radiation.
Caution
Vibration
Do not use in the controller an area with a lot of
vibration.
Caution
Space
Be sure to provide sufficient space around of open its
top, side, and back.

Document No. ME_CT_ETC76_(CN)_R0
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Warranty and Liability
EBARA guarantees the quality of its pumps, controllers, and their accessories as
described in the included "Standard Warranty Certificate". Note, however, that
handling the pump in manners not described in this manual will void all warranty.
Use of the pumps and controllers under atypical conditions without prior consent
from EBARA may also void the warranty.

Document No. ME_CT_ETC76_(CN)_R0
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Contents
Page
1. Characteristics ------------------------------------------------------------------------- 6
2. Unpacking and carrying ------------------------------------------------------------- 6
2-1. Unpacking
2-2. Carrying
3. Installation ------------------------------------------------------------------------------- 7
3-1. Dimensions
3-2. Name of pump parts
3-3. Warning label and name plate
3-4. Mounting
4. Cable connection -------------------------------------------------------------------- 11
4-1. Power input connector connection
4-2. Motor cable connection
4-3. Fan cable connection
4-4. Remote connector connection
5. Operation ------------------------------------------------------------------------------ 14
5-1. Pre-operation notes
5-2. Power-on
5-3. Local operation
5-4. Remote operation
6. Protection ----------------------------------------------------------------------------- 16
7. Emergency stop ---------------------------------------------------------------------- 18
8. Scrapping ----------------------------------------------------------------------------- 18
9. Specifications ----------------------------------------------------------------------- 19

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1. Characteristics
1) This controller is a high-frequency inverter to drive the pump. The controller
controls motor current to a fixed value and set the output voltage proportional to
output frequency. Thus the controller gives full play to its ability and can start the
pump in a short time.
2) The pump and controller is conformed to regulations as follows.
EMC directive
[Emission]
EN61000-6-4:2001
EN55011:1998+A1:1999+A2:2002(Group1 Class A)
[Immunity]
EN61000-6-2:2005
EN61000-4-2:1995+A1:1998+A2:2001
EN61000-4-3:2002+A1:2002
EN61000-4-4:2004
EN61000-4-5:1995+A1:2001
EN61000-4-6:1996+A1:2001
EN61000-4-8:1993+A1:2001
EN61000-4-11:2004
2. Unpacking and carrying
2-1. Unpacking
Check the following items when unpacked.
A: Unpacking
Table 1 lists the controller weight.
Table 1 Controller weight
Controller model
Weight
ETC76
Max. 2.4 kg［6 lb］
B: Damage to the contents
Should any of the package contents be damaged or defective, contact EBARA prior
to use.

Document No. ME_CT_ETC76_(CN)_R0
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C: Accessories
The standard package includes following accessories. Should any item be missing,
contact EBARA .
(1) REMOTE connector 1 set
(2) Power Input connector 1 set
(3) Instructions manual 1 copy
2-2. Carrying
When carrying the controller, or when mounting/dismounting the controller to/from the
equipment, handle the controller with care.
Caution
Avoid applying a shock onto the controller.
3. Installation
3-1. Dimensions
The external view and the dimensions of the controller are as illustrated below.
Figure 1 Controller external view and dimensions
Caution
When fixing the controller with the hole of the rubber stand
attachment, use M3 screws of 5mm or shorter.
ETC76 EBARA Corporation

Document No. ME_CT_ETC76_(CN)_R0
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3-2. Name of pump parts
The controller parts are named as illustrated below.
①
[START] switch
Starts the pump during local operation.
②
[STOP/RESET] switch
Stops the pump during local operation, and reset all
protections during local operation.
③
[LOCAL/REMOTE] select
switch
Selects between local operation and remote
operation.
④
Status display LEDs
Indicates the operation status of the pump.
⑤
MOTOR connector
Connect the motor cable to this connector.
⑥
FAN connector
Connect the fan cable to this connector.
⑦
REMOTE connector
Connect the remote cable to this connector.
⑧
INPUT connector
Connect the power input cable to this connector.
⑨
FAN
When the controller is powered on, the fan will rotate
to provide cooling.
⑩
FUSE
(model: ET 3.15A / SOC x2)
When the overcurrent occurs, the circuit in the
controller is protected.（When shipping, a spare fuse
is not attached.）
Figure 2 Name of pump parts
ETC76 EBARA Corporation

Document No. ME_CT_ETC76_(CN)_R0
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3-3. Warning label and name plate
Number
Example
Content
①
Main name
plate
Indicates the controller's model name,
serial number, date of manufacture,
input voltage, SCCR, maximum power
consumption.
②
Warning
label
READ INSTRUCTION MANUAL
CAREFULLY PRIOR TO OPERATION
Failure to follow instruction may result in
serious accidents, causing death, serious
injury, and/or property damage.
③
Warning
label
HAZARDOUS VOLTAGE INSIDE
Can shock, born or cause death.
Turn power off before removing the cover.
④
Warning
label
DOING SO MAY RESULT IN PUMP OR
CONTROLLER FAILURE.
Use the pump and controller in a correct
combination.
Figure 3 Warning label and name plate
ETC76 EBARA Corporation
ETC
EBARA Corporation