Energetiq LDLS EQ-99 User manual

Model EQ-99
LDLS™
Laser-Driven Light Source
Operation and Maintenance Manual
Revision 4 August 2011
Part Number DOC-4957

Copyright © 2011 Energetiq Technology Inc. All rights reserved.
Energetiq products are covered by US and foreign patents. All technical information, including
drawings, schematics and specifications contained in this manual are the property of Energetiq
and shall not be reproduced in whole or in part without the written consent of Energetiq. The
content of this manual is subject to change without notice.
Energetiq Technology Inc.
7 Constitution Way, Woburn, MA 01801 USA
Tel. [phone]
Fax [phone]
E-mail: [email protected]
http://www.energetiq.com

Declaration of Conformity
We, the manufacturers
Energetiq Technology Inc.
7 Constitution Way
Woburn, Massachusetts USA
hereby declare that the product family
LDLS™ Laser-Driven Light Source
Model EQ-99 High Brightness Broadband Light Source
is in conformity with the requirements of the following standards
EN61010-1 (2001) Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use: Part 1 – General Requirements
CISPR 11:2003 Industrial, scientific and medical equipment - Radio-frequency
disturbance characteristics - Limits and methods of
measurement
IEC61000-4-2:2001 Electrostatic Discharge Immunity
IEC61000-4-3:2002 Radiated Electromagnetic Field Immunity
IEC61000-4-6:2003 Radio Frequency Common Mode Immunity
IEC61000-4-8:1994 Power Frequency Magnetic Field Immunity
EN61326-1:2006 Electrical equipment for measurement, control and laboratory
use. EMC requirements. General requirements
EN60825-1 (2007) Safety of laser products - Part 1: Equipment classification and
requirements
in accordance with the provisions of
2006/95/EC EU Low Voltage Directive
2004/108/EC EU Electromagnetic Compatability Directive.
Signed,
Paul Blackborow, CEO Date
at Woburn, Massachusetts USA

TABLE OF CONTENTS
Chapter 1...................................................................................................................................................... 1
General Information........................................................................................................................... 1
Safety............................................................................................................................................... 1
Chapter 2...................................................................................................................................................... 7
Description ........................................................................................................................................... 7
General ........................................................................................................................................... 7
Specifications................................................................................................................................. 7
System Description ...................................................................................................................... 9
Power Supply Controller........................................................................................................... 10
Lamp House................................................................................................................................ 12
Chapter 3.................................................................................................................................................... 15
Installation........................................................................................................................................... 15
Unpacking.................................................................................................................................... 15
Connections................................................................................................................................. 15
Installation Procedure................................................................................................................ 21
Chapter 4.................................................................................................................................................... 23
Operation............................................................................................................................................ 23
Starting.......................................................................................................................................... 23
Stopping ....................................................................................................................................... 23
Chapter 5.................................................................................................................................................... 25
Maintenance........................................................................................................................................ 25
Fiber Cleaning Process.............................................................................................................. 25
Troubleshooting ......................................................................................................................... 28
Lamp Replacement .................................................................................................................... 29

EQ99 Operation Manual Rev. 4 1
Chapter 1
GENERAL INFORMATION
Safety
WARNING
CAUTION
WARNING
The EQ-99 controller utilizes an internal Class
4 IR laser capable of causing severe injury to
eyes or skin. Do not open or attempt to
service this unit. Contact Energetiq regarding
any problems with the unit.
The EQ-99 emits dangerous levels of UV
radiation. Even short exposures to skin or eyes
may cause burns. Ensure that only authorized
personnel are in the vicinity of source during
operation. Personnel in vicinity of operating
source should wear protective eyewear,
clothing, and gloves. Lighted UV warning
lights and signs posted on doors to lab areas
may help prevent accidental exposure.
This unit emits ultraviolet (UV) radiation that is
harmful to humans. Avoid exposure to the
direct or reflected output beam. Make certain
that the appropriate output beam shields and
optics are in place prior to energizing the unit.
All interlocks must be satisfied prior to
operation; failure to do so may lead to hazardous
conditions.

2 EQ99 Operation Manual Rev. 4
General Precautions
The output beam from the EQ-99 should be blocked when not in use with an electronic
shutter or other appropriate beam blocking device. Due to the possibility of generating ozone
when ambient oxygen is exposed to short wavelength light, the beam should always be
enclosed in an appropriate beam pipe, tube, or enclosed space. We suggest purging any beam
transport space with dry nitrogen gas.
The EQ-99 source must also be cabled correctly and connected to a socket with a protective
earth ground prior to operation.
Refer to the Installation section of this manual (Chapter 3) for details of the facilities
connections.
Other than a bulb replacement, there are no user-serviceable parts inside the EQ-99. For any
problems encountered during operation, please contact Energetiq Technology for assistance.
If there is a component failure, do not attempt to open the Power Supply Controller or
Lamp House enclosure of the EQ-99.
The EQ-99 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the
lamp and possible injury from flying fragments can occur if the lamp is mishandled.
Do not open the enclosure of either the Lamp House enclosure or the Power Supply
Controller. Dangerous invisible infrared laser beams and hazardous voltages exist
inside the units. Opening the chassis both voids the warranty and exposes the user to
dangerous radiation and hazardous voltages.
CAUTION
Use of controls or adjustments or performance of procedures
other than those specified herein may result in hazardous
radiation exposure.

EQ99 Operation Manual Rev. 4 3
Laser Information
The EQ-99 uses a patented (U.S. Patent #7,435,982, others pending) laser drive system to
excite a plasma that radiates in the UV as well as the visible bands. A class 4 laser is located in
the Power Supply Controller enclosure. Laser energy is delivered via an armored fiber to the
Lamp House enclosure and connected with an SMA-type connector. Safety interlocks shut
down the laser power if the SMA connector is removed from the Lamp House enclosure. The
optical configuration of the Lamp House ensures that the direct laser beam can not exit the
unit. The EQ-99 laser product is designated as Class 1 during all normal operation.
The parameters of the non-accessible internal laser are given below in Table 1.
Wavelength 974 nm
Emission Type CW
Laser Power for classification <8 mW via 7mm measurement
aperture
Beam Diameter ~29 mm at aperture
Divergence >100 mRad
Transverse Beam Mode Diffuse
Table 1: Embedded Laser Parameters
No regular service is required for the EQ-99. Any service to the system must be performed
only by factory authorized and trained technicians. To avoid injury, under no circumstances
should the user open or modify the Lamp House or Power Supply Controller enclosure.
The unit must not be operated if the covers are removed or it is defective in any way. Contact
Energetiq if any problems with the equipment are suspected.
Labels and Safety Notification
The following safety labels appear on the product. Figure 1 shows the location of each label
on the EQ-99 system.
UV Hazard warning label – indicates hazardous levels of UV
light are present.

4 EQ99 Operation Manual Rev. 4
Manufacturer’s identification label – gives the manufacturer’s
name and address, and the model, serial number, and date of
manufacture of the equipment.
Explanatory label – states the classification of the laser product.
Class 1 is the lowest hazard level classification.
Certification label – states that the equipment has been tested
and verified to meet the standards indicated.
Non-interlocked housing label – notifies of a potential hazard
when covers are removed.

EQ99 Operation Manual Rev. 4 5
Figure 1: Safety Label Locations
Safety Interlocks
The EQ-99 is equipped with interlocks to prevent operation of the device when the following
conditions are present
1. Bulb is not installed into the Lamp House enclosure
2. The laser fiber is not connected to the Lamp House enclosure
3. An external interlock is open
LASER DRIVEN LIGHT SOURC E
Manufacturer’s
ID Label Non-interlocked
Housing Label
Certification
Label
Explanatory
Label
UV Hazard
Warning Label Non-interlocked
Housing Label

6 EQ99 Operation Manual Rev. 4
External Interlock
External interlock pins are provided for the customer’s use (see Chapter 3 for connection
details). Any suitable normally-open contact or solid-state switch can operate the interlock
circuit.
The interlock circuit must be connected to enable the operation of the unit. Should the
interlock connection open during operation or standby, the source is immediately disabled, and
all light output from the aperture ceases.

EQ99 Operation Manual Rev. 4 7
Chapter 2
DESCRIPTION
General
The EQ-99 is a broad-band lamp system for use in a wide variety of applications. The lamp
produces high brightness, broad-band light from DUV wavelengths through visible and
beyond. The output is very stable, and has a long lifetime before any service is required. A
simple control interface ensures ease of use.
Some of the advantages of the EQ-99 include:
•Very high brightness across complete spectrum
–170nm through visible and beyond
•Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
–Simplified optical system
•Excellent spatial stability
–Repeatable measurements
•Superior short and long term power stability
–Repeatable measurements
•Electrodeless operation for long life
–Reduced consumable costs
–Minimal recalibration of instrument
The EQ-99 system consists of a Power Supply Controller unit, Lamp House unit, and
interconnecting cables. Connection to DC power is required for operation. Connection to
nitrogen purge gas is optional, but recommended for best performance. See Chapter 3 for
connection details.
Specifications
Optical Performance
•Typical output spectrum: see Figure 2.

8 EQ99 Operation Manual Rev. 4
0.001
0.01
0.1
1
10
100
150 250 350 450 550 650 750
Wavelength, nm
Radiance, mW/mm2/nm/s
r
EQ-99
D2 Lamp
Figure 2: Typical Output Spectrum
Physical Specifications
Dimensions (H x W x D)
•Lamp House: 82 x 86 x 76 mm (3.2 x 3.4 x 3.0 in)
•Power Supply Controller: 140 x 108 x 254 mm (5.5 x 4.2 x 10.0 in)
Weight
•Lamp House: 0.7 kg (1.5 lbs)
•Power Supply Controller: 2.2 kg (5.0 lbs)
Utility Requirements
•Electrical: 24VDC, 125W
•Cooling: natural convection and internal fan, no auxiliary cooling necessary
•Purge gas (optional): clean dry nitrogen, 20 psig (0.14 MPa) supply pressure
Remote Interface
Digital Inputs

EQ99 Operation Manual Rev. 4 9
•Type: Optocoupler LED
•Logic: Active High
•Input voltage: 5VDC
•Input current: 8mA
Digital Outputs
•Type: Open collector to ground (digital common)
•Logic: Active Low
•Voltage: 30VDC max.
•Sink current: 30mA max.
User Power
•Voltage: 5VDC, referenced to digital common
•Current: 50mA maximum
Environmental Requirements
Operating
•Ambient temperature: 15–35°C
•Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
decreasing linearly to 50% max. at 40°C.
•Pollution Degree 2 (normally only non-conductive pollution; occasional,
temporary condensation possible)
•Installation Category II
•Indoor use only
Transport
•Temperature: -5–95°C
•Relative Humidity: non-condensing, 95% max.
System Description
As shown in Figure 3 the EQ-99 system consists of a Power Supply Controller unit, Lamp
House, laser fiber optic cable, and Lamp House signal cable (not shown). Power and I/O
interface connections (also not shown) are provided by the user.
The following sections provide descriptions of the system components and controls, and gives
an overview of their functions. Refer to the “Installation” section of this manual (Chapter 3)
for more detailed information.

10 EQ99 Operation Manual Rev. 4
Figure 3: EQ-99 Lamp System
Power Supply Controller
The Power Supply Controller contains:
•IR Diode Laser
•Laser power supply
•Thermo-electric cooler for laser
•Permanently attached, armored laser fiber optic cable
•Control electronics
•Status indicator LEDs
•Interface connectors
Power Input
Connector
Lamp House
Signal Connector
I/O Interface
Connector
Armored Laser
Fiber
Status
Indicators
Lamp
House
Power Supply
Controller
Optical
Output

EQ99 Operation Manual Rev. 4 11
Rear panel features (refer to Figure 3):
Status Indicator LEDs
These five LEDs indicate the system status. The function of these indicators is shown below
in Table 2.
LED Label Meaning (when lit)
POWER ON DC power is connected to the EQ-99 Power Supply Controller
LAMP ON UV Light is on
LASER ON Laser power is ON and laser light is being delivered to the Lamp
House
CONTROLLER FAULT One of the following has occurred in the Power Supply Controller:
1. External interlock open
2. Controller internal temperature too high
3. Loose or missing cover
4. Laser power not reaching setpoint
LAMP MODULE FAULT One of the following has occurred in the Lamp House module:
1. Lamphouse internal termperature too high
2. Laser fiber not correctly connected
3. Bulb not correctly installed
Table 2: Status Indicator LED Functions
Input/Output (I/O) Connector
Provides access to control and status signals. See Chapter 3 for pin assignments and functions.
This is the only operator interface to the EQ-99 – there are no local controls. Energetiq offers
the EQ-99-RC Remote Control Module which connects to the Input/Output connector and
provides a means of local control. Contact Energetiq for additional information.

12 EQ99 Operation Manual Rev. 4
Power Input Connector
This is the input connector for 24 VDC power. Power can be provided using the optional EQ-
99-PS001 (US and Japan) or EQ-99-PS002 (Europe). Alternatively, the EQ-99 can be powered
directly from a customer provided 24VDC power supply. See Chapter 3 for detailed
information.
Lamp House Signal Connector (mini D sub – 9-pin)
Provides various power and control signals to/from the Lamp House module. No other
connector or cable may be used with the EQ-99 other than the one supplied.
Armored Laser Fiber
The laser light is delivered from the Power Supply Controller to the Lamp House via a fiber
optic cable with armored protection. It is critical that this armored fiber be treated with care
and inspected for any abnormalities prior to operation. The fiber is permanently attached to
the Power Supply Controller, and connected to the Lamp House by an SMA-type connector.
Lamp House
The Lamp House assembly contains:
•Lamp
•Igniter
•IR pumping optics
•Output window
•Laser ON indicator
•Interface connectors

EQ99 Operation Manual Rev. 4 13
Figure 4: Lamp House Assembly
External features (refer to Figure 4):
Lamp Window
The lamp window at the optical output provides protection from the high pressure bulb inside
the Lamp House. An internally-threaded SM1 adapter is provided for easy connection of
optical hardware.
Nitrogen Purge Inlet
This is the inlet fitting for nitrogen purge gas. Purge gas is optional but is recommended for
best performance. With no purge, ozone will form from atmospheric oxygen and attenuate
the light output in the 220 – 280nm band. In addition, atmospheric oxygen and water vapor
will attenuate the output below 200nm.
There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
Lamp House enclosure, and then to atmosphere.
Lamp
Window
Laser Input
(SMA-type)
Laser ON
Indicator
Purge Gas
Port
Signal Connector
(to Controller)
Lamp mounting
flange

14 EQ99 Operation Manual Rev. 4
Laser Input
This is the inlet connector for the armored fiber from the Power Supply Controller. It
contains a set of interlock pins that disable the laser when the SMA connector is not properly
in place.
Laser On Indicator
This LED is illuminated when the laser is ON.
J4 Signal Connector (mini D sub – 9-pin)
Provides various power and control signals to/from the Power Supply Controller. No other
connector or cable may be used with the EQ-99 other than the one supplied.