Parker MSR Series Owner's manual

MANUAL NO. 102-6195-01
REV C
EFFECTIVE : 1/25/18
SUPERCEDES : 8/25/17
User Information Guide
mSR080

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For assistance contact:
Parker Hannifin Corporation
Electro Mechanical Division
1140 Sandy Hill Road
Irwin , PA 15642
Ph 724-861-8200
800-245-6903
E-mail : [email protected]
www.parkermotion.com

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MSR Series Product Manual
TABLE OF CONTENTS
Introduction………………………………….………………………………………………………….5
General Information…………………………………………………………………….…5
Return….………………………………………………………………………………….5
Repair……………………………………………………………………………………..5
Unpacking and General Installation.………………………………….……………………………....6
Warnings and Precautions………….………………………………………………………………….7
Specification Conditions….………….…………………………………………………………………8
Environmental Specifications.…….…………………………………………………...…8
Mounting Requirements .….…………..……………….…………………………….…..8
Specifications………………. ……….………………………………………………………………….9
Part Number Nomenclature ……….…………………………………………………………………11
Electrical Specifications…………….……………..………………………………………………….12
Standard Cabling and Wiring Diagrams……………………………………………………………..13
Dimensional Drawings…………………………………………………………………………………14
Assembly Diagram……………………………………………………………………………………..15
Optical Encoder Limits………………………………………………………………………………..16
Magnetic Encoder Limits……………………………………………………………………………...17
Part and Serial Number Location…………………………………………………………………….18
Caution and Warning Label…………………………………………………………………………..18
Maintenance and Life Expectancy……………………………………………………………………19
Spare Parts……………………………………………………………………………………………..19
Compliance Documents………………………………………………………………………………..20
Restriction of Hazardous Substances………………………………………………...…..20
CE Declaration of Conformity…………………………………………………………...20
Notes…………………………………………………………………….………………………………21

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REVISON NOTES_____________________________________________________________________
REV - INITIAL RELEASE 5/15/15.
REV 1 PG 8 - CHANGE TRANSPORT TEMPERATURE TO 0 TO +40 (WAS -20 TO +60)
REV 2 Updated mounting information P 14
REV C - p14 - Base Dowel Pin corrected to Slip Fit

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Introduction
The mSR is a series of linear positioners that fits a miniature foot print but delivers large value for cus-
tomers looking to move a relatively light payload with high precision. All key components are integral
to the unit - residing within the body of the stage to provide a clean looking, reliable, unobstructed
package. At the heart of the mSR is an innovative, non-contact linear servo motor. This direct drive
motor has been optimized for force, speed, and acceleration, to deliver outstanding performance and
response. A variety of high precision non-contact linear encoders provides sub-micron resolution and
repeatability. Selectable resolutions range from 10 nanometers to 1 micron. Precision linear ‘square
rails’ provide extremely smooth - precise linear translation. Travel limit and home sensors are conven-
iently designed into the unit for easy adjustment over the entire travel of the stage. Each stage has
been fitted with hi-flex cabling to address cable flexing concerns associated with multi-axis system.
The mSR is intended to be integrated as a component into a machine with separate power electron-
ics, and motion controller. As such the mSR is an incomplete machine, requiring proper power elec-
tronics to be added, as well as necessary machine guarding. The mSR is only rated for use in relative-
ly clean environments moving relatively light payloads (≤ 8 kg).
Return Information
Returns
All returns must reference a “Return Material Authorization” (RMA) number. Please call your local author-
ized distributor or Parker Customer Service Department at 800-245-6903 to obtain a “RMA” number.
Repair Information
Out-of-Warranty Repair
Our Customer Service Department repairs Out-of-Warranty products. All returns must reference a “RMA”
number. Please call your local authorized distributor or Parker Customer Service Department at 800-245-
6903 to obtain a “RMA” number. You will be notified of any cost prior to making the repair.
General Information
Thank you for your interest in the products and systems offered by Parker Hannifin Electromechanical
Automation Division. Our products and systems are recognized around the world for their functionality,
performance, and reliability. Our products can be combined to form single or multi-axis systems with a full
support of custom applications.
The intent of this guide is to provide general information for our MSR product line., including safety, basic
maintenance and features. Not all of this information may be applicable to your product.
If you have any questions or challenges please call our factory support team at 800-245-6903.
It is the responsibility of the end user to ensure that equipment is installed and operated in
accordance with both local and federal safety codes and guidelines.
The user must ensure that the attachment of work pieces/tools or other devices on the moving

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Unpacking and General Installation
Carefully remove the positioner from the packaging materials and inspect the unit for any evidence of shipping
damage. Report any damage immediately to your local authorized distributor. Please save the shipping contain-
er for damage inspection or future transportation.
Incorrect handling of the positioner may adversely affect the performance of the unit in its application. Standard
handling and lifting practices should be employed, product may be heavy.
Please observe the following guidelines for handling and mounting of your new positioner.
Proper mounting of the positioneris required to reduce risk of injury and provide optimal performance.
Positioners should be mounted to a flat, stable surface by using thru-holes , counter bored holes, or tapped
holes on the base of the unit.
Unless otherwise specified, the standard installation of the linear drive is horizontal.
DO NOT allow the positioner to drop onto any surface. Dropping the positioner can generate impact loads that
may result in flat spots on bearing surfaces or misalignment of drive components, drastically effecting the perfor-
mance of the product.
DO NOT drill holes into the positioner. Drilling holes into the positioner can generate particles and machining forc-
es that may effect the operation of the positioner. Parker will drill holes if necessary; contact your local authorized
distributor.
DO NOT subject the unit to impact loads such as hammering, riveting, etc. Impacts loads generated by hammer-
ing or riveting may result in flat spots on bearing surfaces or misalignment of drive components, drastically effect-
ing the performance of the product.
DO NOT lift the positioner by cables or cable management system. Lifting positioner by cables or cable manage-
ment system may effect electrical connections and/or cable management assembly. The unit should be lifted by
the base structure only.
DO NOT expose positioner to mist, spray or submersion in liquids.
DO NOT disassemble positioner. Unauthorized adjustments may alter the positioner’s specifications and will void
the product warranty.
DO NOT transport a long axis without proper support as excessive deflection may occur.

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Warnings and Precautions
Hot Surfaces
DO NOT touch motor coils located in the positioner after high duty operation. Motor temperature may
approach 60°C. The unit itself may become warm or hot to the touch.
Electrical Shock
DO NOT take apart or touch any internal components of the positioner while unit is plugged into an elec-
trical outlet. SHUT OFF power before replacing components to avoid electrical shock.
High Magnetic Field
Unit may be HAZARDOUS to people with Pace Makers or any other ‘magnetically-sensitive’ medical de-
vices. Unit may have an effect on ‘magnetically-sensitive’ applications.
Ferrous Materials
The positioner will NOT keep out small ferrous materials in applications with air born metallic particles.
The customer must take additional precautions in these applications to prevent intrusion of these ferrous
particles.
Vertical Operation
Depending upon your load and counter balance selection the carriage and load may drop when mounted
vertically in power loss situations potentially causing product damage or personal injury.
General Safety
Because linear motors can accelerate up to 3 g's and operate at high speeds, and sometimes positioners
move without warning, keep all personnel away from dynamic travel range of positioner. Product does
have pinch areas where moving elements relative to each other come together.
Moving Cables
If the cables are to be moving, the use of high flex cabling is recommended to ensure long life .
Strain Relieve Electrical Components
All electrical components (such as motor, halls, encoders and limit/home switches) must be strain re-
lieved. Failure to strain relieve electrical wires or cables may result in component failure and/or possible
personal injury.
Pinch Points
Unit may have a pinch point because the top extends over the base of the table as well as moving ele-
ments relative to stationary elements. Proper care should be exercised.

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Specification Conditions
Environmental Specicaons
Storage and Transport Temperature Range 0 to +40 Degrees C.
Storage and Transport Humidity Range 10 - 95% Non Condensing
Operaon Temperature to Achieve Specicaons 20 Degrees C +/- 1 degree C
Operaon Temperature range for basic moon ¹ 5 to 40 Degrees C.
Operaonal Humidity Range 10 - 95% Non Condensing
Cleanliness
Operang area is to be clean and free of parculaon. Normal
room dust is acceptable but heavy parculaon can cause malfunc-
ons and damage.
¹ Minimum to maximum connuous operang temperature range (with NO guarantee of any specicaon except moon)
Mounng Surface Requirements
Proper mounng of the mSR is essenal to opmize product performance. All specicaons are based on the follow-
ing condions:
• The posioner must be bolted down to a at surface which supports the enre length of the base using all
mounng holes provided
• At a minimum for basic moon the posioner must be mounted to a at, stable surface, with a atness error
less than or equal to 0.025mm/300mm, (specicaons will be greatly varied from published specicaon with
this atness).
• To meet catalog specicaons the surface must have a atness error less than or equal to 0.003mm/300mm
for Standard grade and 0.001mm/300mm for Precision grade.

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Specifications
Connuous Power
Motor Power (Was)
CS Motor 38.4
CD motor 76.8
Specicaons Units
25 35 50 100 150
Travel mm
Size (WxH) mm 80 x 25 80 x 25 80 x 25 80 x 25 80 x 25
Normal Load kg 44888
Connuous Thrust N44888
Peak Thrust (Max) N12 12 24 24 24
Duty Cycle %100 100 100 100 100
Acceleraon (Max– no load) G33333
Rated Bus Voltage Volts DC 48 48 48 48 48
Straightness & Flatness¹ Standard grade μm±6 ±6 ±8 ±10 ±15
Precision grade ±3 ±3 ±4 ±5 ±10
Carriage Mass kg 0.2365 0.2365 0.3065 0.4115 0.519
Stage Mass kg 0.525 0.5815 0.7395 1.0665 1.403
1 Precision grade version stage mounted to granite surface, 0.01 micron opcal encoder

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mSR080 Specicaons (Travel & Encoder Dependent)
Travel (mm)
Specicaon Units 25 35 50 100 150
Magnec Encoder -1 Micron Resoluon
Max. Speed mm/s 1100 1500 2000 2000 2000
Bi-direconal
Repeatability μm±5.0
Posional Accuracy μm40 40 60 80 80
Opcal Encoder- 1 Micron Resoluon
Max. Speed mm/s 1100 1500 2000 2000 2000
Bi-direconal
Repeatability μm±2.0
Posional Accuracy μm99911 13
Posional Accuracy
(Slope Corrected) μm56667
Opcal Encoder- 0.1 Micron Resoluon
Max. Speed mm/s 300 300 300 300 300
Bi-direconal
Repeatability μm±0.3
Posional Accuracy μm88810 12
Posional Accuracy
(Slope Corrected) μm45556
Opcal Encoder- 0.01 Micron Resoluon
Max. Speed mm/s 30 30 30 30 30
Bi-direconal
Repeatability μm±0.1
Posional Accuracy μm88810 12
Posional Accuracy
(Slope Corrected) μm45556

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Part Number Nomenclature
mSR 080
Part
Number
Example:

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Electrical Specifications
Motor Specicaons Units 4 Pole 8 Pole
(CS Opon) (CD Opon)
Magnec Pitch mm 13 13
Connuous Force¹ N 48
Peak Force N 12 24
Connuous Current¹ A(rms) 0.8 1.6
Peak Current²˒³ A(rms) 2.4 4.8
Voltage Constant²˒³ Volts/m/s 4.5 4.5
Force Constant² N/A(rms) 5.51 5.51
Resistance² Ohms 8.8 4.3
Inductance⁴ mH 2.4 1.6
Max Bus Voltage VDC 48 48
Thermal Resistance C/Wa 6.84 3.4
Winding Thermal Time Constant Minutes 0.5 0.5
Motor Thermal Time Constant Minutes 0.8 0.8
1 @ 25° C ambient, and winding temperature at 125° C
2 Measured line to line
3 Value is measured peak of sine
4 ±30% Line-to-Line, inducon bridge measurement @ 1 Khz Funcon Color Pin #
Motor Phase U Red 1
Motor Phase V Brown 2
Motor Phase W Orange 3
PE Ground Green/Yellow 4
Hall Power (+5Volts DC) Black 5
Hall Ground White 6
Hall 1 Yellow 7
Hall 2 Blue 8
Hall 3 Green 9

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Opcal Encoder
Funcon Signal Pin #
Power 5 Volts DC 8
Ground 2,9
Incremental Signals
A+ 14
A- 6
B+ 13
B- 5
Reference Mark Z+ 12
Z- 4
Limits Posive Limit 11
Negave Limit 10
Setup (Used in installaon) 1
Error Output NPN 3
Sine Cosine Encoder
Funcon Signal Pin #
Power 5 Volts DC 4, 5
0 Volts DC 12, 13
Incremental Signals
Cosine + 9
Cosine - 1
Sine + 10
Sine - 2
Reference Mark Z+ 3
Z- 11
Limits Posive Limit 7
Negave Limit 8
Setup (Used in installaon) 6
Error Output NPN 14
Magnec Encoder
Funcon Signal Pin #
Power 5 Volts DC 8
Ground 9
Incremental Signals
A+ 14
A- 6
B+ 13
B- 5
Reference Mark Z+ 12
Z- 4
Limits Posive Limit 11
Negave Limit 10
Home NPN 2
Error Output NPN 3

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Dimensional Drawings- mSR080 - mm
Dimensions - mm (in)
Travel ABCDEFGH
(mm) (QTY) (QTY) (QTY)
25 - - 110 (4.33) 80 4 - 46
35 - - 120 (4.72) 80 4 - 46
50 70 (2.76) - 165 (6.50) 110 (4.33) 8 - 86
100 70 (2.76) 125 (4.92) 265 (10.43) 160 (6.30) 12 70 (2.76) 810
150 100 (3.94) 175 (6.89) 365 (14.37) 210 (8.27) 12 100 (3.94) 814
The mSR part numbers
mount directly to one
another. The 4 bolts go
through the center of
the Y axis base to the
carriage of the X axis.
See the mSR100 for
more informaon.
Mounng Requirements
Hardware SCH M4x8
Torque 30 in-lbs
Wrench Size 3mm Allen
Configuration Bolt size
mSR80—mSR80 M4 x 0.7 x 8
mSR80—mSR100 M4 x 0.7 x 8
4 mm Slip Fit of Dowel Pin
(2X Hole)

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Assembly Diagram - mSR080

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Setting the Optical Encoder Limits
The mSR080 with the opcal encoder opon comes equipped with adjustable end of travel limit
sensors. The sensors are acvated by two magnec targets on the side of the stage as shown in
image #1 below. The factory seng locaon of these sensor targets provide the full nominal travel
of the stage with approximately 2mm of over travel before the stage encounters the hard stop.
To adjust travel, simple loosen both screws on the targets ~1/4 turn using a Philips screw driver,
slide the target to the desired posion, push the target upward toward the carriage top to seat the
target on the boom side of the carriage (see image #1) and ghten the screws.
NOTE: The acve length of the target is approximately 9mm, if the target is moved greater than 9
mm from the stage hard stop, the stage can move beyond the acve area of the target and shut o
on the other side of the target. This can lead to having the stage behind a limit sensor. Cauon in
setup and programming should be taken to avoid this potenal issue.
Limit sensor hysteresis: Limit sensor can have up to 1.5 mm of hysteresis which means aer acva-
on the stage must move more than 1.5 mm away from the acvaon point to release the limit
sensor from being acve.
Image 1

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Setting the Magnetic Encoder Limits
The mSR080 with the magnec encoder opon comes equipped with adjustable end of travel limit
sensors and a home sensor. The sensors are acvated by magnec targets on the side of the stage as
shown in image #2 below. The factory seng locaon of the limit sensor targets provide the full nomi-
nal travel of the stage with approximately 2mm of over travel before the stage encounters the hard
stop. The home sensor is set such that during a posive direcon move the home sensor trips approx-
imately in the center of the travel of the stage.
To adjust travel, simple loosen both screws on the targets ~1/4 turn using a Philips screw driver, slide
the target to the desired posion, push the target upward toward the carriage top to seat the target
on the boom side of the carriage (see image #2) and ghten the screws.
NOTE: The acve length of the target is approximately 9mm, if the target is moved greater than 9 mm
from the stage hard stop, the stage can move beyond the acve area of the target and shut o on the
other side of the target. This can lead to having the stage behind a limit sensor. Cauon in setup and
programming should be taken to avoid this potenal issue.
Limit sensor hysteresis: Limit sensor can have up to 2 mm of hysteresis which means aer acvaon
the stage must move more than 2 mm away from the acvaon point to release the limit sensor from
being acve.
Home sensor hysteresis: Home sensor can have up to 0.6 mm of hysteresis which means aer acva-
on the stage must move more than 0.6 mm away from the acvaon point to release the home sen-
sor from being acve.
Image 2

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Part and Serial Number Location
Caution and Warning Label
The mSR Cauon and Warning label is located on the motor phase an hall cable (9 pin D-Sub), as
pictured below.
The mSR 80 part number and serial number can be located at the negave end of travel, be-
tween the square rail bearings.

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Maintenance and Life Expectancy
Maintenance:
The mSR080 is designed to be a maintenance free device. The drive train is a
non-contact linear motor and does not need maintenance of any kind. The linear
bearings are designed with internal lubricators which provide lubrication of the
bearings for the life of the stage. Beside normal cleaning of surfaces (if needed)
no other maintenance is required.
Life:
The operational life of the mSR080 is limited by the linear bearings, if the rated
load of the stage is not exceeded the typical bearing life is on the order of 2,540
km in a clean environment. Contamination or solvents on the bearings can result
in lower life performance.
Spare Parts
Descripon Part #
Limit Kit,MSR080 Opcal 002-3545-01
Limit Kit,MSR080 Magnec 002-3546-01
Z bracket, 25-50mm 002-2238-01
Z bracket, 100-150mm 002-2240-01

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Compliance Documents