Edwards STP-XA2703BV155 User manual

MT-66E-A01-D
STC-U eTMS unit
for Turbomolecular Pump
Instruction Manual (D)
Applicable pump model
◼STP-XA2703BV155 / XA3203BV155
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STC-U.
Keep this Manual in a place where you can
quickly access it at any time.
Read this Manual thoroughly and keep it with
the Turbomolecular Pump Instruction Manual.
STP pump consists of the four-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Instruction Manual (D):
(This Instruction Manual)
STC-U eTMS unit for Turbomolecular Pump
2023.08

The description of this product consists of the four-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System (TMS)
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link
•EdCentra (for SCU-1601 series only）
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Instruction Manual (D)
STC-U eTMS unit for Turbomolecular Pump:
•Introduction
•Technical data
•Installation
•Operation
•Maintenance and inspection
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.his page is intentionally blank.

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CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3Limited warranty 2
1.3.1 Item warranted 2
1.3.2 Disclaimer 2
1.4 Labels 3
1.5 Label affixing positions 5
1.6 General description 6
1.7 Cable set 7
2TECHNICAL DATA 9
2.1 STC-U specifications 9
3INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 14
3.4 Precautions before installation 15
3.4.1 Operating environment 15
3.4.2 Installation test 15
3.4.3 Installation area 16
3.5 Attaching the STC-U to a rack 17
3.6 Cable connection 18
3.6.1 TMS heater cable 19
3.6.2 TMS sensor cable 19
3.6.3 TMS valve extension cable 20
3.6.4 STC-U remote branch cable 21
3.6.5 Power cable 22
3.6.6 Power extension cable 25
3.6.7 Cable installation 26
3.7 Connecting to semiconductor equipment 27
3.7.1 Connecting to power 27
3.7.2 Emergency off circuit (EMO circuit) 27

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CONTENTS(CONTINUED)
Section Title Page
4OPERATION 29
4.1 Before starting 29
4.1.1 Confirmation before starting 29
4.1.2 Confirmation of communication parameters
of STP control unit 29
4.2 Power ON 30
4.3 Power OFF 30
4.4 Abnormality/Error in the STC-U 31
4.5 Troubleshooting immediately after power failure occurs 32
5MAINTENABCE AND INSPECTION 35
5.1 Inspection of connection cable 35
5.2 Cleaning 35
5.3 Maintenance 35
6STORAGE, TRANSPORTATION AND DISPOSAL 37
6.1 Storage of the STC-U 37
6.2 Transporting for repair or overhaul 37
6.3 Disposal 38
7SERVICE, SPARES AND ACCESSORIES 39
7.1 Introduction 39
7.2 Service 39
7.3 Spares 39
7.4 Accessories 40

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ILLSUTRATIONS
Figure Title Page
1 Safety instruction label 3
2 "Use designated cable" caution label 3
3 Connection caution label 4
4 High voltage device caution label 4
5 "Use designated control unit" caution label 4
6 Applicable pump model label 4
7 Label affixing positions 5
8 STC-U 6
9 System configuration 7
10 Dimensions (mm) 11
11 STC-U front panel 13
12 STC-U rear panel 14
13 Installation of STC-U 16
14 Example of securing the STC-U 17
15 TMS heater cable 19
16 Sensor cable 19
17 TMS valve cable 20
18 STC-U remote branch cable (for STP control unit) 21
19 Power cable (without plug) 22
20 Power cable (with plug) 23
21 Connecting method of the power cable without plug 24
22 Power extension cable (for STP control unit) 25
23 Example of cable installation in metallic duct 26
TABELS
Table Title Page
1 STC-U front panel functions 13
2 STC-U rear panel connection 14
3 Power cable 23
4 Communication parameters 29
5 "POWER" LED and error messages 31
6 Error messages related to STC-U 33
7 Error messages related to STC-U (continued) 34

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INTRODUCTION
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1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the external
temperature control unit STC-U eTMS unit (abbreviated to "STC-U" throughout this manual) for the
Turbomolecular pump (STP). You must use the STC-U as specified in this manual otherwise the
protection provided by the equipment may be impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious
injury or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note : Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STC-U Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Protective earth (ground).
Connect the ground wire to this terminal to prevent electric shock.

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INTRODUCTION
1.2 Electromagnetic compatibility
•This product is a Class A product according to EN61326-1 (Group 1, Class A product according
to EN55011) and intended to be used in an industrial electromagnetic environment defined by
EN61326-1
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment
of material or inspection / analysis purpose and that it is suitable for use in all establishments
other than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
•This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
•This product must not be used in residential areas because it may cause interference if used in
residential areas.
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services,
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.1 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge
1.3.2 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.

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INTRODUCTION
1
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. Overhaul and replacement of maintenance parts.
1.4 Labels
The following labels are affixed or printed to the STC-U. Read the contents of the labels before
operation.
1. Safety instruction label
This label describes instructions before operating the STC-U
Figure 1 - Safety instruction label
2. "Use designated cable" caution label
This label describes precautions for operating the STC-U. When using STC-U, use the
designated cable.
Figure 2 - "Use designated cable" caution label

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INTRODUCTION
3. Connection caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 3 - Connection caution label
4. High voltage device caution label
The STC-U is equipped with a high voltage device. This label warns operators to pay attention
to the high voltage device at the maintenance and inspection
Figure 4 - High voltage device caution label
5. "Use designated control unit" caution label
This label describes precautions for operating the STC-U. When using STC-U, use the
designated control unit. "Applicable pump model label" is affixed on the front panel of
designated control unit.
Figure 5 - "Use designated control unit" caution label
6. Applicable pump model label
This label describes an applicable pump model to STC-U. Use this model of STP pump when
using STC-U. (xxxxxxxxxxxx: is the model name of the pump)
Figure 6 - Applicable pump model label

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INTRODUCTION
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1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels from 1 to 6.
Figure 7 - Label affixing positions
1
Safety instruction label
2
"Use designated cable" caution label
3
Connector caution label
4
High voltage device caution label
5
"Use designated control unit" caution label
6
Applicable pump model label
7
Parts number label
8
Name plate
5
6
8
7
3
2
1
4
5
6

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INTRODUCTION
1.6 General description
STC-U is an external temperature control device for maintaining predetermined part of the STP pump
at the set temperature. When operating the STP pump, connect the STC-U to the STP control unit.
STP control unit can set ON / OFF setting of temperature control function of STC-U, and display the
temperature value on LCD on the STP control unit.
⚫STC-U consists of four temperature sensor inputs, two water-cooling valve outputs, and two
heater outputs.
⚫By communicating with the STP control unit, the STC-U operates the pump, and controls the
temperature of the pump
⚫Only applicable control unit is available.
Note : Applicable pump model label is affixed to the front panel of the STC-U and STP control unit.
Note : TMS unit built in the STP control unit controls one water-cooling valve output and one heater
output with one temperature sensor input. On the other hand, the STC-U can control several
parts of the STP pump to the respective setting temperatures by multiple input and multiple
output.
Figure 8 - STC-U

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INTRODUCTION
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1.7 Cable set
The following cable set (optional accessories) is used with the STC-U, STP control unit and STP
pump:
•Heater, Valve and Sensor cable: STP pump to STC-U
•STP connection cables: STP pump to STP control unit
•STC-U remote cable: STP control unit to STC-U
•Power extension cable: Supply power to STP control unit via STC-U
•Power cable: Supply power to STC-U
Note : STP connection cables consist of 5 cables (Motor relay cable, TC cable, Connection relay
cable, PLTC cable and Pump relay cable).
1
TMS sensor cable
7
PLTC cable (signal line)
2
TMS heater cable
8
Pump relay cable
3
TMS valve cable
9
TMS valve
4
Motor relay cable
10
STC-U remote branch cable
5
TC cable (motor line)
11
Power extension cable
6
Connection relay cable
12
Power cable
Figure 9 - System configuration
STP
control
unit
STP pump
10
3
2
1
STC-U
eTMS
unit
8
12
11
4
6
5
7
9

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INTRODUCTION
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TECHNICAL DATA
2
2 TECHNICAL DATA
2.1 STC-U specifications
Applicable pump
STP-XA2703BV155
STP-XA3203BV155
Applicable control unit
SCU-1600/1601 *1
Input voltage
200 to 240V AC
Allowable input voltage fluctuation
±10%
Total Input power
with STP control unit
2300 VA maximum
without STP control unit
800 VA maximum
Input frequency
50/60 ± 2Hz
Input phase
Single phase
leakage current
1.5 mA maximum
Main breaker specification
Rated current
7.5 A
Ampere Interrupting Capacity (AIC)
750 A (250 V AC、50/60 Hz)
Pollution degree
2
Installation category
Ⅱ
Allowable ambient
temperature
0 to 40 °C (32 to 104 °F)
Storage temperature
-25 to 55 °C (-13 to 131 °F)
Mass
3.5 kg
Dimensions
Refer to Figure 10
Housing*2
Material
SPCC
Surface treatment
Trivalent chromate
TMS unit setting temperature
TMS heater
Refer to Instruction Manual
(B) Section 3.5,
“Specification of TMS unit”.
TMS valve
Panel indication LED
POWER
(Red / Green LED)
VALVE1
(Green LED)
VALVE2
(Green LED)
*1 Specific control unit for STP-XA2703BV155/XA3203BV155.
*2 Irregular color or small scratches may appear on the housing in the metal plate processing of the manufacturing process.
This is no abnormality.

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TECHNICAL DATA
HEATER1
(Green LED)
HEATER2
(Green LED)
Input / Output terminal
X1 AC IN
(3 pin)
X2 AC OUT
(3 pin)
X4 HEATER OUT1
(3 pin)）
X7 HEATER OUT2
(2 pin)
X4 VALVE
(4 pin)
X6 SENSOR
(10 pin)
X3 STP
(9 pin)

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TECHNICAL DATA
2
Figure 10 - Dimensions (mm)

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TECHNICAL DATA
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INSTALLATION
3
3 INSTALLATION
3.1 Unpacking
Check outer package for damage and that the delivery note corresponds to the purchase order. If the
STC-U is damaged, contact Edwards or their distributor.
Note : It is recommended to keep the packaging materials, such as the corrugated fibreboard
container and cushioning material for possible re-use.
3.2 Front panel
Figure 11 - STC-U front panel
No
Descriptions
Function
1
POWER LED
(Green/Orange/Red LED) illuminates the STC-U operation
status. Green LED illuminates during normal operation.
Refer toTable 5 for Orange flash, Red flash, and Red light.
2
VALVE 1 LED
(Green LED) turns on when VALVE 1 connected to the
connector X4 (1 pin and 2 pin) is commanded to open the
valve.
3
VALVE 2 LED
(Green LED) turns on when VALVE 2 connected to the
connector X4 (3 pin and 4 pin) is commanded to open the
valve.
4
HEATER 1 LED
(Green LED) turns on when the HEATER 1 connected to the
HEATER OUT1 X5 connector is commanded to heat up.
5
HEATER 2 LED
(Green LED) turns on when the HEATER 2 connected to the
X7 HEATER OUT2 connector is commanded to heat up.
6
POWER breaker
Main power circuit breaker.
(NOT switch the output of X2 AC OUT connector)
7
Cover (for maintenance only)
Do not open this cover. Used only by Edwards service
personal.
Table 1 - STC-U front panel functions
2
3
5
4
7
1
6

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INSTALLATION
3.3 Rear panel
1
X1 AC IN connector
5
X4 VALVE connector
2
X2 AC OUT connector
6
X3 STP connector
3
X5 HEATER OUT1 connector
7
X6 SENSOR connector
4
X7 HEATER OUT2 connector
8
Ground terminal
Figure 12 - STC-U rear panel
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign
. DO NOT touch the terminal. Doing so may result in electric
shock. When connecting/disconnecting the connecter, always power off the STC-U
and STP control unit (turn the MAIN POWER "OFF") and isolate (Lockout/Tagout)
the electrical energy source, water and gas, and other energy sources on the
vacuum equipment.
Table 2 - STC-U rear panel connection
Item
Description
Function
1
X1 AC IN connector
Main power connection (240 Va.c. maximum)
2
X2 AC OUT connector
Main power connection to supply to STP control unit (240 Va.c.
maximum)
3
X5 HEATER OUT1 connector
Main power connection to HEATER 1 (240 Va.c. maximum)
4
X7 HEATER OUT2 connector
Main power connection to HEATER 2 (240 Va.c. maximum)
5
X4 VALVE connector
VALVE 1 and VALVE 2 connection (24 Vd.c. maximum)
6
X3 STP connector
Serial communication to STP control unit and STP pump (12
Vd.c. maximum)
7
X6 SENSOR connector
Temperature Sensor connection (5 Vd.c.)
8
Ground terminal (M4)
Ground (Earth) connection terminal
1
2
3
4
7
6
5
8