PI P753 User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ254E
P-753 Positioning Systems
User Manual
Version: 1.0.1
Date: 28.11.2018
This document describes the following products:

P-753.11C / P-753.1CD
LISA high dynamics piezo nanopositioning
system, 15 µm, direct position measuring,
capacitive sensor

P-753.21C / P-753.2CD
LISA high dynamics piezo nanopositioning
system, 30 µm, direct position measuring,
capacitive sensor

P-753.31C / P-753.3CD
LISA high dynamics piezo nanopositioning
system, 38 µm, direct position measuring,
capacitive sensor
.11C/.21C/.31C = with LEMO connectors
.1CD/.2CD/.3CD = with D-sub connector

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: (http://www.physikinstrumente.com/en/about-
pi/patents)
© 2018 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 28.11.2018
Document number: PZ254E, CBo, Version 1.0.1
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling....................................................................................................... 10
3.4 Scope of Delivery...................................................................................................... 11
3.5 Suitable Electronics .................................................................................................. 11
3.6 Technical Features.................................................................................................... 11
3.6.1 PICMA® Piezo Actuators.............................................................................. 11
3.6.2 Flexure Guides ............................................................................................. 12
3.6.3 Capacitive Sensors ....................................................................................... 12
3.6.4 ID Chip (Only Models With D-Sub Connector)............................................. 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installation................................................................................... 15
5.2 Connecting the P-753 to the Protective Earth Conductor ....................................... 16
5.3 Mounting the P-753 ................................................................................................. 18
5.4 Fixing the Load.......................................................................................................... 20
6Startup and Operation 25
6.1 General Notes on Startup and Operation ................................................................ 25
6.2 Operating the P-753 ................................................................................................. 26
6.3 Discharging the P-753............................................................................................... 27
Contents

7Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Cleaning the P-753 ................................................................................................... 29
8Troubleshooting 31
9Customer Service 33
10 Technical Data 35
10.1 Specifications............................................................................................................ 35
10.1.1 Data Table.................................................................................................... 35
10.1.2 Maximum Ratings........................................................................................ 36
10.1.3 Ambient Conditions and Classifications ...................................................... 37
10.2 Dimensions ............................................................................................................... 38
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 41
10.4 Pin Assignment ......................................................................................................... 41
11 Old Equipment Disposal 43
12 EU Declaration of Conformity 45

1 About this Document
P-753 Positioning Systems PZ254E Version: 1.0.1 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for the intended use of the P-753
(hereinafter referred to as "positioner"). The letter x in the product number stands for the
various models (p. 9).
Basic knowledge of control technology, drive technologies and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.0.1 PZ254E P-753 Positioning Systems
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose sequential order must
be observed

Action consisting of one or several steps whose sequential order
is irrelevant

List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning signs affixed to the product that refer to detailed
information in this manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
The latest versions of the user manuals are available for download (p. 3) on our website.
Product Document
E-625.CR piezo servo controller PZ166E User Manual
E-754 digital piezo controller E754T0001 User Manual
PIMikroMove SM148E Software Manual
P-5xx / P-6xx / P-7xx piezo positioning systems
PZ240EK Short Instructions

1 About this Document
P-753 Positioning Systems PZ254E Version: 1.0.1 3
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 33).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.

1 About this Document
4 Version: 1.0.1 PZ254E P-753 Positioning Systems
3. Click Search.
4. Enter the product number up to the period (e.g., P-753) or the product family (e.g.,
LISA) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
P-753 Positioning Systems PZ254E Version: 1.0.1 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-753 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P-753 is intended for fine positioning as well as the fast
and precise motion of small objects. The motion takes place linearly in one axis.
The P-753 can be mounted with a horizontally or vertically oriented motion axis. Vertical
mounting is only possible under certain conditions (p. 18).
The intended use of the P-753 is only possible in combination with suitable electronics (p. 11)
that is available from PI. The electronics is not included in the scope of delivery of the P-753.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must be able to read out and process the signals from
the capacitive sensors.
2.2 General Safety Instructions
The P-753 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-753.
Only use the P-753 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the P-753.
2
Safety

2 Safety
6 Version: 1.0.1 PZ254E P-753 Positioning Systems
The P-753 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators can
remain charged for several hours. Touching or short-circuiting the contacts in the connector of
the P-753 can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-753.
Discharge the positioner's piezo actuators before installation:
Connect the positioner to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Secure the plug connector of the positioner with screws against being pulled out of the
controller.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-753 in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-753 can result in minor injuries from electric shock.
Connect the P-753 to a protective earth conductor (p. 16) before startup.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-753 to the protective earth conductor before starting it
up again.
Mechanical forces can damage or misalign the P-753.
Avoid impacts that affect the P-753.
Do not drop the P-753.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
Do not touch any sensitive parts (e.g., motion platform) when handling the P-753.
The P-753 is maintenance-free and achieves its positioning accuracy as a result of the optimum
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-753.

2 Safety
P-753 Positioning Systems PZ254E Version: 1.0.1 7
2.3 Organizational Measures
User manual
Always keep this user manual available with the P-753.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-753 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the P-753 after you have read and understood this user
manual.
Personnel qualification
The P-753 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.

3 Product Description
P-753 Positioning Systems PZ254E Version: 1.0.1 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View................................................................................................................................ 10
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics...................................................................................................................... 11
Technical Features ....................................................................................................................... 11
3.1 Model Overview
The P-753 is available in the following versions:
Model Description
P-753.11C LISA high dynamics piezo nanopositioning system, 15 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-753.1CD LISA high dynamics piezo nanopositioning system, 15 µm, direct position
measuring, capacitive sensor, D-sub connector
P-753.21C LISA high dynamics piezo nanopositioning system, 30 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-753.2CD
LISA high dynamics piezo nanopositioning system, 30 µm, direct position
measuring, capacitive sensor, D-sub connector
P-753.31C
LISA high dynamics piezo nanopositioning system, 38 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-753.3CD
LISA high dynamics piezo nanopositioning system, 38 µm, direct position
measuring, capacitive sensor, D-sub connector
3
Product Description

3 Product Description
10 Version: 1.0.1 PZ254E P-753 Positioning Systems
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Figure 1: Example of product view
1Motion platform
2Protective earth connection
3Cable exit
4Base body
X Positive direction of motion of the positioner
3.3 Product Labeling
Labeling Description
P-753.1CD Product name (example), the characters following the
period refer to the model
123456789 Serial number (example), individual for each P-753
Meaning of the places (counting from left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive numbers
LISA
Brand name
Manufacturer's logo
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 43)
Country of origin: Germany
Country of origin
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark
Symbol for the protective earth conductor, marks the
protective earth connection of the P-753 (p. 16)

3 Product Description
P-753 Positioning Systems PZ254E Version: 1.0.1 11
Figure 2: "Residual Voltage" warning sign on the connector of the P-753
Warning sign "Residual voltage": Notice of risk of electric shock (p. 5) for models with
D-sub plug connector
3.4 Scope of Delivery
Product number Description
P-753 Positioner according to order (p. 9)
000036450 M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
PZ240EK Short instructions for piezo positioning systems
3.5 Suitable Electronics
You need suitable electronics to operate a P-753. Selection of the device depends on the
application and the connections available.
Product number Description
E-625 Piezo servo controller
E-754 Digital piezo controller
To order, contact our customer service department (p. 33).
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-753 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.

3 Product Description
12 Version: 1.0.1 PZ254E P-753 Positioning Systems
3.6.2 Flexure Guides
P-753 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the motion platform (direct metrology) and
work without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.6.4 ID Chip (Only Models With D-Sub Connector)
An ID chip is located in the D-sub connector of the P-753. When the P-753 is calibrated at the
factory with digital electronics, the calibration data is saved on the ID chip together with
specific product information. During switch-on, the digital electronics read the data from the
ID chip of the P-753 connected. An P-753, whose ID chip contains the calibration data, can
therefore be connected to any suitable digital electronics without renewed calibration.
For more information on the ID chip, see the manual of the controller used.

4 Unpacking
P-753 Positioning Systems PZ254E Version: 1.0.1 13
1. Unpack the P-753 with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 33) immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
P-753 Positioning Systems PZ254E Version: 1.0.1 15
In this Chapter
General Notes on Installation ...................................................................................................... 15
Connecting the P-753 to the Protective Earth Conductor........................................................... 16
Mounting the P-753..................................................................................................................... 18
Fixing the Load ............................................................................................................................. 20
5.1 General Notes on Installation
CAUTION
Dangerous voltage and residual charge in piezo actuators!
The P-753 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators
can remain charged for several hours. Touching or short-circuiting the contacts in the
connector of the P-753 can lead to minor injuries from electric shock. The piezo actuators can
be destroyed by an abrupt contraction.
Do not open the P-753.
Discharge the positioner's piezo actuators before installation:
Connect the positioner to the switched-off PI controller, which is equipped with an internal
discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Secure the plug connector of the positioner with screws against being pulled out of the
controller.
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the motion platform of the P-753 can cause damage to
the piezo actuators, sensors, and flexures of the P-753 as well as loss of accuracy.
Do not touch any sensitive parts (e.g., motion platform) when handling the P-753.
5
Installation

5 Installation
16 Version: 1.0.1 PZ254E P-753 Positioning Systems
NOTICE
Damage due to unsuitable cables!
Unsuitable cables can damage the P-753 and the electronics.
Only use cables provided by PI for connecting the P-753 to the electronics.
NOTICE
Damage due to improper mounting!
Improper mounting of the P-753 or incorrectly mounted parts can damage the P-753.
Mount the P-753 and the loads only onto the mounting fixtures (holes) intended for this
purpose.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Pay attention to the torque range (p. 41) specified for the screws used during installation.
INFORMATION
Extended cables can reduce the positioning accuracy of the P-753 or affect the sensor
processing by the electronics.
Do not use cable extensions. If you need longer cables, contact our customer service
department (p. 33).
5.2 Connecting the P-753 to the Protective Earth Conductor
INFORMATION
In the case of P-753 positioners with D-sub connectors, ground loops can occur when the
positioner is grounded via its protective earth connection as well as by the shield of the
connecting cable for the electronics.
If a ground loop occurs, contact our customer service department (p. 33).
INFORMATION
Pay attention to the applicable standards for connecting the protective earth conductor.