EBARA ETC76 User manual

Document No. ME_CT_ETC76_(CN)_R0
Instructions Manual
Controller
ETC76
Be sure to read and understand all warnings in this manual before
using the product.
Keep this manual readily available for reference.
EBARA Corporation

Document No. ME_CT_ETC76_(CN)_R0
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Safety
This section provides important safety information. Be sure to read this section
thoroughly before using the compound molecular pump EBT70F-20 and the
controller ETC76, and follow all instructions.
Note that the scope of the cautions and warnings in this manual are limited to the
range of our expectation. For your safety, follow all general rules (laws and
regulations) in addition to the instructions provided herein.
EBARA reserves the right to make changes to the product specifications without
notice, so as to maintain and improve the quality of the product. For this reason,
the contents of this manual may not match exactly with the actual product.
Symbols and Definitions
The following symbols and definitions are used for the warnings and cautions in
this manual.
Warning
Important information for preventing serious bodily injuries.
Failure to follow instructions labeled with this symbol may
result in death or serious injury.
Caution
Important information for safe use of the controller.
Failure to follow instructions labeled with this symbol may
result in injury and/or property damage.
Information
Information that may be useful when using the controller.

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Warning
Instructions Manual
This instructions manual (hereinafter, "this manual")
provides safety notes, operation procedures, and
maintenance and inspection procedures for the controller.
All personnel must read and understand the contents of this
manual, and handle the controller appropriately.
Warning
Input power
Input power voltage is AC100-230V.
Supply the power excluding noise, surge and voltage
fluctuation to the controller.
Warning
Combination of the controller and the pump.
Match the controller with the correct pump.
The nameplate is stuck on the side panel of the controller at
shipping from our company.
Controller model
⇒
Pump model
ETC76
⇒
EBT70F-20
When requesting our company for repair or making other
inquiries on the product, please do not forget to tell us the
serial number.
Warning
Earth
Be sure to connect the earth line of the INPUT connector to
EARTH/GROUND.
Caution
Connections of cables
Do not disconnect the cables or connectors of the
controller in operation.
Caution
Disassembly and modification
Do not disassemble or modify the controller, the controller
and the cable.
It may result in failures or accidents and fails safety.
Warning
Electric shock
Do not touch the inside of the alive controller.
Do not touch the inside of the controller within 5 minutes
after turning the input power off, or you may get electric
shock.

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Warning
Ambient temperature and humidity
Do not use the controller in an area of high temperature
or high humidity
Warning
Water drop
Do not use the controller where water drips.
Caution
Dust, flammable gas and corrosive gas
Do not use the controller in an area exposed to dust,
flammable gas or corrosive gas.
Caution
Magnetic field and electric field
Do not use the controller in a strong magnetic field or
electric field.
Caution
Radiation
Do not use the controller in an area exposed to radiation.
Caution
Vibration
Do not use in the controller an area with a lot of
vibration.
Caution
Space
Be sure to provide sufficient space around of open its
top, side, and back.

Document No. ME_CT_ETC76_(CN)_R0
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Warranty and Liability
EBARA guarantees the quality of its pumps, controllers, and their accessories as
described in the included "Standard Warranty Certificate". Note, however, that
handling the pump in manners not described in this manual will void all warranty.
Use of the pumps and controllers under atypical conditions without prior consent
from EBARA may also void the warranty.

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Contents
Page
1. Characteristics ------------------------------------------------------------------------- 6
2. Unpacking and carrying ------------------------------------------------------------- 6
2-1. Unpacking
2-2. Carrying
3. Installation ------------------------------------------------------------------------------- 7
3-1. Dimensions
3-2. Name of pump parts
3-3. Warning label and name plate
3-4. Mounting
4. Cable connection -------------------------------------------------------------------- 11
4-1. Power input connector connection
4-2. Motor cable connection
4-3. Fan cable connection
4-4. Remote connector connection
5. Operation ------------------------------------------------------------------------------ 14
5-1. Pre-operation notes
5-2. Power-on
5-3. Local operation
5-4. Remote operation
6. Protection ----------------------------------------------------------------------------- 16
7. Emergency stop ---------------------------------------------------------------------- 18
8. Scrapping ----------------------------------------------------------------------------- 18
9. Specifications ----------------------------------------------------------------------- 19

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1. Characteristics
1) This controller is a high-frequency inverter to drive the pump. The controller
controls motor current to a fixed value and set the output voltage proportional to
output frequency. Thus the controller gives full play to its ability and can start the
pump in a short time.
2) The pump and controller is conformed to regulations as follows.
EMC directive
[Emission]
EN61000-6-4:2001
EN55011:1998+A1:1999+A2:2002(Group1 Class A)
[Immunity]
EN61000-6-2:2005
EN61000-4-2:1995+A1:1998+A2:2001
EN61000-4-3:2002+A1:2002
EN61000-4-4:2004
EN61000-4-5:1995+A1:2001
EN61000-4-6:1996+A1:2001
EN61000-4-8:1993+A1:2001
EN61000-4-11:2004
2. Unpacking and carrying
2-1. Unpacking
Check the following items when unpacked.
A: Unpacking
Table 1 lists the controller weight.
Table 1 Controller weight
Controller model
Weight
ETC76
Max. 2.4 kg［6 lb］
B: Damage to the contents
Should any of the package contents be damaged or defective, contact EBARA prior
to use.

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C: Accessories
The standard package includes following accessories. Should any item be missing,
contact EBARA .
(1) REMOTE connector 1 set
(2) Power Input connector 1 set
(3) Instructions manual 1 copy
2-2. Carrying
When carrying the controller, or when mounting/dismounting the controller to/from the
equipment, handle the controller with care.
Caution
Avoid applying a shock onto the controller.
3. Installation
3-1. Dimensions
The external view and the dimensions of the controller are as illustrated below.
Figure 1 Controller external view and dimensions
Caution
When fixing the controller with the hole of the rubber stand
attachment, use M3 screws of 5mm or shorter.
ETC76 EBARA Corporation

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3-2. Name of pump parts
The controller parts are named as illustrated below.
①
[START] switch
Starts the pump during local operation.
②
[STOP/RESET] switch
Stops the pump during local operation, and reset all
protections during local operation.
③
[LOCAL/REMOTE] select
switch
Selects between local operation and remote
operation.
④
Status display LEDs
Indicates the operation status of the pump.
⑤
MOTOR connector
Connect the motor cable to this connector.
⑥
FAN connector
Connect the fan cable to this connector.
⑦
REMOTE connector
Connect the remote cable to this connector.
⑧
INPUT connector
Connect the power input cable to this connector.
⑨
FAN
When the controller is powered on, the fan will rotate
to provide cooling.
⑩
FUSE
(model: ET 3.15A / SOC x2)
When the overcurrent occurs, the circuit in the
controller is protected.（When shipping, a spare fuse
is not attached.）
Figure 2 Name of pump parts
ETC76 EBARA Corporation

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3-3. Warning label and name plate
Number
Example
Content
①
Main name
plate
Indicates the controller's model name,
serial number, date of manufacture,
input voltage, SCCR, maximum power
consumption.
②
Warning
label
READ INSTRUCTION MANUAL
CAREFULLY PRIOR TO OPERATION
Failure to follow instruction may result in
serious accidents, causing death, serious
injury, and/or property damage.
③
Warning
label
HAZARDOUS VOLTAGE INSIDE
Can shock, born or cause death.
Turn power off before removing the cover.
④
Warning
label
DOING SO MAY RESULT IN PUMP OR
CONTROLLER FAILURE.
Use the pump and controller in a correct
combination.
Figure 3 Warning label and name plate
ETC76 EBARA Corporation
ETC
EBARA Corporation

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3-4. Mounting
The controller can be mounted in one of two ways.
Mount to a rack.
Mount directly to a wall.
When mounting the controller to a rack, refer to Figure 1 and Figure 4. Use the rubber
stand attachment holes (4-M3 x 5) or other measures to provide support from the
bottom.
Be sure to secure a space of 10 mm or greater to the top and sides of the controller,
and 100 mm or greater to the rear.
Figure 4 Controller fixture
Caution
Do not mount the controller solely by the attachment holes on its
front panel.
The controller is max. 2.4 kg［6 lb］in weight. If no support is
provided from the bottom, the controller may fall, causing injury
and/or controller damage.
Caution
When installing the controller, secure the specified amount of
open space around its top, sides, and back.
Otherwise, the ventilation may become inadequate, increasing
the internal temperature of the controller and causing a failure.
Caution
When fixing the controller with the hole of the rubber stand
attachment, use M3 screws of 5mm or shorter.
Warning
Do not use the controller under the following environment.
An area exposed to high temperature and/or humidity.
An area where water may drop.
An area exposed to explosive/flammable gas or dust.
An area exposed to corrosive and/or toxic gas.
An area exposed to a strong electromagnetic field.
An area with a lot of vibration.
An area exposed to radiation.
Use of the controller in an inappropriate location may result in
death or serious injury, and/or controller damage or failure.

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4. Cable connection
Figure 5 Cable connection for pump and controller
Table 2 Connectors and cables
No.
name
Connector type of the
controller side
Connector type of the
pump side
Remarks
①
Power Input
Connector
YAMATE
AP-400(B)
accessory
②
Remote Connector
OMRON
XM2D-1501
XM2S-1511
accessory
③
Motor Cable
Nanaboshi
NJC-207-PM-UL,CSA
Cable length:1-15m
Exclusive cable
SOURIAU
UTOW6128SNH-ADJ
(S)M12SR438J-5
Cable length:16-20m
Bendix
PT06A-12-8S(SR)
④
Fan Cable*
AMP
1-178288-3
AMP
172233-1
Exclusive cable
* only to forced air cooling type pump
4-1. Power input connector connection
Connect the cable to the power input connector (accessory).
1) Select the input power cable show in the Table3.
2) Strip sheath of the cable about 30mm from the end.
3) Set the solderless terminals at the end of the cable, and cover the part of the cable
which is clamped by a protective tube.

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4) After thread the cable through a bushing, screw the solderless terminals at each pin
of the connector, and screw the cable clamp.
N (R)
AC100-230V, 50/60Hz, single phase
L (S)
E Earth
Table 3 Recommended specifications of input power cable
Cable
EN/IEC: IEC 60227 or IEC 60245
ANSI/UL/CSA: ANSI/UL 817 and CSA C22.2 No21
Outer diameter max.9mm / 0.75mm2 / 3cores
Warning
Be sure to ground the power input cable.
If not grounded, an electrical leakage may result in an electric
shock and/or a fire.
Implement a power breaker and an overcurrent protection
device(*) for the controller’s input power circuit.
The power breaker and the overcurrent protection device
should have an ampere interruption capacity of 10,000A or
greater.
Failure to implement a power breaker and/or an overcurrent
protection device may result in serious accidents, causing death,
serious injury, and/or property damage.
The connection to a main supply needs permanent connection
such as connection to the industrial control panel. Do not use
the plug to connect.
If used the plug to connect to a main supply, the leakage current
as provided by SEMI S2 standard (≦3.5mA) may not be
satisfied.
*: “Power breaker” refers to components that are used to cut off a power supply, such as
circuit breakers, switches, and plugs that comply with the necessary standards.
"Overcurrent protection device” refers to components that are used to cut off short-circuit
and ground-fault currents generated within the equipment, such as circuit breakers and
fuses that comply with the necessary standards.
Some components, such as a circuit breaker with a protection device, offers both
functionalities.

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4-2. Motor cable connection
Using a designated cable, connect the motor connector on the pump to the motor
connector on the back panel of the controller.
4-3. Fan cable connection
Using a designated cable, connect the fan connector on the pump to the fan connector
on the back panel of the controller.
4-4. Remote connector connection
Connect the remote connector(accessory) to the remote connector on the back panel of
the controller.
Refer to Remote I/O Signals and connect the provided remote connector correctly.
These signals are all SELV (Safety Extra Low Voltage) circuits that are protected by
double insulation or reinforced insulation from the hazardous voltage circuits. Table 4
lists recommended specifications of cable.
Figure 6 Remote I/O Signals
Table 4 Recommended specifications of remote cable
Cable
Shielded twisted-pair cable
(Outer diameter max.10mm)
ETC76

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Caution
Use these signals in only the SELV (Safety Extra Low
Voltage, Generally it is less than AC25V or less than DC60V.)
circuit that are protected by double insulation or reinforced
insulation from the hazardous voltage circuits.
Caution
Fix the connector with screws not to disconnect from the
controller.
Caution
RESET signal should not short-circuit in a usual state. The
signal should be closed only when you reset protection
function.
Caution
Maximum capacity of output signal (Acc., Normal,
Failure) is DC24V, 0.1A.
5. Operation
5.1 Pre-operation notes
Check the following before operating the controller.
・Combination of the pump and the controller
Controller model
⇒
Pump model
ETC76
⇒
EBT70F-20
・check that the connectors are connected properly.
・Check that the input power is 100-230V.
・For local operation or remote operation, set the [LOCAL/REMOTE] selection switch
on the front panel properly. The factory setting is LOCAL.
5-2. Power-on
Supply the power to the controller.
Status
LED Display
Description
Power-off
○POWER
○ACCELERATION
○NORMAL
○FAILURE
LED is all turned off.
Power-on
●POWER
○ACCELERATION
○NORMAL
○FAILURE
The POWER LED is lit.

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5-3. Local Operation
5-3-1. Startup
To start the operation of the pump, press the [START] switch on the front panel of the
controller.
Status
LED Display
Description
Accelerating
●POWER
●ACCELERATION
○NORMAL
○FAILURE
The ACCELERATION LED is lit, and
the pump begins rotate.
Rated
operation
●POWER
○ACCELERATION
●NORMAL
○FAILURE
When the actual rotation speed of the
pump reaches 90 % of the specified
rotation speed, the NORMAL LED is
lit.
5-3-2. Stop
To stop the operation of the pump, press the [STOP] switch on the front panel of the
controller.
Status
LED Display
Description
Decelerating
↓
Stop
●POWER
○ACCELERATION
○NORMAL
○FAILURE
The NORMAL LED turns off, and
pump begins shutting down by
free-running (without brake).
5.4 Remote Operation
Shorten the pin No. 1 and 9 of the connector, and the pump begins starting up. Open
the pins, and the pump begins shutting down by free-running (without brake).
Following signals are provided from the remote connector. Apply the signals what you
want.
1) Acc. signal （Pin No. 3,11）
Closed when the rotational speed is 0-90 % of rated speed in starting up.
2) Normal signal （Pin No. 4,12）
Closed when the rotational speed is 90-100 % of rated speed.
3) Failure signal （Pin No. 5,13）
Open when the protection of the controller works.

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6. Protection
If the controller or the pump has something wrong, FAILURE LED turns red, and the
pump begins shutting down by free-running (without brake).
In such a case, failure signal on pin No. 5 and 13 of the connector becomes open.
Table 5, 6 and 7 list items of failure, causes and measures. Guess the cause, and
remove it.
Table 5 Failure which can reset
Failure mode
Possible cause
Measure
Delay in acceleration
Unable to reach the rated
speed within 6 minutes
from start.
1) The backing pressure
is too high.
2) Leakage in the
system.
3) Too much of gas flow
rate.
1) Keep the backing pressure
1200Pa or lower.
2) Check if the system has
any leakage.
3) Stop the gas flow during
starting up.
Motor step out
Unable to control the motor
because of too much load.
1) Foreign matter is in
the pump.
2) The backing pressure
is too high.
1) Send back the pump when
it has foreign matter
inside.
2) Keep the backing
pressure 1200Pa or lower.
Controller Overheat
The temperature inside the
controller is 80°C [176°F]
or higher.
1) Ambient temperature
is too high.
1) Keep the ambient
temperature 45°C
［113°F］or lower.
When you reset the controller, shorten the pin No. 2 and 10 of the connector. Keep
shortening the pins for 5msec or longer. Remove the cause of failure before resetting.
Note that the pump begins to start up as soon as you reset, if the Start/Stop signal is
closed and you reset.
Keep the Reset signal open usually.

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Table 6 Failure automatically reset
Failure mode
Possible cause
Measure
Motor overheat
The motor temperature in
the pump is 105°C [221°F]
or higher.
1) Ambient temperature
is too high.
2) The backing pressure
is too high.
3) Too much of gas flow
rate.
4) Leakage in the
system.
1) Keep the ambient
temperature 38°C [100°F]
or lower.
2) Cool the pump and keep
the surface temperature
50°C [122°F] or lower.
3) Keep the backing pressure
1200Pa or lower.
4) Keep the gas flow rate
under the allowable rate.
5) Check if the system has
any leakage.
Input power voltage loss,
drop off
Input power voltage has
kept 90V or lower for 80
msec.
1) Input power voltage
is lost or dropped off.
1) Check the input power
voltage
These failure are automatically reset if motor temperature or input power voltage
return to a normal value. For remote operation, note that the pump begins to start up
as soon as automatically reset, if the Start/Stop signal is closed.
Table 7 Failure which cannot reset
Failure mode
Possible cause
Measure
Output over-current
Motor current has
exceeded a specified
value.
Short-circuit on motor,
etc.
Put off the input power, wait
for several minutes, and put in
the input power again. Send
the pump back to EBARA or
our service centers.(*)
System error
Fatal error inside the
controller
Breakdown of controller
Over speed
Rotational speed has
exceeded 105% of the
rated speed.
Breakdown of controller
You cannot reset the controller with the Reset signal if it has any failure listed in table
7. Put off the input power, wait for several minutes, and put in the input power again.
If the failure keeps even after retrying, the controller has something wrong. Send the
pump back to EBARA .
*: For our contact information, refer to the end of this manual.

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7. Emergency stop
Pull out power input cable in an emergency. After power supply interruption, pump
begins shutting down by free-running. The pump will come to a complete stop in about
25 minutes.
8. Scrapping
Scrap the controller as an industrial waste, in accordance with national and regional
regulations.

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9. Specifications
Controller model
ETC76
Environment
Allowable temperature
0 –45 °C [32 –113°F]
Allowable humidity
5 –85 %
Input
Voltage
AC100 –230 V
Phase
Single
Frequency
50/60 Hz
Max. power
160 VA
Rated power
60 VA
Over voltage category
Ⅱ
Output
Phase
3
Rated current
2.9 Arms
Rated frequency
1500 Hz
Weight
max. 2.4 kg [6 lb]
IP code
IP20 (service area, operation area )