Edwards nXDS Series User manual

A735-01-840
Issue B
Instruction Manual
nXDS Pump Accessories

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Contents
A735-01-840 Issue B
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Installation and operation safety ...................................................................................... 2
1.3 Unpack and inspect ...................................................................................................... 2
1.4 Disposal of accessories .................................................................................................. 2
1.5 Spares and accessories .................................................................................................. 2
2 Gas ballast adaptor blank .......................................................................5
2.1 Description ................................................................................................................ 5
2.2 Installation ................................................................................................................5
2.2.1 Install the gas ballast adaptor blank .................................................................................. 5
3 Gas ballast adaptor ...............................................................................7
3.1 Description ................................................................................................................ 7
3.2 Technical data ........................................................................................................... 7
3.3 Installation ................................................................................................................7
3.3.1 Install the gas ballast adaptor ......................................................................................... 7
4 Inlet/exhaust filter ...............................................................................9
4.1 Description ................................................................................................................ 9
4.2 Technical data ........................................................................................................... 9
4.3 Installation ...............................................................................................................10
4.3.1 Install the inlet/exhaust filter ........................................................................................10
4.4 Maintenance .............................................................................................................10
4.4.1 Introduction .............................................................................................................10
4.4.2 Removal of elements ...................................................................................................10
4.4.3 Inspection and replacement of the element .......................................................................11
5 Silencer ........................................................................................... 13
5.1 Description ...............................................................................................................13
5.1.1 Application ...............................................................................................................13
5.1.2 Connections ..............................................................................................................13
5.2 Technical data ..........................................................................................................13
5.3 Installation ...............................................................................................................15
5.3.1 Install the nXDS silencer ...............................................................................................15
5.4 Maintenance .............................................................................................................15
5.4.1 Introduction .............................................................................................................15
5.4.2 Removal of elements ...................................................................................................15
5.4.3 Inspection of elements .................................................................................................16
5.4.4 Replacement of elements .............................................................................................16
6 Exhaust nozzle .................................................................................. 17
6.1 Description ...............................................................................................................17
6.2 Technical data ..........................................................................................................17
6.3 Installation ...............................................................................................................17
6.3.1 Install the exhaust nozzle .............................................................................................17
7 Mountable vibration isolators ................................................................. 19
7.1 Description ...............................................................................................................19
7.2 Technical data ..........................................................................................................19
cg/0219/08/13

A735-01-840 Issue B
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Contents
7.3 Installation ...............................................................................................................20
7.3.1 Install the Edwards mountable vibration isolators ................................................................20
8 Chemical resistance conversion kit .......................................................... 21
8.1 Description ...............................................................................................................21
8.2 Installation ...............................................................................................................21
8.2.1 Install the chemical resistance conversion kit .....................................................................22
8.2.2 Inlet/exhaust port conversion ........................................................................................23
9 Pump-to-controller cable ...................................................................... 25
9.1 Description ...............................................................................................................25
9.2 Technical data ..........................................................................................................25
9.3 Installation ...............................................................................................................25
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Accessories for nXDS pumps - general view (o-ring seals not shown) ............................................ 3
2 Gas ballast adaptor blank fitting ...................................................................................... 5
3 Gas ballast adaptor conversion ........................................................................................ 7
4 Inlet/exhaust dust filter components and dimensions ............................................................. 9
5 Silencer dimensions (mm) .............................................................................................14
6 Nozzle and dimensions .................................................................................................17
7 Vibration isolator dimensions .........................................................................................19
8 Inlet/exhaust port conversion ........................................................................................23

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Contents
A735-01-840 Issue B
Tables
Table Page
1 Gas ballast adaptor blank - checklist of components (A735-01-806) ............................................ 5
2 Gas ballast adaptor technical data ................................................................................... 7
3 Gas ballast adaptor - checklist of components (A735-01-809) .................................................... 7
4 Inlet/exhaust filter technical data .................................................................................... 9
5 Inlet/exhaust filter - checklist of components NW25 (A505-97-805)/ NW40 (A505-97-806) ................10
6 NW25/NW40 filter element replacement kit .......................................................................11
7 Silencer technical data ................................................................................................13
8 Silencer - checklist of components (A505-97-000) .................................................................15
10 Nozzle technical data ..................................................................................................17
11 Exhaust nozzle - checklist of components (A505-09-000) ........................................................17
12 Vibration isolator technical data .....................................................................................19
13 Mountable vibration isolators - checklist of components (A248-01-441) .......................................20
14 Chemical resistance conversion kit - checklist of components nXDS6i/10i/15i (A735-01-807) .............21
15 Chemical resistance conversion kit - checklist of components nXDS20i (A735-01-808) ......................21
16 Ordering information ...................................................................................................25
17 Checklist of components ...............................................................................................25
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400-40-100

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A735-01-840 Issue B
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Introduction
A735-01-840 Issue B
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards range of accessories for
the nXDS pump range.
The accessories are shown in Figure 1. The Item Numbers for the accessories are listed in the appropriate sections.
The accessories must be used as specified in this manual. Read this manual before installing accessories onto the
nXDS pump.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
In accordance with the recommendations of EN61010, the following warning labels may appear on the pump or its
accessories:
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.

A735-01-840 Issue B
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Introduction
1.2 Installation and operation safety
Before installing the accessory:
Switch off the nXDS pump and wait until the pump has stopped rotating.
Isolate the pump controller from the electrical supply.
1.3 Unpack and inspect
Remove all packing materials and check the accessory. If it is damaged, notify the supplier and the carrier in writing
within three working days; state the item number of the accessory together with the order number and the suppliers
invoice number. Retain all packing materials for inspection. Do not use the accessory if it is damaged.
Check that the packaging contains the items shown in the Checklist of items table. If any of the items are missing,
notify the supplier in writing within three working days.
1.4 Disposal of accessories
Dispose of the used accessories and accessory spares safely in accordance with all local and national safety
environmental requirements.
1.5 Spares and accessories
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France,
Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A, and a worldwide network of
distributors. The majority of these centres employ service Engineers who have undergone comprehensive Edwards
training courses.
Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, please state for
each part required:
Model and Item Number of the equipment
Serial number (if any)
Item Number and description of part.
WARNING
Use the procedures described in this manual to install the accessory. Obey all safety instructions
and take note of all appropriate precautions. If not, damage to the accessory or other equipment
and injury to people can result.
WARNING
The user of the nXDS pump system is responsible for the safe operation and monitoring of the
system.
WARNING
Before installing the accessory, ensure the pump is off and the controller is isolated as described
below.

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Introduction
A735-01-840 Issue B
Figure 1 - Accessories for nXDS pumps - general view (o-ring seals not shown)
1. Gas ballast adaptor blank
2. Gas ballast adaptor
3a+b. Inlet/exhaust filter
4. Silencer
5. Exhaust nozzle
6. Vibration isolators
7. Chemical resistance conversion kit
8. Pump-to-controller cable (not shown)

A735-01-840 Issue B
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Gas ballast adaptor blank
A735-01-840 Issue B
2 Gas ballast adaptor blank
2.1 Description
The gas ballast adaptor blank (Figure 1, item 1) allows conversion from a standard nXDS pump into an nXDS-R pump.
The gas ballast control is replaced with a blank adaptor to prevent accidental air admittance into the pump. This
feature is also useful for applications such as rare gas recirculation or gas recovery.
2.2 Installation
2.2.1 Install the gas ballast adaptor blank
The method for installing the gas ballast adaptor blank follows some of the stages used to install the gas ballast
adaptor. To install the gas ballast adaptor blank, refer to stages 1, 2, 3, 4 and 6 of the gas ballast adaptor fitting
instructions in Section 3.3.1. For the instructions on how to fit the adaptor blank refer to the instruction and Figure 2
below.
Using a pin spanner (not provided), fit the adaptor blank and tighten to 6 Nm.
Figure 2 - Gas ballast adaptor blank fitting
Note: As a precaution, Edwards recommends that a complete vacuum leak check be performed following this
installation.
Table 1 - Gas ballast adaptor blank - checklist of components (A735-01-806)
Qty Description Check ()
1 Gas ballast adaptor blank 
1 O-ring 19.6ID X 2.4 

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Gas ballast adaptor
A735-01-840 Issue B
3 Gas ballast adaptor
3.1 Description
The gas ballast adaptor (Figure 1, item 2) fits in place of the gas ballast control. The gas ballast adaptor allows
connection of a controlled supply of inert gas such as nitrogen into the low vacuum stage of the pump.
The gas purge can be used to dilute flammable gases down to a safe level (Edwards recommends 1/4 of the Lower
Explosive Limit). An inert purge can also be used to reduce the likelihood of gas vapours such as iodine from
condensing at the outlet stage of the pump.
3.2 Technical data
3.3 Installation
3.3.1 Install the gas ballast adaptor
Figure 3 - Gas ballast adaptor conversion
Table 2 - Gas ballast adaptor technical data
Maximum permitted gas ballast inlet pressure 0.5 bar gauge
Orifice diameter 0.25 mm
Maximum flowrate 0.75 slm
Table 3 - Gas ballast adaptor - checklist of components (A735-01-809)
Qty Description Check ()
1 Gas ballast adaptor 
1 O-ring 19.6 ID x 2.4 

A735-01-840 Issue B
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Gas ballast adaptor
Ensure the pump is switched off before fitting.
As a precaution, Edwards recommends that a complete a vacuum leak check be performed after this installation.
Tip:
Ensure the cooling fan operates correctly following the installation of the gas ballast adaptor.
Retain the gas ballast control assembly and seat for future use if required.
1. Undo the 2 off retaining bolts and partially
remove the fan cowl.
Caution: Cooling fan supply lead attached.
2. Carefully disconnect the cooling fan electrical supply lead
and remove the fan cowl.
3. Using a 21 mm AF spanner, remove the gas
ballast control assembly. 4. Carefully remove the gas ballast control seat and O-ring.
5. Assemble the gas ballast adaptor and new
O-ring, ensure the O-ring and seal surface
are clean and free of dust or dirt.
6. Reconnect and assemble the cooling fan supply lead and fan
cowl (1) in reverse order. Torque the retaining bolts (2) to
3Nm.

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Inlet/exhaust filter
A735-01-840 Issue B
4 Inlet/exhaust filter
4.1 Description
CAUTION
This filter is not designed to withstand positive pressures. Ensure that any system valves are correctly scheduled
to avoid pumping to a closed exhaust line. Refer to the Installation section of the nXDS pump instruction manual.
The inlet/exhaust filter performsa number of functions. It canbe connected in-line between the nXDS pump exhaust
and the exhaust extraction system (Figure 1, item 3a), this is especially useful for process applications such as gas
recirculation. Alternatively, it can be connected in-line between the nXDS pump inlet and the chamber outlet
connection (Figure 1, item 3b) to prevent particles from migrating (backstreaming) into the system, or to stop
particulate from entering the pump. The filter is supplied ready to use with a 5 micron element. A 1 micron element
can be purchased separately and used to replace the 5 micron element if required.
4.2 Technical data
Figure 4 - Inlet/exhaust dust filter components and dimensions
Table 4 - Inlet/exhaust filter technical data
Inlet/outlet port size NW25 (A505-97-805)
NW40 (A505-97-806)
Leak tightness 1 x 10-5 mbar.ls-1
A. Inlet
1. Lid fastening clamp
2. Filter lid
B. Exhaust
3. Polyester element
4. Filter body

A735-01-840 Issue B
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Inlet/exhaust filter
4.3 Installation
4.3.1 Install the inlet/exhaust filter
Ensure the pump is switched off before fitting.
1. Inspect the mating port and seals faces, ensure they are free of dirt or any particulate which could cause the
vacuum seal to leak.
2. Place the centring ring in the end of the NW25 filter port and seat the filter onto the pump mating port. Ensure
the filter is fitted in the correct orientation (refer to Figures 1and 4).
3. Fit the NW25 retaining clamp and tighten to secure the filter.
4.4 Maintenance
4.4.1 Introduction
Edwards recommends that a filter element replacement (Figure 4, item 3) should coincide with a tip seal change.
Refer to the maintenance plan in the nXDS pump manual for recommendations on changing the tip seal.
4.4.2 Removal of elements
Remove the filter from the system. Release the clamps (Figure 4, item 1) and remove the lid (Figure 4, item 3) from
the filter body (Figure 4, item 4). Remove the element for inspection.
Table 5 - Inlet/exhaust filter - checklist of components NW25 (A505-97-805)/ NW40 (A505-97-806)
Qty Description Check ()
1Filterassembly 
2 NW clamp 
2 Centring ring 
WARNING
Take all necessary precautions if toxic or dangerous substances have been pumped. Wear PPE
when handling contaminated filters and filter elements.
WARNING
Do not attempt todismantle the filter whilst the pump is running. Ensure the pump is isolated from
its electrical supply before removing the filter.
Do not inhale the tip seal dust. Do not blow the tip seal dust from the filter with compressed air.

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Inlet/exhaust filter
A735-01-840 Issue B
4.4.3 Inspection and replacement of the element
CAUTION
At high temperature (in excess of 250 ºC) tip seal wear product will begin to decompose, giving rise to gaseous
fumes which can produce unpleasant symptoms.
The filter may be contaminated with the process chemicals that have been pumped during operation. Ensure that
the pump is decontaminated before maintenance and that adequate precautions are taken to protect people from
the effects of dangerous substances if contamination has occurred.
Renewal of the element is recommended regardless of the level of contamination. If the element is heavily
contaminated with tip-seal dust it must be replaced or cleaned in order to avoid a build up of dust that may adversely
affect the pump performance. Rinse the element if necessary with lukewarm water and mild detergent. Observe local
guidelines to advise the safe disposal of PTFE dust.
Fitting the new element is the reverse of removal.
WARNING
Take all necessary precautions if toxic or dangerous substances have been pumped. Wear PPE
when handling contaminated filters and filter elements.
Table 6 - NW25/NW40 filter element replacement kit
Product description Ordering information
5 micron element A505-97-802
1 micron element A505-97-803

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Silencer
A735-01-840 Issue B
5Silencer
5.1 Description
The nXDS silencer has two main functions.
To reduce exhaust noise during pump down and gas ballast operation.
To collect and retain tip seal dust as the pump is operated.
Exhaust gases exit the exhaust port when the pump is being used to evacuate a process chamber, when the gas ballast
control is being used, or both. The noise level when pumping down rises as the throughput increases and the silencer
is used to reduce this noise level.
The outer can is made of pressed steel and is split to allow access to the filter elements.
The filter element housing is made from Santoprene® thermoplastic elastomer. The element itself is polyester. The
foam block is manufactured from filter foam.
Note: These elements can only be used in dry applications and must not be allowed to moisten.
A pressure relief valve is not fitted to the silencer.
5.1.1 Application
5.1.2 Connections
The nXDS silencer has been manufactured with an NW25 fitting to enable fitting to the nXDS pump exhaust (Figure 1,
item 4). An NW25 clamp and centring ring are included. A sectional view of the silencer is shown in Figure 5.
5.2 Technical data
WARNING
The Edwards nXDS silencer is not recommended for use with pumping hazardous substances.
Table 7 - Silencer technical data
Maximum back pressure 0.2 bar gauge
Tip seal dust Pump performance and silencer performance is
unaffected providing elements are serviced in
accordance with recommendations.
Dimensions Refer to Figure 5
Mass 265 g
Port size NW25

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Silencer
Figure 5 - Silencer dimensions (mm)
A. 94 mm
B. 81 mm
1. Top casing
2. Foam block
3. Polyester element
4. Bottom casing
5. Centring ring