Edwards STP Series User manual

MT-39E-101-F
Model name Voltage
STP-603/1003 series 200 - 240 Va.c.
100 -120 Va.c.
STP Series Turbomolecular Pumps
STP-603/1003 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Instruction Manual
(B)
:
(This Instruction Manual)
STP
p
ump specific information
Instruction Manual (C): STP control unit Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We,
Manufacture: Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan
EU Representative: Edwards
Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Product Name: Turbomolecular pump
Model Number: STP-603/1003 series
Accessories Covered: Communication Interface (LonWorks, EtherCAT)
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps.
Safety Requirements. Vacuum Pumps
EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
EMC requirements. General requirements
(Immunity: Industrial locations, Emission: Class A)
EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.
Immunity for industrial environments
EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency
disturbance characteristics (Group1, Class A)
EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic
Products with respect to the Restriction of Hazardous Substances
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not
legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
VI-DOC-39-009
M
anufacture:
Y
uji Kato, TMP Technical Senior Manager
,
Edwards Japan Limited
5
th
June
. 201
6
,
Yachiyo
Date and Place
EU representative:
Ian Stones
,
Vice President, Technology
, Edwards
6
th
June
. 201
6
, Burgess Hill
Date and Place

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
Introduction
Installation of the STP pump
Installation of the STP control unit
Operation
Safety functions
Maintenance and inspection
Storage and disposal
Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
Technical data
How to Secure the STP pump
Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
Introduction
Technical data
Installation
Operation
Serial communication protocol
STP-Link
Maintenance
Storage, transportation and disposal
Service, spares, and accessories
Keep the manuals in an easily accessible location.

This page intentionally blank.

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page i
PAGE
i
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 9
1.4 Accessories 10
2 HOW TO SECURE THE STP PUMP 11
2.1 When securing the inlet port with bolts 12
2.2 When securing the inlet port flange with claw clamps 14
2.3 When installing the damper in the inlet port flange 15

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page ii
PAGE
ii ILLUSTRATIONS
Figure Title Page
1 STP-603 series: ICF203/VG150 4
2 STP-603 series: ISO160/ISO160F 5
3 STP-1003 series: ICF253/VG200 6
4 STP-1003 series: ISO200/ISO200F 7
5 STP-1003 series: ISO250/ISO250F 8
6 Label affixing positions for the STP pump 9
7 Example of securing the STP pump
(when securing the inlet port with bolts) 13
8 Example of securing the STP pump
(when securing the inlet port flange with claw clamps) 14
9 Example of securing the STP pump
(when installing the damper in the inlet port flange) 15
TABLES
Table Title Page
1 Tightening torque of bolt 11
2 Maximum torque predicted and recommended securing bolt
for inlet port flange 12
3 Number of claw clamps for flange size 14

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 1
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit
STP-603/1003 series Ultra high-vacuum type SCU-800
Naming convention:
"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-603C).
*1 Corrosion resistant: STP pump with anti-corrosive treatment.

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 2
TECHNICAL DATA
PAG
E
2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item 603 series 1003 series
Flange size Inlet port flange ICF203/VG150/
ISO160/ISO160F
ICF253/VG200/ISO200/
ISO200F/ISO250/ISO250F
Outlet port flange KF40 KF40
Pumping speed N2L/s 650 1000
H2L/s 550 800
Compression ratio N2 >108
H2 105
Ultimate pressure Non-corrosion
resistant type Pa (Torr)
10-8 (10-10) order: ICF flange
10-7 (10-9) order: VG/ISO flange
Corrosion
resistant type Pa (Torr)
10-7 (10-9) order: ICF flange
6.5×10-6 (5×10-8) or less: VG/ISO flange
Maximum working pressure*1Pa (Torr) 1.3×10-2 (1×10-4): Natural air-cooling
Allowable backing pressure*1Pa (Torr) 13 (0.1): Natural air-cooling
Flow rate of purge gas <N2> Pa·m3/s (SCCM) 1.7×10-2 (10): Corrosion resistant type only
Rated speed rpm 35,000
Backup rotational speed*2 rpm Approximately 8,500
Starting time min 6
Stopping time min 6
Noise dB <50 (at 35,000 rpm)
Temperature Management System (TMS) N/A
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Natural air cooling (Water cooling, Air cooling:
At baking and gas pumping)
Recommended backing-pump L/min >1,300
Mass*3kg 31
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
Applicable Control unit SCU-800

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 3
TECHNICAL DATA
1
*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping
speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be
exhausted. Consult Edwards about conditions.
*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
1.1.2 Condition for the water-cooling unit
The water-cooling unit is an optional accessory.
Item Specification
Port type Rc 1/4 (Female) *1
Flow rate L/min 2
Water temperature °C 5 to 25
Water pressure MPa (kgf/cm2) 0.3 (3)
*1 Standard type

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 4
TECHNICAL DATA
PAG
E
4
1
1.2 External appearance of the STP pump
Figure 1 - STP-603 series: ICF203/VG150
No. Item Description
1 Inlet port flange ICF*1203
2 Inlet port flange VG*2150
3 Height of the purge port (only for corrosion resistant type)
4 Bending dimension of the STP
connection cable
5 Screw hole of legs M10*2 depth 20
6 Outlet port flange KF*240
7 STP connector
8 Screw hole for legs 8-M10*2 depth 24
9 Purge port KF*210 (only for corrosion
resistant type)
10 Viewed from arrow A
*1 JVIS
*2 JIS

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 5
TECHNICAL DATA
1
Figure 2 - STP-603 series: ISO160/ISO160F
No. Item Description
1 Inlet port flange ISO*2160
2 Inlet port flange ISO*2160F
3 Height of the purge port (only for corrosion resistant type)
4 Bending dimension of the STP
connection cable
5 Screw hole of legs M10*1 depth 20
6 Outlet port flange KF*140
7 STP connector
8 Screw hole for legs 8-M10*1 depth 24
9 Purge port KF*110 (only for corrosion
resistant type)
10 Viewed from arrow A
11 Magnified view of the inlet port
flange
ISO160
*1 JIS
*2 ISO

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 6
TECHNICAL DATA
PAG
E
6
1
Figure 3 - STP-1003 series: ICF253/VG200
No. Item Description
1 Inlet port flange ICF*1253
2 Inlet port flange VG*2200
3 Height of the purge port (only for corrosion resistant type)
4 Bending dimension of the STP
connection cable
5 Screw hole of legs M10*2 depth 20
6 Outlet port flange KF*240
7 STP connector
8 Screw hole for legs 8-M10*2 depth 24
9 Purge port KF*110 (only for corrosion
resistant type)
10 Viewed from arrow A
*1 JVIS
*2 JIS

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 7
TECHNICAL DATA
1
Figure 4 - STP-1003 series: ISO200/ISO200F
No. Item Description
1 Inlet port flange ISO*2200
2 Inlet port flange ISO*2200F
3 Height of the purge port (only for corrosion resistant type)
4 Bending dimension of the STP
connection cable
5 Screw hole of legs M10*1 depth 20
6 Outlet port flange KF*140
7 STP connector
8 Screw hole for legs 8-M10*1 depth 24
9 Purge port KF*110 (only for corrosion
resistant type)
10 Viewed from arrow A
11 Magnified view of the inlet port
flange
ISO200
*1 JIS
*2 ISO

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 8
TECHNICAL DATA
PAG
E
8
1
Figure 5 - STP-1003 series: ISO250/ISO250F
No. Item Description
1 Inlet port flange ISO*2250
2 Inlet port flange ISO*2250F
3 Position of the purge port (only for corrosion resistant type)
4 Bending dimension of the STP
connection cable
5 Screw hole of legs M10*1 depth 20
6 Outlet port flange KF*140
7 STP connector
8 Screw hole for legs 8-M10*1 depth 20
9 Purge port KF*110 (only for corrosion
resistant type)
10 Viewed from arrow A
*1 JIS
*2 ISO

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 9
TECHNICAL DATA
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 7.
Figure 6 - Label affixing positions for the STP pump
1 STP pump installation warning label
3 Heavy product caution label
4 Connector caution label
5 STP pump/control unit caution label
7 Rotational direction instruction label
8 Name plate
9 Company logo
3
1
8
9
45
7

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 10
TECHNICAL DATA
PAG
E
10
1
1.4 Accessories
Item Q’ty Remarks
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Blank flange for purge port 1 KF10 (only for corrosion resistant type)
Clamping ring for purge port 1 KF10 (only for corrosion resistant type)
O-ring washer for purge port 1 KF10 (only for corrosion resistant type)
Leg 8 4 legs are attached to the STP pump
Rubber foot for leg 4
Instruction Manual (B) 1 This manual

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 11
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the installation requirements. Secure the STP
pump to the vacuum equipment as follows:
Design and secure the mounting for the STP pump so that it can withstand the maximum rotational
torque. Refer to Table 2 for torque in pump abnormality.
In some cases, the damper and the claw clamper securing cannot be used.
This will depend on the type of STP pump. Refer to Table 1 for torque tightening the bolts used.
Bolt size Tightening torque (Nm)
M8 12
M10 24
M12 42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.
Damper
Yes
No
With bolts
With claw clamps
Secure the inlet port
Refer to
Section
2.1
Refer to
Section
2.2
Refer to
Section
2.3

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 12
HOW TO SECURE THE STP PUMP
2
2.1 When securing the inlet port with bolts
Refer to Table 2 for maximum predicted torque in any pump abnormality and for the recommended
type of securing bolt for inlet port flange.
Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard.
Secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with
regard to legs and bolts for securing the base are adhered to page 11. Make sure that the
recommended securing bolt is the correct one depending on the method of securing the base.
Pump mode STP-603 series
Flange type VG150 ISO160F*2 ICF203
Torque in pump abnormality
[Nm] 1.5×1041.5×1041.5×104
Base (8 positions) securing No Yes No Yes No Yes
Recommended
securing bolt
for flange
Shape Standard Standard Standard Standard Standard Standard
Size M10 M10 M10 M10 M8 M8
Q’ty 8 8 8 8 20 20
Material*1Stainless steel
Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel
Strength*170 or more 70 or more 70 or more 70 or more 70 or more 70 or more
Pump mode STP-1003 series
Type of flange VG200 ISO200F/ISO250F*2 ICF253
Torque in pump abnormality
[Nm] 1.5×1041.5×1041.5×104
Base (8 positions) securing No Yes No Yes No Yes
Recommended
securing bolt
for flange
Shape
Standard Standard Standard Standard Standard Standard
Size M12 M12 M10 M10 M8 M8
Q’ty 8 8 12 12 24 24
Material*1Stainless steel
Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel
Strength*170 or more 70 or more 70 or more 70 or more 70 or more 70 or more
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054) and AMS6419 (Aerospace Material Specification).
*2 Maximum predicted torque of ISO flange type pump is the same as that of ISO_F flange type pump.
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 13
HOW TO SECURE THE STP PUMP
2
(A) When the base is not secured (B) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base
Figure 7 - Example of securing the STP pump (when securing the inlet port with bolts)
1
2

STP-603/1003 Series Turbomolecular Pump
MT-39E-101-F
Page 14
HOW TO SECURE THE STP PUMP
2
2.2 When securing the inlet port flange with claw clamps
Refer to Table 2 for rotational torque.
When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot
withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum
equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8
attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to
page 11.
For the claw clamp-type, use the required number of claw clamps as specified in Table 3. Position
the claw clamps evenly on the circumference.
Flange size Number of claw clamps
ISO 160 or less 4 or more
ISO 200 to 250 6 or more
ISO 320 or more 8 or more
Table 3 - Number of claw clamps for flange size
1. Vacuum equipment
2. Claw clamps
3. Secure the base
Figure 8 - Example of securing the STP pump
(when securing the inlet port flange with claw clamps)
1
2
3