Edwards STP-301 Series User manual

MT-21E-003-D
BOCEdwards Japan Limited
Dec. 2003
Copyright 2003 BOCEdwards Japan Limited. All rights reserved. Printed in Japan.
STP-301/451 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Third Edition- d)
Read through the Safety Precautions and each section
of this Manual carefully before using the STP pump.
Keep this Manual in a place where you can quickly
access it at any time.

STP-301/451 Series Instruction Manual
1
SAFETY PRECAUTIONS
The Safety Precautions in this Manual constitute guidelines to protect operators, the STPpump
and its peripheral equipment.
To avoid personal injury and prevent product and/or peripheral equipment damage, observe
the Safety Precautions as well as the general safety rules (your country’s laws, regulations,
safety standards and so on).
If the equipment is used in a manner not specified by BOCEdw ards, the protection provided
by the equipment may be impaired.
SYMBOLS
The following symbols are used in this manual:
Death or Serious Personal Injury
Failure to follow the guidelines marked with this symbol may result in death or serious
personal injury.
Minor PersonalInjury, Productand/or PeripheralEquipmentDamage
Failure to follow the guidelines marked with this symbol may result in minor personal
injury, product and/or peripheral equipment damage.
NOTICE
Items you mustfollow during operation andmaintenance.
ATTENTION : refer to this manual.
BOC Edw ards Japan Limited (hereafter called BOCEdw ards) cannot perfectly anticipate
circumstances of all of hazards or problems. The scope of anticipation is limited to the
precautions included in the and specified in this
manual.

STP-301/451 Series Instruction Manual
2
◇ The STPpump is provided with a high-speed rotor. Secure the STPpump according to
the specified method. Failure to do so may lead to serious personal injury, product
and/or peripheral equipment damage if any abnormality/error occurs in the rotor.
◇ The STPpump operates at high temperatures w hile the baking heater is in operation.
NEVER touch the STPpump and its peripheral equipment w hile the baking heater is in
operation.
Operators can burn hands.
◇ Execute the following to prevent an accident caused by the gas.
• Check the properties of the gas to be used, referring to the Material Safety Data
Sheet (MSDS) you obtain fromthe gas supplier. (explosive・combustible・toxic・
corrosive, etc) And, keep MSDS and a safety advice of gas supplier.
• Warn of the danger of the gas w ith the warning label when the use gas is
hazardous chemicals materials.
• Always execute gas purge in the pump with the inert gas, and then exhaust residual
gases thoroughly fromthe STPpump w hen removing the STPpump fromthe vacuum
equipment.
• Secure safety by w earing personal protective equipment when using the gas w hich
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
◇ Exhaust residual gas thoroughly when disposing of the STPpump. If the STPpump is
used for any toxic or reactive gas, always clean the STPpump and dispose of it as
industrial waste in accordance with guidelines given by the national and/or local
government. Residual gas in the STPpump may cause an accident which, for certain
gases, may involve serious injury or death.

STP-301/451 Series Instruction Manual
3
◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas
may corrode the STPpump and damage it.
◇ A hazardous live voltage may exist at connector/terminal that marked .
DO NOT touch the terminal. Doing so may result in electric shock.
When operating connection/disconnection to terminal, always power OFF the STPpump
(Switch the breaker "OFF").
◇ Always check the STPpump has stopped, then turn OFFthe primary pow er (switch the
breaker “OFF”) before proceeding to any of the following operations. Failure to do so
may cause the STPpump to rotate accidentally, w hich may injure operators seriously or
result in electric shock. Moreover, do not remove the connecter while the pump is
rotating. The voltage might be output to connector according to the rotational speed, and
it causes the electric shock or the failure.
• Connect or disconnect cables;
• Performmaintenance and inspections such as replacement of fuses as well as
inspections of deposit and/or the air cooling fan; or
• Performinvestigations into probable causes and action/measures taken in the event
of occurrence of a problem.
◇ DO NOT performthe insulation test (insulation resistance test and w ithstand voltage test)
to the STPcontrol unit and STPpump. When performing the insulation test to your
equipment, turn "OFF" the STPcontrol unit. The varistor for the power supply line
protection is installed to the STPcontrol unit. DO NOTperformthe insulation test with the
varistor installed. Doing so may result in product damage.
◇ When removing or installing the pump or at maintenance and inspection, follow the
precautions below . Failure to do so might hurt your back or cause injuries due to
occurrence of an accident such as fall.
• Use a crane or the like when lifting the heavy product of 18kg or more.
• When lifting by hands for unavoidable reason, two or more people must always
conduct it.
• When lifting STPcontrol unit with handles, support bottomof STPcontrol unit, do not
have only handle.
◇ When "emergency off" (EMO) circuit is installed in the vacuumequipment, consider the
following to stop the STPpump safely w hen the EMO circuit operates.
• When the EMO circuit operates, atmosphere might be introduced in the STPpump
depending upon the backing pump. Unite the exhaust gas systemto prevent
atmosphere frombeing introduced into the STPpump when the EMO circuit operates.
(example: shut the valve) When atmosphere is introduced into the STPpump, the
touch down bearing may not operate normally.
◇ Install the STPcontrol unit not only by fitting it with the front panel fitting screws but also
by supporting it fromthe bottomside.
Fitting the STPcontrol unit with the screw s only cannot sustain its w eight, and therefore
resulting in product damage.
◇ Always use the STPpump and STPcontrol unit with same model name, which are
specified on their ow n nameplate. If use the units having different model names, they may
not be used. In the latter case, contact service office. If you use the units having the
same model name but different serial numbers or change the length of the STPconnection
cable, the tuning is required. They may not function normally when they are used without

STP-301/451 Series Instruction Manual
4
tuning. Once tuning is completed, re-tuning is not required unless the configuration (the
STPpump serial number, the STPcontrol unit serial number, and the STPconnection cable
length) is changed.

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5
STP-301/451
Series
◇ Use the STPconnection cable that has a label affixed
The use of different cables may result in product damage.
◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable.
Doing so may result in electric shock or product damage.
◇ NEVER remove the splinter shield fromthe STPpump. Doing so may result in product
damage.
◇ DO NOT put foreign objects into the STPpump. Doing so may result in product damage.
◇ Always use the pow er voltage specified on the nameplate for the primary power voltage
of the STPcontrol unit. Wire the pow er cable securely. Incorrect wiring may result in
electric shock or product damage.
◇ The wipes used for clean the flange of the pump might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes appropriately
according to the regulations of each national and/or local government.
◇ NEVER turn OFF the primary power (DO NOTsw itch the breaker “OFF”) while the STP
pump is rotating. Doing so may result in product damage.
◇ Performinvestigations into probable causes and remove thembefore restarting the STP
pump in the event of the occurrence of a problem. The use of the abnormal STPpump
may result in product damage.
◇ DO NOT move the STPpump and the STPcontrol unit while the STPpump is in operation.
Doing so may result in product damage.

STP-301/451 Series Instruction Manual
6
INTRODUCTION
Thank you very much for purchasing BOC Edwards’ turbomolecular pump.
The turbomolecular pump is designedto be installed in the vacuum equipment to
exhaust gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-301/STP-451 turbomolecular pump:
Model Name Specification
• STP-301 High-vacuum type
• STP-451 High-vacuum type
• STP-301C High-vacuum type, chemical specific *1
• STP-451C High-vacuum type, chemical specific *1
For the specifications of other models, contactBOC Edwards.
In this manual, the above STP pump series is collectively called the "STP pump."
APPLIED STANDARDS
The STP pumpconformsto the following directivesandstandards:
◇ Applied Directives
• ECMachinery Directive
• ECElectromagnetic Compatibility Directive
• ECLow Voltage Directive
◇ Applied Standards
• EN292-1
• EN292-2
• EN60204-1
• EN61326 (class A)
• EN61000-6-2
◇ Applied Standards (Only a some model)*2
• UL3101-1, 1993 (Electrical Equipment for Laboratory Use; Part 1 : General
Requirements)
*1: Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)
*2: Contact BOC Edwards about recognized model

STP-301/451 Series Instruction Manual
7
PRECAUTIONS
1) No part of this manual may be reproduced in any form by any means without prior
written permission from BOC Edwards.
2) BOC Edwards pursues a policy of continuing improvement in design and
performance of this product. The rightis, therefore, reserved to vary specifications
and design without notice. Understand that the product you purchased and its
contents including specifications described in this manual may differ.
REQUEST
If you find inaccuracies or errors in this manual, advise distributor or the nearest
Service office.

STP-301/451 Series Instruction Manual
8
LIMITED WARRANTY
This WARRANTY applies to the customer to whom BOC Edwards has delivered this
product.
1. WARRANTY PERIOD:
BOC Edwards warrants this product against defects for a period of two (2) years
from the date of delivery or during the periodspecifiedin the agreementmade by
and between the customer and BOC Edwards.
2. ITEM WARRANTED:
1) This warranty applies only to the productdeliveredfrom BOC Edwards to the
customer.
2) If any defect is found during this period, BOC Edwards will, at its option, repair
or recondition the productfree of charge. The costsfor repair or replacement
of the product after the warranty period has passed will be at the customer's
own charge.
3. DISCLAIMER:
BOC Edw ards makes no warranty with respect to any damage occurred due to any of
the following during the warranty period:
1) Handling, operation or maintenance other than that specified herein;
2) Failure to follow any of the warnings or cautions enumerated under
or ;
3) Installation, operation or maintenance using parts w hich are not specified by BOC
Edw ards;
4) Maintenance personnel other than those authorized by BOCEdwards or service
office have disassembled, reconditioned, or tampered the product;
5) Defect resulting fromthe not-specified use of the product.
6) When the product is used under special conditions without obtaining the written
consent of BOC Edw ards (Particular gases, strong magnetic field and the radiation
are added to the product.);
7) Defect resulting fromdeposit;
8) Water cooling systemdefect resulting fromwater quality used;
9) Defect resulting fromthe installation of the product (Exclude the installation by
authorized personnel.)
10) Deterioration in the external because of use (Discoloration, scratches and so forth)
11) Product damage occurred during transport or other factors not attributable to BOC
Edw ards;
12) Product breakage or damage due to natural disasters, fire or other external factors;
13) Deterioration in the basic performance due to the use of the product beyond limits of
the use;
14) Any direct, incidental or consequential damage resulting fromthe use of the product;
15) When continuously operated w ithout overhaul after the WARNING indication
(“WARNING” message) on the LCD display;
16) Overhaul and replacement of maintenance parts;

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9
4. SPARE PARTS:
 Fuse and air cooling fan for control unit
 Touch down bearing
 Heater

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8
TABLE of CONTENTS
SAFETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump...................... 1-1
1.1 Usable Gases ..............................................................................................................1-1
1.2 Precautions on Maintenance and Inspection...............................................................1-1
1.3 Labels ..........................................................................................................................1-2
2 Operation Principle of the STP Pump.........................................2-1
3 Unpacking .................................................................................. 3-1
3.1 Unpacking the STPPump and the STPControl Unit......................................................3-1
3.2 Accessories ................................................................................................................3-1
4 Installation of the STP Pump ...................................................... 4-1
4.1 Name and Function of Each Part..................................................................................4-1
4.2 Precautions Before Installation....................................................................................4-3
4.2.1 Operating Environment........................................................................................4-3
4.2.2 Installation Area..................................................................................................4-4
4.2.3 Bench..................................................................................................................4-4
4.3 How To Install the STPPump.......................................................................................4-5
4.3.1 Cleaning the Seal................................................................................................4-6
4.3.2 STPPump Installation Positions...........................................................................4-7
4.3.3 How to Secure the STPPump.............................................................................4-8
4.3.4 VacuumPiping..................................................................................................4-12
4.3.5 Connecting the Ground Cable...........................................................................4-13
4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C).............4-14
5 Baking, Cooling the STP Pump and Gas Pumping..................... 5-1
5.1 Baking the STPPump...................................................................................................5-1
5.1.1 Attaching a Baking Heater..................................................................................5-1
5.2 Cooling the STPPump..................................................................................................5-2
5.2.1 Water Cooling Method.........................................................................................5-2
5.2.2 Air Cooling Method..............................................................................................5-3
5.3 Gas Suction.................................................................................................................5-4
5.3.1 How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)].............5-4
6 Installation of the STP Control Unit............................................. 6-1
6.1 Name and Function of Each Part..................................................................................6-1
6.1.1 Front Panel..........................................................................................................6-1
6.1.2 Rear Panel...........................................................................................................6-3
6.1.3 Top Panel............................................................................................................6-5
6.1.4 Side Panel (Left) .................................................................................................6-6
6.2 Precautions Before Installation....................................................................................6-7

STP-301/451 Series Instruction Manual
9
6.2.1 Operating Environment........................................................................................6-7
6.2.2 Insulation Test.....................................................................................................6-7
6.2.3 Installation Area..................................................................................................6-8
6.3 Attaching the STPControl Unit Front Panel to a Rack..................................................6-9
6.4 Cable Connection.......................................................................................................6-10
6.4.1 Name and Dimensions of Each Cable...............................................................6-10
6.4.2 How to Connect the Cables..............................................................................6-12
6.5 Connecting to Semiconductor Equipment...................................................................6-14
6.5.1 Connecting to Power ........................................................................................6-14
6.5.2 Emergency Off Circuit (EMO Circuit).................................................................6-14
7 Howto Start/Stop the STP Pump................................................ 7-1
7.1 Before Starting.............................................................................................................7-1
7.2 Start Procedures..........................................................................................................7-2
7.3 Stop Procedures..........................................................................................................7-2
7.4 Manual Operation.........................................................................................................7-3
7.4.1 Powering ON.......................................................................................................7-3
7.4.2 Starting the STPPump.........................................................................................7-3
7.4.3 Stopping the STPPump.......................................................................................7-3
7.4.4 Starting the STPPump after Stopping.................................................................7-4
7.4.5 Powering OFF.....................................................................................................7-4
7.4.6 Starting the STPPump after a Safety Function Operates...................................7-4
7.5 Remote Operation (I/O TB2).........................................................................................7-5
7.5.1 Powering ON.......................................................................................................7-5
7.5.2 Starting/Stopping the STPPump..........................................................................7-5
7.5.3 Starting the STPPump After Stopping................................................................7-6
7.5.4 Powering OFF.....................................................................................................7-6
7.5.5 Starting the STPPump after a Safety Function Operates...................................7-6
7.6 Remote Operation (CON4: Optional Accessory) .........................................................7-7
7.6.1 Powering ON.......................................................................................................7-7
7.6.2 Starting/Stopping the STPPump..........................................................................7-7
7.6.3 Starting the STPPump After Stopping................................................................7-8
7.6.4 Powering OFF.....................................................................................................7-8
7.6.5 Starting the STPPump after a Safety Function Operates...................................7-8
8 Remote Input/Output Signal Terminal Blocks.............................. 8-1
8.1 I/O TB1 Terminal Block.................................................................................................8-1
8.2 I/O TB2 Terminal Block.................................................................................................8-5
8.3 CON4 Connector (Optional accessory).......................................................................8-7
8.3.1 Remote Input Signals...........................................................................................8-7
8.3.2 Remote Output Signals........................................................................................8-9
8.3.3 Remote Cables (Optional Accessories)............................................................8-11
9 Adjustment Method..................................................................... 9-1
9.1 Tuning..........................................................................................................................9-1
9.1.1 Tuning Method.....................................................................................................9-1
9.2 Setting the Rated Speed..............................................................................................9-3
9.2.1 When Setting DSW-B No. 1 to ONunder Power-ONState.................................9-3
9.2.2 When Setting DSW-B No. 1 to ONbefore Powering On.....................................9-4

STP-301/451 Series Instruction Manual
10
10 Safety Functions...................................................................... 10-1
10.1 Power Failure.............................................................................................................10-1
10.2 Abnormal State of Magnetic Bearing.........................................................................10-3
10.3 Excessive Vibration...................................................................................................10-3
10.4 Motor Driver Overload................................................................................................10-3
10.5 Overheating Inside the STPPump..............................................................................10-3
10.6 Overheating Inside the STPControl Unit....................................................................10-3
10.7 Overspeed.................................................................................................................10-3
11 Troubleshooting, Maintenance and Inspection..........................11-1
11.1 Troubleshooting Immediately After An Abnormality/Error Occurs.............................11-1
11.1.1 In Case of a Power Failure:.........................................................................11-1
11.1.2 In Other Cases.............................................................................................11-1
11.2 When Error Message is Displayed.............................................................................11-2
11.2.1 Error Messages ...........................................................................................11-2
11.2.2 Displaying Past Abnormalities/Errors and Accumulated Running-Time.......11-5
11.2.3 Abnormalities When Pow ering ON...............................................................11-7
11.2.4 Abnormalities When Performing the STPPump Start Operation..................11-7
11.2.5 Other Abnormalities .....................................................................................11-8
11.3 Maintenance and Inspection......................................................................................11-9
11.3.1 Inspecting the Air Cooling Fan.....................................................................11-9
11.3.2 Replacing the Fuses ..................................................................................11-10
11.3.3 Cleaning and Decontamination...................................................................11-11
11.3.4 Inspecting for Deposit................................................................................11-11
11.3.5 Overhaul....................................................................................................11-12
11.3.6 Transporting for Repair or Overhaul..........................................................11-13
12 Storage and Disposal............................................................... 12-1
12.1 Storage of the STPPump...........................................................................................12-1
12.2 Storage of the STPControl Unit.................................................................................12-1
12.3 Disposal.....................................................................................................................12-2
13 Specifications and Accessories.................................................13-1
13.1 Specifications of the STPPump.................................................................................13-1
13.2 Specifications of the STPControl Unit.......................................................................13-6
UNIT CONVERSION TABLE
ANNEX
MALFUNCTION INFORMATION
STP Series / Global Service Network

STP-301/451 Series Instruction Manual
11
TABLES
Table 3.1 Accessories ..........................................................................................................3-1
Table 3.2 Accessories for Chemical Specific Pump (Type C)...............................................3-1
Table 4.1 Tightening torque of bolt........................................................................................4-8
Table 4.2 MaximumTorque predicted and Recommended securing bolt for inlet port flange4-9
Table 4.3 Number of Claw Clamps by Size of Flange.........................................................4-10
Table 6.1 Connecting the Power Cable...............................................................................6-13
Table 7.1 Starting/Stopping the STPPump during Remote Operation (I/O TB2).....................7-5
Table 7.2 Reset Operation during Remote Operation (I/O TB2).............................................7-6
Table 7.3 Starting/Stopping the STPPump during Remote Operation (CON4).......................7-7
Table 7.4 Reset Operation during Remote Operation (CON4) ...............................................7-8
Table 8.1 I/O TB1 Terminal Block...........................................................................................8-1
Table 8.2 Rated Contacts for Relays CR1, 3, 5, 7, and 8......................................................8-4
Table 8.3 Rated Contacts for Relays CR4 and 6...................................................................8-4
Table 8.4 I/O TB2 Terminal Block...........................................................................................8-5
Table 8.5 CON4 Connector (Remote Input Signal).................................................................8-7
Table 8.6 Rated Coils for Relays CR1, 2 and 3......................................................................8-8
Table 8.7 CON4 Connector (Remote output signal)..............................................................8-9
Table 8.8 Rated Contacts for Relays CR4, 5, 6, 7, 8, 9 and 10...........................................8-11
Table 8.9 Remote Cable Connections (Single-Side Connector Type)..................................8-11
Table 10.1 States of Lamps and REMOTEOutput Signals at Pow er Failure.......................10-2
Table 10.2 Operations of the STPPump after Power Recovery.........................................10-2
Table 10.3 Safety Functions................................................................................................10-4
Table 11.1 Error Messages .................................................................................................11-3
Table 11.2 Troubleshooting after Powering ON..................................................................11-7
Table 11.3 Troubleshooting When Performing the STPPump Start Operation....................11-7
Table 11.4 Troubleshooting While the STPPump is Rotating...............................................11-8
Table 11.5 Recommended Spare Parts .............................................................................11-10
Table 11.6 Cleaning and Decontamination.........................................................................11-11
Table 13.1 Specifications of the STPPump.........................................................................13-1
Table 13.2 Specifications of the STPControl Unit...............................................................13-6

STP-301/451 Series Instruction Manual
12
FIGURES
Figure 2.1 Cross Sectional View of the STPPump...............................................................2-2
Figure 4.1 Configuration of the STPPump.............................................................................4-2
Figure 4.2 Installation of the STPPump to the VacuumEquipment........................................4-5
Figure 4.3 STPPump Installation Positions.............................................................................4-7
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STPPump....4-7
Figure 4.5 Example of securing the STPpump
(When securing the inlet port with bolts) ....................................................4-9
Figure 4.6 Example of securing the STPpump
(When securing the inlet port flange with claw clamps)...........................4-10
Figure 4.7 Example of securing the STPpump
(When installing the damper in the inlet port flange)..................................4-11
Figure 4.8 Connecting the Purge Port..................................................................................4-14
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater...................................5-5
Figure 6.1 STPControl Unit Front Panel.................................................................................6-2
Figure 6.2 STPControl Unit Rear Panel..................................................................................6-4
Figure 6.3 STPControl Unit Top Panel...................................................................................6-5
Figure 6.4 STPControl Unit Side Panel (Left) ........................................................................6-6
Figure 6.5 Peripheral Spaces of the STPControl Unit...........................................................6-8
Figure 6.6 Example of Securing the STPControl Unit............................................................6-9
Figure 6.7 External Dimensions of Ground Cable................................................................6-10
Figure 6.8 External Dimensions of STPConnection Cable...................................................6-10
Figure 6.9 External Dimensions of STPConnection Cable...................................................6-11
Figure 6.10 How to Secure the Power Cable......................................................................6-13
Figure 7.1 STPPump Operation Procedures .........................................................................7-9
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block.......................................................8-3
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block..........................................................8-6
Figure 8.3 CON4 Remote Input Signal Connector ..................................................................8-8
Figure 8.4 CON4 Remote Output Signal Connector .............................................................8-10
Figure 9.1 Tuning Procedures ...............................................................................................9-2
Figure 9.2 LCDMessage in Rated Speed Setting Mode........................................................9-5
Figure 13.1 External Appearance of the STPPump [without Anti-Corrosion Treatment]
(Example: STP-301)...................................................................................13-2
Figure 13.2 External Appearance of the STPPump [Chemical Specific Type C]
(Example: STP-301C).................................................................................13-3
Figure 13.3 Label Affixing Position for the STPPump.........................................................13-4
Figure 13.4 Label Affixing Positions for the Optional Accessories.....................................13-5
Figure 13.5 External Appearance of the the STPControl Unit.............................................13-8
Figure 13.6 Label Affixing Positions for the STPControl Unit..............................................13-9

STP-301/451 Series Instruction Manual
1-1
Installation
1 Precautions for Safe Operation of the STP Pump
1.1 Usable Gases
Chlorine or fluorine system gases can be used in chemical specific pumps
(STP-301C/STP-451C or other models). When you use gases including alkaline metals,
but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
◇ To prevent an accident, confirmthe characteristics of gases to be used,
referring to the Material Safety Data Sheet (MSDS) you obtain fromthe gas
supplier.
And, keep MSDS and a safety advice of gas supplier.
◇ NEVERuse corrosive gases (chlorine, fluorine, or other systemgases) in the
STP-301/STP-451 pump or other models without anti-corrosion treatment.
◇ Introduce a dry N2gas (purge gas) to protect the inside of the STPpump w hen
using reactive or corrosive gases.
◇ Cool the STPpump to prevent the STPpump fromoverheating when pumping
gases.
1.2 Precautions on Maintenance and Inspection
Read through Section 11, "Troubleshooting, Maintenance and Inspection" before
performing any maintenance or inspection of the STPpumpor the STPcontrolunit
(such as fuse replacement).
◇ Always turn OFFthe primary pow er (switch the breaker "OFF") before
performing any maintenance.
◇ NEVER touch any portions other than those designated when performing
maintenance.
Careless touch may cause electric shock and/or a short-circuiting of the internal
circuit, resulting in product damage or a problem.

STP-301/451 Series Instruction Manual
1-2
Installation
1.3 Labels
The following labels are affixed to the STP pump and STP control unit.
Read the contents of the labels before operation.
1) STP Pump Caution Label
This label indicates precautions for operating the STP pump.
Follow these precautions.
2) STP Control Unit Caution Label
This label indicates precautions for operating the STP control unit.
Follow these precautions.
3) STP Pump Installation Warning Label
This label indicates the installation of the STP pump.
Install the STP pump according to the precautions in Section 4, "Installing the STP Pump.
"

STP-301/451 Series Instruction Manual
1-3
Installation
4) Connector Caution Label
i. This label indicates the lock of the connector
ii. This label instructs operators to prevent the connectors from being
disconnectedwhile the STPpumpis in operation.
5) STP Control Unit Safety Instruction Label
This label indicates instructions before operating the STP control unit.
6) High Voltage Device Caution Label
The STP control unit is equipped with a high voltage device. This label warns
operators to pay attention to the high voltage device.
7) Rotational Direction Instruction Label
This label indicates the rotational direction of the STP pump.
The STP pump rotates in this direction.

STP-301/451 Series Instruction Manual
1-4
Installation
8) Voltage Rating Label
This label indicates the rated voltage of the STP control unit.
Use voltage specified in this label.
200 V specification
100 V specification
9) Hot Surface Warning Label
This labelinstructs operatorsso as notto touch the hotsurface of the STP
pump.
The use of the baking heater (optionalaccessory) may leadto a considerable
rise in temperatures outside the STPpump.
This label warns operators so as not to burn hands.(only when using the baking
heater.)

STP-301/451 Series Instruction Manual
2-1
Installation
2 Operation Principle of the STP Pump
The STP-301/451 is a series of magnetically-levitated turbomolecular pumps, featuring
the following:
• Oil free
• Low vibration
• High reliability
The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the
outlet portby the high speed rotation of the rotor.
Rotor blade (1) is supported by the magnetic bearing without mechanical contact.
Therefore the STPpumprequires no lubrication oilunlike conventionalturbomolecular
pumps using ball bearings.
The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is
supported in the radial direction by 2 pairs of radial direction active magnetic bearings
that consistof radialsensor (3) andradialelectromagnet(4). A pair of axialdirection
active magnetic bearings consists of axial sensor (5) and axial electromagnet (6) to
support the rotor in the axialdirection. Because the rotor is thus supported without
mechanical contact, it can rotate with low vibration.
There is less heatgenerated from magnetic bearings because there is no friction.
Therefore the STPpumprequires no cooling. However,the STPpumprequires water
cooling or air cooling during baking and gas pumping.
Taking into consideration a breakage of magnetic bearings, touch down bearings (7) and
(8) coated with solid lubrication have been installed. They do not contact the rotor
during the rated operation.
A radialsensor, an axialsensor, a rotationalspeed sensor and a temperature sensor
always monitor the magnetic bearing as well as the rotor. If an abnormality/error
occurs, the rotor will stop.