Edwards nEXT User manual

Vibraon Isolator
nEXT Turbomolecular Pumps
INSTRUCTION MANUAL
B80000860_A Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2021. All rights reserved.
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Associated publicaons
Publicaon tle Publicaon number
nEXT Turbomolecular Pumps nEXT240, nEXT300 and
nEXT400 B80000880
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3 Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.1 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.3 Install the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.1 Maintenance safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.2 Maintenance plan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . . 15
8. Legal declaraons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
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List of Figures
Figure 1: General view of the Vibraon Isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Figure 2: Axial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Figure 3: Radial transmission funcon of isolator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 4: Installaon orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
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1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
For safe operaon from the start, read these instrucons carefully before you install
or commission the equipment and keep them safe for future use.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the equipment.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
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B80000860_A - Safety and compliance

1.2 Safety symbols
The safety symbols on the products show the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
An appropriate safety instrucon must be followed or cauon to a po-
tenal hazard exists.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Heavy object
Idenes a possible hazard from a heavy object.
Warning - Moving parts present
Idenes parts that move. You must let the parts that turn stop before
you remove the electrical power.
Warning - Read the manual
Warning - Use protecve equipment
Use appropriate protecve equipment for the task.
1.3 Trained personnel
“Trained personnel” for the operaon of this pump are
▪ skilled workers with knowledge in the elds of mechanics, electrical engineering
and vacuum technology and
▪ personnel specially trained for the operaon of vacuum pumps.
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2. Introducon
This manual provides installaon, operaon and maintenance instrucons for the
Vibraon Isolator which is an accessory for the nEXT pump.
If you use the vibraon isolator with any other item or isolators from dierent supplier,
the eciency of the equipment can not be guaranteed.
2.1 Overview
The Vibraon Isolator is used to reduce the transmission of the small amount of
vibraon generated by the pump to the vacuum system. You can install the Vibraon
Isolator to the inlet ange of the nEXT pump.
It consists of two anges and a damping mass between the anges. The anges and the
mass are separated by special O‑rings and rubber washers which manage the sealing
and also the damping.
The Vibraon isolator is designed for use only with the vercal oriented pumps.
Figure 1 General view of the Vibraon Isolator
1. Damping and sealing O-ring 2. Spacer
3. Damping block 4. ISO100 Flange
5. Screw 6. Damping mass
1. Damping and sealing O-ring 2. Spacer
3. Damping block 4. ISO100 Flange
5. Screw 6. Damping mass
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B80000860_A - Introducon

3. Technical data
Table 1 General technical data
Parameter Value
Item number B58053400
Flange size DN100ISO-K
Inside diameter (mm) 100
Overall length (mm) 145
Weight (kg) 10.7
Maximum tensile load (kg) 8
Minimum number of claw clamps 4
Table 2 Operang and storage condions
Parameter Value Units
Ambient operang temperature range 12 to +35 * °C
Ambient storage temperature range -10 to +60 C
Maximum operang humidity maximum 90
condensing at 40 °C % RH
Maximum operang altude No limit m
*Damping properes could be aected by operang temperature
Figure 2 Axial transmission funcon of isolator
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B80000860_A - Technical data

Figure 3 Radial transmission funcon of isolator
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4. Storage
To store the vibraon isolator, do the steps that follows:
1. Put the protecve covers over the inlet and outlet anges.
2. Store the vibraon isolator in cool and dry condions unl required for use. Refer
to Table: Operang and storage condions for recommended storage
environment.
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5. Installaon
5.1 Installaon safety
WARNING: UNSAFE INSTALLATION
Risk of injury or damage to equipment. Follow the safety instrucons and take note
of all appropriate precauons.
CAUTION: OVERPRESSURE IN THE PUMPING SYSTEM
Risk of damage to equipment. Make sure that the maximum overpressure used for
system purge is 0.25 bar(g).
▪ Obey all WARNING and CAUTION instrucons in the Supplementary Publicaon.
▪ A suitably trained and supervised technician must install the pumping system.
▪ Check that all the required parts are available and of the correct type before you
start work.
▪ Make sure that the technician is familiar with the safety procedures which relate to
the products pumped.
▪ Make sure that you wear the appropriate safety clothing when you come in
contact with contaminated components.
▪ Isolate the system and its components from electrical supply so that they cannot
be operated accidentally.
▪ Do not reuse O-rings and co-seals if they are damaged.
▪ Take care to protect the sealing faces from damage.
▪ We recommend to do a leak test aer installaon is complete to ensure opmum
vacuum performance.
5.2 Unpack and inspect
1. Remove the outer cover and packing materials from the pump.
2. Remove the protecve covers from the inlet and outlet ports.
3. Check the Vibraon isolator for damage.
4. If the Vibraon isolator is damaged, nofy your supplier and the carrier
immediately. Give the supplier and the carrier the informaon that follows:
▪ part number of the Vibraon isolator
▪ serial number of the Vibraon isolator
▪ order number
▪ supplier's invoice number
5. Do not use the pump if the Vibraon isolator is damaged.
6. Check that the package has the items given in Table: Checklist of components. If
the items are missing, nofy the supplier in wring in three days.
7. If the Vibraon isolator is not to be used immediately, store the pump in
condions as given in Storage.
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Table 3 Checklist of components
Quanty Descripon Check (ü)
1Vibraon isolator B58053400 r
1Instrucon manual r
5.3 Install the Vibraon Isolator
WARNING: HEAVY OBJECT
Risk of muscle strain or back injury. The mass of the Vibraon Isolator is 10.7 kg.
WARNING: HAZARDOUS VOLTAGE
Risk of injury or damage to equipment. Make sure that you switch o the pump and
isolate the controller from the power supply.
Refer to the instrucon manual supplied with your nEXT pump to determine the
minimum number of clamps required to t the vibraon isolator to the pump inlet
ange. You must use the same number of clamps to t the upper ange of the vibraon
isolator to your vacuum system.
To install the vibraon isolator, do the steps that follows:
1. Switch o the pump.
2. Isolate the pump controller from the electrical supply and wait unl the pump has
stopped rotang.
3. Install the vibraon isolator between the inlet ange of the nEXT pump and the
vacuum system.
4. Install a exible below between the nEXT pump backing port.
Note:
The vibraon isolator is designed to operate in vercal direcon. If you install the
vibraon isolator in any other direcon, the funconal eciency will be eected.
Refer to Figure: Installaon orientaon.
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B80000860_A - Installaon

Figure 4 Installaon orientaon
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6. Maintenance
6.1 Maintenance safety
▪ Obey all WARNING and CAUTION instrucons in the Supplementary Publicaon, if
supplied.
▪ A suitably trained and supervised technician must maintain the Vibraon Isolator.
▪ Check that all the required parts are available and of the correct type before you
start maintenance.
▪ Make sure that the technician is familiar with the safety procedures which relate to
the products pumped.
▪ Make sure that you wear the appropriate safety clothing when you come in
contact with contaminated components.
▪ Isolate the system and its components from electrical supply so that they cannot
be operated accidentally.
▪ Do not reuse O-rings and co-seals if they are damaged.
▪ Take care to protect the sealing faces from damage.
▪ We recommend to do a leak test aer installaon is complete to ensure opmum
vacuum performance. Seal any leaks found if any vacuum or exhaust pipeline
connecons have been disconnected.
6.2 Maintenance plan
Sealing and damping O-rings are designed to work properly for 3 years in standard
operang condion. We recommend to check if there are some potenal damping or
leaking issue in your system. Change the O-ring if necessary.
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B80000860_A - Maintenance

7. Service
Our products, spares and accessories are available from our companies in Belgium,
Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom,
U.S.A and a world-wide network of distributors. The majority of these centres employ
service engineers who have undergone our comprehensive training courses.
Order spare parts and accessories from our nearest company or distributor. When you
order, give:
▪ Model and Item Number of the equipment
▪ Serial number
▪ Item Number and descripon of part.
Our products are supported by a world-wide network of our service centres. Each
service centre oers a wide range of opons that includes: equipment decontaminaon,
service exchange, repair, rebuild and tesng to factory specicaons. Equipment which
has been serviced, repaired or rebuilt is returned with a full warranty.
The local service centres can also give our engineers to support on-site maintenance,
service or repair of equipment. For more informaon about service opons, contact our
nearest service centre or the company.
7.1 Return the equipment or components for service
Before you send your equipment to us for service or for any other reason, you must send
us a completed Declaraon of Contaminaon of Vacuum Equipment and Components –
Form HS2. The HS2 form tells us if any substances found in the equipment are
hazardous, which is important for the safety of our employees and all other people
involved in the service of your equipment. The hazard informaon also lets us select the
correct procedures to service your equipment.
We provide instrucons for compleng the form in the Declaraon of Contaminaon of
Vacuum equipment and Components – Procedure HS1.
If you are returning a vacuum pump, note the following:
▪ If a pump is congured to suit the applicaon, make a record of the conguraon
before returning the pump. All replacement pumps will be supplied with default
factory sengs.
▪ Do not return a pump with accessories ed. Remove all accessories and retain
them for future use.
▪ The instrucon in the returns procedure to drain all uids does not apply to the
lubricant in pump oil reservoirs.
Download the latest documents from edwardsvacuum.com/HSForms/, follow the
procedure in HS1, ll in the electronic HS2 form, print it, sign it, and return the signed
copy to us.
NOTICE:
If we do not receive a completed HS2 form, your equipment cannot be serviced.
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Page 15B80000860_A
B80000860_A - Service

Table 4 Service tool kits
Service tool kit Item number
Rubber components eld kit B58053499
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B80000860_A - Service

This product has been manufactured under a quality management system certified to ISO 9001:2015
P20010474A
EU Declaration of Conformity
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
Documentation Officer
Jana Sigmunda 300
Lutín, 78349
Czech Republic
T: [phone]
[e-mail]
The product specified and listed below
•Vibration Isolator ISO100 100D SLIM nEXT Turbomolecular Pumps B58053400
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
Note: The safety objectives of the Low Voltage Directive 2014/35/EU were complied with in accordance
with Annex 1 No. 1.5.1 of this directive.
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 2021-09-13
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Petr Šmérek
– Engineering Manager
Scientific Vacuum Division, Lutín, CZ
Jan Večeřa
– General Manager
Lutín, CZ

This product has been manufactured under a quality management system certified to ISO 9001:2015
P20010474A
Declaration of Conformity
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
Documentation Officer
[e-mail]
This declaration of conformity is issued under the sole responsibility of the manufacturer.
•Vibration Isolator ISO100 100D SLIM nEXT Turbomolecular Pumps B58053400
The object of the declaration described above is in conformity with relevant statutory requirements:
Supply of Machinery (Safety) Regulations 2008
The objectives of the Electrical Equipment (Safety) Regulations 2016 are governed by Annex 1 1.5.1 of this regulation.
Relevant designated standards or technical specifications are as follows:
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
This declaration, based on the requirements of the listed Statutory Instruments and EN ISO/IEC 17050-1, covers all
product serial numbers from this date on: 2021-09-13
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Petr Šmér
ek – Engineering Manager
Scientific Vacuum Division, Lutín, CZ
Jan Več
eřa – General Manager
Lutín, CZ

This product has been manufactured under a quality management system certified to ISO 9001:2015
ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
RoHS (EU, UK): Material Exemption Information
This product is compliant with no Exemptions
REACH (EU, UK)
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration (EU, UK)
This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww
by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.
材料成分声明
China Material Content Declaration
表示该有害物质在该部件的所有均质材料中的含量低于
GB/T 26572
标准规定的限量要求。
Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.

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