Edwards nEXT User manual

Vibraon Isolator
nEXT Turbomolecular Pumps
INSTRUCTION MANUAL
B80000860_A Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2021. All rights reserved.
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Associated publicaons
Publicaon tle Publicaon number
nEXT Turbomolecular Pumps nEXT240, nEXT300 and
nEXT400 B80000880
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3 Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.1 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.3 Install the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.1 Maintenance safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.2 Maintenance plan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . . 15
8. Legal declaraons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
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List of Figures
Figure 1: General view of the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Figure 2: Axial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Figure 3: Radial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 4: Installaon orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
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1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
For safe operaon from the start, read these instrucons carefully before you install
or commission the equipment and keep them safe for future use.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the equipment.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
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B80000860_A - Safety and compliance

1.2 Safety symbols
The safety symbols on the products show the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
An appropriate safety instrucon must be followed or cauon to a po-
tenal hazard exists.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Heavy object
Idenes a possible hazard from a heavy object.
Warning - Moving parts present
Idenes parts that move. You must let the parts that turn stop before
you remove the electrical power.
Warning - Read the manual
Warning - Use protecve equipment
Use appropriate protecve equipment for the task.
1.3 Trained personnel
“Trained personnel” for the operaon of this pump are
▪ skilled workers with knowledge in the elds of mechanics, electrical engineering
and vacuum technology and
▪ personnel specially trained for the operaon of vacuum pumps.
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B80000860_A - Safety and compliance

2. Introducon
This manual provides installaon, operaon and maintenance instrucons for the
Vibraon Isolator which is an accessory for the nEXT pump.
If you use the vibraon isolator with any other item or isolators from dierent supplier,
the eciency of the equipment can not be guaranteed.
2.1 Overview
The Vibraon Isolator is used to reduce the transmission of the small amount of
vibraon generated by the pump to the vacuum system. You can install the Vibraon
Isolator to the inlet ange of the nEXT pump.
It consists of two anges and a damping mass between the anges. The anges and the
mass are separated by special O‑rings and rubber washers which manage the sealing
and also the damping.
The Vibraon isolator is designed for use only with the vercal oriented pumps.
Figure 1 General view of the Vibraon Isolator
1. Damping and sealing O-ring 2. Spacer
3. Damping block 4. ISO100 Flange
5. Screw 6. Damping mass
1. Damping and sealing O-ring 2. Spacer
3. Damping block 4. ISO100 Flange
5. Screw 6. Damping mass
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B80000860_A - Introducon

3. Technical data
Table 1 General technical data
Parameter Value
Item number B58053400
Flange size DN100ISO-K
Inside diameter (mm) 100
Overall length (mm) 145
Weight (kg) 10.7
Maximum tensile load (kg) 8
Minimum number of claw clamps 4
Table 2 Operang and storage condions
Parameter Value Units
Ambient operang temperature range 12 to +35 * °C
Ambient storage temperature range -10 to +60 C
Maximum operang humidity maximum 90
condensing at 40 °C % RH
Maximum operang altude No limit m
*Damping properes could be aected by operang temperature
Figure 2 Axial transmission funcon of isolator
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B80000860_A - Technical data

Figure 3 Radial transmission funcon of isolator
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4. Storage
To store the vibraon isolator, do the steps that follows:
1. Put the protecve covers over the inlet and outlet anges.
2. Store the vibraon isolator in cool and dry condions unl required for use. Refer
to Table: Operang and storage condions for recommended storage
environment.
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B80000860_A - Storage