Edwards STP Series User manual

MT-21E-AA2-D
STP Series Turbomolecular Pumps
TMS Unit for STP-301CVB3
(Second Edition - d)
Instruction Manual
Copyright 2021 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Read this Manual thoroughly and keep it with
the Turbomolecular Pump Instruction Manual.
September 2021

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TMS Unit INSTRUCTION MANUAL for STP-301CVB3
1
SAFETY PRECAUTIONS
The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump
and its peripheral equipment.
To avoid personal injury and prevent product and/or peripheral equipment damage, observe the
Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety
standards and so on).
If the equipment is used in a manner not specified by Edwards, the protection provided by the
equipment may be impaired.
Symbols
The following symbols are used in this manual:
Death or Serious Personal Injury
Failure to follow the guidelines marked with this symbol may result in death or serious
personal injury.
Minor Personal Injury, Product and/or Peripheral equipment Damage
Failure to follow the guidelines marked with this symbol may result in minor personal
injury, product and/or peripheral equipment damage.
NOTICE
Items you must follow during operation and maintenance.
ATTENTION: refer to this manual.
Edwards Japan Limited (hereafter called Edwards) cannot perfectly anticipate circumstances of
all of hazards or problems. The scope of anticipation is limited to the precautions included in the
and specified in this manual.

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
2
◇The STP pump operates at high temperatures while the baking heater is in operation.
NEVER touch the STP pump and its peripheral equipment while the baking heater is in
operation.
Operators can burn hands.
◇Execute the following to prevent an accident caused by the gas.
•Check the properties of the gas to be used, referring to the Material Safety Data Sheet
(MSDS) you obtain from the gas supplier. (explosive・combustible・toxic・corrosive, etc)
And, keep MSDS and a safety advice of gas supplier.
•Warn of the danger of the gas with the warning label when the use gas is hazardous
chemicals materials.
•Always execute gas purge in the pump with the inert gas, and then exhaust residual
gases thoroughly from the STP pump when removing the STP pump from the vacuum
equipment.
•Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
◇Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is used
for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial
waste in accordance with guidelines given by the national and/or local government.
Residual gas in the STP pump may cause an accident which, for certain gases, may involve
serious injury or death.
◇NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
◇TMS unit does not stop automatically when an abnormality/error is detected.
Establish a sequence so that equipments can stop when an abnormality/error occurs.
◇Always check the STP pump has stopped, then turn OFF the primary power (disconnect the
power cable) and isolate the electrical energy source (Lockout/Tagout) on the vacuum
equipment before proceeding to any of the following operations. Failure to do so may cause
the STP pump to rotate accidentally, which may injure operators seriously or result in electric
shock.
•Connect or disconnect cables;
•Perform maintenance and inspections such as replacement of; or
•Perform investigations into probable causes and action/measures taken in the event of
occurrence of a problem.
◇Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so
may result in electric shock or product damage.
◇Always use the power voltage specified on the nameplate for the primary power voltage of
the STP control unit. Wire the power cable securely. Incorrect wiring may result in electric
shock or product damage.
◇Perform investigations into probable causes and remove them before restarting the STP
pump in the event of the occurrence of a problem. The use of the abnormal STP pump may
result in product damage.

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3
INTRODUCTION
Thank you very much for purchasing Edwards’ Temperature Management System (TMS)
unit.
The Temperature Management System (TMS) maintains the temperature of the
turbomolecular pump by monitoring the temperature with thermistor in the base of the
turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the TMS unit for STP-301CVB3:
Model name:
Pump type
STP-301CVB3:
Chemical specific*1
The pump with a TMS unit has some specifications which are different from the STP-301
series. Refer to Section 7 in this manual for details.
For the "Safety Precautions", installation, operation and maintenance, read the "STP-
301/451 Series Instruction Manual".
In this manual, the above Temperature Management System unit series is collectively
referred to as the "TMS unit".
PRECAUTIONS
1) No part of this manual may be reproduced in any form by any means without prior
written permission from Edwards.
2) Edwards pursues a policy of continuing improvement in design and performance of this
product. The right is, therefore, reserved to vary specifications and design without notice.
Understand that the product you purchased and its contents including specifications
described in this manual may differ.
REQUEST
If you find inaccuracies or errors in this manual, advise distributor or the nearest Service
office.
*1 Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
4
LIMITED WARRANTY
This WARRANTY applies to the customer to whom Edwards has delivered this product.
The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and
Services, or during the period specified in the agreement made by and between the customer
and Edwards.
1. ITEM WARRANTED:
1) This warranty applies only to the product delivered from Edwards to the customer.
2) If any defect is found during this period, Edwards will, at its option, repair or
recondition the product free of charge. The costs for repair or replacement of the
product after the warranty period has passed will be at the customer's own charge.
2. DISCLAIMER:
Edwards makes no warranty with respect to any damage occurred due to any of the following
during the warranty period:
1) Handling, operation or maintenance other than that specified herein;
2) Failure to follow any of the warnings or cautions enumerated under
or ;
3) Installation, operation or maintenance using parts which are not specified by Edwards;
4) Maintenance personnel other than those authorized by Edwards or service office have
disassembled, reconditioned, or tampered the product;
5) Defect resulting from the not-specified use of the product.
6) When the product is used under special conditions without obtaining the written
consent of Edwards (Particular gases, strong magnetic field and the radiation are
added to the product.);
7) Defect resulting from deposit;
8) Water cooling system defect resulting from water quality used;
9) Defect resulting from the installation of the product (Exclude the installation by
authorized personnel.)
10) Deterioration in the external because of use (Discoloration, scratches and so forth)
11) Product damage occurred during transport or other factors not attributable to Edwards;
12) Product breakage or damage due to natural disasters, fire or other external factors;
13) Deterioration in the basic performance due to the use of the product beyond limits of
the use;
14) Any direct, incidental or consequential damage resulting from the use of the product;
15) When continuously operated without overhaul after the WARNING indication
("WARNING" message) on the LCD display;
16) Overhaul and replacement of maintenance parts;
3. SPARE PARTS:
⚫Fuse and air cooling fan for control unit
⚫Touch down bearing
⚫Heater

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
5
TABLE of CONTENTS
SAFETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1Configuration..................................................................................1-1
2Name and Function of Each Part....................................................2-1
2.1 TMS Control Unit ............................................................................................................2-1
2.1.1 Remote Input/Output Signal Connector (“INTERFACE” Connector)......................2-3
3Installation ......................................................................................3-1
3.1 Operating Environment...................................................................................................3-1
3.2 Preparation for STP Pump..............................................................................................3-1
3.2.1 Installation for the Water Cooling Unit.....................................................................3-1
3.2.2 Installation for the TMS Heater................................................................................3-2
3.2.3 Installation for the TMS Valve .................................................................................3-3
3.3 Installation for the TMS Control Unit...............................................................................3-5
3.4 Cable Connection ...........................................................................................................3-6
3.4.1 Name and Dimensions of Each Cable....................................................................3-6
3.4.2 STP Pump and TMS Control Unit Connection........................................................3-6
4Operation........................................................................................4-1
4.1 Operation Start................................................................................................................4-1
4.2 Temperature Control Operation......................................................................................4-1
4.3 Operation Stop................................................................................................................4-1
4.4 Operation when malfunction occur.................................................................................4-2
5Maintenance...................................................................................5-1
5.1 Replacing the Fuse.........................................................................................................5-1
6Specifications of the TMS Unit........................................................6-1
6.1 Specifications of the TMS Unit .......................................................................................6-1
6.2 Accessories.....................................................................................................................6-1
7Specifications of the STP Pump......................................................7-1
7.1 Specifications of the STP Pump.....................................................................................7-1

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
6
TABLES
Table 2.1 Remote Input/Output Signal Connector..................................................................2-3
Table 2.2 Rated Contacts for Relays CR3 and 4 ...................................................................2-4
Table 5.1 Recommended Spare Parts ...................................................................................5-1
Table 6.1 Specifications of the TMS Unit................................................................................6-1
Table 6.2 Accessories.............................................................................................................6-1
Table 7.1 Specifications of the STP Pump.............................................................................7-1
FIGURES
Figure 1.1 TMS Unit Block Diagram.......................................................................................1-1
Figure 2.1 TMS Control Unit...................................................................................................2-2
Figure 2.2 Pin Arrangement....................................................................................................2-3
Figure 2.3 “INTERFACE” Connector ......................................................................................2-4
Figure 3.1 Installation for the Water Cooling Unit...................................................................3-1
Figure 3.2 Installation for the TMS Heater..............................................................................3-2
Figure 3.3 Installation for the TMS Valve................................................................................3-4
Figure 3.4 External Dimensions of TMS Power Cable...........................................................3-6
Figure 3.5 External Dimensions of TMS Sensor Cable..........................................................3-6
Figure 6.1 External Appearance of the TMS Control Unit......................................................6-2
Figure 7.1 External Appearance of the STP Pump ................................................................7-2

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
1-1
1 Configuration
1) TMS control unit
⚫It controls the TMS heater and the TMS valve.
2) TMS heater (for base)
⚫It heats the base of the STP pump.
Controlling the heater stabilizes the STP pump’s temperature.
A cable with connector is a standard accessory.
3) TMS valve (3 port)
⚫It controls the cooling water flow quantity, and stabilizes the STP pump’s
temperature.
A cable with connector is a standard accessory.
4) TMS power cable
⚫It supplies the power supply to the TMS heater and TMS valve.
5) TMS sensor cable
⚫For connections of the TMS control unit and TMS sensor.
The built-in sensor in the base of the STP pump detects the temperature through
this cable.
Figure 1.1 TMS Unit Block Diagram

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TMS Unit INSTRUCTION MANUAL for STP-301CVB3
2-1
2 Name and Function of Each Part
2.1 TMS Control Unit
(1) "POWER IN" connector (J1)
⚫For input power source. (primary side, for TMS heater and TMS valve)
(2) "HEATER OUT" connector (J2)
⚫For TMS heater output.
(3) "COOLING VALVE OUT" connector (J3)
⚫For TMS valve output.
(4) "ISO VLV OUT" connector (J4)
⚫For solenoid valve heater output.
This output voltage is supplied by "POWER IN" connector directory.
NOTICE
◇Procure the heater for solenoid valve at your site.
(5) "TC IN" connector
⚫For TMS sensor input.
(6) "INTERFACE" connector
⚫Control power input connector
⚫POWER ON and ALARM signal output connector
(7) "POWER ON" LED (Green LED)
⚫Illuminates during operation.
(8) "ALARM" LED (Red LED)
⚫Illuminates when any of the malfunction occur. (See Section 4.4, "Operation when
malfunction occur")
(9) "F1" fuse (0.5A)
⚫For control power.
(10) "F2" fuse (2A)
⚫For TMS heater.
(11) "F3" fuse (0.5A)
⚫For TMS valve.
(12) "F4" fuse (1.5A)
⚫For Solenoid valve heater.

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
2-2
Figure 2.1 TMS Control Unit

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
2-3
2.1.1 Remote Input/Output Signal Connector ("INTERFACE" Connector)
Use it in accordance with Table 2.1 and Figure 2.3.
This connector is of D-Sub1type (9-pins, pin type).
The screw for connector is No.4-40UNC-2B.
Five abbreviations are used in the following table:
N.O: Normal Open, N.C: Normal Close, COM: Common,
IN: Input Pin, OUT: Output Pin
NOTICE
◇Procure the connector for remote connection at your site.
Table 2.1 Remote Input/Output Signal Connector
Pins
Method of use
(1)
(2)
POWER ON
N.O OUT
Pins for outputting the POWER ON state signal.
These pins are closed during POWER ON.
(3)
(5)
ALARM OUT
(4)
COM
N.C
N.O
Pins for outputting the ALARM state signal.
When an abnormality/error is detected under the POWER
ON state, the pins between (3)-(4) are closed, and the pins
between (3)-(5) are opened.
(See Section 4.4, "Operation when malfunction occur")
If malfunction is detected, using this signal to stop the pump.
(6)
(9)
START
IN
0VDC
IN
15VDC
IN
Pins for inputting the control power.
Input 15 VDC between (6) pin and (9) pin, TMS control unite
is start.
The 0 VDC side is (6) pin, the 15VDC side is (9) pin.
(7), (8)
Unused pins. DO NOT use.
Figure 2.2 Pin Arrangement
1: D-Subminiature connector (Conforms to MIL-C-24308)

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
2-4
(1)
(2)
(3)
(4)
CR3
(6)
(7)
CR4
"INTERFACE" connector
(5)
COM
ALARM OUT N.O OUT
N.C OUT
(8)
(9)
COM
POWER
N.O OUT
START IN (0VDC)
unused pin
START IN (15VDC)
unused pin
START signal
input terminal
ALARM state signal
output terminal
N.O: Normal Open
N.C: Normal Close
COM: Common
IN：Input Terminal
OUT: Output Terminal
POWER ON state signal
output terminal
Figure 2.3 “INTERFACE”Connector
Table 2.2 shows rated contacts for relays CR3 and 4. (see Figure 2.3)
Table 2.2 Rated Contacts for Relays CR3 and 4
Resistance Load
(COSφ= 1)
Induction Load
(COSφ= 0.4)
(L/R = 7 ms)
Rated Load
AC120 V 0.4 A
DC 30 V 2 A
AC125 V 0.2 A
DC 30 V 1 A
Rated Current
3 A
Maximum Contact
Point Voltage
AC250 V
DC220 V
Maximum Contact
Point Current
3 A
Maximum Open/Close
Capacity
AC50 VA
DC60 W
AC25 VA
DC30 W
Minimum Applicable
Load
DC10 mV, 10μA

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3-1
3 Installation
Read the "STP pump Instruction Manual" for the installation
of the STP pump and STP control unit.
3.1 Operating Environment
Install the TMS unit in a place meeting the following requirements:
Ambient temperature
0 to 40 °C
Ambient relative humidity
30 to 95 % (no dew condensing)
Other
Install a place meeting required environment for the
STP pump and STP control unit.
3.2 Preparation for STP Pump
3.2.1 Installation for the Water Cooling Unit
1) Unpack the supplied water cooling unit. (See Figure 3.1)
2) Attach the water cooling unit using 4 screws at screw holes for legs. (8-M8, depth 16
mm)
Figure 3.1 Installation for the Water Cooling Unit

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3-2
3.2.2 Installation for the TMS Heater
Wind the base part of the pump with the TMS heater. (See Figure 3.2)
◇Wind the TMS heater around the surface of the STP pump tightly.
If the TMS heater is not wound tightly, the loose parts will overheat.
◇DO NOT apply excessive force to the cable for TMS heater.
Figure 3.2 Installation for the TMS Heater

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3-3
3.2.3 Installation for the TMS Valve
◇DO NOT apply excessive force to the cable for TMS valve.
◇Pay special attention to the port label (IN, NO, NC) on the TMS valve. Cooling water
does not flow normally when the TMS valve is not connected to the apprpriate port.
◇Secure cooling water pipe to prevent water leakage.
NOTICE
◇Procure and connect the cooling water pipe and connect the TMS valve at your site.
◇Use clean water as much as possible.
Cooling water containing foreign materials may corrode or clog the cooling water
pipe.
When the cooling system is clogged with foreign materials, clogs may possibly be
removed by feeding cooling water reversibly.
◇When the STP pump is overheated due to shortage or suspension of water, the
protective function detects the overheated condition in the STP pump and stops the
STP pump.
As a further safety procedure, attach a flow switch to the cooling water exit so that
the STP pump stops if abnormal cooling water flow occurs (a flow switch is
available on the market).
◇When the STP pump is not to be used for a long period of time or it is to be moved
after use, introduce compressed air from one side of the inlet/outlet port so that no
water will remain inside.
Connect the TMS valve to the cooling water pipe according to Figure 3.3.
⚫Outside diameter of the cooling water ports are 1/4 inch.
⚫Use cooling water under the following conditions:
Amount of water: 1.5 L/min or more
Temperature: 10 to 20 °C
Water pressure: 2.9×105Pa(3 kgf/cm2) or lower

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3-4
Figure 3.3 Installation for the TMS Valve

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3-5
3.3 Installation for the TMS Control Unit
TMS control unit can be install with two screws.
Refer to Figure 6.1, "External Appearance of the TMS Control Unit" for the dimensions of
installing hole.
◇Tighten all installing screw. Doing so may result in product damage.
◇NEVER bend nor place heavy objects on the cable. Connect the cables securely.
Doing so may result in electric shock or product damage.

TMS Unit INSTRUCTION MANUAL for STP-301CVB3
3-6
3.4 Cable Connection
3.4.1 Name and Dimensions of Each Cable
Power source side pin
Remark
L
AC90 to 110 V (single phase)
N
50/60 Hz
GND
Ground
Figure 3.4 External Dimensions of TMS Power Cable
Figure 3.5 External Dimensions of TMS Sensor Cable
3.4.2 STP Pump and TMS Control Unit Connection
See Figure 1.1, "TMS Unit Block Diagram", connect the pump and TMS control unit as
described below:
1) Connect the TMS sensor cable between the "TMS sensor connector" of the STP pump
and "TC IN" connector of the TMS control unit.
2) Connect the cable of TMS valve to "COOLING VALVE OUT" connector (J3) of the TMS
control unit.
3) Connect the cable of TMS heater to "HEATER OUT" connector (J2) of the TMS control
unit.
4) Connect the TMS power cable to "POWER IN" connector (J1) of the TMS heater cable.