EBARA EV-A Series User manual

PM10U EBARA CORPORATION
EV-A Series
DRY VACUUM PUMP
APPLICABLE TYPE
EV-A06
INSTRUCTION MANUAL

P.3
PM10U EBARA CORPORATION
HANDLING OF MANUAL
This instruction manual describes installation, operation, and maintenance about the EV-A Series Dry
Vacuum Pump.
Be sure to read this instruction manual to operate correctly before installing and operating it.
In particular, take care about the precautions for safety to the following warning words.
DANGER
This indicates the existence of imminent hazard, which if the equipment is operated without
respect to its contents, will result in death or a serious injury of the operator.
WARNING
This indicates the existence of potential hazard, which if the equipment is operated without
respect to its contents, will result in death or a serious injury of the operator.
CAUTION
This indicates the existence of potential hazard, which if the equipment is operated without
respect to its contents, may result in slight injury or less serious injury of the operator.
CONFIRMATION
This indicates the existence of possibility, which if the equipment is operated without respect to
its contents, may result in equipment damage.
The following symbols may appear on the EV-A Series Dry Vacuum Pump.
Warning ―refer to manual
Warning ― risk of electric shock
Warning ― hot surface

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PM10U EBARA CORPORATION
<STORAGE OF THIS INSTRUCTION MANUAL>
This instruction manual describes important matters related to pump operation. Keep the manual in an
easy-to-see place so that it may be available whenever required.
＜Definitions of term＞
Definitions of term are as follows.
Solvent: IPA, Organic solvent such as Ethanol and etc.
Condensable gas: Water vapor or mixed gas with solvent.
Clean gas exhaust: Inert gas such as nitrogen, atmosphere (exhaust dry types of gas)
*These are one of the examples
*Regardless of the solvent kind and its amount, contact one of our sales offices before you start
operation. When you pump flammable chemical, including solvent stated above, always
introduce N2 through gas ballast system.
*To vacuum solvent and condensable gas, read P.17 3.3 Gas Ballast Mechanism and P.39 6.3
About The Gas Ballast Mechanism beforehand to handle correctly.

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PM10U EBARA CORPORATION
WARRANTY OF THE DRY PUMP
Any failure attributable to our responsibility which is due to a defect of design, material, manufacturing, and
occurs within one year from the date of commencing operation by user or 18months from shipment by
EBARA, whichever comes first, shall be repaired or replaced free of charge.
This warranty shall be applicable only to the case where the equipment has been correctly operated in
accordance with this instruction manual and other instructions. Additionally warranty period by different
usage is set forth hereunder. Any defectives or damages that fall into the case stipulated below as
“Exemption of the warranty” shall be out of warranty.
Warranty period by different usage. (Applied to new purchase only. Product is warranted for the period
listed below from shipping date from factory)
Two (2) years warranty: Pumping clean gasses such as dry air and inert gases (N2, etc).
One (1) year warranty: Pumping condensable gases such as water vapor and solvent mixed gas.
(Prior meeting is required when pumping solvent)
Exemption of the warranty.
* Failure due to improper handling, operation or storage.
* Failure caused by the usage of special gas like acid, alkaline, corrosive gas, or the usage possibly
contains solid or may cause solidification and condensation.
* Failure due to negligence of necessary maintenance.
* Failure due to use of maintenance/replacement parts other than those made by manufacturer.
* Failure due to repair and modification by and party other than manufacturer and manufacturer’s approved
dealers.
* Failure due to fire, flood, earthquake, lightning and other force majeure.
This “Warranty” limitedly warrants to the repair and replacement of the affected portion of the product, and
does not warrant to the defect and damage collaterally occurs therewith.
Also This “Warranty” shall not be applicable to wearing and maintenance parts.
In case any failure or fault occurs, please contact one of our offices listed in the back.

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PM10U EBARA CORPORATION
APPLICATION OF THE VACUUM PUMP
* This vacuum pump is intended to get a vacuum source for vacuum exhaust, maintenance of vacuum
condition, and a clean usage as a vacuum source for general industry. However, the above is not
applicable to the case where using this vacuum pump has been judged to be usable for a use other
than these by a previous arrangement with the user before purchase.
* When the use is going to change the process for using this vacuum pump or divert this pump to
another use, please consult our business offices listed in the back. It may be necessary to change
the specifications of the pump and peripheral units.
* Using this vacuum pump to the process where existing radiation is prohibited.
DANGER
Don’t use it to exhaust the combustible gas or the dangerous fumes for the human body, etc.

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PM10U EBARA CORPORATION
Contents
1. ITEMS RELATED TO SAFETY
1.1 Safety --------------- 8
1.2 Types of Warning Label -------------- 12
1.3 Warning Label Positions -------------- 13
2. PRODUCT CONFIRMATION -------------- 14
3. PRODUCT OVERVIEW
3.1 Pump Body -------------- 15
3.2 Electrical Equipment -------------- 15
3.3 Gas ballast mechanism -------------- 15
3.4 Product Specifications -------------- 16
3.5 External View -------------- 18
3.6 Pumping Performance -------------- 19
4. INSTALLATION OF THE PUMP
4.1 Installation -------------- 20
4.2 Piping -------------- 23
4.3 Electric Wiring -------------- 24
5. OPERATION PANEL
5.1 Operation Panel -------------- 29
5.2 How to Switch LED Display -------------- 31
6. OPERATION AND STOP
6.1 Preparations for Operation -------------- 33
6.2 Operation and Stop -------------- 33
6.3 About the Gas Ballast Mechanism -------------- 37
7. MAINTENANCE
7.1 Routine Maintenance -------------- 39
7.2 Inlet and Outlet Plumbing -------------- 40
7.3 Lubricant -------------- 40
7.4 Overhaul -------------- 42
7.5 Removal of the Pump -------------- 43
8. TROUBLESHOOTING
8.1 Primary Trouble -------------- 44
8.2 Pump Malfunction -------------- 45
9. SCRAPPING METHOD -------------- 46
10. PRECAUTIONS ON RETURN OF PRODUCT
10.1 Note -------------- 46
10.2 Returning Procedure -------------- 46
< Notice >
Return Notice Sheet

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PM10U EBARA CORPORATION
1. ITEMS RELATED TO SAFETY
1.1 Safety
This instruction manual describes the following items related to safety.
Read this manual carefully before operating this product.
Safety precautions are also described in each related sections.
DANGER
Do not use this product for pumping harmful or flammable gas.
Turn off the main switch on the pump and disconnect power cable before servicing. Do not
supply power before completion of service work.
WARNING
Because the temperatures of the inlet and outlet pipes of the pump become high, arrange them
so that they may not come in contact with the human body and combustible materials.
Perform leak check after piping maintenance. Apply pressure form exhaust piping and
pressurize up to 0.05 MPa for pressure leak check.
Wiring work must be done by qualified workers.
This product is not equipped with earth leakage breaker (ELB) and emergency off switch (EMO).
Follow the local regulations when installing this product.
Be sure to perform grounding, otherwise an electric shock may be caused by electric leakage.
Pump remains hot during/after operation. Avoid direct skin contact otherwise it may cause burn.
Keep combustible materials away from the product. Do not attempt to service the product when
it is hot.
Do not remove packaging covers during operation.

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PM10U EBARA CORPORATION
CAUTION
Do not step on the pump, otherwise falling or turnover may be caused. Do not place anything on
the pump as it may damage the product.
Do not lift the pump by your self. Lift the pump by hand with two (2) persons.
Do not use sling or the like to lift the pump as the handles are not designed to be used with slings.
Use high corrosion-resistant materials for pipes and parts used on both inlet port and outlet port
sides.
Pump starts operation as soon as power is supplied if pump run command presents.
Take safety precautions and make sure pump inlet and outlet are plumbed properly before
supplying power.
Use lubricant oil specified on P.18 (3.4. Product specification) section.
Do not overfill more than upper limit as it may damage the product.
Refill oil immediately when oil level is low as it may cause severe damages to the product.

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PM10U EBARA CORPORATION
CONFIRMATION
Don't pile packed pumps and don't lay each pump on its side in any case; otherwise the damage
may be caused to the pumps.
Keep space, 100mm or more at front and rear side, 50mm or more at lateral side, to secure
good ventilation for cooling. Bad ventilation can cause pump overheat which results in
unpredicted pump failure.
Do not place the device which could be heat source at the front of pump, and consider that air
ventilation temperature around pump is kept at 15 to 30 degrees C. High-temperature ventilation
heats up pump and causes pump failure.
For Input signals (Pin No. 1-9, 2-10, 3-11, 4-12), apply a voltage of 24V DC on the pump
controller side. Don't apply a voltage on the equipment side; otherwise the controller may go
wrong.
Pump stops in emergency off state if STOP/RESET switch on the controller is pressed during
pump operation with driving connector under direct power input. To restart the pump, turn
power off (wait until LED light goes off) then turn it back on.
Pump stops in emergency off state if STOP/RESET switch on the controller is pressed during
pump operation under remote control. To restart the pump, deactivate pump run command (pin
No. 1-9) then apply the command again or press STOP/RESET switch.
In the states that “LOCAL/REMOTE Selection Switch” in the I/O connector (CN2) is open –
means Pin No.3-11 is open circuit -, external signal mode is not available. In this case,
handling by operation-panel is required.
Pump stops if the controller is removed during operation.
Frequent power supply to the inverter may shorten the inverter life. Remote operation
described in 6.2.3 section P.37 is recommended if frequent RUN/STOP is necessary.

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PM10U EBARA CORPORATION
CONFIRMATION
Always use gas ballast mechanism (optional) when the pump needs to exhaust solvent gas and
water vapor.
Air gas ballast mechanism has a built in filter to protect the pump from foreign materials in the
atmosphere. When pump is used in dusty environment the filter may get clogged and reduce
ballast gas flow into the pump which causes a failure to prevent condensation in the pump.
Install the pump in clean environment.
Maximum supply pressure for N2 gas ballast is 0.05MPa.
Do not over pressurize as it may damage the pump.
When using gas ballast valve, while the beginning operation of which the pump is still cold, "gas
ballast capability" cannot be fully performed. If it is necessary to exhaust water vapor and other
condensable gases, warm-up the pump enough (more than 1 hour after running) and use gas
ballast mechanism. While the pump is still cold, "gas ballast capability" cannot fully perform and
condensable gas (eg, solvent gas) condenses inside the pump of which may lead to the pump
stop.
When the pump stops and the gas ballast valve still remains "open" state, air is introduced from
the gas ballast valve into the pump. This cannot keep vacuum condition of the pump. If it is
necessary to keep vacuum of the pump and/or equipment, attach shut off valve at the top of the
pump inlet to hold vacuum condition and shut it off before the pump is stopped.
When condensable gas such as water vapor is pumped, please keep it running for about 1 hour
opening the inlet port. There is a possibility of pump failure arising from corrosion or other factors
when condensed moisture, etc. remains inside the pump.
The condensable gas, which isn’t condensed in the pump, might be condensed in the exhaust
piping. Take care of the condensate not to move back into the pump.
<Notice>
Please fill out Return Notice Form attached end of this manual and provide necessary
information before returning the product.
Dry out pump inside before returning the product if it was used to pump condensable gases.
For safety reasons, replace remaining gases with N2 (nitrogen) completely and seal inlet and
outlet port with blank off caps prior to returning the pump for repair/overhaul service if the pump
was used to pump toxic gases.

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PM10U EBARA CORPORATION
1.2 Types of Warning Label
The following warning labels are attached to the main body of the dry vacuum pump to provoke
cautions on use. The warning label positions are shown on the next page.
List of Warning Labels on the Dry Vacuum Pump
Warning Label A Warning Label B Warning Label D
Warning Label C
Hot surface.
Can burn hands.
Do not touch.
警 告
WARNING
高温の為、火傷の恐れあり。
触れないでください。

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PM10U EBARA CORPORATION
1.3 Warning Label Positions
Warning Label CWarning Label A Warning Label D
1Ph AC100-1 20V
50/60Hz
PE
Warning Label B
Warning Label B Warning Label A Warning Label C Warning Label D

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PM10U EBARA CORPORATION
2. PRODUCT CONFIRMATION
This dry vacuum pump is delivered after it is strictly inspected and packed. When the user receives the
package, open it and confirm the following points.
* Check if its components parts are all included.
* Check if the pump specifications comply with those of your orders.
* Check if any damage has not occurred during transportation.
If any fault is found, please inform one of our offices listed in the back at once.
* Regarding pump accessories, check them according to the packing list separately dispatched.
<Storage of the Pump>
* In case the pump is not installed immediately after it is received, store it in a clean environment in the
following conditions:
Temperature 5 to 40 deg. C
Humidity 80 % or less (Condensation must not exist)
* Don’t pile packed pumps and don’t lay each pump on its side in any case
CONFIRMATION
Don’t pile packed pumps and don’t lay each pump on its side in any case, otherwise the
damage may be caused to the pumps.

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PM10U EBARA CORPORATION
3. PRODUCT OVERVIEW
Pumps basically consist of a pumping mechanism; electrical parts are mounted on the base and
covered with package.
3.1 Pump Body
* A pair of hybrid roots rotors synchronously rotates, keeping a given clearance, and transfers the
gas from inlet port to outlet port.
* Gears are installed on the other side of rotors and lubricated with oil.
*This series adopts synchronized motor.
* They are heated up by the compressed gas, the friction at the bearing and at the seals makes
pump temperature high, under which the pump is cooled with cooling fan.
* To prevent condensation in the pump when condensable gas is pumped, adopt the gas ballast
mechanism.
(The gas ballast mechanism is an option.)
* Silencer is built in to reduce exhaust noise.
3.2 Electrical equipment
* The pump package has built-in circuit protector, noise filter, and inverter.
* Electrical component varies depending on power supply. Choose appropriate model according to
facility set up.
(See Product Specification section next page for power supply and pump model.)
3.3 Gas ballast mechanism (Option)
Condensable gases (water vapor, solvent mixed gas) pumped may condense and become liquid in
the pump if it exceeds its saturated vapor pressure. Gas ballast mechanism prevents
condensation by introducing air or nitrogen which reduces the partial pressure of the pumped
gases. Condensable gases are exhausted from outlet port without condensation by introducing
ballast gas.
(Maximum water vapor pump rate : 350g/h)
It is recommended to use the following gas ballast mechanism when pumping condensable gases.
⇒Pumping non flammable vapor, condensable solvent : Atmospheric (air) ballast
⇒Pumping flammable solvent and gas, condensable solvent : N2 ballast

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PM10U EBARA CORPORATION
3.4 Product Specifications
Specification Table EV-A06
Model
Item EV-A06-1
(Single Phase 100V) EV-A06-2 (Single Phase 200V) EV-A06-3 (Three Phase 200V)
Max. Pumping Speed [50/60 Hz] 600 L/min
1.0 Pa Note1）w/ gas ballast OFF
Ultimate Pressure 10 Pa Note1）w/ gas ballast ON
N2 Gas ballast Note2）
N2 supply pressure (Gauge press.)
Regulator set pressure 0.01 – 0.05 MPa
Max. Inlet Pressure Atmospheric pressure
Outlet Back Pressure (Gauge
press.) 3 kPa or less
Max. water vapor pumping rate Note3）350 g/h
Motor Rated Power 0.75 kW
Operating current ［50/60 Hz］
（Primary current） Note4）6.8 – 12.6 A 4.8 – 7.5 A 2.5 – 4.4 A
Inlet NW40 (Quick Flange)
Flange Size Outlet NW25 (Quick Flange)
Name of article K-7（Synthetic oil）
Lubricant oil Quantity of oil 0.24 litter
Weight Approx. 54 kg
Size 298W x 475L x 275H
Atmosphere
temperature 15 to 30 deg. C
Operating
condition Relative
Humidity 20 to 80% (Condensation must not exist)
Pollution Degree Pollution Degree 2
Maximum Operating Altitude 2000m
Utility Requirements
Voltage [50/60 Hz] 100-120 V 200-240 V 200-240 V
Tolerable voltage
fluctuation Note5）±10％Note6）
±10％(Max 250V)
Power
Supply Capacity 1.5 kVA
Note7）
Safety standard NRTL（UL61010-1）
CE Marking

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PM10U EBARA CORPORATION
Note 1) The gas ballast mechanism is an option.
Note 2) N2 supply pressure for N2 gas ballast mechanism
Note 3) Maximum water vapor pumping rate with gas ballast valve fully opened.
Note 4) Actual value may not be in the range depending on facility.
Note 5) This describes tolerable voltage range, and is not steady voltage.
Note 6) Do no use this product with over 250V even it is within the tolerable range.
Note 7) For more details about oversea safety standard, contact one of our sales offices listed in the
back.

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PM10U EBARA CORPORATION
3.5 External View
260
475
(225)
119 132
7.5
298
215
99
35
(47)
290
1515
260
275
470
(46) 28030 38 30 46
Oil Level Gauge
4×M10
6×φ11
Eyebolt 2×M8
Outlet NW25 Gas ballast portInlet NW40
5
CN2
CN1
Operation panel
I/O connector
Power Input
Main Switch
Direction of
ventilation
Please secure the space for cooling front and rear side: 100 mm or more lateal side: 50 mm or more
Single phase
100/200V
Main Switch
Power Input
CN2
Operation panel
CN1
I/O connector
Three phase
200V
Cooling air inlet
Cooling air inlet Cooling air outlet

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PM10U EBARA CORPORATION
3.6 Pumping Performance
0
100
200
300
400
500
600
700
800
1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05
Pressure[Pa]
Pumping speed [L/min]
Gas ballast valve : ON Gas ballast valve : OFF
Note) The gas ballast mechanism is an option.

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PM10U EBARA CORPORATION
4. INSTALLATION OF THE PUMP
The pumping performance of the dry vacuum pump is affected by the opening diameter and length of
the inlet / outlet pipe and the performance of the installed peripheral units.
Moreover, when corrosive gas is pumped, proper maintenance is required for each use to operate the
pump normally for a long period. When the pump is installed, valves and pipes are recommended to be
installed beforehand to secure higher maintenance efficiency.
Adopt pipes and sealing parts in consideration of corrosion resistance.
4.1 Installation
4.1.1 Installation
WARNING
Lifting up the pump by crane or forklift must be operated by licensed worker, and make sure
surrounding area is secured.
When the pump is lifted, do not get close to its underneath; the pump may fall down and it may
cause injury.
･Use appropriate wire or crane for lifting up the weight of the pump.
･Figure 4.1 shows that the angle of wire
when lifting up the pump,
should be equal apportion.
CAUTION
Do not step on the pump, otherwise falling or turnover may be caused. Do not place anything
on the pump as it may damage the product.
Do not lift the pump by your self. Lift the pump by hand with two (2) persons. Do not use sling
or the like to lift the pump as the handles are not designed to be used with slings.
Fig. 4.1 How to Lifting up the Pump
Within 60°
M8×2 positions
Eyebolt for lifting up