Gamma Vacuum SPCe User manual

Small Pump Controller (SPCe)
Instruction manual
www.gammavacuum.com
900026_F Original instructions

Copyright notice
© Gamma Vacuum 2021. Part of the Atlas Copco Group
Trademark credit
Gamma Vacuum and the Gamma Vacuum logo are trademarks of 2700 4th
Avenue East, Ste 100, Shakopee, MN 55379, USA
Disclaimer
The content of this manual may change from time to time without notice.
We accept no liability for any errors that may appear in this manual nor do
we make any expressed or implied warranties regarding the content. As far
as practical we have ensured that the products have been designed and
constructed to be safe and without risks when properly installed and used
in accordance with their operating instructions.
We accept no liability for loss of prot, loss of market or any other indirect
or consequential loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms
and conditions of sale or negotiated contract under which this document is
supplied.
You must use this product as described in this manual. Read the manual
before you install, operate, or maintain the product.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1. Denition of Warnings and Cautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2. Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3. Warnings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4. Safety notices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2. General information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1. Approvals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
3. Unpacking the controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.1. Inspect for any obvious damage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.2. Check the equipment received. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
4. Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.1. Required items. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.2. Installation procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5. Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.1. Front panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.2. High voltage operation (quick start). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6. Display menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.1. Display during ion pump operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.2. System information menu (Sys). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
6.3. High voltage output menu (output). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.4. Supply menu (supply). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.5. Communications mode (Comm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.6. Serial parameters menu (Serial). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.7. Ethernet parameters menu (Ethnt). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.8. Conguration menu (Cong). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.9. Diagnostics menu (Diag). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.10. SPC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7. Display messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
8. Back panel operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
8.1. Remote hardware option (J1). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
8.2. Power supplies. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
9. Serial (J3) and ethernet (J2) operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
9.1. Ethernet connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
9.2. Serial connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
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Page 3900026_F

9.3. Standard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9.4. Cabling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9.5. Command packet structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9.6. Decoding the command packet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
9.7. Response packet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
9.8. RS 232/422/485 general commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
9.9. CRC checksum example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
9.10. Serial command examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
10. Warranty and service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
10.1. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
10.1.1. Cleaning procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
10.1.2. Service requests. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
10.1.3. Direct support. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
10.2. Warranty. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
10.2.1. General terms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
10.2.2. Warranty claims. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
10.3. Returning material. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
10.3.1. Return procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
10.3.2. Required documentation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
11. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
04/2021 - ©Gamma
Page 4900026_F

List of Figures
Figure 1: Front panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 2: Display during ion pump operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Figure 3: Accessing Main Menu settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 4: System information menu (Sys). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 5: Pump size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 6: Units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 7: Setpoint function cong. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 8: Setpoint. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 9: Factor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 10: Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 11: Voltage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 12: Current. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 13: Foldback pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 14: System output supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 15: Supply menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 16: Arc processing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 17: Auto HV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Figure 18: HV enable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Figure 19: Battery mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 20: Communication mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 21: RS protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 22: Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Figure 23: Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Figure 24: Handshaking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Figure 25: Serial menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Figure 26: SW protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Figure 27: Baud rate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Figure 28: Parity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Figure 29: Data and stop bits. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 30: Ethernet parameter menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 31: DHCP and IP address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 32: Subnet mask. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 33: Gateway address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 34: MAC address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 35: Conguration menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 36: Adjust display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 37: Pump name. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 38: Adjust LCD timeout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 39: Diagnostic menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 40: Calibrate supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 41: Emission analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
04/2021 - ©Gamma
Page 5900026_F

Figure 42: High pot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 43: Supply jump start. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 44: SPC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 45: Technician features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 46: Events. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 47: Update rmware. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 48: DIGITEL SPCe. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 49: Back panel view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figure 50: Remote hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figure 51: Pressure output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Figure 52: Current output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Figure 53: Ethernet connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Figure 54: Serial connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
04/2021 - ©Gamma
Page 6900026_F

1. Safety and compliance
1.1. Denition of Warnings and Cautions
NOTICE:
For safe operation from the start, read these instructions carefully before
you install or commission the equipment and keep them safe for future use.
Read all the safety instructions in this section and the rest of this manual
carefully and make sure that you obey these instructions. The equipment
must only be operated and maintained by trained personnel in the proper
condition and as described in this instruction manual.
Obey local and state requirements and regulations. If you have any
questions about safety, operation or maintenance of the device, please
contact our nearest subsidiary.
Important safety information is highlighted as warning and caution
instructions. Obey these instructions.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent
symbols are used according to the type of hazard.
CAUTION:
If you do not obey a caution, there is a risk of minor injury, damage to
equipment, related equipment or process.
NOTICE:
Information about properties or instructions for an action which, if ignored,
will cause damage to the equipment.
We reserve the right to change the design and the stated data. The
illustrations are not binding.
Keep the instructions for future use.
04/2021 - ©Gamma
Page 7900026_F
900026_F - Safety and compliance

1.2. Safety symbols
The safety symbols on the products show the areas where care and
attention is necessary.
The safety symbols that follow are used on the product or in the product
documentation.
Warning/Caution
An appropriate safety instruction must be followed or caution
to a potential hazard exists.
Warning - Dangerous voltage
Identies possible hazards from dangerous voltages.
Warning - Heavy object
Identies a possible hazard from a heavy object.
Warning - Read the manual
1.3. Warnings
WARNING:
Shock hazard. Can
cause injury or death.
Remove power before
servicing.
AVERTISSEMENT :
Risque de choc
électrique. Peut
entraîner des blessures,
voire la mort. Coupez
l'alimentation électrique
avant l'entretien.
警告:
感電事故。怪我や死亡事
故の原因になります。保
守を行う前に、電源を切
ってください。
ADVERTENCIA:
Peligro de descarga.
Pueden producirse
lesiones o incluso la
muerte. Desconecte la
alimentación antes de
realizar cualquier tarea
de mantenimiento.
WARNUNG:
Stromschlaggefahr. Es
besteht Verletzungs-
und Todesgefahr. Vor
Wartungsarbeiten vom
Strom trennen.
警告：
触电危险。可能导致人员
伤亡。维护之前先断电。
04/2021 - ©Gamma
Page 8900026_F
900026_F - Safety and compliance

WARNING:
Heavy object. To avoid
muscle strain or back
injury, use lifting aids
and proper lifting
techniques when
removing or replacing.
AVERTISSEMENT :
Objet lourd. Pour éviter
les blessures
musculaires ou
dorsales, utilisez des
engins de levage et des
techniques de levage
appropriées lors du
retrait ou du
remplacement d’un
objet lourd.
警告:
重量のある装置、部品。
筋挫傷、背中や腰の怪我
を避けるために、取り外
しや交換はリフトを使用
した適切な吊り上げ方法
で行ってください。
ADVERTENCIA:
Objeto pesado. Para
evitar distensiones
musculares o lesiones
en la espalda, utilice
ayudas para la
elevación y técnicas de
elevación adecuadas
durante la retirada o
sustitución del equipo.
WARNUNG:
Schwerer Gegenstand.
Um
Muskelverspannungen
oder
Rückenverletzungen zu
vermeiden, verwenden
Sie beim Entfernen
oder Ersetzen
Hebehilfen und
geeignete
Hebetechniken.
警告：
重物。为了避免肌肉劳损
或背部损伤，执行卸除或
更换操作时，应使用起重
工具，并采用适当的起重
技巧。
WARNING:
Read and understand
operator’s manual
before using this
machine. Failure to
follow operating
instructions could result
in injury or damage to
equipment.
AVERTISSEMENT :
Lisez et comprenez le
mode d’emploi avant
d’utiliser cette machine.
Le non-respect des
instructions d’utilisation
peut entraîner des
blessures ou
endommager
l’équipement.
警告:
本機械を使用する前に、
取扱説明書をよく読み、
十分に理解してくださ
い。操作手順に従わない
場合、怪我や機器が損傷
する原因となることがあ
ります。
ADVERTENCIA:
Lea y comprenda el
manual del operador
antes de utilizar este
equipo. Si no se siguen
las instrucciones de
funcionamiento,
podrían producirse
lesiones o daños en el
equipo.
WARNUNG:
Sie müssen diese
Bedienungsanleitung
lesen und verstehen,
bevor Sie diese
Maschine benutzen. Die
Nichtbeachtung der
Gebrauchsanleitung
kann zu Verletzungen
oder Schäden an der
Anlage führen.
警告：
使用本设备之前，请阅读
并理解操作员手册。不遵
守操作手册说明可能导致
人员受伤和设备损坏。
1.4. Safety notices
1. To avoid personal injury, do not perform any installation or service unless
qualied to do so. Installation should be performed by qualied,
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authorized personnel who have experience working with voltages greater
than 50 volts.
2. Do not open the SPCe case under any circumstances. There are no
serviceable parts inside the SPCe, and voltages over 5000V are present. In
the event that the SPCe requires attention, return it to Gamma Vacuum.
3. Do not disconnect the high-voltage cable with the power on. After turning
o the SPCe, allow at least one minute before disconnecting electrical
equipment.
4. Do not operate the SPCe without a proper electrical ground or near
water. The SPCe may be damaged and its safety reduced, if it is operated
outside specications.
5. In the event that this unit is not used in accordance with its intended
purpose of controlling an ion pump, safety and protection requirements
are subjected to change and not specied by the manufacturer.
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2. General information
The DIGITEL SPCe is an intelligent, programmable ion pump power supply,
which features a LCD display and soft-keys for navigation. It requires an
external 24 V d.c. power supply (depends on the ordered part number)
supplied with the SPCe. It is equipped with an universal power input too
permit operation from 85 to 260V a.c., 50 or 60 Hz. It is 1/4 rack and 2u high
with an optional half rack or full rack mount kit.
The SPCe can be controlled two ways: directly from the front panel or
remotely through serial or Ethernet ports. The serial port supports
RS-232/422/485 protocols.
Individual model specication information is located on our website at:
www.gammavacuum.com
WARNING:
Do not use unauthorized parts. Such parts may compromise safety. Contact
Gamma Vacuum with any questions.
CAUTION:
Read this entire manual and follow installation instructions. Failure to do so
may cause injury and/or may void warranty.
2.1. Approvals
Gamma Vacuum Small Pump Controllers (SPCe) are shown to meet the EEC
Low-Voltage Directive and Electromagnetic Compatibility
approvals:
▪EN 61326-1
▪EN 616326-2-1
▪Low Voltage Directive 73/23/EEC
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3. Unpacking the controller
3.1. Inspect for any obvious damage
If the SPCe is damaged in any way, a claim should be led with the carrier
immediately and notication given to Gamma Vacuum.
If equipment must be returned for inspection or repair, obtain authorization
from Gamma Vacuum prior to shipping. Contact Gamma Vacuum for
authorization and return instructions.
3.2. Check the equipment received
Ensure that all items shipped have been received. If any items are missing,
notify the carrier and Gamma Vacuum. Save all packaging material for
inspection.
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4. Installation
▪The SPCe can be mounted in a standard 19 in. (48.3 cm) rack or used as a
free-standing unit. Optional 19-in. Rack Adapter Kit (part 310057) and
Half-Rack Adapter Kit (part 360242) are available.
▪When installing, make sure the rear power cord is accessible.
▪Maintain a 2.52 in. (64 mm) clearance behind controllers for cable bend
radius and proper airow.
▪Maintain a .125 in. (3 mm) gap between vertically mounted controllers.
This gap is designed in the rack mount kit, and they can be mounted
directly above or below each other.
▪Position the control so that the power plug can be reached to disconnect
power.
CAUTION:
This equipment uses a high voltage, detachable power supply cord. Do not
replace with inadequately rated supply cords.
CAUTION:
Remove all metal jewellery prior to working with any potential electrical
hazards.
4.1. Required items
You will need the following items to install the controller:
1. A 3-wire, detachable, universal input power cable that connects to the
24 V power supply (both included for most part numbers).
2. A high voltage (HV) cable for each pump (ordered separately).
3. A safety ground cable for each pump (ordered separately).
4.2. Installation procedure
1. Place the controller in its location and secure as necessary.
2. Connect the safety ground cable to the pump and the safety ground stud
at the SPCe rear panel.
3. Connect the high voltage cable to the ion pump and the high voltage
connector on the SPCe rear panel (J501).
4. If you have the optional SAFECONN feature, an additional connector is
part of the HV cable. Connect it to the SAFECONN connector (J401).
5. Verify input voltage requirements, and then connect the detachable
universal input power adapter cable to the input power receptacle on the
24 V power supply. Connect the 24 V d.c. supply to the SPCe.
6. Connect the power adapter mains cable to A/C power source.
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5. Operation
5.1. Front panel
Figure 1. Front panel
LED indicators and LCD display
LEDs indicate the status of the main power, high voltage, and the set point.
The LCD displays operation parameters, messages, and menu options.
During ion pump operation, the screen displays voltage, current, and
pressure. One of these three values is displayed larger than the other two;
this can be changed by pressing the left and right arrow keys.
Soft keys
▪Main Power: Turns on and o the controller.
▪High Voltage: Enables high voltage when pressed and held for 1-2
seconds.
▪OK and arrow keys: Open and navigate the conguration menus, and
commit changes.
Note:
Some keys may be disabled by a serial command when the controller is
connected to a computer or terminal.
5.2. High voltage operation (quick start)
Prior to starting the ion pump, conrm the following:
▪The controller and connected ion pumps are grounded with a redundant
grounding wire.
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▪The high voltage cable is attached to the controller and the ion pump.
▪The controller’s high voltage output has the correct output polarity for the
ion pump (positive voltage for diode pump and negative voltage for triode
pump).
Evacuate the vacuum system
1. Rough pump down to 1x10-4 Torr or less (the lower the better). See
Rough Pump manual for details.
2. Ensure contaminants do not exist in the system.
3. If an ion pump is used or has been exposed to atmospheric pressure, it
may be necessary to bake the pump into the roughing pump to achieve
the best pressure. See the Operation section in the Pump manual for
details.
Starting the ion pump
1. If the ion pump size has not been entered into the System Menu, enter
the ion pump size. The SPCe will not start until the ion pump size has
been entered.
2. Press and hold High Voltage on the front panel for 1-2 seconds.
Stopping the ion pump
Press High Voltage on the front panel to disable high voltage.
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6. Display menu
Operation parameters, messages, and menu options are shown on the LCD
display.
6.1. Display during ion pump operation
When the ion pump is in operation, the SPCe displays voltage, current, and
pressure.
Figure 2. Display during ion pump operation
Accessing Main Menu Settings
The main menu categories are:
▪System
▪Output
▪Supply
▪Communications
▪Serial
▪Ethernet
▪Conguration
▪Diagnostics
▪SPC.
To access and navigate the main menu: (Refer to Figure: Front panel)
▪Press OK to access the main menu.
▪Press the left and right arrow keys to navigate through the main menu.
▪Press the up and down arrow keys to navigate through the drop down
menus.
▪Press OK to select the highlighted menu item.
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Figure 3. Accessing Main Menu settings
6.2. System information menu (Sys)
Figure 4. System information menu (Sys)
Size
The Size parameter must be set prior to high voltage operation. Setting the
correct pump size allows the controller to properly monitor power delivered
to the ion pump and calculate pressure.
Figure 5. Pump size
Pressure is calculated using the following current-to-pressure calculation:
Where:
▪ I - Current in amps.
▪ V - Voltage in volts. (SPCe is variable)
▪ U - Pressure units conversion factor (1 for Torr, 1.33 for mbar and 133 for Pascal).
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▪ F - MPCe/LPCe programmed calibraon factor (typically set to 1)
▪ S - Congured pump size in l/s.
Units
The Units parameter changes the displayed unit of measurement for
pressure. It can be changed to display in Torr, m Bar, or Pascal. (Torr is the
default.)
Figure 6. Units
Setpoint
▪On Point: The setpoint will deactivate when the pressure is equal to or
below this pressure.
▪O Point: The setpoint relay will activate when the pressure is equal to or
above this pressure.
▪The o point pressure must be equal to or greater than the on point.
▪When the o point value is set to 0.1e-10, the o point value will be
ignored, and once the setpoint is active, the setpoint will remain active
independent of the pressure thereafter.
▪Error: The setpoint will turn on when the SPCe has an error condition.
Figure 7. Setpoint function cong
Figure 8. Setpoint
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Factor
The calibration factor is a variable used in the current-to-pressure
calculation. The default value is one. Changing this value will have a linear
relationship with respect to pressure. This setting can be changed, for
example, when calibrating the SPCe pressure to a known gauge pressure.
Figure 9. Factor
Pressure is calculated using the following current-to-pressure calculation:
Where:
▪ I - Current in amps.
▪ V - Voltage in volts. (SPCe is variable)
▪ U - Pressure units conversion factor (1 for Torr, 1.33 for mbar and 133 for Pascal).
▪ F - MPCe/LPCe programmed calibraon factor (typically set to 1)
▪ S - Congured pump size in l/s.
6.3. High voltage output menu (output)
Figure 10. Output
Note:
If an asterisk (*) is present, a pump size has not been entered into the controller.
Voltage
The Voltage parameter sets the output voltage. It can be set in the range of
3000 to 7000 V d.c. For ion pumps at 5 l/s or less, the default voltage is
5000 V d.c. For ion pumps larger than 5 l/s, the default voltage is 7000 V d.c.
Note:
The default voltage for ion pumps at 5 l/s or less but with 5 KV feedthrough is
7000 V d.c.
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Figure 11. Voltage
Current
The Current parameter sets the output current. The maximum current
output is limited based on the size of the ion pump programmed into the
controller. The default is 2 mA per l/s.
Figure 12. Current
Foldback Voltage Feature
With the Foldback feature enabled, the SPCe will reduce the voltage once a
specied pressure is reached. The specied pressure can be set in the range
of 1x10-5 to 1x10-12 Torr. The default is 9x10-9 Torr. The Foldback voltage
can be programmed in the range of 3000 V to 6900 V, done in 100 V
increments. The default voltage is 3500 V.
Figure 13. Foldback pressure
Pressure or Current Output Setting (Monitor)
The SPCe can be monitored via the miscellaneous I/O port (J1). This
parameter determines the pressure or current output. Selectable values are:
▪Pressure: Logarithmic
▪Current: Logarithmic
▪Current: 1VDC per 1nA
▪Current: 1VDC per 10nA
▪Current: 1VDC per 100nA
▪Current: 1VDC per 1uA
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