Gamma Vacuum DIGITEL User manual

DIGITEL TSPq controller
Instruction manual
www.gammavacuum.com
900035_B Original instructions

Copyright notice
© Gamma Vacuum 2021. Part of the Atlas Copco Group
Trademark credit
Gamma Vacuum and the Gamma Vacuum logo are trademarks of 2700 4th
Avenue East, Ste 100, Shakopee, MN 55379, USA
Disclaimer
The content of this manual may change from time to time without notice.
We accept no liability for any errors that may appear in this manual nor do
we make any expressed or implied warranties regarding the content. As far
as practical we have ensured that the products have been designed and
constructed to be safe and without risks when properly installed and used
in accordance with their operating instructions.
We accept no liability for loss of prot, loss of market or any other indirect
or consequential loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms
and conditions of sale or negotiated contract under which this document is
supplied.
You must use this product as described in this manual. Read the manual
before you install, operate, or maintain the product.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1. Denition of Warnings and Cautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2. Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3. Warnings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2. General information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.1. Approvals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3. Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.1. Titanium Sublimation Pump (TSP). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2. Liquid Nitrogen (LN2) cryoshroud. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
3.3. Ambient sputter shield. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4. Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.1. Pre-installation checks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.2. Inspect for any obvious damage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.3. Safety notices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.4. Required Items. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5. Controller conguration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.1. Input mains a.c. voltage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.2. Number of TSP pump connectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.3. DIGITEL TSPq standalone conguration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.4. DIGITEL TSPq + Remote TSP controller conguration. . . . . . . . . . . . . . . . . . . 15
6. Front panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
7. Touchscreen user interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.1. Home screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.2. TSP setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
7.3. Display setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
7.4. Digital input setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
7.5. Serial port setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.6. Ethernet interface setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
8. Rear panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
9. Serial communication. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
9.1. Gamma protocol over serial connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
9.2. Gamma protocol response packet structure over serial connection. . . . . . 27
9.3. CRC checksum example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
9.4. Gamma protocol commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Page 3900035_B

10. Ethernet communication. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
10.1. Gamma Protocol Over Ethernet Connection. . . . . . . . . . . . . . . . . . . . . . . . . 33
11. Technical specications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
12. Warranty and service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
12.1. Warranty. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
12.2. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
12.3. Returning Material. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
13. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Page 4900035_B

List of Figures
Figure 1: Titanium Sublimation Pump (TSP). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Figure 2: Liquid nitrogen cryoshroud. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Figure 3: Ambient sputter shield. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Figure 4: DIGITEL TSPq standalone conguration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 5: DIGITEL TSPq + Remote TSP controller conguration. . . . . . . . . . . . . . . . . . . 15
Figure 6: Front panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Figure 7: Home screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 8: Home screen (control buttons visible). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 9: TSP setup screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 10: Display setup screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 11: Digital input setup screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 12: Serial port setup screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 13: Ethernet setup screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 14: Rear panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Page 5900035_B

1. Safety and compliance
1.1. Denition of Warnings and Cautions
NOTICE:
For safe operation from the start, read these instructions carefully before
you install or commission the equipment and keep them safe for future use.
Read all the safety instructions in this section and the rest of this manual
carefully and make sure that you obey these instructions. The equipment
must only be operated and maintained by trained personnel in the proper
condition and as described in this instruction manual.
Obey local and state requirements and regulations. If you have any
questions about safety, operation or maintenance of the device, please
contact our nearest subsidiary.
Important safety information is highlighted as warning and caution
instructions. Obey these instructions.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent
symbols are used according to the type of hazard.
CAUTION:
If you do not obey a caution, there is a risk of minor injury, damage to
equipment, related equipment or process.
NOTICE:
Information about properties or instructions for an action which, if ignored,
will cause damage to the pump or the system.
We reserve the right to change the design and the stated data. The
illustrations are not binding.
Keep the instructions for future use.
Page 6900035_B
900035_B - Safety and compliance

1.2. Safety symbols
The safety symbols on the products show the areas where care and
attention is necessary.
The safety symbols that follow are used on the product or in the product
documentation.
Warning/Caution
An appropriate safety instruction must be followed or caution
to a potential hazard exists.
Warning - Dangerous voltage
Identies possible hazards from dangerous voltages.
Warning - Heavy object
Identies a possible hazard from a heavy object.
Warning - Read the manual
1.3. Warnings
WARNING:
Shock hazard. Can
cause injury or death.
Remove power before
servicing.
AVERTISSEMENT :
Risque de choc
électrique. Peut
entraîner des blessures,
voire la mort. Coupez
l'alimentation électrique
avant l'entretien.
警告:
感電事故。怪我や死亡事
故の原因になります。保
守を行う前に、電源を切
ってください。
ADVERTENCIA:
Peligro de descarga.
Pueden producirse
lesiones o incluso la
muerte. Desconecte la
alimentación antes de
realizar cualquier tarea
de mantenimiento.
WARNUNG:
Stromschlaggefahr. Es
besteht Verletzungs-
und Todesgefahr. Vor
Wartungsarbeiten vom
Strom trennen.
警告：
触电危险。可能导致人员
伤亡。维护之前先断电。
Page 7900035_B
900035_B - Safety and compliance

WARNING:
Heavy object. To avoid
muscle strain or back
injury, use lifting aids
and proper lifting
techniques when
removing or replacing.
AVERTISSEMENT :
Objet lourd. Pour éviter
les blessures
musculaires ou
dorsales, utilisez des
engins de levage et des
techniques de levage
appropriées lors du
retrait ou du
remplacement d’un
objet lourd.
警告:
重量のある装置、部品。
筋挫傷、背中や腰の怪我
を避けるために、取り外
しや交換はリフトを使用
した適切な吊り上げ方法
で行ってください。
ADVERTENCIA:
Objeto pesado. Para
evitar distensiones
musculares o lesiones
en la espalda, utilice
ayudas para la
elevación y técnicas de
elevación adecuadas
durante la retirada o
sustitución del equipo.
WARNUNG:
Schwerer Gegenstand.
Um
Muskelverspannungen
oder
Rückenverletzungen zu
vermeiden, verwenden
Sie beim Entfernen
oder Ersetzen
Hebehilfen und
geeignete
Hebetechniken.
警告：
重物。为了避免肌肉劳损
或背部损伤，执行卸除或
更换操作时，应使用起重
工具，并采用适当的起重
技巧。
WARNING:
Read and understand
operator’s manual
before using this
machine. Failure to
follow operating
instructions could result
in injury or damage to
equipment.
AVERTISSEMENT :
Lisez et comprenez le
mode d’emploi avant
d’utiliser cette machine.
Le non-respect des
instructions d’utilisation
peut entraîner des
blessures ou
endommager
l’équipement.
警告:
本機械を使用する前に、
取扱説明書をよく読み、
十分に理解してくださ
い。操作手順に従わない
場合、怪我や機器が損傷
する原因となることがあ
ります。
ADVERTENCIA:
Lea y comprenda el
manual del operador
antes de utilizar este
equipo. Si no se siguen
las instrucciones de
funcionamiento,
podrían producirse
lesiones o daños en el
equipo.
WARNUNG:
Sie müssen diese
Bedienungsanleitung
lesen und verstehen,
bevor Sie diese
Maschine benutzen. Die
Nichtbeachtung der
Gebrauchsanleitung
kann zu Verletzungen
oder Schäden an der
Anlage führen.
警告：
使用本设备之前，请阅读
并理解操作员手册。不遵
守操作手册说明可能导致
人员受伤和设备损坏。
Page 8900035_B
900035_B - Safety and compliance

2. General information
2.1. Approvals
TSP products are shown to meet the intent of Directive 89/336/EEC for
Electromagnetic Compatibility and Low-Voltage Directive 73/23/EEC for
product Safety.
Compliance was demonstrated to the following specications as listed in the
Ocial Journal of the European Communities:
▪EN 50081-1 Emissions
▪ EN 55011 Class A radiated and Conducted Emissions
▪EN 50082-1 Immunity
▪ IEC 801-2 Electrostac Discharge Immunity
▪ IEC 801-3 RF Electromagnec Field Immunity
▪ IEC 801-4 Electrical Fast Transient/Burst Immunity
▪Low Voltage Directive 73/23/EEC
▪ EN 61010-1 Safety requirements for electrical equipment for measurement,
control and laboratory use.
Page 9900035_B
900035_B - General information

3. Introduction
3.1. Titanium Sublimation Pump (TSP)
WARNING:
Do not use unauthorized parts. Such parts may compromise safety. Contact
Gamma Vacuum with any questions.
The TSP is designed to be used in high to extreme vacuum environments,
but it can be operated over a wide range of pressures. TSPs eectively
remove chemically active gases and are excellent in combination with an ion
pump.
The amount of gettering material evolving from an ion pump is directly
proportional to the pressure and atomic weight of the gas molecules.
Therefore, at low pressures there is not sucient gettering material to
remove light gases (e.g. hydrogen). TSP operation is relatively insensitive to
system pressure and has no diculty emitting gettering material at low
pressure. In most ultra-high and extreme high vacuum systems, hydrogen is
the primary load contributor. Hydrogen removal is greatly aided with the use
of a TSP.
The TSP is a getter type pump and sublimates titanium from its laments.
The sublimated titanium coats the line-of-sight surfaces surrounding the
laments. The titanium serves to capture chemically reactive (non-noble)
gases.
Sublimation requires heating the laments, which raises the vacuum system
temperature and, temporarily, system pressure. Therefore, the TSP should
be operated intermittently. The lm deposited will capture gases
permanently for a long period after ring.
The TSP does not eectively remove all gases (mainly noble) from the
system and therefore should be used in conjunction with other vacuum
pumps (e.g. ion pump).
Due to the conductive nature of the titanium lm, it is a good practice to
eliminate line of sight from the TSP to the rest of the vacuum system. If the
lm coats electrical insulators (e.g. the ceramic insulators of the sputter-ion
pump) it will create an electrical path that can lead to electrical leakage or
shorts.
Page 10900035_B
900035_B - Introduction

Figure 1. Titanium Sublimation Pump (TSP)
3.2. Liquid Nitrogen (LN2) cryoshroud
A cryoshroud provides capture and hold of water (H2O) and carbon dioxide
(C02) pumping when cooled with liquid nitrogen (LN2).
It provides a surface for sublimated titanium while preventing line of sight
migration of titanium (Ti). Cryoshrouds can be used with and without
coolants. Recommended coolants include: water and LN2. When used with
LN2, hydrogen pumping speed is increased by a factor of 6.5.
Figure 2. Liquid nitrogen cryoshroud
3.3. Ambient sputter shield
An ambient sputter shield provides a surface for sublimated titanium while
preventing line of sight migration of Ti. It is low cost and is smaller than the
cryoshield.
Page 11900035_B
900035_B - Introduction

Figure 3. Ambient sputter shield
Page 12900035_B
900035_B - Introduction

4. Installation
Note the following when you install the SPC-NEG
▪The SPC-NEG can be mounted in a standard 19 in. (48.3 cm) rack or used
as a free-standing unit. A 19 in. Rack adapter kit (Part 310057) and Half-
rack adapter kit (Part 360242) are available as an option.
▪Make sure that the rear power cord is accessible.
▪Maintain a 2.52 in. (64 cm) clearance behind controllers for cable bend
radius and proper airow.
▪Maintain a 0.125 in. (3 mm) gap between vertically mounted controllers.
This gap is designed in the rack mount kit and they can be mounted
directly above or below each other.
▪Position the controller so that the power plug can be reached to
disconnect power.
4.1. Pre-installation checks
▪Make sure that all items on the enclosed packing list have been received.
If any items are missing, notify us and the carrier.
▪Store all packaging material for inspection.
▪If the equipment is damaged in any way, inform us and request a claim
with the carrier immediately.
▪If the equipment must be returned for inspection or repair, obtain
authorization from us prior to shipping. Contact us for authorization and
return instructions.
4.2. Inspect for any obvious damage
If the equipment is damaged in any way, a claim should be led with the
carrier immediately and notication given to Gamma Vacuum. If equipment
must be returned for inspection or repair, obtain authorization from Gamma
Vacuum prior to shipping. Contact Gamma Vacuum for authorization and
return instructions.
4.3. Safety notices
4.4. Required Items
▪DIGITEL TSPq Controller
▪Remote TSP Controller (optional)
▪Titanium Sublimation Pump (TSP) (sold separately)
▪TSP high current cable (sold separately)
▪Liquid nitrogen cryoshroud (optional)
▪Ambient sputter shield (optional)
Page 13900035_B
900035_B - Installation

5. Controller conguration
Following conguration options are specied at order time:
▪Input mains a.c. voltage
The controller uses a universal input of 90-240 V a.c., 48-62 Hz.
▪NEG pump connectors
Single output connector J510 Output 1 on the rear panel.
5.1. Input mains a.c. voltage
Controller does not have universal power input. Input mains AC voltage is
part of the controller conguration. Following options are available:
▪100-120 V a.c., 57-63 Hz
▪200-240 V a.c., 57-63 Hz
Care must be taken when connecting controller to mains a.c. voltage to
avoid connecting controller to wrong input voltage.
5.2. Number of TSP pump connectors
Following options are available:
▪Single output connector J510 Output 1 (TSP 1) on the rear panel. See
DIGITEL TSPq standalone conguration on page 14 for details.
▪Two output connectors J510 Output 1 (TSP 1) and J511 Output 2 (TSP 2) on
the rear panel. See DIGITEL TSPq standalone conguration on page 14 for
details.
▪No connectors. Remote connection J113 connector installed. Used in
combination with Remote TSP Controller. See DIGITEL TSPq + Remote TSP
controller conguration on page 15 for details.
5.3. DIGITEL TSPq standalone conguration
Figure 4. DIGITEL TSPq standalone conguration
Page 14900035_B
900035_B - Controller configuration

5.4. DIGITEL TSPq + Remote TSP controller conguration
Figure 5. DIGITEL TSPq + Remote TSP controller conguration
Page 15900035_B
900035_B - Controller configuration

6. Front panel
Figure 6. Front panel
Front panel contains:
▪Main power on/o rocker type switch - Hard switch, when in o position
main power is completely cut o from the unit.
▪7” TFT WVGA (800x480) Color LCD, 16:9 aspect ratio, touchscreen -
Primary user interface.
▪‘Power’ indicator lamp - Color green. When light up, indicates primary
input power present.
Page 16900035_B
900035_B - Front panel

7. Touchscreen user interface
7.1. Home screen
Tap the screen to show "Turn ON" and "MENU."
"MENU" takes you to NEG recipe selection, custom recipe setup, and display
setup.
Figure 7. Home screen
Line one indicates TSP status. Following are possible statuses:
▪Initializing
▪OFF
▪Armed, X/Y min
▪Armed, Interlock - Active
▪Armed, Waiting - In use
▪ON X/Y A
The ‘OFF’ status indicates TSP programmed mode is not running.
Armed status indicates TSP programmed mode is running, but actual TSP
lament sublimation is not in progress at this time.
For example, ‘Armed, 2/15 min’ status indicates two minutes has passed
from last sublimation cycle where period between sublimation cycles is set
to 15 minutes.
The ‘Armed, Interlock -Active’ status indicates TSP programmed mode is
running, but sublimation is not possible because TSP interlock is not
satised.
The ‘TSP 1 Armed, Waiting -In use’ status indicates TSP 1 programmed mode
is running, but sublimation is waiting for TSP 2 sublimation to complete.
The ‘ON 40/45A’ status indicates lament sublimation is in progress. The
lament current is ramping up and currently at 40 Amps, where target
sublimation current level is set to 45 Amps.
Line two indicates current TSP setup. See TSP setup on page 18 for details.
Page 17900035_B
900035_B - Touchscreen user interface

Line three indicates status of the currently selected TSP lament. See TSP
setup on page 18 for details.
Figure 8. Home screen (control buttons visible)
Available setup:
Menu - Invokes main menu.
Exit - Clears screen/hides control buttons.
TSP Setup - Invokes respective TSP setup screen.
Turn On/O TSP- Starts/stops sublimation programmed mode for respective
TSP (1-2).
Turning on TSP will start TSP programmed mode according to parameters
specied in the TSP Setup window.
TSP 1 and TSP 2 programmed modes can run simultaneously, but only one
lament can be sublimated at a time.
7.2. TSP setup
Figure 9. TSP setup screen
Available setup:
Page 18900035_B
900035_B - Touchscreen user interface

Filament - Selects active lament (1-4). This lament is used in the
sublimation process.
The lament status is displayed in brackets next to lament number.
Filament status reads (ok) if at the end of the last sublimation cycle, lament
current reached at least 80% of the target current value.
The status will read (open?) if lament current did not reach 80% of the
target current value.
Current Target (A) - Congures sublimation current target level.
On Time (s) - Congures lament sublimation time in seconds.
Number of Cycles - Congures number of sublimation cycles to run.
Cycle period - Congures time in minutes between each sublimation cycle.
Cycle period is not applicable (N/A) when number of cycles is set to 1.
TSP1/TSP2 - Selects TSP for which above parameters are congured.
7.3. Display setup
Figure 10. Display setup screen
Brightness Level - Congures screen brightness level (1-10).
Screensaver - Congures screen-saver on/o state. Turning screensaver o
is not recommended as this will shorten screen backlight lifetime. When
screen-saver is enabled/active, display brightness level is reduced to level 1.
Touchscreen calibration - Invokes touchscreen calibration process.
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7.4. Digital input setup
Figure 11. Digital input setup screen
Total of four digital inputs on connector J104.
Digital Input 1 (J104, pin 22)
Digital Input 2 (J104, pin 23)
Digital Input 3 (J104, pin 24)
Digital Input 4 (J104, pin 25)
By default all digital inputs are turned o (function set to o).
Available functions:
▪OFF
▪TSP 1 Interlock
▪TSP 2 Interlock
TSP 1 interlock function
Ground pin to satisfy TSP 1 interlock.
If interlock is not satised, TSP 1 sublimation is not possible.
TSP 2 interlock function
Ground pin to satisfy TSP 2 interlock. If interlock is not satised, TSP 2
sublimation is not possible.
By default all digital inputs are turned o (function set to o).
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