EBARA EV-SA20 User manual

Noise reduction enclosure (-15 dB(A) soundproofing performance)
for the EBARA EV-SA20 & EV-SA30. Click here !

EBARA CORPORATION
“Model EV-SA20” in this INSTRUCTION MANUAL is EBARA model code.
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
CE / NRTL MODEL
200-240V (1Phase 50/60Hz)
200-240V (3Phase 50/60Hz)
CAUTION
READ AND UNDERSTAND THIS INSTRUCTION MANUAL THOROUGHLY
BEFORE USING THIS EQUIPMENT.
BE SURE TO KEEP THIS INSTRUCTION MANUAL ON HAND FOR FUTURE
REFERENCE.
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user personal
actually operation this equipment.
EVSA_CN_E_Rev.0
MODEL EV-SA20
ISSUED BY PRECISION MACHINERY COMPANY

PM10U EBARA CORPORATION
The Products described herein fall under “the goods listed in row 16 of the appended
table 1 of the Export Trade Control Order of Japan”, so in cases of export of such
products, you need to confirm “use” and “purchaser and/or end-user” and, as case may
be, obtain the approval of the Minister of Economy, Trade and Industry. (Please confirm
these conditions on your own.) Furthermore, some of the Products fall under row 1-15 of
the appended table 1(listed items). In case of export of these listed items, you are
required to obtain the export license from the Minister of Economy, Trade and Industry.
For more information, please contact our sales office located near you.
Do not reproduce or reprint any portion of this manual without permission.
Manufacture reserves the right to discontinue or change any specifications or designs
with out notice and without incurring obligations.
MODEL EV-SA20 in this instruction manual is our model code.
All rights reserved, copyright EBARA Corporation.

P.3
PM10U EBARA CORPORATION
Environmental Basic Policies
It is our responsibility to protect irreplaceable treasure of the nature and to hand it over to our future
generations as people of Earth.
As we undertake our business activities, we will establish environmental management systems and
implement ongoing improvements and reviews, while striving to promote harmony between
technology and nature, prevent environmental pollution, and improve the overall results of our
environmental management activities. We are aware that environmental protection and management
activities are the responsibility of all managers and employees of the Corporation, and each person
will demonstrate this awareness when carrying out his or her duties.
We will widely publicize these basic policies to regional societies and the general public and work to
make Ebara’s position on the environment clear to society in general.

P.4
PM10U EBARA CORPORATION
Foreword
Design of EBARA MODEL EV-SA20 DRY VACUUM PUMP is based on superior engineering and
long experience. To prevent any possible trouble and provide satisfactory operation and long life, it is
important to thoroughly understand this EBARA MODEL EV-SA20 DRY VACUUM PUMP by careful
study of this manual. If any questions arise regarding this manual, please direct them to EBARA or
your dealer. Your questions will be promptly answered and your suggestion may be considered for
incorporation into our future product.
WARNING
BEFORE USING THIS EQUIPMENT, READ THIS INSTRUCTION
MANUAL THOROUGHLY. MANUFACTURES WARRANTY WILL BE
VOID, IF THE MODEL EV-SA20 DRY VACUUM PUMP HAS BEEN
INCORRECTLY INSTALLED, OPERATED OR MAINTAINED OR IF IT
HAS BEEN MODIFIED OR REPAIRED WITH PARTS NOT SPECIFIED
BY MANUFACTURE.
SINCE THE OPERATIONS OR WORKS THAT ARE NOT DESCRIBED IN
THIS MANUAL COULD RESULT IN SERIOUS OR POSSIBLY EVEN
FATAL INJURY OR DAMAGE TO THE PUMP, DO NOT THESE THAT
ABSOLUTELY.
EBARA IS NOT LIABLE FOR ANY INJURY OR DAMAGE ARISING FROM
AN INDIVIDUAL’S CARELESSNESS, OR MISUSE.

P.5
PM10U EBARA CORPORATION
(1) Limited Warranty
The liability of EBARA CORPORATION under this Warranty covers the following.
Unless otherwise specified in the contact, the warranty period shall be either one year from the
first date of operation or 18 months after the shipment from EBARA, whichever comes first.
1. When the purchased pump cause failure that owe to its design, manufacturing processes or
other faultiness that EBARA is responsible to, EBARA will either repair the troubling parts or
replace the pump at free of charge. No extension of warranty is available even when the pump
was replaced during the original warranty program.
2. Fees will be charged for repair in the following circumstances and for consumable parts:
1) If the trouble occurs after Warranty has expired.
2) If the trouble is caused by operating in the manner not described in the instruction manuals
or using under special condition.
3) If the trouble is caused by repair or remodeling of the pump by other than EBARA or
authorization suppliers by EBARA.
4) If the trouble is caused be corrosion or by-products due to pumping the corrosive or reactive
substance.
5) If the trouble is caused by fire, flood, earthquake, or other circumstances beyond EBARA’s
control.
3. EBARA will not be liable for any compensation for damage or injury resulting from breakdown
of the pump.
(2) Repair and Servicing
Requests for repair or servicing of the pump shall be made to your dealer or to EBARA.
If any abnormal symptoms other than those displayed on the operational panel appear, take
action in accordance with the instruction of Section 9 “Troubleshooting”.
If trouble occurs, to order repairs or servicing. Please contact EBARA CORPORATION or an
authorized Agent/Distributor, and provide the information on the nameplate and details of the
problem.
If you have any inquiries about the pump, please contact EBARA.

P.6
PM10U EBARA CORPORATION
(3) Safety Notice
It is essential that those operating this pump should have the knowledge to identify and avoid
hazardous conditions associated with the pump. Inadequate or rush operation may cause
dangerous and serious accidents. Before installation and operation, the operator should first have
a good knowledge of the pump construction, operation procedure, and its hazards (e.g., electrical,
stored electrical, thermal). The operator should read through this instruction manual and other
documents issued by EBARA in detail.
The following symbols are used to highlight important information and instructions that must be
followed to prevent personal injury or damage to equipment. Please study the symbols carefully so
that the meaning of any warning you encounter is immediately clear.
DANGER : Indicates an imminently hazardous situation that, if not avoided, will result in
death or serious injury.
WARNING : Indicates a potentially hazardous situation that, if not avoided, could result
in death or serious situation.
CAUTION : Indicates a potentially hazardous situation that, if not avoided, may result in
minor or moderate injury. This term may also indicate situations that might
damage equipment.
NOTE : is used to call attention or to emphasize essential information.
The following symbols may appear on the model EV-SA20 dry vacuum pump.
: DANGER - Heavy Object
: WARNING - Hot Surfaces
: WARNING - Hazardous Voltage

P.7
PM10U EBARA CORPORATION
Precautions necessary for safe use of the EBARA MODEL EV-SA20 DRY VACUUM PUMP are detailed
in this instruction manual, while important items concerning precautions for handling EBARA MODEL
EV-SA20 DRY VACUUM PUMP are listed below.
DANGER
· Keep out from under the pump when it is elevated. Only qualified personnel shall
unload and lift the pump.
· Keep pump at horizontal position when lifted.
· Do not lift the pump without eyebolt spacer.
WARNING
· Be careful not to overturn the pump when pushing and pulling it sideways, because
the pump is narrow in comparison to its height.
· Be sure to turn off the power at the circuit protector (CP) and disconnect the power
cable from the power connector, when the pump installing, the wiring and
maintenance work. Never supply power to the pump, Until you have completed
these works.
· Only a qualified electrician, observing all national and local regulations, should
perform electrical work.
· Be sure to connect the grounding wire, otherwise an electric shock may be caused
by electric leakage.
· The earthing of the pump is realized by connecting the cable with qualified
electricians. The qualified electricians should have themselves a connection the
ground.
· The pump unit is not equipped with circuit breaker (CB). Please install CB based on
the law and the standard in the installation region.
· The pump must be connected to electrical power supply with a suitable circuit
beaker (lockout / tagout CB).
· Be sure to check for leaks after you have installed the pump. When checking for
gas leaks by pressurization, please pressurize by less than 0.05 MPa into the
exhaust piping.
· This pump is suitable for use on clean and non-corrosive gases. Do not use
explosive, flammable, toxic or corrosive substances.
· The pump and exhaust piping will remain at a high temperature during operation
and for a short time after the pump has stopped. Be sure to avoid contact and keep
inflammable substances out of reach. Do not remove the pump cover during
operation.
· Do not perform a withstand voltage test. Failure to comply could result in damage to
the sensitive devices.
· Do not insert any part of body to ventilation inlet. Moving parts of the cooling fan can
crash and cut.
· Check safety interlock functions periodically (every 6 months) to confirm the
interlocks will work correctly.
· Do not alter the pump member nor change any parts without the EBARA’s consent
or approval.

P.8
PM10U EBARA CORPORATION
CAUTION
· Do not step on the pump or place object on it.
· The exhaust piping made by polyvinyl chloride causes the noise through the pipe.
· Do not apply the power supply from the pump’s power pack to any other equipment
as this will result in malfunctioning of the control units and in pump failure.
· Use the correct wiring materials and size to match the operating conditions in
accordance with the power consumption rating and ambient air temperature of the
pump.
· Vents at both ends, both side, and top of the pump. Place the pump enough space
from the stationary section. If the cooling air supply is insufficient, the pump
temperature will rise and problems such as rotor contact will occur.
Front / Rear / Top : 100mm or more
Both side : 50mm or more
· Install pump in a location at an ambient not exceeding 40 deg C. Particular caution is
required when the pump is operated in an enclosed room.
· Never operate the pump without pump cover for safety.
NOTE
· Pump must be placed in an upright position. Do not stack as packing. When the
pump is overturned, this will result in accident.
· To fix the pump, the height-adjustment feet of four each are attaches. If the pump is
not stable, vibration and noise of the pump may be increased.
· Do not wire vacant pins.
· Apply a 24V DC power for input signals on the pump side. Do not apply this voltage
on the equipment side.
· Be sure to wire all signals with the correct polarity (+/-).
· When output signals are used to energize an inductive load such as a relay, be sure
to insert a diode (100V. 1A class) in order to absorb the back electromotive force due
to surge currents.
· The pump cannot start while the measuring instruments are booting after the ＣＰ is
placed in the ON position.
· The pump will not start when an ALARM has been generated. After you have taken
the remedial action, reset the pump.

P.9
PM10U EBARA CORPORATION
(4) Safety Warning Labels
Following safety labels are attached to pump covers.
1. Hazardous weight danger
2. Hazardous voltage warning
3. High temperature warning
4. Electric charge mark
1. Hazardous weight danger
Heavy object may cause injury or death due to overturning or falling pump. Keep out from
under the lifted pump. Raise all adjuster-feet fully when moving.
2. Hazardous voltage warning
Hazardous voltage may shock, burn, or cause death. Turn power off and lockout before
servicing.
3. High temperature warning
Hot surface may burn or cause injury. Allow the piping and casing to cool before servicing.
4. Electric charge mark

P.10
PM10U EBARA CORPORATION
High temperature warning
Hazardous voltage warning
Heavy weight danger
Electric charge mark
Top View
Front View

P.11
PM10U EBARA CORPORATION
(5) Safety Interlocks
Motor thermostat protect the pump motor from overheating due to extended current draws in excess
of the motor rating. Under a persistent overload condition, motor thermostat opens a contact, which
interrupts the motor run circuit. A brief cool down interval permits restarting the pump.
WARNING
Check Safety Interlock functions periodically (every 6 months) to confirm the interlocks
will work correctly.

P.12
PM10U EBARA CORPORATION
EC DECLARATION OF CONFORMITY

P.13
PM10U EBARA CORPORATION
Contents
Environmental Basic Policies................................................................................. 3
Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(2) Repair and Servicing...................................................................................... 5
(3) Safety Notice ................................................................................................... 6
(4) Safety Warning Labels................................................................................... 9
(5) Safety Interlocks........................................................................................... 11
EC DECLARATION OF CONFORMITY ............................................................... 12
Contents................................................................................................................ 13
1. Introduction......................................................................................................15
1.1 Acceptance Check........................................................................................ 15
1.2 Environmental Concerns............................................................................. 16
2. Product Description ........................................................................................ 17
2.1 Outline............................................................................................................ 17
2.1.1 Pump Module......................................................................................... 17
2.1.2 Cooling Fan............................................................................................ 17
2.1.3 Exhaust................................................................................................... 17
2.2 Control System ............................................................................................. 17
2.2.1 Alarm Control System........................................................................... 17
2.3 Movement......................................................................................................18
2.3.1 Preparation ............................................................................................ 18
2.3.2 Moving Method...................................................................................... 18
2.4 Release and shut off residual internal energy..........................................19
2.4.1 Electrical Power – Lockout and Tagout .............................................19
2.4.2 Returning to Service............................................................................. 19
2.5 Detailed Specification ..................................................................................20
2.5.1 Model Description................................................................................. 20
2.5.2 Specifications........................................................................................21
2.5.3 Outline Drawing..................................................................................... 22
2.5.4 Performance Curve...............................................................................23
2.5.5 System Flow .......................................................................................... 24
3. Installation........................................................................................................25
3.1 Movement and Fixation................................................................................ 25
3.1.1 Location.................................................................................................. 25
3.1.2 Caster and adjustment foot .................................................................25
3.1.3 Pump Anchoring (Option).................................................................... 26
3.2 Piping............................................................................................................. 28

P.14
PM10U EBARA CORPORATION
3.2.1 Vacuum and Exhaust Piping................................................................ 28
3.3 Electrical Wiring............................................................................................ 29
3.3.1 Power Supply Wiring ............................................................................29
3.3.2 Control Signal Wiring ........................................................................... 33
4. Operation Panel ...............................................................................................36
4.1 Operation Panel Outline............................................................................... 36
4.2 Operation Panel Display..............................................................................39
5. Operation..........................................................................................................41
5.1 Before Starting..............................................................................................41
5.2 START / STOP............................................................................................... 42
5.3 Pump speed control mode.......................................................................... 44
5.4 Operation when momentarily power failure happens..............................45
5.5 Gas Ballast .................................................................................................... 46
6. Maintenance and Inspection .......................................................................... 47
6.1 Routine Inspection .......................................................................................47
6.2 Vacuum and Exhaust Piping....................................................................... 47
6.3 Lubrication Oil .............................................................................................. 48
6.4 Maintenance Parts List ................................................................................ 50
6.5 List of Wastes During Maintenance ........................................................... 50
6.6 Repair and Service ....................................................................................... 51
6.7 Overhaul ........................................................................................................51
7. Storage / Disposal ...........................................................................................51
7.1 Storage........................................................................................................... 51
7.2 Disposal......................................................................................................... 51
8. Disconnection and Transportation................................................................ 52
9. Troubleshooting ..............................................................................................54
9.1 Troubleshooting (1) : Basic trouble ...........................................................55
9.2 Troubleshooting (2) : ALARM ..................................................................... 55
---------------------------------------------------------------------------------------------------------------------
[Attachment Data]
Appendix 1 : Material Safety Data Sheet of Lubricant oil (JPN)
Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG)
Appendix 3 : Overhaul / Repair Request form (JPN)
Appendix 4 : Overhaul / Repair Request form (ENG)
Appendix 5 : Leak Check procedure
Information of Global Network

P.15
PM10U EBARA CORPORATION
1. Introduction
1.1 Acceptance Check
Check the following items on receipt of the pump package.
1) Check that the nameplate affixed to the outer cover of the pump to confirm that the pump
supplied agrees with your order. Check the accessories against the packing list and the
previously submitted drawings and documents to confirm that the all ordered accessories have
arrived.
2) Check whether damage has occurred or screws/bolts have worked themselves loose in transit.
3) Store the pump in a dry and clean place until installation.
Temperature : 5 to 40 deg C
Humidity : 80% or less (condensation must not exist)
4) The pump must be placed in an upright position.
NOTE
Do not stack the pump. The pump must be placed in an upright position. When the
pump is overturned, lubricating oil inside a pump may leak to a rotor room, and it may
cause trouble to operation.
CAUTION
Notify EBARA immediately, when damage is discovered or when components are
missing. Do not use when a leak is present as this will result in accident.

P.16
PM10U EBARA CORPORATION
1.2 Environmental Concerns
Handling or operating the unit other than specified may induce adverse impacts on the environment.
Follow the descriptions below to handle, operate, and maintain the unit.
1) Ask an authorized waste-disposal company to dispose packing materials from uncrating
according to laws and ordinances applicable to the waste.
2) Maintenance failure of the pump (including overhaul) may trigger accidents causing injury or
death, unit troubles, or environmental pollution. Plan the maintenance and perform it periodically
to operate the unit efficiently.
3) To dispose the unit, follow effective laws and ordinances applicable in the area where the unit is
installed.
If you have any inquiries about the pump, please contact EBARA.
4) To dispose the lubricant oil and chemicals, follow effective laws and ordinances applicable in the
area where the unit is installed.

P.17
PM10U EBARA CORPORATION
2. Product Description
2.1 Outline
This pump has a compact design and includes controls to enhance reliability and operation.
This pump is suitable for use on clean and non-corrosive gases. Do not use explosive, flammable,
toxic or corrosive substances.
2.1.1 Pump Module
The pump is Roots type Dry vacuum pump, which rotates a pair of non-contact multi-stage rotors,
synchronized by timing gears.
The timing gears and bearings are enclosed in a compartment that is independent of the casing. For
lubrication Perfluoro-Polyether (PFPE) oil and grease are used. The pump is factory-filled with
lubrication oil.
Replenish or replace only with the recommended oil grades shown in Specification Table 2.1.
2.1.2 Cooling Fan
Because the pump compresses gas from a vacuum to atmospheric pressure, compression heat is
generated. Therefore cool the pump with cooling fan.
Place the pump enough spaces from the stationary section.
FRONT / REAR / TOP : 100 mm or more
Both side : 50 mm or more
2.1.3 Exhaust
A check valve is provided as a standard accessory to prevent reverse flow of gas from the exhaust
through the pump to the vacuum chamber when pump is stopped.
2.2 Control System
This pump has a built-in unit consisting of a Circuit Protector (CP), Noise Filter (NF), and Inverter.
During pump operation, some conditions are monitored, including electrical power and current for
motor. Continuous operation is possible when there is a momentarily power failure (170V or less) of
1sec or less.
2.2.1 Alarm Control System
To improve the reliability of the pump as a vacuum exhaust system, the pump protection system
generates an ALARM signal. This signal output is generated and the pump will stop automatically
when the upper mechanical safety limit is reached during pump operation.
Contact EBARA Corporation for details on checking the ALARM setting conditions.
All ALARM signal are displayed on the front panel. For remote operation and monitoring, the signal is
available as group output.

P.18
PM10U EBARA CORPORATION
2.3 Movement
2.3.1 Preparation
Raise all four adjuster feet fully before moving the pump; otherwise, an obstacle on the floor may
cause the moving pump to tip over.
2.3.2 Moving Method
Move pump slowly by pushing at eyebolt along the long axis of the pump(direction A).
Keep toes and fingers away from moving wheels. If placing the pump in an corner or narrow space
requires moving it along the short axis (Direction B), two persons should “walk” the pump over by
alternately pushing the ends as shown below.
To move the pump across steps, cracks or joints in the floor, spread a steel plate or similar device,
which can sustain the pump weight, over the discontinuity. At least two persons, using great caution,
should move the pump.
If a moving pump should lose balance and start to tip over, do not attempt to stop it. Get away from
the pump immediately.
A
B
Steel Plate
Caster Adjuster
Fully raised
CAUTION
・ When using the tool to raise adjuster feet, be careful of handling of the tool.
・ Do not heave the pump.

P.19
PM10U EBARA CORPORATION
2.4 Release and shut off residual internal energy
2.4.1 Electrical Power – Lockout and Tagout
Lock the branch circuit in the OFF position and tag it out to perform maintenance or troubleshooting.
The Lockout / Tagout procedures must comply with OSHA 29 CFR 1910.147 and 1910.331-335.
1) Turn off the pump circuit protector.
2) Turn the branch circuit disconnect off. Check with a voltmeter that the power is shut off the
pump.
3) Insert padlock through holes provided on locking device. Close padlock and attach tag.
Keep the key with you while working.
4) Check that the display panel is off.
2.4.2 Returning to Service
1) Remove handle stop bracket and switch circuit breaker on.
2) Restart pump and open fore-line valve only after appropriate leak checks and safety
verifications are completed.
WARNING
· To avoid dangers potentially encountered during maintenance, transportation or
storage, follow instructions below to shut off power.
· Capacitors within the control panel retain residual energy after interruption of power
supply. Wait five (5) minutes after shutting off breaker before opening the control
panel. Carefully check that bleed circuits have discharged the residual energy before
servicing the control panel.