Edwards nEXT 55 User manual

nEXT Turbomolecular Pumps
nEXT 55/85
INSTRUCTION MANUAL
B8G000880_E Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2021. All rights reserved.
Associated publicaons
Publicaon tle Publicaon number
Vacuum pump and vacuum system safety P40040100
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3 Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.2 Pump model descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Motor controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.4 Operaonal features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.4.1 Power limit seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.4.2 Standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.4.3 Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.4.4 Analogue output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.4.5 Automac vent opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4.6 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4.7 Electronic braking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.5 Logic interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.5.1 USB interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.5.2 Parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.5.3 Serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.5.4 Serial control with parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . 16
2.5.5 Parallel control with serial monitoring or serial conguraon. . . . . 17
2.5.6 Motor controller conguraon (serial conguraon). . . . . . . . . . . . 17
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.1 General technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.2 Operang and storage condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.3 Vent gas specicaon and vent control data. . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.4 Purge gas specicaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.5 Cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.6 Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.7 Pumping media. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.8 Materials exposed to gases pumped. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.9 Logic interface connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.10 Motor controller auxiliary connector socket. . . . . . . . . . . . . . . . . . . . . . . . . 29
3.11 Indicator LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
3.12 Pump performance data nEXT85. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.13 Pump performance data nEXT55. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
4. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
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4.1 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.2 Connect to the vacuum system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.2.1 Remove and replace the inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . 41
4.2.2 Mount the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.2.3 Backing port connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
4.2.4 Interstage connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.3 Purge gas connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.3.1 Recommended purge gas ow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.3.2 Connect the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.4 Electrical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.4.1 Ground the connecons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.4.2 Connect the logic interface to the TIC or TAG. . . . . . . . . . . . . . . . . . . 46
4.4.3 Connect the logic interface to the control equipment. . . . . . . . . . . . 46
4.5 Connect the parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.6 Connecon for serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . 49
4.6.1 Connect the serial interface to the customer control equipment. . 49
4.6.2 Serial enable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
4.6.3 Serial protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
4.6.4 Command set. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
4.6.5 Mul-drop operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
4.7 Connecon for mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . 58
4.8 Cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
4.8.1 Cooling requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
4.8.2 Forced air cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
4.8.3 Water cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
5. Conguraon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
5.1 Congure the pump using serial commands. . . . . . . . . . . . . . . . . . . . . . . . . . 62
5.1.1 Message structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
5.1.2 Command and reply table denions. . . . . . . . . . . . . . . . . . . . . . . . . 63
5.1.3 Power limit seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
5.1.4 Power supply to the fan from the motor controller. . . . . . . . . . . . . . 64
5.1.5 Controlled venng opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
5.1.6 Standby speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
5.1.7 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
5.1.8 Timer seng and opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
5.1.9 Analogue signal opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
5.1.10 Electronic braking opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
5.1.11 Factory sengs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
5.1.12 Assigning a mul-drop address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
5.2 Congure the pump using a TIC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
6. Operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
6.1 Before starng the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
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6.1.1 Close the vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
6.1.2 Pre-start sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
6.2 Vent opons, vent valve connecon and control. . . . . . . . . . . . . . . . . . . . . . 72
6.2.1 Manual vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
6.2.2 TAV5 solenoid vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
6.2.3 Vent valve control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
6.2.4 Alternave valve connected to the vacuum system. . . . . . . . . . . . . 75
6.3 Operaon with parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . 75
6.3.1 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
6.3.2 Run the pump at standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
6.3.3 Stop the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
6.3.4 Parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
6.4 Operaon with serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . 77
6.4.1 Delayed start. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
6.4.2 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
6.4.3 Run the pump at standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.4.4 Stop the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.4.5 Monitor temperature readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.4.6 Monitor link parameter readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
6.4.7 Monitor measured motor speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
6.5 Mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
6.6 Operaon with a TIC or TAG. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
6.7 Decelerang and venng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
6.8 Operaon at extreme condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
6.8.1 Operaon with high inlet pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . 82
6.8.2 Operaon at high temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
6.8.3 Protecon against over-speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
6.8.4 Electrical supply failure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
6.9 Bakeout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
6.10 Shut down the pump manually. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
7. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
7.1 Bearing and oil cartridge maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
7.2 Rotor life. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
7.3 Cleaning the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
7.4 Decoding service status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
7.5 Controller run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
7.6 Pump run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
7.7 Pump cycles. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
7.8 Bearing run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
7.9 Oil cartridge run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
8. Fault nding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
8.1 Command set error codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
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8.2 Flashing service codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
8.3 Flashing error codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
8.4 Decoding system status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
8.5 Service informaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
9. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
10. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
11. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
11.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . 101
11.2 Bearing and oil cartridge on-site maintenance. . . . . . . . . . . . . . . . . . . . . . 102
12. Spares. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
12.1 Inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
12.2 Inlet strainer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
12.3 Inlet ange seals and integrated inlet screens. . . . . . . . . . . . . . . . . . . . . . . 103
12.4 NW16 and NW25 ports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
13. Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
13.1 Air cooler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
13.2 Water cooler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
13.3 Flange heater. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
13.4 TAV5 vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
13.5 VRX vent restrictor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
13.6 Vent port adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
13.7 PRX purge restrictor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
13.8 Interface cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
13.9 nST PC program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
13.10 Auxiliary connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
13.11 Auxiliary extension cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
13.12 Auxiliary 'Y' cable adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
13.13 Base mounng adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
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Page 6B8G000880_E

List of Figures
Figure 1: Pump model descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Figure 2: Dimensions - nEXT85 ISO63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 3: Dimensions - nEXT85 CF63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 4: Dimensions - nEXT85 ISO100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 5: Dimensions - nEXT85 DN40. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 6: Typical base view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 7: Dimensions - nEXT55D ISO63 NW16 80W. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 8: Dimensions - nEXT55D CF63 NW16 80W. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 9: Typical base view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 10: Maximum allowed rate of pressure rise during venng: pressure against me
(with pump inially at full rotaonal speed). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Figure 11: Maximum relave humidity to avoid condensaon with water cooling. . . . . . 24
Figure 12: Interface circuits for nEXT turbo pump controllers. . . . . . . . . . . . . . . . . . . . . . . 29
Figure 13: Valve connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 14: nEXT85 pumping speed versus inlet pressure performance graph. . . . . . . . . . . 33
Figure 15: nEXT85 compression rao versus backing pressure graph. . . . . . . . . . . . . . . . . 33
Figure 16: nEXT55 pumping speed versus inlet pressure performance graph. . . . . . . . . . . 37
Figure 17: nEXT55 compression rao versus backing pressure graph. . . . . . . . . . . . . . . . . 37
Figure 18: Typical pumping system with a nEXT pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Figure 19: Allowable pump orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Figure 20: Logic interface connecons - parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Figure 21: Motor controller status informaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Figure 22: Logic interface connecons - RS232 serial control. . . . . . . . . . . . . . . . . . . . . . . . 51
Figure 23: Logic interface connecons - RS485 serial control. . . . . . . . . . . . . . . . . . . . . . . . 51
Figure 24: Conceptual diagram for mul-drop connecon using RS232 interface. . . . . . . 57
Figure 25: RS485 mul-drop connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Figure 26: Logic interface connecon - mixed parallel and serial operaon. . . . . . . . . . . . 59
Figure 27: Auxiliary interface connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Figure 28: Serial and parallel control owchart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Figure 29: Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
07/2021 - ©Edwards Limited
Page 7B8G000880_E

1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
For safe operaon from the start, read these instrucons carefully before you install
or commission the equipment and keep them safe for future use.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the equipment.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
07/2021 - ©Edwards Limited
Page 8B8G000880_E
B8G000880_E - Safety and compliance

1.2 Safety symbols
The safety symbols on the products show the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
An appropriate safety instrucon must be followed or cauon to a po-
tenal hazard exists.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Hot surfaces
Idenes a potenal hazard from a hot surface.
Warning - Protecve earth (ground)
Earth point for electrical equipment.
Warning - Use protecve equipment
Use appropriate protecve equipment for the task.
Warning - Risk of explosion
There is a risk of explosion when you do the task.
1.3 Trained personnel
“Trained personnel” for the operaon of this pump are
▪ skilled workers with knowledge in the elds of mechanics, electrical engineering
and vacuum technology and
▪ personnel specially trained for the operaon of vacuum pumps.
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Page 9B8G000880_E
B8G000880_E - Safety and compliance

2. Introducon
2.1 Overview
WARNING: SAFE EQUIPMENT USE
Risk of injury or damage to equipment. Improper use of the equipment could cause
damage to it or injury to people. The user is responsible for the safe operaon,
installaon and monitoring of the system.
WARNING: DANGEROUS FUMES
Risk of asphyxiaon. The drive contains electrolyc capacitors and, under certain
fault condions, may emit dangerous fumes. Ensure that the drive is operated in a
well-venlated area.
CAUTION: ELECTRICAL CONNECTIONS
Risk of damage to equipment. Do not aempt to separate the controller from the
pump since this will cause damage to the electrical connecons.
A nEXT pump has a turbomolecular pump with a permanently aached controller which
contains the drive electronics.
The controller controls the electrical supply to the pump. With the controller, you can
manually adjust the standby speed. Other controls can be operated through the logic
interface only. To operate the nEXT pump, connect it to the customer control equipment
and to the power supply or use manufacturer's TIC Turbo Instrument Controller, TIC
Turbo Controller or TAG Controller. Refer to Electrical data on page 24.
The controller drives the brush-less motor in the pump. Two variants of the pump are:
▪ The 'D' or 'Duplex' variant which has turbomolecular blades and a drag mechanism
that allows operaon at higher backing pressures than the pure turbomolecular
pumps.
▪ The ‘H’ or ‘High Compression’ variant which has the same technology as the 'D'
variant, but it is tuned to deliver higher compression.
Also available is an ‘iD’ or ‘iH’ interstage variant, which provides an interstage port
between the turbomolecular blades and drag mechanism.
The nEXT pump is supplied with an inlet screen. The inlet screen is installed in the
centering O‑ring for ISO and NW40 version pumps and in the envelope for CF version
pumps. The inlet screen prevents damage to the pump caused by debris entering the
pump.
The nEXT pump has a vent port for venng the pump and vacuum system to the
atmospheric pressure. The pump has a manual vent valve which can be replaced with a
TAV5 solenoid‑operated vent valve (available as an accessory, refer to Accessories on
page 105). The on‑board motor controller can control the TAV valve.
The nEXT pump has a purge port through which an inert purge gas can be introduced to
protect the bearing and motor from corrosion. You can install an oponal vent port
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Page 10B8G000880_E
B8G000880_E - Introducon

adapter and purge restrictor to the purge port to control the ow rate of the purge gas
and to lter the gas supply. This can be used to opmise the performance of the pump,
for example with low molecular mass gases. Refer to Accessories on page 105.
A forced air-cooling kit and a water‑cooling block are available as oponal accessories to
cool the nEXT pump. Refer to Accessories on page 105.
Note:
The units used throughout this manual conform to the SI internaonal system of units of
measurement. Also throughout this manual, wherever ow rates are specied, the
abbreviaon 'sccm' is used to mean standard cm3min-1: this is a ow of 1 cm3min-1 at an
ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 105 Pa).
2.2 Pump model descripon
Figure 1 Pump model descripon
2.3 Motor controller
The motor controller has the drive electronics that control the pump operaon, the TAV
vent valve and the air cooler.
An auxiliary connector socket is given at the side of the motor controller where you can
plug in the TAV vent valve and the air cooler. Refer to Motor controller auxiliary
connector socket on page 29.
A USB port (Figure: Motor controller status informaon, item 9) is given which is a
service port to use with our nST PC soware using a standard micro‑USB cable. This
enables the pump to be congured, monitored and upgraded without disconnecng
from the 24 ‑ 48 V d.c. supply. This soware is available for download from our Upgrade
website: www.upgrades.edwardsvacuum.com
07/2021 - ©Edwards Limited
Page 11B8G000880_E
B8G000880_E - Introducon

Currently, for the nST soware, a free license is necessary to use the soware. To get a
free license, obey the on‑screen instrucons, complete the user data form and send the
automacally generated email to us.
The controller has ve indicator LED's which signal the general status, operaon and
service status of the pump. The LEDs can be used for fault nding if a problem occurs.
Refer to Indicator LEDs on page 31.
The motor controller has built‑in safety features to prevent the pump from damage
during sustained high pressure or temperature.
▪ The electronics constantly monitors the temperature in the controller and the
temperature of the motor in the pump. If the controller or the motor gets too hot,
the controller decreases the power supplied to the pump motor and the pump
speed decreases. If the rotaonal speed of the pump decreases below 50% of the
full speed, the electronics can trip into a fail condion, depending on the system
conguraon. Refer to Timer on page 13.
▪ If the pump inlet pressure increases, the power supplied to the pump motor
increases to counteract the gas friconal load. When the built‑in maximum power
limit is reached, the speed of the pump starts to decrease. If the rotaonal speed
of the pump decreases below 50% of the full speed, the electronics can trip into
fail condion, depending on how the system has been congured. Refer to Timer
on page 13.
If the electrical supply fails, the controller uses the motor in the pump as a generator.
This means the pump has its own regenerave supply and a separate baery for
emergency power backup is not necessary. The regenerated energy maintains the
electrical supply to the controller, the vent valve or the fan aached to the controller
connector unl the pump speed decreases below 50% of the full rotaonal speed to
make sure that the vent valve stay shut unl below 50% of the full rotaonal speed and
prevent the pump from venng at full speed. It makes sure that the serial link and
signals on the parallel interface stays acve unl the pump speed decreases below 50%.
2.4 Operaonal features
The pumps have basic start and stop commands and some other features that allow the
pump operaon to be modied for an applicable applicaon.
2.4.1 Power limit seng
Select the maximum power that will be drawn by the pump. The more power supplied,
the quicker the pump will accelerate to reach full speed.
If the applicaon requires fast cycling or higher gas loads, set the power limit to the
maximum value. If ramp me is not important in the applicaon, use a lower power
limit, down to a minimum value (refer to Table: Power limit seng). Also ensure there is
sucient cooling for the applicaon.
Ensure that the power supply is capable of delivering sucient power to the nEXT pump.
By choosing a lower power limit seng, a smaller power supply may be used. For more
informaon, refer to Electrical data on page 24.
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Page 12B8G000880_E
B8G000880_E - Introducon

2.4.2 Standby speed
In standby mode, the pump rotaonal speed is lower than the full rotaonal speed. The
default seng for standby speed is 70% of the full speed.
To operate the pump at standby speed, it must be in the start condion.
If operang the pump at maximum speed at all mes is not necessary for the
applicaon, use the standby speed feature rather than seng the pump to o. You can
use the standby speed feature for tuning the vacuum system or as a power saving opon
for the system.
The standby speed is a user‑selectable value. Refer to Standby speed seng on page 65.
2.4.3 Timer
When the pump is started, an internal mer starts automacally in the motor controller.
The default mer seng is 8 minutes.
If the pump fails to reach 50% of full rotaonal speed in the meout period, the motor
controller will signal a fail and decelerate the pump to rest. This feature prevents the
motor controller from driving the pump at maximum power for a long me. The pump
can fail to reach 50% speed if the gas load is too high (for example if there is a leak in the
system), if the backing pump fails or if the pump is too hot.
The meout period is user‑selectable (refer to Timer seng and opons on page 66). If
slow ramp‑up of the pump is necessary for the applicaon, extend the meout period.
The mer is permanently enabled for ramp‑up.
If the rotaonal speed of the pump decreases below 50% of the full speed, the pump
me can be set to recover rather than trigger a fail condion. The mer starts
immediately when the rotaonal speed of the pump decreases below 50% of the full
speed. If the rotaonal speed of the pump increases above 50% during the meout
period, the mer will reset. If the rotaonal speed of the pump does not recover by the
end of the meout period, the motor controller will trigger a fail condion and
decelerate the pump to rest.
The mer funcon is enabled when the pump is shipped. You can disable the mer
funcon. If the mer funcon is disabled, the pump will fail and decelerate to rest
immediately when the rotaonal speed of the pump decreases below 50%.
2.4.4 Analogue output
The pump controller gives an analogue output for monitoring ve parameters of the
system:
▪ Measured pump rotaonal speed (default condion)
▪ Measured link power
▪ Measured motor temperature
▪ Measured controller temperature
▪ Measured rotor power
The range of the analogue output signal is from 0 to 10 V and is directly proporonal to
the system parameter. Refer to Logic interface on page 15.
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Page 13B8G000880_E
B8G000880_E - Introducon

Connect the analogue output to an applicable meter or indicator to display the
applicable system parameter or connect it to the customer control equipment (for
example, to operate other components in the pumping system at set values).
The analogue output can monitor only one system parameter at a me. You can
congure the controller to monitor a dierent system parameter. Refer to Analogue
signal opons on page 67.
2.4.5 Automac vent opons
The manufacturer's TAV vent valve can be connected to the motor controller. The motor
controller can give a number of dierent venng opons and can be congured for a
normally closed and a normally open vent valve.
The motor controller can control the rate of venng. Using this feature, the pump can be
vented from the full rotaonal speed in a controlled manner that will not damage the
pump bearings. When the pump rotaonal speed decreases below 50% of the maximum
speed, it is safe to do a hard vent (open the vent valve fully).
Many venng opons are available, that include:
▪ Hard vent when the rotaonal speed decreases below 50% speed.
▪ Controlled vent when the rotaonal speed is above 50% speed and hard vent is
below 50% speed.
▪ Hard vent immediately through an applicable restrictor.
Controlled venng gives quicker ramp down me by controlling the vent rate through a
single large orice across the speed range of the pump. A list of the venng opons is
given in Vent opons, vent valve connecon and control on page 72.
There is also a feature that allows a delayed start of the pump. With this feature, the
vent valve can be closed before starng the pump. This allows the backing pump to
decrease the pressure in the vacuum system before starng the pump.
With a ‘Y’ cable adaptor, a TAV and a cooling fan can be controlled at the same me. No
conguraon is necessary.
2.4.6 Normal speed seng
The normal speed is a user‑selectable parameter which can be set from 50% to 100% of
full rotaonal speed.
When the pump gets to normal speed, a signal is available on the normal pin of the logic
interface connector. The signal can be used to control the applicaon as it shows that
the vacuum performance (pump speed) is at a set level. The default seng is 80% of the
full rotaonal speed. Refer to Normal speed seng on page 66 for instrucons to
change the normal speed seng.
2.4.7 Electronic braking
The pump has a user‑selectable electronic braking opon which is disabled by default.
With the electronic braking opon disabled, the pump will take power from the
electrical supply during acceleraon and operaon.
When the pump decelerates it will coast down and power will not be returned to the
electrical supply.
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Page 14B8G000880_E
B8G000880_E - Introducon

The electronic braking opon can be enabled to decrease the pump deceleraon me
and to recover some energy from the pump. This can be done by returning the power
from the pump to the electrical supply. The rate at which the electrical energy is
returned to the supply is regulated to the voltages shown:
Voltage range Returned electronic braking voltage
Below 21.6 V d.c. (24 V d.c. -10%) Outside working range for pump
21.6 V d.c. to 26.4 V d.c. 24 V d.c. +10%
26.4 V d.c. to 38.4 V d.c. Electronic braking not funconal
38.4 V d.c. to 50.4 V d.c. 48 V d.c. +10%
Above 50.4 V d.c. (48 V d.c. +5%) Outside working range for pump
To get the fastest electronic braking mes, the returned power must go to somewhere,
such as:
▪ A supply capable to receive the returned power.
▪ Other devices that share the same electrical supply bus with the pump.
▪ An applicable 2 A load during the deceleraon of the pump.
2.5 Logic interface
The pump controller can be operated only through the logic interface. The signals on the
logic interface are of three types:
▪ Control inputs: Switch‑type signals that are used to control the pump
▪ Status outputs: To idenfy the status of the system
▪ Analogue output: Gives a 0 ‑ 10 V output for a number of pump parameters.
The logic interface supports the serial control and the parallel control to monitor and
control through one connector. For serial control, RS232 (default) or RS485 can be
selected using the RS485 / RS232 slide switch which is given on the motor controller.
Refer to Connecon for serial control and monitoring on page 49.
You can plug the logic interface into the manufacturer's TIC Turbo Controller or
TIC Turbo Instrument Controller and then use the given funconality. The logic interface
can be connected to the customer control system as an alternave.
Refer to Logic interface connector on page 26 for more informaon about the logic
interface.
2.5.1 USB interface
The USB service port is designed to work with manufacturer's nST PC soware. The
primary funcon of the interface is to allow an easy conguraon of the pump.
The START / STOP opon is given to check the pump operaon through the USB service
port. It is not intended as an industrial control interface for unaended machine to
machine (M2M) control.
The USB service port supports the same me communicaons with the serial interface
in the logic interface connector. This enables the review of the pump status and logs,
and you can congure the pump while the pump is installed and in operaon.
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Page 15B8G000880_E
B8G000880_E - Introducon

Use the USB service port only when the 24 - 48 V d.c. power is applied. Do not use the
USB service port without 24 - 48 V d.c. power as there is a risk of corrupon of the pump
controller memory.
2.5.2 Parallel control and monitoring
The simple parallel interface is a quick and easy way to control the pump. Same interface
is used on the 24 V manufacturer's Turbo Pumps. The start and standby controls are
available to use. You can monitor the system status using the normal, fail and analogue
output signals.
Refer to Connect the parallel control and monitoring on page 47 for more instrucons
about how to use the parallel interface.
A system that is in operaon with a parallel connecon only is not capable to adjust the
conguraon sengs stored in the controller (for example, power limit seng or
controlled venng opons). All these features will be at factory default sengs. You can
manually adjust the standby speed if the standby mode is selected, but the motor
controller has to be congured separately before the installaon of the pump to the
system. Refer to Parallel control with serial monitoring or serial conguraon on page 17
and Motor controller conguraon (serial conguraon) on page 17 for more
informaon.
2.5.3 Serial control and monitoring
The serial communicaons link gives complete control and monitoring by using three
signal lines.
The serial data lines have the same connector pins as the parallel signals standby and
fail. The serial data lines can be congured to give an RS485 compliant or RS232
compable interface by seng the posion of the RS485 / RS232 slide switch. Refer to
Connecon for serial control and monitoring on page 49.
The serial enable signal must be linked to 0 V for the system to accept commands from
the serial link. This is a safety feature which operates as an interlock. For pure serial
control, the parallel start signal will be le unconnected.
The motor controller will connue to give normal and analogue signals on the logic
interface connector even when operang under serial control. You can get the status of
the normal signal and the value of the system parameter on the analogue output by
interrogang the system status through the serial link.
Refer to Connecon for serial control and monitoring on page 49 for more informaon
about the serial interface.
2.5.4 Serial control with parallel monitoring
Normal and analogue signals stay available when using serial control. You can control the
pump through the serial link while monitoring the normal and analogue signals in the
parallel interface.
The serial link uses the same connector pins as the parallel signals standby and fail so
these parallel control and monitoring signals are not available. The serial enable signal
must be linked to 0 V and the parallel start signal will be le unconnected.
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Page 16B8G000880_E
B8G000880_E - Introducon

2.5.5 Parallel control with serial monitoring or serial conguraon
Use this conguraon to operate the pump in parallel control mode, with the opon to:
▪ adjust the conguraon sengs stored in the motor controller or
▪ monitor operaonal status of the pump through the serial link or through the USB
service port.
If using the USB service port with manufacturer's nST PC soware, it is not necessary to
link the serial enable signal to 0 V for the serial communicaons to take place. While
operang under parallel control with the USB service port, all parallel control and
monitoring signals are available (as given in Parallel control and monitoring on page 16),
which include the standby control line and fail monitoring line.
If using the serial link, the serial enable signal must be linked to 0 V for serial
communicaons to take place. While operang under parallel control with the serial link
acve, the parallel start control signal is available (as given in Parallel control and
monitoring on page 16), but the standby control line will not be available as it is used as
a serial data line.
If the serial enable line is deacvated while the RS485 / RS232 slide switch is in the
RS232 posion, the serial link has to be disconnected. We recommend you to make a
special cable for the serial communicaons that includes a link between the serial
enable and 0 V. This way, the serial enable is automacally acvated when the cable is
connected and deacvate when the cable is removed.
2.5.6 Motor controller conguraon (serial conguraon)
All conguraon sengs stored in the motor controller are kept when the power to the
pump is removed so that it is possible to use another system to congure the motor
controller before the installaon of the pump at the applicaon. You can congure the
operaon of the pump as per the applicaon and the pump can be operated using a
simple parallel interface system.
To congure the nEXT pump, use a customer simple serial system through the serial link,
or use manufacturer's TIC Turbo Controller, TIC Turbo Instrument Controller or TAG
Controller. The TICs allow the storage of a pump's conguraon. You can download the
conguraon to another nEXT pump. This is useful when you congure a number of
nEXT pumps with the same sengs before they are installed at a system.
The USB service port can be used with the manufacturer's nST PC soware to congure
the pump. You can download the conguraon to another pump which is useful when
you congure a number of nEXT pumps.
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B8G000880_E - Introducon

3. Technical data
3.1 General technical data
Table 1 General technical data
General items Reference data
Dimensions
Refer to Figure: Dimensions - nEXT85 ISO63,
Figure: Dimensions - nEXT85 CF63, Figure: Di-
mensions - nEXT85 ISO100, Figure: Dimen-
sions - nEXT85 DN40
Figure: Dimensions - nEXT55D ISO63 NW16
80W and Figure: Dimensions - nEXT55D CF63
NW16 80W.
Maximum inlet ange temperature 120 °C
Maximum permied external magnec
eld
5 mT Radial (for standard aluminium enve-
lope pump)
Polluon degree 61010-1 Polluon degree 2
Equipment type Fixed equipment, for indoor use only
Enclosure protecon (installed) IP64
Power supply 24 - 48 V d.c. (Refer to Electrical data on
page 24 for addional informaon)
Figure 2 Dimensions - nEXT85 ISO63
All measurements shown are in mm (inches)
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Figure 3 Dimensions - nEXT85 CF63
All measurements shown are in mm (inches)
Figure 4 Dimensions - nEXT85 ISO100
All measurements shown are in mm (inches)
Figure 5 Dimensions - nEXT85 DN40
All measurements shown are in mm (inches)
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B8G000880_E - Technical data

Figure 6 Typical base view
1. Body purge port 1/8” BSP 2. Envelope vent port 1/8” BSP
3. Alternave backing port posion 4. 4 x holes (M5 x 12 deep) Base mounng
holes and fan mounngs
5. 79 PCD mounng port 6. Electric drive
7. 24 V supply cable 8. Backing port NW16 (Oponal NW25)
1. Body purge port 1/8” BSP 2. Envelope vent port 1/8” BSP
3. Alternave backing port posion 4. 4 x holes (M5 x 12 deep) Base mounng
holes and fan mounngs
5. 79 PCD mounng port 6. Electric drive
7. 24 V supply cable 8. Backing port NW16 (Oponal NW25)
Figure 7 Dimensions - nEXT55D ISO63 NW16 80W
All measurements shown are in mm (inches)
07/2021 - ©Edwards Limited
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B8G000880_E - Technical data