Edwards STP-iXA3306C User manual

MT-82E-001-H
STP Series Turbomolecular Pumps
STP-iXA3306 Series
Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.

This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We,
Manufacture: Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan
EU Representative: Edwards
Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Product Name: Turbomolecular pump
Model Number: STP-iXA3306 series
Accessories Covered: Display Unit: iDT-001, TMS Unit,
Communication Interface (LonWorks, Profibus, Device Net, EtherCAT)
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps.
Safety Requirements. Vacuum Pumps
EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
EMC requirements. General requirements
(Immunity: Industrial locations, Emission: Class A)
EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.
Immunity for industrial environments
EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency
disturbance characteristics (Group1, Class A)
EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic
Products with respect to the Restriction of Hazardous Substances
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not
legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
VI-DOC-82-004
M
anufacture:
Y
uji Kato, TMP Technical Senior Manager
,
Edwards Japan
Limited
5
th
June
. 201
6
,
Yachiyo
Date and Place
EU representative:
Ian Stones
,
Vice President, Technology
, Edwards
6
th
June
. 201
6
, Burgess Hill
Date and Place

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 3
1.3.3 Disclaimer 3
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 13
2.1 STP pump specifications 13
2.2 Maximum gas flow-rate 14
2.2.1 STP-iXA3306C/CV 14
2.2.2 STP-iXA3306B/BV 15
2.3 Water cooling use condition 16
2.4 Control unit 17
2.5 External appearance of the STP pump 19
2.6 Label affixing positions 20
3 INSTALLATION OF THE STP PUMP 21
3.1 Precautions before installation 21
3.1.1 Operating environment 21
3.1.2 Installation area 23
3.1.3 Bench 24
3.1.4 Insulation test 24
3.2 Unpacking 25
3.2.1 Unpacking the STP pump 25
3.3 Name and function of each part 29
3.3.1 Name and function of the pump 29
3.3.2 Name and function of the control unit 30
3.4 How to install the STP pump 33
3.4.1 Cleaning the seal 34
3.4.2 STP pump installation positions 35
3.4.3 Secure the STP pump 36
3.4.4 Legs for securing the base 40
3.4.5 Power cable 41
3.4.6 How to connect the power cable 43
3.5 Precautions of vacuum piping 45
3.5.1 Vacuum piping method 45
3.6 Connecting the purge port 46

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ii
CONTENTS (CONTINUED)
Section Title Page
3.7 Connecting the water cooling pipe 47
3.8 Attaching a baking heater 48
3.9 Installation of the TMS unit 49
3.9.1 TMS unit specification 49
3.9.2 Configuration of the STP pump with the TMS 50
3.9.3 TMS heater 51
3.9.4 Connecting the TMS heater cable 51
3.9.5 TMS valve 51
3.9.6 Connecting the pump and TMS valve 52
3.10 Connecting to semiconductor equipment 53
3.10.1 Connecting to power 53
3.10.2 Emergency off circuit (EMO circuit) 53
4 OPERATION 55
4.1 Gas pumping, cooling and baking the STP pump 55
4.1.1 Gas pumping 55
4.1.2 How to introduce a purge gas 56
4.2 Cooling the STP pump 56
4.2.1 Water-cooling method 56
4.3 Baking the STP pump 57
4.4 Before starting the STP pump 58
4.4.1 Confirmation before starting 58
4.4.2 Confirmation of vacuum system 58
4.5 Powering ON 59
4.6 Pump operation 59
4.6.1 Input operation port setting 59
4.6.2 Starting/stopping the STP pump 60
4.7 How to start/stop the STP pump 62
4.7.1 Starting the STP pump after stopping 62
4.7.2 Starting the STP pump after a safety function operates 62
4.7.3 Powering OFF 62
4.8 LED 63
4.9 Parallel port input/output signal 64
4.9.1 Input signal pins 64
4.9.2 Input operation port setting 71
4.9.3 Rotation INHIBIT signal 72
4.9.4 Second speed option 73
4.9.5 Output signal pins 74
4.10 Operating the TMS unit (for use with the TMS unit) 78
4.10.1 Before starting 78
4.10.2 Starting/Stopping 78
4.10.3 Setting the TMS unit function 78

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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iii
CONTENTS (CONTINUED)
Section Title Page
5 SERIAL COMMUNICATION PROTOCOL 79
5.1 Introduction 79
5.2 Connection and setting up 80
5.2.1 Signal connection 80
5.2.2 Connecting the RS485 82
5.2.3 Communication parameter setting 83
5.2.4 Input operation port setting 84
5.2.5 Serial communication timeout setting 85
5.2.6 Recommended items about communication cable installation 86
5.3 Protocol specifications 89
5.3.1 General description 89
5.3.2 Standard transmission frame 90
5.3.3 Control command
(in the RS232/RS485 single point connection) 91
5.3.4 Query command
(in the RS232/RS485 single point connection) 92
5.3.5 Transmission data format 93
5.3.6 Frame control (checksum) 94
5.3.7 Error control 94
5.3.8 Transmission frame in the RS485 multi-point connection 94
5.3.9 Control command in the RS485 multi-point connection 96
5.3.10 Query command in the RS485 multi-point connection 97
5.3.11 Broadcasting command in the RS485 multi-point connection 98
5.3.12 Application note 99
5.4 Command specifications 103
5.4.1 Command list 103
5.4.2 ReadMeas 104
5.4.3 Command 104
5.4.4 ReadFailMess 105
5.4.5 ReadModFonct 109
5.4.6 ReadVersion 111
5.4.7 ReadCounters 112
5.4.8 ReadSetPoint 113
5.4.9 ReadMotorTemp 113
5.4.10 ReadStatus 114
5.4.11 ReadEvents 115
5.4.12 SetSpeedSetPoint 116
5.4.13 ReadSpeedSetPoint 117
5.4.14 ReadModFonctWithWarning 118
5.4.15 ReadMeasValue 121
5.4.16 ReadOptionFunc 123
5.4.17 SetOptionFunc 126
5.4.18 ReadCondition 128
5.4.19 ReadEventsWithTime 130
5.4.20 SetOptions 134
5.4.20.1 Second speed option setting 134
5.4.20.2 Second speed selection 135

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iv
CONTENTS (CONTINUED)
Section Title Page
5.4.21 ReadOptions 136
5.4.21.1 Second speed function setting 136
5.4.21.2 Second speed select 137
6 STP-LINK AND DISPLAY UNIT 139
6.1 STP-Link 139
6.2 Display unit 140
7 SAFETY FUNCTIONS 141
7.1 Safety functions 141
7.1.1 Power Failure 141
7.1.2 Operation after a power recovery 142
7.1.3 Abnormal state of magnetic bearing (Disturbance) 143
7.1.4 Excessive vibration (Disturbance) 143
7.1.5 Motor driver overload (DRV Overload) 143
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 143
7.1.7 Overheating inside the control unit (CNT Overheat) 143
7.1.8 Overspeed 144
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 144
7.2 "WARNING" function 145
7.2.1 "WARNING" function 145
7.3 Contents of WARNING function 147
7.3.1 First Damage limit 147
7.3.2 Second Damage Limit 147
7.3.3 Pump run time over 147
7.3.4 Pump Overload 148
7.3.5 Imbalance 148
7.4 WARNING function setting 149
7.5 Troubleshooting immediately after failure occurs 150
7.5.1 After power failure 150
7.5.2 After other abnormality/error 150
7.6 Troubleshooting 151
7.6.1 Indication of "FAILURE" LED (red) 151
7.6.2 Indication of "FAILURE" LED (green) 158
7.6.3 No Indication of the "FAILURE" LED 158
8 MAINTENANCE AND INSPECTION 159
8.1 Maintenance and inspection 159
8.2 Cleaning 160
8.3 Inspecting the deposit 160
8.4 Maintenance 161
8.4.1 Recommended overhaul intervals 161
8.4.2 Standard replacement parts 161
8.4.3 Recommended maintenance intervals for main parts 162
8.5 Transporting for repair or overhaul 163

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v
CONTENTS (CONTINUED)
Section Title Page
9 STORAGE AND DISPOSAL 165
9.1 Storage of the STP pump 165
9.2 Disposal 166
10 SERVICE, SPARES AND ACCESSORIES 167
10.1 Introduction 167
10.2 Service 167
10.3 Spares 167
10.4 Accessories 168

STP-iXA3306 Series Turbomolecular Pump
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vi
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 6
2 Hot surface warning label 6
3 Heavy product caution label 7
4 High voltage device caution label 7
5 Rotation instruction label 7
6 Cross sectional view of the STP pump 8
7 External appearance of STP-iXA3306C(V)/iXA3306B(V) 19
8 Label affixing positions 20
9 Space around the STP pump 23
10 Example of lifting the STP pump 25
11 Example of lifting the STP pump (horizontal positioning) 26
12 Jack-up the STP pump 27
13 Control unit bottom face 27
14 Prohibited matter 28
15 STP pump with eyebolts 28
16 Configuration of the STP pump 29
17 Control unit (Front panel) 30
18 Installation of the STP pump to the vacuum equipment 33
19 STP pump installation positions 35
20 Positions of the outlet port on the horizontally
or slanted installed STP pump 35
21 Shape of reduced diameter shank bolts 39
22 Methods of securing the STP pump 39
23 Screw holes for securing the base 40
24 Power cable 41
25 Connecting method of the power cable 42
26 Connecting the purge port 46
27 Positions of the cooling water port 47
28 Baking heater installation position 48
29 Configuration of the TMS 50
30 TMS valve connection 52
31 Pump operation method 1 (contact input) 60
32 Pump operation method 2 (contact input) 60
33 Pump operation method 1 (voltage input) 61
34 Pump operation method 2 (voltage input) 61
35 "ROTATION" LED Indication 63
36 X2 REMOTE connector 64
37 X2 REMOTE input signal pins (contact input) 67
38 X2 REMOTE input signal pins (voltage input) 70
39 X2 REMOTE output signal pins 76
40 Serial port 79
41 X3/X4 connector (D-Sub9) 81
42 RS485 connections 82
43 Grounding example (Both ends grounding) 86
44 Grounding example (single point grounding) 86
45 Example of ring ferrite core installation 87
46 Example of cable installation in metallic duct 87
47 Example of differential signal waveform 88
48 PC to SIM communication 89
49 Block diagram of communication process example 99

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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vii
ILLUSTRATIONS (CONTINUED)
Figure Title Page
50 Example of answer resending process 100
51 Example of response when the command is sent continuously100
52 Example of command sending during answer data reply 100
53 Example of communication cycle process 101
54 Example of command sending process 102
55 Example of answer receiving process 102
56 Display unit iDT-001 140
57 WARNING output 146
58 Failure output 151

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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PAGE
viii
TABLES
Table Title Page
1 Maximum gas flow-rate (STP-iXA3306C) 14
2 Maximum gas flow-rate (STP-iXA3306CV) 14
3 Maximum gas flow-rate (STP-iXA3306B) 15
4 Maximum gas flow-rate (STP-iXA3306BV) 15
5 Environmental requirements for installation 22
6 Eyebolt size 25
7 Pump functions 29
8 Control unit front panel functions 31
9 Control unit front panel functions (continued) 32
10 Tightening torque of bolt 36
11 Maximum torque predicted and recommended securing bolt
for inlet port flange 37
12 Power cable 41
13 TMS unit specification 49
14 Starting/stopping the STP pump
using contact input (X2 REMOTE) 60
15 Starting/stopping the STP pump
using voltage input (X2 REMOTE) (voltage input) 61
16 Reset Operation (X2 REMOTE) 62
17 LED Indications for each state 63
18 X2 REMOTE input signal pins 65
19 X2 REMOTE input signal pins (continued) 66
20 X2 REMOTE input signal pins (voltage input) 68
21 X2 REMOTE input signal pins (voltage input) (continued) 69
22 Input operation port setting 71
23 Rotation INHIBIT signal input 72
24 Second speed function 73
25 X2 REMOTE output signal pins 75
26 X2 REMOTE output signal pins (continued) 76
27 Rated contacts for relays CR1 to CR8 77
28 X3/X4 pin position 80
29 Communication parameters 83
30 Input operation port 84
31 Serial communication time out setting 85
32 Transmission control characters 90
33 Pump operation commands 98
34 Command list 103
35 Pump operation commands 105
36 Error message values 107
37 Error message values (continued) 108
38 Pump operation mode 110
39 Remote mode 115
40 Warning value bit assign 119
41 Parameter setting value 124
42 Option function number and parameter list 134
43 Option function number and parameter list 136
44 Functions of STP-Link 139
45 States of LEDs and X2 REMOTE output signals
at power failure 142
46 WARNING function 145

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ix
TABLES (CONTINUED)
Table Title Page
47 Default setting of WARNING function 149
48 Factory Setting and Variable Range 149
49 Priority of failure signal 151
50 Error List 152
51 Error List (continued) 153
52 Error List (continued) 154
53 Error List (continued) 155
54 Error List (continued) 156
55 Error List (continued) 157
56 Troubleshooting with no indication of the "FAILURE" LED 158

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STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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INTRODUCTION
1
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP
pump as specified in this manual otherwise the protection provided by the equipment may be
impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP-iXA3306 Series Turbomolecular Pump
and the STP Pump Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Warning - Heavy object
This symbol denotes the risk of low back pain and fall.
Warning - Hot surface
This symbol denotes the risk of burns.

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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1
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the display unit iDT-001 (optional accessory). Note that the words
"WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the
pump or precautions during the operation. They do not have the same meaning as the much
more serious symbols for "WARNING" and "CAUTION" used in the instruction manual.
1.2 Applied standards
The STP pump conforms to the following directives and standards:
1. Applied Directives
EC Machinery Directive
EC Electromagnetic Compatibility Directive
EC Low Voltage Directive
2. Applied Standards
EN1012-2
EN61010-1
EN61326-1 (class A)
EN61000-6-2
EN55011
UL61010-1, 2nd Edition (Electrical Equipment for Measurement, Control, Laboratory Use)
SEMI S2-0310
3. Electromagnetic compatibility
This product is a class A product according to EN61326, and a group 1, class A product
according to EN 55011.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment
of material or inspection / analysis purpose and that it is suitable for use in all establishments
other than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
This product must not be used in residential areas because it may cause interference if used in
residential areas.

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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1
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication on the “Failure”
LED of the control unit or the LCD ("WARNING" message) of the display unit iDT-001.
16. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
Touch down bearing.
Air-cooling fan
Touch down bearing and air-cooling fan should be replaced at Edwards, contact Edwards.

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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INTRODUCTION
1
1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
Gases including alkaline metals except Li gas.
Gases including Ga, Hg, In, or Sn.
HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine
system gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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INTRODUCTION
1
1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump under the condition that no power is
applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8,
"MAINTENANCE AND INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. STP pump installation warning label
This label describes installation of the STP pump. Install the STP pump according to the
precautions. Install the STP pump according to the precautions of Section 3, "INSTALLATION
OF THE STP PUMP".
Figure 1 - STP pump installation warning label
2. Hot surface warning label
This label instructs operators so as not to touch the hot surface of the STP pump. The pump
and control unit will become high temperature while the STP pump is in operation. This label
warns operators so as not to burn hands.
Figure 2 - Hot surface warning label

STP-iXA3306 Series Turbomolecular Pump
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INTRODUCTION
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3. Heavy product caution label
This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of
Section 3.2, "Unpacking" so as not to cause any accident during handling.
Figure 3 - Heavy product caution label
4. High voltage device caution label
The pump and control unit are equipped with a high voltage device. This label warns operators
to pay attention to the high voltage device at the maintenance and inspection.
Figure 4 - High voltage device caution label
5. Rotational direction instruction label
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
Figure 5 - Rotation instruction label

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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INTRODUCTION
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1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel,
solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iXA3306 series pump is a series of a magnetically-levitated turbomolecular pumps, each
with the following features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
5. Temperature management system
6. Dust and water protection (STP-iXA3306C/B)
1.
Rotor blade
4.
Radial electromagnet
7.
Touch down bearing
2.
Stator blade
5.
Axial sensor
8.
Control unit
3.
Radial sensor
6.
Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
1
2
4
6
7
3
3
5
8