EBARA ESA200W User manual

PM40U EBARA CORPORATION
ESA200_CSN_2_E_Rev. 0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA200W
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
「Model ООО」 in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY COMPANY

Do not reproduce or reprint any portion of this manual without permission.
Manufacturer reserves the right to discontinue or change any specifications
or designs without notice and without incurring obligations.
Model ○○○ in this catalog is our model code.
All rights reserved, copyright EBARA Corporation.

（i）
PM10U EBARA CORPORATION
Environmental Basic Policies
It is our responsibility, as people of the earth, to protect nature's irreplaceable treasures
and to pass them on to future generations.
As we undertake our business activities, we will establish environmental management
systems and implement ongoing improvements and reviews, while striving to promote
harmony between technology and nature, prevent environmental pollution, and improve
the overall results of our environmental management activities. We are aware that
environmental protection and management activities are the responsibility of all managers
and employees of the Corporation, and each person will demonstrate this awareness
when carrying out his or her duties.
We will widely publicize these basic policies to regional societies and the general public
and work to make Ebara's position on the environment clear to society in general.

（ii）
PM10U EBARA CORPORATION
Safety Information
It is essential that those operating this pump should have the knowledge to identify and avoid
hazardous conditions associated with the pump.
Inadequate or rash operation may cause dangerous and serious accidents.
Before installation and operation, the operator should first have a good knowledge of the
pump construction, operation procedure, and its hazards.
The operator should read through this instruction manual and other documents issued by
EBARA in detail.
If you have any questions on pump operation, safeties, and maintenance, please do not
hesitate to contact EBARA directly. Refer to Global network for contact address.
Three terms designating the level of hazard are used in this manual.
DANGER indicates an imminently hazardous situation which, if not avoided,
will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not avoided,
could result in death or serious injury.
CAUTION indicates an imminently hazardous situation which, if not avoided,
may result in minor or moderate injury.
This term may also be used as a warning for situations liable to
damage to equipment.

（iii）
PM10U EBARA CORPORATION
Important Prior Warnings
DANGER Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
WARNING Be careful not to overturn the pump when pushing and pulling it
sideways, because the width of the pump is small to its height.
WARNING All electrical works must be performed by only a qualified
electrician.
All national and local electrical regulations must be observed.
WARNING Interrupt Circuit Breaker (CB) before starting on wiring
and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
WARNING Supply N2 gas to the exhaust piping when necessary to dilute
the inflammable or toxic gas up to a safe concentration.
WARNING Purge with sufficient N2 gas before removing and washing the
vacuum and exhaust piping.
Do not let inflammable, toxic or dangerous materials
disperse and guard against contact with the human body.
Always work in a location with an escape route in an emergency.
WARNING Do not use the pump for another process without a previous
overhaul. Gases or reaction products remaining in the pump will
react and lead to accidents with the formation of large amounts of
products.

（iv）
PM10U EBARA CORPORATION
WARNING To avoid any hazard induced by toxicity, flammability and
explosiveness of the process gases used in the tool, be sure to
operate the tool according to the operations safety guidelines
supplied by tool suppliers.
Appendix 6 lists typical process gases used in a
semiconductor-processing tool. However, details concerning
the tool gases and other concerns specific to your tool should be
directed to the respective tool suppliers.
WARNING Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air
into the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
WARNING Do not alter the pump member nor change any parts without the
EBARA's consent or approval.
WARNING The pump casing and exhaust piping become extremely hot
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
WARNING Check Safety Interlock functions periodically (every 6 months) to
confirm the interlocks will work correctly.
CAUTION Disposal of process by-products shall be strictly in accordance
with all local and national environmental and safety regulations.
CAUTION Disposal of Printed circuit board containing Lithium battery shall
be strictly in accordance with all local and national environmental
and applicable regulations.

（v）
PM10U EBARA CORPORATION
WARNING In designing the dry pumps, Ebara does not assume risks
caused by hazardous chemical reactions resulted from
simultaneous injection or mixture of multiple process gases in
the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage. The tool
suppliers and users must pay attention not to simultaneously
inject or mix those gases.
WARNING Do not perform a withstand voltage test.
Failure to comply could result in damage to the sensitive
devices.
CAUTION Never operate the pump without pump cover for safety.

（vi）
PM10U EBARA CORPORATION
Following safety warning labels are attached to pump covers.
1. High temperature warning
2. Hazardous voltage warning
3. Hazardous materials warning
4. Hazardous voltage after EMO warning
5. Hazardous weight danger
6. High temperature eyebolt warning
7. Anti Earthquake fixture warning
1. High temperature warning
Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.
2. Hazardous voltage warning
Hazardous Voltage may shock, burn, or cause death.
Turn power off and lockout before servicing.
WARNING 警 告
Hazardous Voltage
Contact will cause injury or death by
electrical shock. Disconnect
line power before servicing.
危険電圧部あり。接触すると重傷または死亡の
危険があります。電源供給を止めてブレーカを切った状態で
メンテナンスをして下さい。
C-7110-313-0001
WARNING 警 告
Hot Surfaces
Will burn skin on contact.
Allow piping and casing to cool
Before servicing
高温部あり。接触すると火傷をする危険があります。
配管・ケーシングが冷えてからメンテナンスをして下さい。
C-7110-312-0001

（vii）
PM10U EBARA CORPORATION
WARNING 警 告
Hazardous Voltage
Contact will cause injury or death by
electrical shock. Disconnect
line
p
ower before servicin
g
.
危険電圧部あり。接触すると重傷または死亡の
危険があります。電源供給を止めてブレーカを切った状態で
メンテナンスをして下さい。
WARNING 警 告
Hazardous Voltage
Contact will cause injury or death by
electrical shock. Connector CN-C
remains energized after EMO.
危険電圧部あり。接触すると重傷または死亡の
危険があります。コネクタCN-CはEMO作業後も
通電しています。 C-7110-410-0001
3. Hazardous materials warning
In case of hazardous materials are handled. Run the pump only with
N2 gas purge before servicing. Take adequate measures against
dangerous reaction and contact with human body.
4. Hazardous voltage after EMO warning
Contact will cause injury or death by electrical shock.
Connector CN-C remains energized after EMO.
WARNING 警 告
Hazardous Materials
Exposure to air may cause spontaneous fire or explosion.
Inhalation or skin absorption will cause severe injury or
death by poisoning.
Purge thoroughly with nitrogen for at least 30 minutes
before servicing. Use personal protective equipment
a
pp
ro
p
riate to the materials to
p
revent ex
p
osure.
危険物質あり。
危険反応・人体への接触により重傷または死亡の危険があります。Ｎ２パージのみで３０分以上
空運転を行なってから、危険物質のＭＳＤＳに従ってメンテナンスをして下さい。
C-7110-314-0001

（viii）
PM10U EBARA CORPORATION
5. Hazardous weight danger
Heavy weight may cause severe injury or death due to overturning
or falling pump. Keep out from under the lifted pump.
Raise all adjuster-feet fully when moving.
6. High temperature eyebolt warning
Hot surface may burn or cause injury.
Allow the eyebolt to cool before servicing.
7. Anti earthquake fixture warning
To prevent fall down of the pump caused by earthquake,
Pump must be fixed on the floor with attached fixtures.
危 険
Heavy Object
Can cause impact injury through falling or tipping.
Use appropriate, properly rigged lifting equipment and keep from
under suspended pump. Raise all adjuster feet fully when moving.
重量物。落下及び転倒により重傷または死亡の危険があります。
吊り上げたポンプの下に入らないで下さい。
移動時は全アジャスタフットを上限まであげて下さい。
C-7110-316-0001
WARNING 警 告
Pump may fall down when earthquake.
Fix the pump with fixtures.
地震発生時にポンプが転倒する恐れがあります。
固定金具でポンプを床面等に固定して下さい。
C-7110-322-0001
警 告
Hot Surfaces.
Will Cause burn. Do not touch eyebolts
during pump running for some time after stops.
高温部あり。火傷のおそれがあります。
ポンプ運転中及び停止後しばらくの間はアイボルト部に
触れないで下さい。
C-7110-317-0001
WARNING

（ix）
PM10U EBARA CORPORATION

（x）
PM10U EBARA CORPORATION

（xi）
PM10U EBARA CORPORATION
Safety Interlocks
WARNING Check Safety Interlock functions periodically (every 6 months)
to confirm the interlocks will work correctly.
EMERGENCY OFF (EMO)
A manually activated button breaks a low-voltage control circuit that, in turn,
interrupts line power. Restarting the pump(s) requires a manual reset of the
twist-lock button.
NITROGEN FLOW LOW
A normally open flow switch breaks when nitrogen supply to the pump (oil
bearing(s) and inter stage injection) drops below its factory set point, opening the
motor starter relay(s) and shutting down the pump. Restoration of sufficient
nitrogen flow permits restarting the pump.
MOTOR OVERLOAD
Motor overload relays protect the pump motor(s) from overheating due to
extended current draws in excess of the motor rating without tripping due to
current transients such as start up inrush current. Current (for each phase of line
power) passing through a coil heats a bimetallic element simulating motor heating
under load. Under a persistent overload condition, differential expansion of the
bimetallic element opens a contact, which interrupts the motor run circuit. A brief
cool down interval permits restarting the pump.
OVER CURRENT PROTECTION
The nearly instantaneous current rise from a line-to-line or line-to-ground short
very rapidly heats a thermal element in the circuit breaker, opening of a snap
action switch and interrupting all power to the electrical panel. Manual reset,
which requires clearing the fault condition, is necessary before restarting the pump.
The circuit breaker also serves as a lockable interrupt device for servicing the
pump system.

（xii）
PM10U EBARA CORPORATION
Interlock Schematic for ESA200W

（xiii）
PM10U EBARA CORPORATION
Standard Limited Warranty
The terms of this Warranty limit the liability of EBARA CORPORATION. Please read it
carefully.
Duration
For new pumps, the Warranty period shall be one (1) year from the date of commencing
operation by user or 18 months from shipment by EBARA, whichever comes first. This
Warranty does not apply to service beyond these time periods.
For overhauled pumps, the warranty period shall be six (6) months from shipment by EBARA.
Coverage
For the duration of the Warranty period, EBARA warrants this ESA pump from failure due to
defects in materials or workmanship. For such failures, EBARA will, at its option, either
replace or repair the pump free of charge
Such repair or replacement will not extend the duration of the warranty beyond the original
period.
For repairs not covered under this Warranty, EBARA will charge the customer for parts and
labor.
Exclusions and Limitations
This Warranty does not cover the following:
1. Failure due to operating the pump in a manner or under conditions other than as
described in the instruction manual.
2. Failure due to corrosion, byproducts or foreign material entering the pump.
3. Failure due to fire, flood, earthquake, Acts or God, Acts of War or other circumstances
beyond EBARA’s control.
Disassembly or repair of the pump by parties other than EBARA or EBARA-authorized
suppliers will void this Warranty.
EBARA’s liability is limited to repair or replacement of the pump under Warranty. EBARA
accepts no liability for consequential damages, including injury to personnel and damage to
facilities, tools or product.
EBARA makes no Warranty of merchanability, beyond statuatory requirements, or of fitness
for a specific purpose.

（xiv）
PM10U EBARA CORPORATION
Declaration of Conformity

（xv）
PM10U EBARA CORPORATION
Contents
Environmental Basic Policies........................................................................... i
Safety Information ............................................................................................ ii
Important Prior Warnings................................................................................iii
Safety Interlocks .............................................................................................. xi
Standard Limited Warranty........................................................................... xiii
Declaration of Conformity.............................................................................xiv
Contents .......................................................................................................... xv
1. Foreword..................................................................................................... 1
2. Introduction ................................................................................................1
2.1 Introduction .......................................................................................... 1
2.2 Environmental Concerns..................................................................... 2
3. Product Description ................................................................................... 3
3.1 Outline...................................................................................................3
3.1.1 Pump Module ................................................................................3
3.1.2 N2 Gas ...........................................................................................3
3.1.3 Cooling Water ............................................................................... 4
3.1.4 Exhaust..........................................................................................4
3.2 Control System .................................................................................... 4
3.2.1 Warning .........................................................................................4
3.2.2 Operation Status Control .............................................................5
3.3 The way of pump moving .................................................................... 5
3.3.1 Preparation....................................................................................5
3.3.2 Moving method .............................................................................5
3.4 Utility Disconnection............................................................................ 6
3.4.1 Electrical Power - Circuit Breaker Lockout and Tagout ............6
3.4.2 Cooling water ................................................................................7
3.4.3 Nitrogen (N2) ..................................................................................7
3.4.4 Returning to Service .....................................................................7
3.5 Detailed Specifications........................................................................ 8
Specification.............................................................................................8
Outline Drawing........................................................................................9
Performance Curve ................................................................................10
System Flow ...........................................................................................11
4. Installation ................................................................................................ 12
4.1 Movement and Fixation ..................................................................... 12

（xvi）
PM10U EBARA CORPORATION
4.1.1 Location.......................................................................................12
4.1.2 Caster and adjustment foot .......................................................12
4.1.3 Pump Fixation .............................................................................13
4.2 Piping .................................................................................................. 15
4.2.1 Vacuum and Exhaust Piping......................................................15
4.2.2 Cooling Water Piping..................................................................16
4.2.3 N2 Gas Piping .............................................................................17
4.2.4 Ventilation Duct ..........................................................................18
4.3 Electrical Wiring................................................................................. 20
4.3.1 Grounding ...................................................................................20
4.3.2 Power Supply Wiring ..................................................................21
4.3.3 Control Signal Wiring ................................................................. 22
4.3.4 Additional Emergency Off (EMO) input.....................................27
5. Power Supply for accessories ................................................................ 28
6. LCD Controller.......................................................................................... 29
6.1 LCD Outline ........................................................................................ 29
6.2 LCD Indication.................................................................................... 30
6.3 Setting the operational mode............................................................ 34
6.3.1 Setting the pump operation control mode................................ 35
6.3.1 Setting the pump operation control mode................................ 36
6.3.2 Setting the DIP switch ................................................................ 36
6.3.3 Setting the pump running mode................................................ 37
6.3.4 Setting the BP normal rotational speed.................................... 37
6.3.5 Setting the rotational speed in the LOW SPEED mode ........... 37
6.3.6 Setting the pump N2 flow low warning threshold....................38
6.3.7 Setting the dilution N2 0mode warning threshold (option) .....38
6.3.8 Setting the rotational speed in the SAVE ENERGY mode.......39
6.3.9 Setting the WARNING value for the back pressure (option) ...39
6.3.10 Setting the Back Pressure high warning threshold (option). 40
6.3.11 Pump Valve control (option) ....................................................40
6.4 Dip Switch........................................................................................... 41
6.5 DIP Switch setting display ................................................................ 44
7. Operation .................................................................................................. 47
7.1 Before Starting ...................................................................................47
7.2 START/STOP ...................................................................................... 50
7.2.1 LOCAL Start/Stop .......................................................................52
7.2.2 REMOTE Start/Stop ....................................................................52
7.2.3 COMMUNICATION Start/Stop ....................................................53

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PM10U EBARA CORPORATION
8. Maintenance and Inspection ................................................................... 54
8.1 Internal energies ................................................................................54
8.1.1 Power source ..............................................................................54
8.1.2 Cooling water ..............................................................................54
8.1.3 Nitrogen gas................................................................................54
8.2 Routine Inspection............................................................................. 55
8.3 Vacuum and Exhaust Piping............................................................. 57
8.4 Lubricant Oil ....................................................................................... 58
8.5 Spare (Maintenance) Parts List......................................................... 61
8.6 List of wastes during maintenance .................................................. 62
8.7 Overhaul ............................................................................................. 63
9. Disconnection and Transportation......................................................... 64
10. Troubleshooting ..................................................................................... 66
10.1 Troubleshooting (1) Basic trouble ............................................... 66
10.2 Troubleshooting (2) WARNING .................................................... 68
10.3 Troubleshooting (3) ALARM......................................................... 70
10.4 Troubleshooting (4) Option .......................................................... 73

P.1
PM10U EBARA CORPORATION
1. Foreword
We appreciate that you have selected an EBARA dry vacuum pump ESA200W.
This pump has been manufactured with much care and attention so that it can
be operated safely and satisfactorily.
Incorrect operation will result in lack of performance and cause accidents and
injuries to personnel.
[ NOTE ] This instruction manual contains all necessary information on
operation and maintenance of the pump.
Be sure to operate the pump correctly in accordance with these
instructions to ensure a long service life.
Keep this instruction manual in a suitable place for immediate
reference whenever needed.
2. Introduction
2.1 Introduction
Check the following items on receipt of the pump package.
(1) Check that the nameplate affixed to the outer cover of the pump to confirm
that the pump supplied agrees with your order.
Check the accessories against the packing list and the previously submitted
drawings and documents to confirm that the all ordered accessories have
been supplied.
(2) Check whether damage has occurred or screws/bolts have worked
themselves loose in transit.
CAUTION Notify EBARA without delay when damage is discovered or
when components are missing. Do not use when a leak is
present as this will result in accident.
(3) Store the pump in a dry and clean place if it is not installed at once after
delivery.
Temperature : 5-40°C
Humidity : 80% or less
(4) Do not stack the pump. Pump must be placed in an upright position.