Edwards iXL120N User manual

A541-11-880
Issue A Original
Instruction Manual
iXL120 Dry Pump System

iXL Dry Pump Numbering
Speed
1
Application
1
2
3
4
Clean
N2 purge (N)
Clean
N2 purge (N)
OEM
OEM
End User
End User
Other Accessories
0
1 None
Water Constant Flow Valve (1 l/m)
Tool Interface
0
1
2
3
4
5
6
7
None
MicroTIM C3
MicroTIM SPI
MicroTIM E73
MicroTIM TEL
MicroTIM LAM
MicroTIM Hitachi
MicroTIM MCM
Water Fittings
0
1
2
3
5
None
3/8 Quick Connect
1/4 Quick Connect
9/16 JIC
1/4 NPT Male 90°
120 m3/hr
A541

This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble
the technical file, that the product(s)
iXL120 A5411wxyz
where w is 1,2,3 or 4 depending on the application
where x = 0,1,2,3,4,5,6 or 7 depending on the Tool Interface type supplied
where y = 0,1,2,3 or 5 depending on the type of water fittings supplied
where z = 0 if no additional accessories are supplied and 1 if a cooling water constant flow valve
is fitted.
And their accessories:
Disconnect Box 200-460 V 50-60 Hz A50806000
EMS button D37491500
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN1012-2:1997 Compressors and Vacuum Pumps Safety Requirements.
Part 2 - Vacuum Pumps.
EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. Part 1 General Requirements.
EN 61326-1: 2006 Electrical Equipment for Measurement, Control and Laboratory Use
- EMC Requirements. (Industrial Location Immunity – Class A Emissions)
ANSI/UL61010-1:2004 Safety Requirements for Electrical Equipment for Measurement,
+ Rev 2008 Control and Laboratory Use – Part 1: General Requirements.
SEMI S2-0709 Environmental, Health and Safety Guideline for Semiconductor
Manufacturing Equipment.
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
2002/95/EC* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates
only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this
statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply
to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
Note: This declaration covers all product serial numbers from the date this Declaration was signed
onwards.
19.08.2010 Shoreham
Sia Abbaszadeh, Chief Technical Office
r
Date and Place
P200-05-020 Issue A

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Contents
A541-11-880 Issue A
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 The iXL120 system ....................................................................................................... 3
1.4 Priority of control ........................................................................................................ 4
2 Technical data ....................................................................................5
2.1 Technical data ........................................................................................................... 5
2.2 Loading .................................................................................................................... 6
2.3 Electrical data ............................................................................................................ 7
2.4 Electrical connections and cables ..................................................................................... 9
2.5 Cooling water data .....................................................................................................11
2.6 Nitrogen purge system (iXL120N series pumps) ....................................................................11
3 Installation ....................................................................................... 13
3.1 Safety .....................................................................................................................13
3.2 Removing the iXL120 system from the packaging .................................................................14
3.3 Locate the iXL120 .......................................................................................................15
3.4 Stacking the iXL120 system ...........................................................................................16
3.5 Connect the iXL120 system to your vacuum/exhaust system and interstage connection (if fitted) .......17
3.6 Leak test the iXL120 system ..........................................................................................18
3.7 Connect the nitrogen supply ..........................................................................................18
3.7.1 Flammable/pyrophoric materials ....................................................................................18
3.7.2 Gas purges ...............................................................................................................19
3.8 Connect the electrical supply to the dry pumping system .......................................................19
3.8.1 Electrical connector locking mechanism ............................................................................21
3.9 Connect to your emergency stop circuit ............................................................................22
3.10 Connect to your control equipment .................................................................................22
3.10.1 Inputs .....................................................................................................................23
3.11 Connect the cooling-water hoses .....................................................................................23
3.12 Commission the iXL120 system .......................................................................................24
4 Operation ........................................................................................ 25
4.1 Start-up ..................................................................................................................25
4.2 Status indicators ........................................................................................................26
4.3 Manual shut-down ......................................................................................................26
4.4 Automatic shut-down ..................................................................................................27
4.5 Unplanned shut down and alarms ....................................................................................27
4.6 Emergency stop (EMS) ..................................................................................................28
4.7 Restart the pump after an emergency stop or automatic shut-down ..........................................28
5 Maintenance ..................................................................................... 29
5.1 Safety and maintenance frequency ..................................................................................29
5.2 Relocate the system for maintenance ...............................................................................30
5.3 Draining the cooling water ............................................................................................31
5.4 General maintenance ..................................................................................................32
5.5 Inspect the connections, pipelines, cables and fittings ..........................................................32
6 Transportation, storage and disposal ........................................................ 33
6.1 Transportation ..........................................................................................................33
dcs/8604/04/2010

A541-11-880 Issue A
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
6.2 Storage ...................................................................................................................33
6.3 Disposal ...................................................................................................................33
7 Service, spares and accessories .............................................................. 35
7.1 Introduction .............................................................................................................35
7.2 Service ....................................................................................................................35
7.3 Accessories ...............................................................................................................35
7.3.1 Disconnect box ..........................................................................................................35
7.3.2 EMS button ...............................................................................................................36
7.3.3 Accessory modules ......................................................................................................36
7.3.4 Pump Display Terminal (PDT) .........................................................................................36
7.3.5 PDT adaptor cable ......................................................................................................36
7.3.6 PDT holster ..............................................................................................................36
7.3.7 PDT extension cable ....................................................................................................37
7.3.8 Lifting / seismic / stacking brackets (pair) .........................................................................37
7.3.9 Water flow control valve (1 lpm) .....................................................................................37
7.3.10 Stainless steel water fittings (pair) ..................................................................................37
7.3.11 Main power connector .................................................................................................37
7.3.12 EMS terminator plug ....................................................................................................38
7.3.13 Interface modules ......................................................................................................38
Appendix A1 Pump Display Terminal (PDT) .......................................................... 41
A1.1 PDT ........................................................................................................................41
A1.1.1 LEDs .......................................................................................................................41
A1.1.2 Pump start / stop and control ........................................................................................42
A1.1.3 Warning / alarm display and acknowledgement ...................................................................42
A1.1.4 Menus .....................................................................................................................43
Appendix A2 Troubleshooting .......................................................................... 47
A2.1 Warnings .................................................................................................................47
A2.1.1 LED warning indicators .................................................................................................47
A2.1.2 PDT warnings ............................................................................................................47
A2.2 Alarms ....................................................................................................................48
A2.2.1 LED alarm indicators ...................................................................................................48
A2.2.2 PDT alarms ...............................................................................................................48
A2.3 Inverter warnings and alarms .........................................................................................49
A2.4 Other ......................................................................................................................52
A2.4.1 Pump controller communications ....................................................................................52
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 iXL applications chart ................................................................................................... 2
2 The controls/connectors ................................................................................................ 3
3 The front control and indicator panel ................................................................................ 4
4 Centre of gravity and levelling foot loads ........................................................................... 6
5 Connect the electrical supply .........................................................................................21
6 Electrical connector locking mechanism ............................................................................21
7 Accessories ...............................................................................................................39

© Edwards Limited 2010. All rights reserved. Page iii
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Contents
A541-11-880 Issue A
Tables
Table Page
1 General technical data .................................................................................................. 5
2 General technical data .................................................................................................. 5
3 Levelling foot loads (refer to Figure 4) ............................................................................... 6
4 General electrical data ................................................................................................. 7
5 Electrical ratings: ultimate vacuum and extracted (700 torr) exhaust load condition ....................... 7
6 Electrical ratings: full load conditions ............................................................................... 8
7 Electrical ratings: over-load condition (175% full load for 60s) .................................................. 8
8 Branch circuit protection / fusing ..................................................................................... 9
9 Electrical connections ................................................................................................... 9
10 Input supply wire assembly ...........................................................................................10
11 Water cooling system data ............................................................................................11
12 Nitrogen supply .........................................................................................................11
13 Tool connectors and mating tool connector kits ...................................................................23
14 Tool input signals to the pump system ..............................................................................23
15 Pump protection sensors ..............................................................................................27
16 Disconnect box ..........................................................................................................35
17 EMS button ...............................................................................................................36
18 Accessories modules ....................................................................................................36
19 PDT ........................................................................................................................36
20 PDT adaptor cable ......................................................................................................36
21 PDT holster ..............................................................................................................36
22 PDT extension cable ....................................................................................................37
23 Lifting / seismic / stacking brackets ................................................................................37
24 Water flow control valve ..............................................................................................37
25 Stainless steel water fittings ..........................................................................................37
26 Main power connector .................................................................................................37
27 EMS terminator plug ....................................................................................................38
28 Interface modules ......................................................................................................38
A1 Pump start / stop and control ........................................................................................42
A2 Pump start / stop and control ........................................................................................42
A3 Normal menu ............................................................................................................43
A4 Status menu .............................................................................................................43
A5 Setup menu ..............................................................................................................44
A6 Commands menu ........................................................................................................44
A7 Display inverter fault history menu ..................................................................................44
A8 Fit accessory menu .....................................................................................................45
A9 IP configuration menu ..................................................................................................45
A10 Display menu ............................................................................................................46
A11 Display menu select line ...............................................................................................46
A12 Display menu units ......................................................................................................46
A13 Warnings .................................................................................................................47
A14 Alarms ....................................................................................................................49
A15 Hexadecimal to digital conversion ...................................................................................50
A16 Inverter alarm codes ...................................................................................................50
A17 Inverter warnings codes ...............................................................................................51

A541-11-880 Issue A
Page iv © Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400-40-100
Semiconductor pumping application guide P411-00-090
Trademark credits
Han®is a registered trademark of Harting Electric GmbH
EtherCon®is a registered trademark of Neutrik® AG
Fomblin®is a registered trademark of Solvay Solexis SpA

© Edwards Limited 2010. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
A541-11-880 Issue A
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards iXL120(N) Pump. You must
use your pump as specified in this manual otherwise the protection provided by the equipment may be impaired.
Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and/or process.
The units throughout this manual conform to the SI international system of units of measurement.
The following warning labels are on the pump and in this manual:
The following two warning labels, Pressurised and Risk of explosion, only appear in this manual:
Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - Refer to accompanying
documentation. Warning - Risk of electric shock.
Warning - Hot surfaces. Warning - Moving parts present.
Warning - Heavy object.
Warning - Use protective equipment.
Protective Earth (ground).
Warning - Pressurised. Warning - Risk of explosion.

A541-11-880 Issue A
Page 2 © Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
1.2 Applications
The iXL120 is a low energy, compact dry pump system that can be mounted on tool or remotely. It is designed to give
extremely low cost of ownership. The iXL120 is intended only for use on clean duty applications as defined in Figure 1.
The iXL120 is not intended for use with potentially flammable, corrosive, toxic or other hazardous gases since these
gases or oxygen can mix within the pump system. Users must complete their own risk assessment and implement any
necessary controls for pumping potentially flammable gases. Edwards can offer advice and assistance in matching
your pump to your application. If you use the iXL120(N) system on an application for which it is not intended it may
invalidate your warranty.
Figure 1 - iXL applications chart

© Edwards Limited 2010. All rights reserved. Page 3
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Introduction
A541-11-880 Issue A
1.3 The iXL120 system
The iXL120 is a compact dry pump system that can be mounted on tool or remotely. The pumping system can be
controlled from the front control panel, a PDT accessory or by the tool via a MicroTIM.
Figure 2 - The controls/connectors
1. Nitrogen purge connection (if fitted)
2. Cooling water supply connection
3. Transit/lifting/seismic bracket (if fitted, 2 off)
4. Cooling water return connection
5. Exhaust outlet connection
6. Mains power connection
7. Protective Earth (ground) stud M5
8. Electrical connector locking mechanism
9. Accessory interface
10. System control/PDT connection
11. Ethernet installed LED
12. Ethernet connection
13. Ethernet active LED
14. Indicator LED - Tool in control
15. Emergency stop (EMS) connection
16. Tool interface connection (if fitted)
17. Pump inlet
17a. Pump inlet (NW50 connection)
17b. Pump inlet (ISO63 connection)

A541-11-880 Issue A
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
Figure 3 - The front control and indicator panel
1.4 Priority of control
The iXL120 system can be controlled by one of a number of sources: the front control panel (refer to Figure 3), a
Pump Display Terminal (PDT) accessory or from the tool via the MicroTIM. Only one of these can have control of the
iXL120 system at any one time. That is, once one of these has control of the iXL120 system, control requests from
the others are denied until control is released by the first.
An LED is provided on the front panel, which illuminates to indicate that the pump is ‘in control’. An LED is provided
on the rear panel which illuminates to indicate that the tool is ‘in control’. The PDT accessory can identify which
source is ‘in control’ and also has an LED to indicate if the PDT itself is ‘in control’.
Item Indication
1 Start button/indicator LED (green)
2 Stop button
3 Local control button/indicator LED (green)
4 Power on indicator LED (green)
5 Warning indicator LED (yellow)
6AlarmindicatorLED(red)
7 Idle mode active indicator LED (green)

© Edwards Limited 2010. All rights reserved. Page 5
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Technical data
A541-11-880 Issue A
2Technicaldata
2.1 Technical data
Table 1 - General technical data
Type Characteristics Value Units
Dimensions (L x W x H) 450 x 230 x 275 mm
Mass (excluding packaging) 59 kg
Noise level (at ultimate) <55 dB (A)
General Vibration level at inlet <1.5 mm s-1
Vibration to the floor (when docked) <0.05 mm s-1
Initial force to push the pump 0.06 kN
Sustained force to push the pump 0.04 kN
Warm up time to nominal pumping performance 45 minutes
Performance
Typical peak pumping speed (no gas purge/cold
pump) 110 65 m3h-1
cfm
Ultimate pressure 0.01
8mbar mTorr
Connections Pump inlet flange ISO63/NW50
Exhaust gas outlet NW25
Table 2 - General technical data
Item Description Rating Units
Operating conditions
Intended use Indoor use
Ambient temperature
range:
Operating 5 to 40 °C
Storage -45 to 55 °C
Maximum relative
humidity: 80% for temperatures up to 31 °C decreasing linearly to 50% relative humidity at 40 °C
Maximum operating
altitude Up to 2000 m
Pollution degree II (IEC 61010) (Normally only non-conductive pollution
occurs. Occasionally, however, temporary conductivity
caused by condensation must be expected)
Atmosphere Non flammable and non-corrosive
Materials in contact
with process gas
Pump, shafts and rotors Cast iron, SG iron, aluminium and steel
Seals PTFE, Methacrylate Ester and Fluoroelastomer
Gas system Stainless steel, aluminium, PTFE and fluoroelastomer
Degree of protection
provided by enclosure Enclosure protection when installed IP31D (EN60529: Degrees of protection provided by enclosures)

A541-11-880 Issue A
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Technical data
2.2 Loading
Figure 4 - Centre of gravity and levelling foot loads
Table 3 - Levelling foot loads (refer to Figure 4)
Levelling foot identifier Levelling foot load (kg)
113
212
318
416

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Technical data
A541-11-880 Issue A
2.3 Electrical data
Table 4 - General electrical data
Description Rating Units
Input supply voltage, 3-phase, a.c., rms 200 - 460 ±10% V
Input supply frequency 50 - 60 ±5 Hz Hz
Input supply wiring configuration 3 wire plus Earth (ground)
Input supply branch circuit protection requirements Refer to Table 8
Input supply voltage un-balance Voltage un-balance should NOT exceed 2%, when
assessed over any one minute period. %
Input supply short-circuit rating 30 (absolute maximum rating) kA
System Earthing 200 - 240 V: TT; TN and IT
(including corner-Earth supplies)
380 - 460 V: TT; TN and IT
(excluding corner-Earth supplies)
Second protective Earth (ground) conductor Must be fitted with a cross-sectional area at least
equal to the phase conductor size.
Installation category Over-voltage category II (IEC 60664-1)
Typical Earth leakage*
*Typical Earth leakage values were measured at steady-state conditions.
Note that higher leakage currents may occur:
i) under transient conditions such as power on or pump acceleration or
ii) with certain supply configurations such as Earthed phase or
iii) with abnormal supply configurations such as a missing phase or unbalanced supply voltages
Contact Edwards for more information about configuration requirements for Earth leakage reduction.
<3.5 mA
Table 5 - Electrical ratings: ultimate vacuum and extracted (700 torr) exhaust load condition
Electrical sub-system: ultimate vacuum (0.01 mbar) load rating*
*The electrical sub-system ratings, detailed in Table 5, assume an input short-circuit rating of 30 kA.
Input supply
voltage Input supply frequency Input supply current Input supply
power Displayed power / motor power†
†The displayed power consumption, in Table 5, is a typical value and does NOT include the power
consumption of the pump’s internal auxiliary power-supply. This auxiliary power-supply is used to power the
pump’s motor-controller, pump-controller and customer accessories.
(V) (a.c., rms) (Hz) (A) (a.c., rms) (A) (Repetitive
Peak) (kW) (kW)
200 50 4.0 16.2 0.55 0.52
200 60 3.9 15.2 0.55 0.52
240 50 3.3 13.6 0.55 0.52
240 60 3.2 12.9 0.55 0.52
380 50 2.2 9.0 0.55 0.52
380 60 2.1 8.8 0.55 0.52
460 50 1.8 7.7 0.55 0.52
460 60 1.8 7.5 0.55 0.52

A541-11-880 Issue A
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Technical data
Table 6 - Electrical ratings: full load conditions
Electrical sub-system: continuous / 100% full load ratings*
*The electrical sub-system ratings, detailed in Table 6, assume an input short-circuit rating of 30 kA.
Input supply
voltage Input supply frequency Input supply current Input supply power Displayed power / motor power†
†The displayed power consumption, in Table 6, does NOT include the power consumption of the pump’s
internal auxiliary power-supply. This auxiliary power-supply is used to power the pump’s motor-controller,
pump-controller and customer accessories.
(V) (a.c., rms) (Hz) (A) (a.c., rms) (A) (Repetitive
Peak) (kW) (kW)
200 50 9.5 36.2 1.65 1.53
200 60 10.4 38.9 1.65 1.53
240 50 9.3 35.8 1.65 1.53
240 60 9.0 33.7 1.65 1.53
380 50 5.8 22.5 1.65 1.53
380 60 5.7 21.5 1.65 1.53
460 50 4.8 18.8 1.65 1.53
460 60 4.8 18.1 1.65 1.53
Table 7 - Electrical ratings: over-load condition (175% full load for 60s)
Electrical sub-system: over-load ratings*
*The electrical sub-system ratings, detailed in Table 7, assume an input short-circuit rating of 30 kA.
Input supply
voltage Input supply frequency Input supply current Input supply
power Displayed power / motor power†
†The Displayed Power consumption, in Table 7, does NOT include the power consumption of the pump’s
internal auxiliary power-supply. This auxiliary power-supply is used to power the pump’s motor-controller,
pump-controller and customer accessories.
(V) (a.c., rms) (Hz) (A) (a.c., rms) (A) (Repetitive
peak)
(kW) (kW)
200 50 15.1 52.9 2.85 2.62
200 60 15.3 54.1 2.85 2.62
240 50 13.4 49.2 2.85 2.62
240 60 14.5 52.8 2.85 2.62
380 50 9.9 36.6 2.85 2.62
380 60 9.6 34.6 2.85 2.62
460 50 8.2 30.2 2.85 2.62
460 60 8.0 28.9 2.85 2.62

© Edwards Limited 2010. All rights reserved. Page 9
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Technical data
A541-11-880 Issue A
2.4 Electrical connections and cables
Table 8 - Branch circuit protection / fusing
Description Rating Units
Minimum fuse current rating 16 - (200 – 240 V a.c., rms / 50 – 60 Hz)
10 - (380 – 460 V a.c., rms / 50 – 60 Hz) A
Maximum fuse current rating 32 - (200 – 460 V a.c., rms / 50 – 60 Hz) A
Minimum fuse current breaking capacity 30 kA
Maximum fuse current breaking capacity 200 kA
Fuse voltage rating, a.c., rms 600 V
Recommended UL fuse class*
*UL 248 and CSA C22.2 No. 248 low voltage North American Fuses: the recommended fuses provide SLOW
protection from inductive and highly inductive loads. This applies to circuits for motors, transformers,
lighting and so forth.
CC, G, J, or RK5
Recommended IEC fuse type†
†IEC 60269 low voltage fuses: the recommended fuse type, gG, is a general purpose fuse essentially for
conductor protection.
gG
Table 9 - Electrical connections
Description Mating connector description / external supply rating Internal supply
rating
Mains connection
refer to installation section for
wiring diagram
Han-Modular®Compact:
40 A; 2.5 – 8 mm2
Ethernet connection Standard RJ45 type or Neutrik®EtherCon® RJ45 (IEEE802.3i 10 Base
T Ethernet)
System/PDT interface XLR type 5-way plug 24Vdc, 750mA*
EMS XLR type 6-way plug
External emergency stop switch:
1 – supply; 2 – return 24 V d.c., 100 mA
Comms 24 V supply:
5 – supply; 6 – return 24 V d.c., 750 mA*
Accessory interface 15-way D-Type socket
Analogue measurement for water
flow meter:
Pin 1 – input; Pin 5 – common
Active accessory module:
Pin 3 – RS485 (A); Pin 10 – RS485 (B)
Pump running status contacts:
Pin 6 – Dry pump running
(normally open)
Pin 15 – Running common
30 V a.c., 1A, 60 V d.c., 0.55A
Gate valve:
Pin 4 – Gate valve drive transistor
(open collector)
Gate valve position sense:
Pin 7 – ‘Closed’; Pin 8 – ‘Open’

A541-11-880 Issue A
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Technical data
Power supplies:
Pin 12 – Accessory 24 V supply
(standby)
Pin 13 – Accessory 24 V supply
(main)†
Pin 5 – 0 V supply common
24 V d.c., 750 mA*
24 V d.c., 200 mA
Serial comms:
Pin 9 – RS232 Transmit
Pin 11 – RS232 Receive
Tool interface connection (if fitted) Refer to Section 3.10 Nominal voltage
rating 24 V
*The System interface, the EMS interface and the Accessory interface give a combined current rating of
750 mA.
†This supply will be disconnected in the event of an emergency stop.
Table 10 - Input supply wire assembly
Description Rating Units
Minimum conductor cross sectional area
6.0 / 10
(200 – 240 V a.c., rms / 50 – 60 Hz)
2.5 / 12
(380 – 460 V a.c., rms / 50 – 60 Hz)
mm2/ AWG
Conductor wire type Stranded wires
Conductor insulation min temperature rating 75 °C
Table 9 - Electrical connections (continued)
Description Mating connector description / external supply rating Internal supply
rating

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Technical data
A541-11-880 Issue A
2.5 Cooling water data
2.6 Nitrogen purge system (iXL120N series pumps)
Table 11 - Water cooling system data
Description Rating Units
Maximum supply pressure 6.9
100 barg psig
Minimum supply pressure 2.5
36 barg psig
Minimum flow rate required*
*The table specifies minimum water flow rate that is required at 30 °C cooling water. The water flow
rate can be reduced if colder water is supplied. Contact Edwards for additional information. Maximum flow
of 5 l min-1 to prevent condensation at 10 °C cooling water.
1lmin
-1
Cooling-water supply temperature range 10 – 30 °C
Water type Treated or non-corrosive industrial
Maximum particle size 0.03 mm2
Acidity 6.5 to 8.0 pH
Hardness < 100 ppm of CaCO3
(<100 mg of CaCO3per litre)
Resistivity 0.001 ≤ρ≤1Mohm-cm
Solids (turbidity) < 100 ppm
Materials in contact with cooling water Stainless steel, polyamide,
fluoroelastomer, nitrile, PVDF and PTFE
Water inlet connection per customer specification
Water outlet connection per customer specification
Table 12 - Nitrogen supply
Gas Module Items Reference data
Nitrogen supply interface 1/4 inch (6.35 mm) tube
Maximum supply pressure 7 barg, 7 x 105Pa, 100 psig
Minimum supply pressure 3.0 barg, 3 x 105Pa, 45 psig
Minimum purity ISO 8573 solids class 1
Typical flow at 3.0 bar 4 slm

A541-11-880 Issue A
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