Edwards nES EX Series User manual

edwardsvacuum.com
nES SINGLE STAGE EX SERIES
ROTARY VANE PUMPS
INSTRUCTION MANUAL
Publication Number: A351-18-880
Issue: A
Original Instructions

A351-18-880A - Copyright notice
Page 2
Copyright notice
All rights reserved. This material is copyright protected. Do not reproduce, distribute, or
transmit any part of this publication in any form or by any means. Do not photocopy, record
or otherwise reproduce by electronic or mechanical methods without the prior written
permission of the copyright owner.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited.
Disclaimer
The content of this manual can change from time to time without notice. Edwards accepts no
liability for any errors that my appear in this manual nor does it make any expressed or implied
warranties regarding the content. So far as is reasonably practicable Edwards has ensured that
its products have been designed and constructed so as to be safe and without risks when
properly installed and used in accordance with Edwards operating instructions. Edwards
accepts no liability for loss of profit, loss of market or any other indirect or consequential loss
whatsoever.
Product warranty and limit of liability are dealt with in Edwards standard terms and conditions
of sale or negotiated contract under which this document is supplied.
You must use the nES Single Stage EX-Series Rotary Vane Pumps as described in this manual.
Read this manual before you install, operate and maintain the nES Single Stage EX-Series
Rotary Vane Pumps.

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO 9001:2015.
This declaration is based on the requirements of EN ISO 17050-1 and the relevant directives.
P200-10-196-A
Edwards Ltd,
Innovation Drive,
Burgess Hill,
West Sussex,
RH15 9TW, UK
The following product:
Product designation: nES---ex
Type designation: 40 / 65 / 100 / 200 / 300 / 630
part number: nES40ex / nES65ex / nES100ex / nES200ex / nES300ex / nES630ex and their variants
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
2014/35/EU The safety objectives of the Low Voltage Directive 2014/35/EU were
complied with in accordance with Appendix 1 No. 1.5.1 of Machinery
Directive 2006/42/EC.
2014/34/EU
ATEX directive on use in potentially explosive atmospheres
ATEX Notified Body :
LABORATOIRE CENTRAL DES INDUSTRIES ELECTRIQUES
S.A.S. au capital de 15.745.984
RCS Nanterre B 408 363 174
33 avenue du Général Leclerc
F –92266 FONTENAY AUX ROSES
LCIE Notified body AR N° : LCIE 18 AR 017
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
And 2015/863/EU
Restriction of certain hazardous substances (RoHS) Directive
Based on the relevant requirements of harmonised standards:
EN ISO 80079-36:2016 Explosive atmospheres –Part 36: Non-electrical equipment for explosive atmospheres
–Basic method and requirements
EN 13463-6:2005 Non-electrical equipment for use in potentially explosive atmospheres –Part 6:
Protection by control of ignition source "b"
This covers all product serial numbers from the date of this declaration onwards.
Cologne, April 19, 2018 Valence, April 19, 2018
___________________________ __________________________
Andries Desiron Joseph Schott
VP Engineering General Manager Product Company Valence
Industrial Vacuum Division

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Page 5
Contents
A351-18-880A - Contents
Safety 9
Key to the symbols .........................................................................................................9
Description 12
Principle of operation ..................................................................................................12
Inside the pump (process gas) ...........................................................................13
Outside the pump ..............................................................................................13
Ignition temperatures of gases/vapours that can be present ...........................13
Potential Ignition Sources ..................................................................................14
Protective measures ..........................................................................................14
Technical data 16
Technical characteristics nES40ex ................................................................................16
Technical characteristics nES65ex ................................................................................17
Technical characteristics nES100ex ..............................................................................18
Technical characteristics nES200ex ..............................................................................19
Technical characteristics nES300ex ..............................................................................20
Technical data nES630ex ..............................................................................................21
Ordering information ...................................................................................................31
Accessories ...................................................................................................................33
nES Single Stage ex series and booster combinations .................................................33
Spare parts ...................................................................................................................34
Lubricants ..........................................................................................................34
Transport and storing 35
Transport and packaging ..............................................................................................35
Mounting orientation ...................................................................................................35
Storage .........................................................................................................................36
Installation 38
Installation ...................................................................................................................38
Connection to the system ............................................................................................39
Intake side ..........................................................................................................39
Exhaust Side .......................................................................................................39
Electrical connections ..................................................................................................40
Motor protection device ....................................................................................41
Temperature sensor PT100 ................................................................................42
Oil level Switch ...................................................................................................42
Over pressure sensor .........................................................................................42
Associated electrical equipment ........................................................................42
Start the pump .............................................................................................................48
Operation 50
Operation .....................................................................................................................50
Pumping of non-condensible gases ...................................................................50

Page 6
A351-18-880A - Contents
Pumping of condensible gases and vapours ......................................................50
Shut down ....................................................................................................................52
Ultimate pump pressure ..............................................................................................52
Maintenance 53
Safety Information .......................................................................................................53
Spare parts .........................................................................................................53
Maintenance Intervals .................................................................................................54
Service at Edwards Vacuum Service Technology Centre .............................................54
Maintenance work .......................................................................................................55
Checking the oil level .........................................................................................55
Checking the oil condition .................................................................................55
Observe the safety regulations ..........................................................................56
Oil change ....................................................................................................................56
Observe the safety regulations ..........................................................................56
Replacing the exhaust filters ........................................................................................57
The pumps: nES40ex, nES65ex, nES100 .............................................................57
Obey the safety regulations ...............................................................................58
nES200ex ............................................................................................................58
nES300ex ............................................................................................................61
Earthing continuity test .....................................................................................62
nES300ex ............................................................................................................63
Checking the float valve ...............................................................................................64
Cleaning the intake port dirt trap ................................................................................65
Checking the isolation valve .........................................................................................65
Cleaning the gas ballast air filter ..................................................................................66
Cooling coil cleaning (air cooled pumps) .....................................................................66
Check and re-tighten the V-belts on nES630ex .................................................66
Tension meter ....................................................................................................66
Lubricating the bearings ....................................................................................68
Replacement of electrical motor .......................................................................69
Procedure for checking the ignition prevention system ....................................69
Motor installation (for bare shaft non-ATEX pumps) ...................................................70
Motor installation instructions ..........................................................................70
Motor installation instructions for nES200ex pump ..........................................71
Electrical connections ..................................................................................................75
Fault finding 76
Spare parts 78

Page 7
List of Figures
A351-18-880A - List of Figures
Figure 1: Dimensional drawing nES40ex ................................................................................22
Figure 2: Dimensional drawing nES65ex ................................................................................23
Figure 3: Dimensional drawing nES100ex ..............................................................................24
Figure 4: Dimensional drawing nES200ex ..............................................................................25
Figure 5: Dimensional drawing nES300ex ..............................................................................26
Figure 6: Dimensional drawing nES630ex ..............................................................................27
Figure 7: Pumping speed nES40ex .........................................................................................28
Figure 8: Pumping speed nES65ex .........................................................................................28
Figure 9: Pumping speed nES100ex .......................................................................................29
Figure 10: Pumping speed nES200ex .....................................................................................29
Figure 11: Pumping speed nES300ex .....................................................................................30
Figure 12: Pumping speed nES630ex .....................................................................................30
Figure 13: Wiring ....................................................................................................................41
Figure 14: Pump System Overview .........................................................................................43
Figure 15: Decision Diagram ...................................................................................................44
Figure 16: Wiring diagram ......................................................................................................45
Figure 17: Example of electrical diagram ...............................................................................46
Figure 18: Example of electrical diagram ...............................................................................47
Figure 19: Exhaust filter replacement: nES40ex, nES65ex, nES100 .......................................57
Figure 20: nES40ex, nES65ex and nES100EX earth continuity check .....................................58
Figure 21: Replace the exhaust filters ....................................................................................59
Figure 22: nES200ex earth continuity check ..........................................................................61
Figure 23: nES300ex earth continuity check ..........................................................................63
Figure 24: Test earth continuity .............................................................................................64
Figure 25: Using the tension meter ........................................................................................67
Figure 26: nES100ex Motor coupling half position ................................................................70
Figure 27: nES300ex Motor coupling half position ................................................................71
Figure 28: Drain the oil from the pump ..................................................................................71
Figure 29: Remove the pump coupling housing .....................................................................72
Figure 30: Coupling housing removal .....................................................................................72
Figure 31: Proper orientation .................................................................................................73
Figure 32: Turbine support spacing ........................................................................................73
Figure 33: Tighten assembly ...................................................................................................74
Figure 34: Reassemble ...........................................................................................................74
Figure 35: Replace pump cover ..............................................................................................75
Figure 36: nES40 Ex ATEX CAT 2 Spares Parts ........................................................................79
Figure 37: nES65 Ex ATEX CAT 2 Spares Parts ........................................................................81
Figure 38: nES100 Ex ATEX CAT 2 Spares Parts ......................................................................83
Figure 39: nES200 Ex ATEX CAT 2 Spares Parts ......................................................................85
Figure 40: nES300 Ex ATEX CAT 2 Spares Parts (1 of 3) ..........................................................87

Page 8
List of Tables
A351-18-880A - List of Tables
Table 1: Technical characteristics nES40ex ............................................................................16
Table 2: Technical characteristics nES65ex ............................................................................17
Table 3: Technical characteristics nES100ex ..........................................................................18
Table 4: Technical characteristics nES200ex ..........................................................................19
Table 5: Technical characteristics nES300ex ..........................................................................20
Table 6: Technical data nES630ex ..........................................................................................21
Table 7: Ordering information ATEX category II pumps .........................................................31
Table 8: Ordering information bare shaft pump ....................................................................31
Table 9: Connections ..............................................................................................................33
Table 10: Accessories .............................................................................................................33
Table 11: Spare parts ..............................................................................................................34
Table 12: Lubricant .................................................................................................................34
Table 13: Maintenance schedule ...........................................................................................54
Table 14: Tension values with Goodyear tension meter ........................................................68
Table 15: Tension values with PIX tension meter ..................................................................68
Table 16: Amount of grease per bearing ................................................................................68
Table 17: Fault finding ............................................................................................................76
Table 18: nES40 Ex ATEX CAT 2 maintenance kit ...................................................................80
Table 19: nES40 Ex ATEX CAT 2 repair kit ...............................................................................80
Table 20: nES65 Ex ATEX CAT 2 maintenance kit ...................................................................82
Table 21: nES65 Ex ATEX CAT 2 repair kit ...............................................................................82
Table 22: nES100 Ex ATEX CAT 2 maintenance kit .................................................................84
Table 23: nES100 Ex ATEX CAT 2 repair kit .............................................................................84
Table 24: nES200 Ex ATEX CAT 2 maintenance kit .................................................................86
Table 25: nES200 Ex ATEX CAT 2 repair kit .............................................................................86
Table 26: nES300 Ex ATEX CAT 2 maintenance kit .................................................................88
Table 27: nES300 Ex ATEX CAT 2 repair kit .............................................................................88

Page 9
A351-18-880A - Safety
Safety
Key to the symbols
Important instructions relating to technical safety and safe operation are emphasised by
symbols.
Note:
Emphasises additional application information and other useful information provided within
these operating instructions.
Edwards nES Single Stage EX Series ATEX Cat 2 vacuum pump will be referred to as “the pump”
throughout the manual.
The pump has been designed for safe and efficient operation when used properly and in
accordance with these operating instructions. It is the responsibility of the user to carefully
read and obey all safety precautions described in this section and throughout the operating
instructions. The pump must only be operated in the proper condition and under the
conditions described in the operating instructions.
The pump must be operated and maintained by trained ATEX personnel only. Consult local,
state, and national agencies regarding specific requirements and regulations. Address any
further safety, operation and/or maintenance questions to our nearest office.
The pump is not designed:
For pumping of aggressive, corrosive gases or gases mixtures.
For pumping of oxygen or other highly reactive gases with a greater concentration
than atmospheric concentration.
For all these cases, special materials must be used. If in doubt, contact Edwards.
See the limits of use indicated in the CE declaration of conformity.
WARNING:
Warnings are given where failure to obey the instruction could result in injury or death to
people.
CAUTION:
Cautions are given where failure to obey the instruction could result in damage to the
equipment, associated equipment or process.
WARNING:
The pump has been specifically designed and manufactured to meet the requirements for
Equipment-group II Category 2 of the ATEX Directive, that is Directive 2014/34/EU
concerning equipment and protective systems intended for use in potentially explosive
atmospheres. Failure to obey the following precautions can result in serious personal
injury.

Page 10
A351-18-880A - Safety
WARNING:
Never expose any part of the body to vacuum. There is a danger of injury. Never operate
the pump with an open and thus accessible inlet. Vacuum connections as well as oil fill
and oil drain openings must not be opened when the pump is being operated.
WARNING:
When the pump is operating, some surfaces could reach a temperature greater than 80 °C
(176 °F). There is a risk of burn by touching.
WARNING:
Depending on the process involved, dangerous substances and oil can release from the
pump. Take the necessary safety precautions.
WARNING:
When working on the pump system always obey the operating instructions.
WARNING:
Disconnect the unit from the power supply before starting any work.
WARNING:
Take applicable precautions to insure that the pump cannot start.
WARNING:
If hazardous gases are pumped it will be necessary to determine the nature of the hazard
involved and take the applicable safety precautions.
WARNING:
Observe all safety regulations.
WARNING:
Take adequate safety precautions prior to opening the intake or exhaust port.

Page 11
A351-18-880A - Safety
Failure to obey the following precautions could result in damage to the equipment.
Note:
Never use discarded seals. Always assemble using new seals.
Note:
Obey the instructions concerning environment protection when discarding used oil or exhaust
filters.
Note:
The pump must be packaged in such a way that it will not be damaged during shipping, and so
that no harmful substances can release from the package.
Note:
We reserve the right to alter the design or any data given in these operating instructions. The
illustrations are not binding.
It is mandatory that these operating instructions be read and understood prior to the vacuum
pump installation and start.
The pump has been manufactured according to the latest technical standards and safety
regulations. If not installed properly or not used as directed, dangerous situations or damage
might occur. Under certain operating conditions, dangerous situations can occur when
running the vacuum pump. If this happens, please contact our local office.
CAUTION:
Liquid and solid particles or dust must not enter into the pump. Install the adequate
filters, separators and/or condensers. In case of doubt consult Edwards.
CAUTION:
The intake line of the pump must never be connected to a device with over atmospheric
pressure. Design the exhaust line so that no pressure higher than 1.15 bara (0.15 bar) can
occur. Corresponding pressure regulating devices to be installed by the user. Exhaust
must be collected and gases treated in function of their composition.
CAUTION:
Operating of the pump without oil or operating with incorrect direction of rotation can
destroy the pump.

Page 12
A351-18-880A - Description
Description
The pump is designed to pump gases aligned to ATEX marking (gas group and instruction
manual recommendations) from a Zone 1 environment between atmospheric pressure and
end pressure of the pump. When removing condensable vapours, a gas ballast must be used
to avoid condensation.
Principle of operation
The rotor mounted eccentrically in the pump cylinder has three vanes which divide the pump
chamber into several compartments. The volume of each changes periodically with the
rotation of the rotor. As the rotor rotates, the intake portion of the pumping chamber expands
and sucks gas through the intake port. The gas passes through the dirt trap and the open
isolation valve and enters the pump chamber. As the rotor rotates further, the vane separates
part of the pump chamber from the intake port. This part of the pump chamber is reduced,
and the gas is compressed. At slightly above atmospheric pressure the gas is expelled from the
chamber via the exhaust valve.
Oil injected into the pump chamber serves to seal, lubricate and cool the pump. The oil
entrained with the compressed gas is coarsely trapped in the oil case by deflection. Then fine
filtering occurs in the exhaust filter elements. The proportion of oil in the exhaust gas is thus
reduced below the visibility threshold (over 99% entrapment rate).
Oil trapped in the exhaust filters is returned to the inlet chamber via an oil return line.
To prevent gas flowing at atmospheric pressure from the oil reservoir into the intake port, the
oil return line is controlled by a float valve.
The oil cycle is maintained by the pressure difference existing between the oil casing (pressure
above or equal atmospheric pressure) and the intake port (pressure below atmospheric
pressure). On part of the oil is taken from the oil casing and flows via the oil filter bypass to
the bearing points of the rotor and to the pump chamber. The other part of oil injected in the
pump does not run through the oil filter bypass.
A fan running on the motor shaft generates the necessary cooling air. The oil is also fed,
through a cooling coil, or in case of water cooled pumps, flows through a water oil heat
exchanger controlled by a thermostatic valve.
The pumps are fitted with:
PT100 temperature sensor
Oil level switch
Oil casing pressure transmitter.
Pumps depending of their part number are equipped with a gas ballast device. If opened, a
controlled amount of air called "gas ballast" is admitted into the pump chamber. This gas
ballast prevents condensation (up to the limit of water vapour tolerance specified in Technical
data on page 16) when pumping condensible gases or vapours.
Unintentional venting of the vacuum chamber as well as oil suck back when shutting down the
pump are prevented by the integrated anti suck back valve. This valve is not a safety device
and its correct operation and tightness can only be assured if the valve plate and sealing zone
are kept clean and in good condition.
If oil returns are to be avoided by all means, it is required to install a vacuum safety valve on
the pump suction flange. Please consult us.

Page 13
A351-18-880A - Description
Inside the pump (process gas)
The inside (process gas side) of this vacuum pump is designed and constructed so as not to
present an ignition source in cases of expected malfunction. It is therefore correct for use in
situations in which explosive atmospheres caused by gases, vapours, mists can occur
occasionally in normal operation (that is, Zone 1).
The pump and its accessories are not designed for pumping dust, liquids, or reactive,
aggressive or corrosive gases and vapours, explosive or unstable substances, pyrophoric
gases, oxidising agents or oxygen enriched atmospheres.
Outside the pump
The outside of this vacuum pump is also so designed and constructed so as not to present an
ignition source in cases of expected malfunction. It is therefore correct for use in situations in
which explosive atmospheres caused by gases, vapours, mists can occur occasionally in
normal operation, that is, Zone 1.
Places where explosive atmospheres in air can occur are classified in terms of three zones on
the basis of the frequency and duration of the occurrence of an explosive atmosphere. These
are designated Zone 0, 1, 2 where gases, vapours or mists and Zone 20, 21, 22 where the
explosive atmosphere is caused by dusts. The definitions for these Zones are given in Annex I
of the "ATEX Directive for users" that is, Directive 99/92/EC on minimum requirements for
improving the safety and health protection of workers potentially at risk from explosive
atmospheres.
Guidance on how to classify a hazardous area is provided in Directive 99/92/EC and its
accompanying Guide (COM (2003)515) together with the European Standard EN 60079-10 (EN
60079-10 Electrical apparatus for explosive gas atmospheres Part 10 Classification of
hazardous areas). In addition the Directive 99/92/EC and its Guide provide further information
on explosion prevention and protection. They can be downloaded from the EU web site:
www.europa.eu.int under:
www.europa.eu.int/comm/employment_social/health_safety/publicat/
com_1999_92_ce_en.pdf
Ignition temperatures of gases/vapours that can be present
The pump is only correct for use in situations in which potentially explosive gas or vapour
atmospheres have an ignition temperature greater than 200 °C. Ignition temperatures of
gases and vapours can be obtained from the Safety Data Sheet (SDS).

Page 14
A351-18-880A - Description
Potential Ignition Sources
An Ignition hazard assessment has been done according to the European Standard
EN 13463-1. (EN 13463-1 Non-electrical equipment for potentially explosive atmospheres -
Part 1: Basic method and requirements) This has identified that the following ignition sources
can occur during operation of the pump:
Protective measures
Hot surfaces
The compression of gas which occurs during normal operation of a vacuum pump results in
heating and hot surfaces. The pump has been specially modified and tests have shown that
when operated under the conditions specified in this manual, the internal parts of the pump
which could come into contact with a potentially explosive atmosphere could reach a
maximum temperature of 130 °C. The maximum temperature is reached after continuously
operating the pump with an inlet pressure of between 300 mbar and 400 mbar. The actual
temperature reached depends on the inlet pressure. Similarly the outside of the pump could
reach a maximum surface temperature of 130 °C (These temperatures include the safety
allowances specified in EN13463-1).
The pump is fitted with a thermal sensor (PT100) at the pump stator. The thermal sensor must
be connected so that the pump is automatically switched off if the temperature rises above
105 °C which can happen under mal-operations, for example, due to blocked oil filters. This
should activate before the pump reaches this maximum temperature and if installed correctly
will automatically stop the pump. The control system should be configured such that the
pump does not automatically restart as the temperature decreases but should require a
manual restart.
Note:
Higher maximum surface temperatures will occur if the pump is filled and used with oils other
than Edwards type Ultragrade Extend oil.
Hot gases
Hot gases are produced inside the pump due to compression of the gas in normal operation
and are released at the exhaust. These should be ducted to a safe place.
Potential ignition sources Comments
Hot surfaces Inside and outside due to:
Gas compression, vane friction, and so forth
Deposits on stator/rotor slots
Ingress of particles.
Hot gases Produced inside pump and released at the exhaust.
Mechanical sparks Will not occur in normal operation - surfaces covered with
oil inside the pump, sufficient clearance outside the pump.
Electrical sparks Motor and accessories.
Static electricity Possible if conducting parts of pump are not earthed (vanes,
lip-seal, exhaust filter, float valve).
Chemical reaction Possible with process fluid/gas.

Page 15
A351-18-880A - Description
Mechanical sparks
Mechanical sparks will not occur in normal operation as the internal pump surfaces are
covered with oil. The external cooling fan is designed and constructed with sufficient
clearance to prevent contact and frictional rubbing.
Note:
Do not allow particles to go into the pump to prevent the formation of hot spots due to rubbing
or friction, where necessary an applicable ATEX filter can be used.
Electrical sparks
The motor and accessories supplied with this pump are certified to the same classification as
the outside of the pump. These should be installed and used in accordance with the
manufacturer's instructions attached to this manual.
Static electricity
The pump should be adequately earthed to prevent the accumulation of static electricity. This
will be achieved if the electrical earth cable to the motor is properly connected. No hazardous
charge generation will occur on the plastic cooling fan and cowl or on the plastic coupling
sleeve in normal operation. (For further information on hazards from static electricity see
CENELEC report CLC/TR 50404:2003 Electrostatics - Code of practice for the avoidance of
hazards due to static electricity.)
Note:
Only original Edwards replacement exhaust gas filter cartridges and gas inlet filter cartridges
should be used as these have a special construction to make sure of proper grounding.
The pump accessories must be grounded as well.
Chemical reactions
The pump should not be used with reactive gases that could produce a exothermic chemical
reaction.

Page 16
A351-18-880A - Technical data
Technical data
Technical characteristics nES40ex
These values are valid for the standard variants and with the use of the recommended oils.
Table 1 Technical characteristics nES40ex
50 Hz 60 Hz
Nominal speed*
*To DIN 28400 and following numbers, with standard gas ballast.
m3h-1 44 53
Pumping speed*m3h-1 38.5 47
Ultimate total pressure
without gas ballast*mbar 0.5 0.5
Ultimate total pressure with
standard gas ballast*mbar 1.5 1.5
Ambient temperature 10 to 40 °C
Inlet gas temperature <= 60 °C if inlet pressure is <= 200 mbar, and
<= 40 °C above 200 mbar
Water vapour tolerance with
standard gas ballast 1)
mbar 30 30
Water vapour tolerance with
standard gas ballast
kg.h-1 0.76 0.90
Noise level§
§Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of
1 meter.
dB (A) 58 60
Leak rate mbar.l.s-1 1.10-3 1.10-3
Motor voltage V a.c. 230/400 ±10% 460 ±10%
Motor power kW 1.5 1.8
Type of protection IP55
Rated rotational speed min.-1 1500 1800
Net weight (with oil filling) kg 70 70
Oil capacity l 1
Intake connection DN40 / 1"1/2 ANSI
Exhaust connection DN40 / 1"1/2 ANSI
Conversion factors Pressure units Pumping speed units
mbar Torr Inches Hg
vacuum m3h-1 l.s-1 cfm
1 lb = 0.453 kg 1013 760 0 m3h-1 = m3/h 1 0.278 0.589
1 qt = 0.946 l 400 300 18.12 l.s-1 = l/s 3.60 1 2.12
1 hp = 0.735 kW 133 100 25.98 cfm 1.699 0.472 1
1 rpm = 1 min-1 4 3 29.80
1 inch = 25.4 mm 1 0.75 29.89
0.1 0.75 29.92
1 atmosphere (atm) = 1013 mbar Example: 1 m3h-1 = 0.589 cfm
1 Pa (Pascal) = 0.01 mbar = 10-2 mbar Note: The nominal pumping speed of a
pump at 60 Hz is 20% higher than at 50 Hz
1 bar = 1000 mbar
1 Torr = 1.33 mbar

Page 17
A351-18-880A - Technical data
Technical characteristics nES65ex
These values are valid for the standard variants and with the use of the recommended oils.
Table 2 Technical characteristics nES65ex
50 Hz 60 Hz
Nominal speed*
*To DIN 28400 and following numbers, with standard gas ballast.
m3h-1 59 71
Pumping speed*m3h-1 54 64
Ultimate total pressure
without gas ballast*
mbar 0.5 0.5
Ultimate total pressure with
standard gas ballast*
mbar 1.5 1.5
Ambient temperature 10 to 40 °C
Inlet gas temperature  60 °C if inlet pressure is  200 mbar, and
 40 °C above 200 mbar
Water vapour tolerance with
standard gas ballast*
mbar 30 30
Water vapour tolerance with
standard gas ballast
kg.h-1 1.0 1.2
Noise level§
§Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of
1 meter.
dB (A) 60 64
Leak rate mbar.l.s-1 1.10-3 1.10-3
Motor voltage V a.c. 230/400 ±10% 460 ±10%
Motor power kW 2.2 2.5
Type of protection IP55
Rated rotational speed min.-1 1500 1800
Net weight (with oil filling) kg 83 83
Oil capacity l 2
Intake connection DN40 / 1"1/2 ANSI
Exhaust connection DN40 / 1"1/2 ANSI
Conversion factors Pressure units Pumping speed units
mbar Torr Inches Hg
vacuum m3h-1 l.s-1 cfm
1 lb = 0.453 kg 1013 760 0 m3h-1 = m3/h 1 0.278 0.589
1 qt = 0.946 l 400 300 18.12 l.s-1 = l/s 3.60 1 2.12
1 hp = 0.735 kW 133 100 25.98 cfm 1.699 0.472 1
1 rpm = 1 min-1 4 3 29.80
1 inch = 25.4 mm 1 0.75 29.89
0.1 0.75 29.92
1 atm (atmosphere) = 1013 mbar Example: 1 m3h-1 = 0.589 cfm
1 Pa (Pascal) = 0.01 mbar = 10-2 mbar Note: The nominal pumping speed of a
pump at 60 Hz is 20% higher than at 50 Hz
1 bar = 1000 mbar
1 Torr = 1.33 mbar

Page 18
A351-18-880A - Technical data
Technical characteristics nES100ex
These values are valid for the standard variants and with the use of the recommended oils.
Table 3 Technical characteristics nES100ex
50 Hz 60 Hz
Nominal speed*
*To DIN 28400 and following numbers, with standard gas ballast.
m3h-1 97.5 117
Pumping speed*m3h-1 87.5 105
Ultimate total pressure
without gas ballast*
mbar 0.5 0.5
Ultimate total pressure with
standard gas ballast*
mbar 1.5 1.5
Ambient temperature 10 to 40 °C
Inlet gas temperature  60 °C if inlet pressure is  200 mbar, and
 40 °C above 200 mbar
Water vapour tolerance with
standard gas ballast*
mbar 30 30
Water vapour tolerance with
standard gas ballast
kg.h-1 1.6 1.7
Noise level§
§Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of
1 meter.
dB (A) 61 64
Leak rate mbar.l.s-1 1.10-3 1.10-3
Motor voltage V a.c. 230/400 ±10% 460 ±10%
Motor power kW 3.0 3.6
Type of protection IP55
Rated rotational speed min.-1 1450 1750
Net weight (with oil filling) kg 102 102
Oil capacity l 2
Intake connection DN40 / 1"1/2 ANSI
Exhaust connection DN40 / 1"1/2 ANSI
Conversion factors Pressure units Pumping speed units
mbar Torr Inches Hg
vacuum m3h-1 l.s-1 cfm
1 lb = 0.453 kg 1013 760 0 m3h-1 = m3/h 1 0.278 0.589
1 qt = 0.946 l 400 300 18.12 l.s-1 = l/s 3.60 1 2.12
1 hp = 0.735 kW 133 100 25.98 cfm 1.699 0.472 1
1 rpm = 1 min-1 4 3 29.80
1 inch = 25.4 mm 1 0.75 29.89
0.1 0.75 29.92
1 atm (atmosphere) = 1013 mbar Example: 1 m3h-1 = 0.589 cfm
1 Pa (Pascal) = 0.01 mbar = 10-2 mbar Note: The nominal pumping speed of a
pump at 60 Hz is 20% higher than at 50 Hz
1 bar = 1000 mbar
1 Torr = 1.33 mbar

Page 19
A351-18-880A - Technical data
Technical characteristics nES200ex
These values are valid for the standard variants and with the use of the recommended oils.
Table 4 Technical characteristics nES200ex
50 Hz 60 Hz
Nominal speed*
*To DIN 28400 and following numbers, with standard gas ballast.
m3h-1 180 220
Pumping speed*m3h-1 170 200
Ultimate total pressure
without gas ballast*
mbar 0.15 0.15
Ultimate total pressure with
standard gas ballast*
mbar 0.7 0.7
Ambient temperature 10 to 40 °C
Inlet gas temperature  60 °C if inlet pressure is  200 mbar, and
 40 °C above 200 mbar
Water vapour tolerance with
standard gas ballast*
mbar 40 50
Water vapour tolerance with
standard gas ballast
kg.h-1 5.7 8.5
Noise level§
§Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of
1 meter.
dB (A) 69 73
Leak rate mbar.l.s-1 1.10-3 1.10-3
Motor voltage V a.c. 230/400 ±10% 460 ±10%
Motor power kW 5.5 6.6
Type of protection IP55
Rated rotational speed min.-1 1500 1800
Net weight (with oil filling) kg 160 160
Oil capacity l 5/9
Intake connection DN50 / ANSI 2”
Exhaust connection DN40 / ANSI 2”
Conversion factors Pressure units Pumping speed units
mbar Torr Inches Hg
vacuum m3h-1 l.s-1 cfm
1 lb = 0.453 kg 1013 760 0 m3h-1 = m3/h 1 0.278 0.589
1 qt = 0.946 l 400 300 18.12 l.s-1 = l/s 3.60 1 2.12
1 hp = 0.735 kW 133 100 25.98 cfm 1.699 0.472 1
1 rpm = 1 min-1 4 3 29.80
1 inch = 25.4 mm 1 0.75 29.89
0.1 0.75 29.92
1 atm (atmosphere) = 1013 mbar Example: 1 m3h-1 = 0.589 cfm
1 Pa (Pascal) = 0.01 mbar = 10-2 mbar Note: The nominal pumping speed of a
pump at 60 Hz is 20% higher than at 50 Hz
1 bar = 1000 mbar
1 Torr = 1.33 mbar

Page 20
A351-18-880A - Technical data
Technical characteristics nES300ex
These values are valid for the standard variants and with the use of the recommended oils.
Table 5 Technical characteristics nES300ex
50 Hz 60 Hz
Nominal speed*
*To DIN 28400 and following numbers, with standard gas ballast.
m3h-1 280 340
Pumping speed*m3h-1 240 290
Ultimate total pressure without
gas ballast*
mbar 0.15 0.15
Ultimate total pressure with
standard gas ballast*
mbar 0.7 0.7
Ambient temperature 10 to 40 °C
Inlet gas temperature  60 °C if inlet pressure is  200 mbar, and
 40 °C above 200 mbar
Water vapour tolerance with
standard gas ballast 7.5 Nm3/h*
mbar 10 12
Water vapour capacity with
standard gas ballast 7.5 Nm3/h
kg.h-1 1.3 1.8
Noise level§
§Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of
1 meter.
dB (A) 70 74
Leak rate mbar.l.s-1 1.10-3 1.10-3
Motor voltage V a.c. 230/400 ±10% 460 ±10%
Motor power kW 7.5 9.0
Type of protection IP55
Rated rotational speed min.-1 1500 1800
Net weight (with oil filling) kg 200 200
Oil capacity l 8.5/11.5
Intake connection DN50 / ANSI 2”
Exhaust connection DN40 / ANSI 2”
Conversion factors Pressure units Pumping speed units
mbar Torr Inches Hg
vacuum m3h-1 l.s-1 cfm
1 lb = 0.453 kg 1013 760 0 m3h-1 = m3/h 1 0.278 0.589
1 qt = 0.946 l 400 300 18.12 l.s-1 = l/s 3.60 1 2.12
1 hp = 0.735 kW 133 100 25.98 cfm 1.699 0.472 1
1 rpm = 1 min-1 4 3 29.80
1 inch = 25.4 mm 1 0.75 29.89
0.1 0.75 29.92
1 atm (atmosphere) = 1013 mbar Example: 1 m3h-1 = 0.589 cfm
1 Pa (Pascal) = 0.01 mbar = 10-2 mbar Note: The nominal pumping speed of a
pump at 60 Hz is 20% higher than at 50 Hz
1 bar = 1000 mbar
1 Torr = 1.33 mbar