Parker MX80L series User manual

Manual No. : 100-5326-01
Rev: M
Effective: June 10, 2021
Supersedes: March 6, 2020
MX80L Product Manual
Automation

MX80L Series Product Manual
2
Parker Hannifin Corporation
Irwin, Pennsylvania Automation
The information in the product manual, including any apparatus, methods, techniques, and concepts de-
scribed herein, are the proprietary property of Parker Hannifin Corporation, Irwin Division or its licensors, and
may not be copied, disclosed, or used for any purpose not expressly authorized by the owner thereof.
Since Parker Hannifin Corporation, Irwin Division constantly strives to improve all of its products, we reserve
the right to change this product manual and equipment mentioned therein at any time without notice.
WARNING
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED
HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries, and authorized distributors provide
product and/or systems options for further investigation by users having technical expertise. It is important that you ana-
lyze all aspects of your application and review the information concerning the product or system in the current product
catalog. Due to the variety of operating conditions and applications for these product systems, the user, through its own
analysis and testing, is solely responsible for making the final selection of the products and systems and assuming that all
performance, safety, and warning requirements of the application are met.
Important User Information
For assistance contact:
Parker Hannifin Corporation
Actuators Division
1140 Sandy Hill Road
Irwin, PA 15642
Phone: (724) -861-8200
(800) -245 -6903
Fax: (724) -861-3330
E-mail: EMN_Customer_Serv[email protected]
Website: www.parkermotion.com

MX80L Series Product Manual
3 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
Table of Contents
Important User Informaon 2
Table of Contents 3
Revision Notes 4
Chapter 1 - Introducon 5
Product Descripon 5
Unpacking 5
Return/Service Informaon 6
Warnings and Precauons 6
Specicaon Condions 7
Assembly Diagram 8
Chapter 2 – MX80L Series Table Specicaons 9
Order Number Nomenclature 9
Dimensional Drawings 10
General Table Specicaons 13
Test Methodology 14
MX80L Series Technical Data 15
Electrical Specicaons 22
Clean Room Preparaon 23
Encoder Specicaons 24
Hall Eect Specicaon 24
Limit and Home Sensor Specicaons 24
Low ESD Specicaons 24
Standard Cabling and Wiring Diagrams 25
Chapter 3 - How to Use the MX80L 26
Mounng Orientaons 26
Mounng Surface Requirements 26
Load Mounng Requirements 27
Limit and Home sensor operaon 28
Adjusng the Limit Flag Procedure 29
Seng Home Sensor 30
Z Channel Posion Reference 30
Grounding / Shielding 31
Cabling 31
Cable Management 31
Pneumac Counterbalance 32
Chapter 4 - Performance 33
Acceleraon Limits 33
Speed Limits 33
Thermal Eects on Accuracy 34
Thermal Eects on Repeatability 34
Causes of Temperature Increases 35
Compensang for Thermal Eects 35
Chapter 5 - Connecng to Drives 36
Compax 3 Cabling and Wiring Diagrams 36
Vix Cabling and Wiring Diagrams 37
Chapter 6 - Maintenance and Lubricaon 38
Cross Roller Bearing Lubricaon 38
Appendix A - Internal Protecon 39
Appendix B - CE Declaraon of Conformity 40

MX80L Series Product Manual
4
Parker Hannifin Corporation
Irwin, Pennsylvania Automation
Revision 1 -Original Document
Revision 2 – 8/25/03
Made numerous spelling correcons
Added precision grade tables
Page 9 – Modied congurable to include precision grade tables
Page 13 – Modied specicaons to include precision grade tables
Page 25 – Modied Low ESD descripon to include precision grade tables
Revision 3
Changed wiring block extension dimension on page 10
Page 29, 30, & 31, Changed Limits/Home from opcal sensors to magnec sensors
Revision 4
Removed Steps 5a & 5b from page 30 (Steps 5a & 5b were for opcal Limits/Home)
Revision 5
Added informaon for the T05 (200mm travel) posioner
Revision 6
Updated electrical specicaon for the resistance and inductance on D11 and D13 motors, page 23.
Added the following Note to page 26: Tables purchased before June 1, 2009 require an interpolator box and a bypass cable for 10 and 20 nanometer
resoluons.
Revised Stac Fricon for D11 motor from 0.5N to 1.0N, page 23.
Page 29, Changed the following sentence from “These factory sengs only allow for a minimum of 3mm (0.12”) before the carriage contacts the end
stop.” to “These factory sengs only allow for a minimum of 1.5mm (0.06”) before the carriage contacts the end stop.”
Page 9, added encoder opon E5 to Order Number Nomenclature secon.
Revision 7
Add Compax3 opon.
Add MX80L EC declaraon.
Revision 8
Add warning for maximum operang voltage for Compax3.
Revision 9
Claried warnings so that they agree with the CE risk assessment
Revision K
Changed pinning opons to require NSP, updated max acceleraon.
Revision L
Updated congurable opons, updated outdated general informaon, references no longer oered.
Revision M
Updated lubricaon informaon
Revision Notes

MX80L Series Product Manual
5 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
Chapter 1 - Introducon
MX80L Posioner
Although the MX80L is small in size and weight, it is large on performance and reliability. All key components are integral to the unit -
residing within the body of the stage to provide a clean looking, reliable, unobstructed package. At the heart of the MX80L is an inno-
vave non-contact linear servo motor (patent pending). This direct drive motor has been opmized for force, speed, and acceleraon,
to deliver outstanding performance and response. A high precision non-contact linear encoder provides sub-micron resoluon and
repeatability. Selectable resoluons range from 10 nanometers to 5 microns. Precision ground “zero cage creep” crossed roller bear-
ing sets provide extremely smooth - precise linear translaon. Travel limit and home sensors are conveniently designed into the unit
for easy adjustment over the enre travel of the stage. Although there are no moving cables, 1 or 3 meters of hi-ex cabling depend-
ing on conguraon opon is included and wired directly into the units. This hi-ex cabling addresses cable exing concerns associat-
ed with the second or third axis in mul-axis system.
Product Description
Unpacking
Carefully remove the posioner from the shipping container and inspect the unit for any evidence of shipping damage. Report any
damage immediately to your local authorized distributor. Please save the shipping container for damage inspecon or future
transportaon.
Incorrect handling of the posioner may adversely aect the performance of the unit in its applicaon. Please observe the follow-
ing guidelines for handling and mounng of your new posioner:
• Product may be heavy. Standard handling and liing pracces should be employed.
• DO NOT allow the posioner to drop onto the mounng surface. Dropping the posioner can generate impact loads that may
result in at spots on bearing surfaces or misalignment of drive components.
• DO NOT drill holes into the posioner. Drilling holes into the posioner can generate parcles and machining forces that may
eect the operaon of the posioner. Parker will drill holes if necessary; contact your local authorized distributor.
• DO NOT subject the unit to impact loads such as hammering, riveng, etc. Impacts loads generated by hammering or riveng
may result in at spots on bearing surfaces or misalignment of drive components.
• DO NOT li the posioner by cables or cable management system. Liing posioner by cables or cable management system
may eect electrical connecons and/or cable management assembly. The unit should be lied by the base structure only.
• DO NOT expose posioner to mist, spray or submersion in liquids.
• DO NOT disassemble posioner. Unauthorized adjustments may alter the posioner’s specicaons and void the product war-
ranty.

MX80L Series Product Manual
6
Parker Hannifin Corporation
Irwin, Pennsylvania Automation
Repair/Service Information
Field service is not recommended for internal comments of the MX80L product line. Parker accepts both
warranty and non-warranty returns. Please contact a local Parker distributor to iniate an RMA “Return
Material Authorizaon”.
Parker’s customer service team can assist with distribuon details at:
1-800-245-6903
EMN_Customer_Ser[email protected]
During service, RMA tracking is available online: hp://www.parkermoon.com/scripts/repairs.asp
Warnings and Precautions
Hot Surfaces
DO NOT touch linear motor coils located in the base of the MX80, (see page 8, Assembly Diagram, for component locaon), aer high
duty operaon. Motor temperature may approach 125 C. The unit itself may become warm or hot to the touch.
Electrical Shock
DO NOT take apart or touch any internal components of the posioner while unit is plugged into an electrical outlet. SHUT OFF power
before replacing components to avoid electrical shock.
High Magnec Field
Unit may be HAZARDOUS to people with Pace Makers or any other 'magnecally-sensive' medical devices. Unit may have an eect on
'magnecally-sensive' applicaons.
Ferrous Materials
The posioner's open design WILL ATTRACT ferrous materials. The customer must take addional precauons in these applicaons to
keep posioner free of these highly magnec parcles.
Vercal Operaon
The MX80L is NOT recommended for vercal operaon unless it is congured with the pneumac assist opon. If the pneumac assist is
not used, the carriage and customer's load will fall in power loss situaons potenally causing product or load damage or personal injury.
General Safety
Because linear motors can accelerate up to 5 g's and operate at high speeds, and sometimes positioners move without warning, keep all per-
sonnel away from dynamic travel range of positioner. Product does have pinch areas where moving elements relative to each other come
together.

MX80L Series Product Manual
7 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
Specification Conditions
Specicaons Are Temperature Dependent
Catalog specifications are obtained and measured at 20 Degrees C. Specifications at any other temperature may
deviate from catalog specifications. Minimum to maximum continuous operating temperature range (with NO guar-
antee of any specification except motion) of a standard unit before failure is 5 - 40 degrees C.
Specicaons Are Mounng Surface Dependent
Catalog specifications are obtained and measured when the positioner is fully supported, bolted down, and is
mounted to a work surface that has a maximum flatness error of:
Standard Grade: 0.003mm/300mm (0.0001”/ft)
Precision Grade: 0.001mm/300mm (0.00004”/ft)
Table will operate with work surface 0.100mm/300mm but performance specifications will be significantly affected.
Specicaons Are Point of Measurement Dependent
Catalog specifications and specifications in this manual are measured from the center of the carriage, 38 mm
above the carriage surface. All measurements taken at any other location may deviate from these values.

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation
Assembly Diagram

MX80L Series Product Manual
9 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
Chapter 2 - MX80L Series Table Specicaons
Order Number Nomenclature
①Series ⑨Z Channel Locaon
MX80L Z1 None
Z3 Center Posion
②Travel – mm
T01 25 ⑩Digital Linear Encoder Opon
T02 50 E1 None
T03 100 E2 1 μm Resoluon
T04 150 E3 0.5 μm Resoluon
T05 200 E4 0.1 μm Resoluon
E5 5 μm Resoluon
③Mounng E8 0.02 μm Resoluon (20 nanometer)
MMetric E9 0.01 μm Resoluon (10 nanometer)
④Grade ⑪Environmental
SStandard R1
PPrecision (not available w/T05) R2 Cleanroom Prep
R10 Low ESD nish
⑤Drive Type R20 Low ESD nish & cleanroom prep
D1 Free Travel (No motor)
D11 4 Pole (T01 & T02 only) ⑫Digital Drive
D13 8 Pole (T03, T04,T05 only) A1
⑥Home Sensor ⑬Other Opons
H1 None - Free travel (only) X1
H2 N.C. Current Sinking X2 Z-axis Pneumac Counter Balance *
H3 N.O. Current Sinking * Not available with T05
⑦Limit Sensor ⑭Axis Designator
L1 None - Free travel (only) S1
L2 N.C. Current Sinking S2* X-axis base unit (cables @ 12 o’clock)
L3 N.O. Current Sinking S3* Y-axis 60 arc-sec (cables @ 3 o’clock)
S4* Y-axis 60 arc-sec (cables @ 9 o’clock)
⑧Cable Opons (High-ex) S5* Y-axis 15 arc-sec (cables @ 3 o’clock)
CM03 No Cables - Free Travel S6* Y-axis 15 arc-sec (cables @ 9 o’clock)
CM04 High-ex cables w/ HD15M-VF & HD15M-VL Connectors (1 m) *Consult factory, only available through a custom part number
CM05 High-ex cables w/ HD15M-VF & HD15M-VL Connectors (3 m)
CM06 High-ex cables w/ HD15M-VF Connector, w/o Limit cable (1 m)
CM07 High-ex cables w/ HD15M-VF Connector, w/o Limit cable (3 m)
①②③④⑤⑥⑦⑧⑨⑩⑪⑫⑬⑭
Order Example: MX80L T04 MP–D11 H3 L2 CM05 Z3 E8 R1 A1 X1 S2

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation
Dimensional Drawings

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania

13.1[0.51]
002-2223-01
Cylinder assembly
5.6[0.22]
125.0[4.92]
16.0[0.63]
100-9822-01
Qty (2)
45.0[1.77]
Z axis shown at mid-travel posion
MX80L-T01 or T02
Z-axis configuration with counter balance (not available on 200mm Travel)

MX80L-T03
16.0[0.63]
100-9822-02
Qty (2)
5.6[0.22]
002-2223-01
Cylinder assembly 220.0[8.66]
2.1[.08]
50.0[1.97]
Z axis - shown at mid-travel

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation

MX80L-T04
16.0[0.63]
002-2223-01
Cylinder assembly
75.0[2.95]
Z axis - shown at mid-travel
100-9822-02
Qty (2)
7.1 [0.28]
285.0{11.22]
5.7[0.22]

MX80L Series Product Manual
13 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
General Table Specifications
MX80LP Precision Grade MX80LS Standard Grade
Travel (mm) 25 50 100 150 25 50 100 150 200
Normal Load Capacity kg (lb) 8 (18) 8 (18) 8 (18) 8 (18) 8 (18) 8 (18) 8 (18) 8 (18) 8 (18)
Maximum Acceleraon g's 444355543
Maximum Velocity
mm/
sec2
5.0 μm1100 1500 2000 2000 1100 1500 2000 2000 2000
1.0 μm1100 1500 2000 2000 1100 1500 2000 2000 2000
0.5 μm1100 1500 1500 1500 1100 1500 1500 1500 1500
0.1 μm300 300 300 300 300 300 300 300 300
0.02 μm60 60 60 60 60 60 60 60 60
0.01 μm30 30 30 30 30 30 30 30 30
Connuous Force N (lb) 4 (0.9) 4 (0.9) 8 (1.8) 8 (1.8) 4 (0.9) 4 (0.9) 8 (1.8) 8 (1.8) 8 (1.8)
Duty Cycle %100 100 100 100 100 100 100 100 100
Straightness & Flatness μm44566610 12 14
Posional Accuracy*
μm
5.0 μm13 14 15 15 25 30 35 35 35
1.0 μm567715 20 25 25 25
0.5 μm456612 15 20 20 20
0.1 μm345512 15 20 20 20
0.02 μm345512 15 20 20 20
0.01 μm345512 15 20 20 20
Bi-direconal Repeatability*
μm
5.0 μm±10.0 ±10.0 ±10.0 ±10.0 ±10.0 ±10.0 ±10.0 ±10.0 ±10.0
1.0 μm±2.0 ±2.0 ±2.0 ±2.0 ±2.0 ±2.0 ±2.0 ±2.0 ±2.0
0.5 μm±1.0 ±1.0 ±1.0 ±1.0 ±1.0 ±1.0 ±1.0 ±1.0 ±1.0
0.1 μm±0.5 ±0.5 ±0.5 ±0.5 ±0.5 ±0.5 ±0.5 ±0.5 ±0.7
0.02 μm±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.5
0.01 μm±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.4 ±0.5
Unit Mass g590 590 1027 1345 475 475 875 1125 1370
Carriage Mass (unloaded) g282 282 509 676 213 213 405 537 695
(1) Measured at the carriage center, 35
mm above the mounng surface @ 20 C
with no load. Unit bolted to granite sur-
face, at to within 1 micron/300 mm.
(2) Total accuracy and bi-direconal re-
peatability over full travel (peak to peak).
(3) Precision grade with slope correcon
value provided. Consult factory if beer
accuracy is required.
(1) Total accuracy and bi-direconal re-
peatability over full travel (peak to peak).
* Notes:

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation
Test Methodology
Published accuracy and repeatability specicaons are subject to the tesng methodology. Parker’s meth-
odology provides specicaons over the enre table travel regardless of start or nish posion. The accuracy and
repeatability specicaons are based on the peak to peak error measured by a laser interferometer and prism lo-
cated at 38mm above the center of the table. This type of measurement sums the X, Y, Z, roll, pitch, and yaw er-
rors. Temperature deviaons from test condion may cause deviaons in straightness, atness, accuracy, and
repeatability from catalog specicaons. Tests are performed with the table mounted to a granite table, unload-
ed at 20o C.
In this example, the accuracy of an MX80L-T02 ranges from -3.68 microns to 2.64 microns. This table
would have its accuracy specied as 6.32 micron since the worst case would be starng at one extreme and travel-
ing to the other.
2.64
-3.68
6.3

MX80L Series Product Manual
15 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
MX80L Series Technical Data
The useful life of a linear table at full catalog specifications is dependent on the forces acting upon it. These forces include
both static components resulting from payload weight, and dynamic components due to acceleration/deceleration of the load.
In multi-axes applications, the primary positioner at the bottom of the stack usually establishes the load limits for the combined
axes. When determining load/life, it is critical to include the weight of all positioning elements that contribute to the load sup-
ported by the primary axis. The life/load charts are used to establish the table life relative to the applied loads.
-
-
The effect of moment loading on the bearing life is dependent upon load and lever arm. The lever arm in this case is meas-
ured from the center of the surface of the table to the point where the load is applied. For dynamic loading, use the distance
from the center of the table to the center of mass of the load. The Life-Load charts show curves for various lever arm lengths
(units in [mm]). Note Pitch moments and Yaw moments use the same curves.
Yaw Moment Loading Roll Moment Loading Pitch Moment Loading

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation
-
Life - Moment Chart 25mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]
Life - Moment Chart 25mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]

MX80L Series Product Manual
17 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
-
Life-Moment Chart 50mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]
Life-Moment Chart 50mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation
-
Life- Moment Chart 100mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]
Life - Moment Chart 100mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]

MX80L Series Product Manual
19 Automation
Parker Hannifin Corporation
Irwin, Pennsylvania
-
Life- Moment Chart 150mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]
Life- Moment Chart 150mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]

MX80L Series Product Manual
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Parker Hannifin Corporation
Irwin, Pennsylvania Automation

To predict the travel life of the MX80L cross roller bearings under a moment load use the curve with the correspond-
ing lever arm and given load. Factor in dynamic as well as static loads. For compound loading (multiple moments)
use an “effective lever arm of 2x actual lever arm.
Given a MX80L-T02 with a 2 kg load mounted 35
mm off of the end of the carriage in line with the
travel path. The lever arm is 35 mm + 40 mm
(center of table to edge) = 75 mm
This loading produces a pitch moment. Therefore,
using the Pitch curve for the 50mm travel, draw a
vertical line up from the x-axis at the 2 kg load point
until it intersects the 75 curve. The point of intersect
is the predicted bearing life of the table.
In this example the life is 10,000 km of travel
Example :
Life-Moment Chart 50mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
0 1 2 3 4 5 6 7 8
Load [kg]
Life [km]