Ideal Vacuum MKS Baratron 622B User manual

1034356-001
Rev. A, 06/09
MKS Baratron®Type
622B/623B/626B
Absolute Pressure Transducers
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Copyright © 2009 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.
Printed in the United States of America
Swagelok®, VCR®, and VCO®are registered trademarks of Swagelok Co., Solon OH
Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA
Inconel®is a registered trademark of Inc Alloys International, Huntington, WV

Table of Contents
Table of Contents
Pressure Transducer Safety Information......................................................................................1
Symbols Used in This Instruction Manual......................................................................1
Symbols Found on the Unit............................................................................................2
Safety Procedures and Precautions.................................................................................3
Sicherheitshinweise für den Druckmeßumformer .......................................................................5
In dieser Betriebsanleitung vorkommende Symbole ......................................................5
Erklärung der am Gerät angebrachten Symbole.............................................................6
Sicherheitsvorschriften und Vorsichtsmaßnahmen.........................................................7
Informations relatives à la sécurité pour le transducteur de pression ..........................................9
Symboles utilisés dans ce manuel d'utilisation...............................................................9
Symboles apparaissant sur l'unité ...................................................................................10
Mesures de sécurité et précautions .................................................................................11
Medidas de seguridad del transductor de presión........................................................................13
Símbolos usados en este manual de instrucciones..........................................................13
Símbolos hallados en la unidad.......................................................................................14
Procedimientos y precauciones de seguridad..................................................................15
Chapter One: General Information .............................................................................................17
Introduction.....................................................................................................................17
How This Manual is Organized......................................................................................18
Customer Support...........................................................................................................18
Chapter Two: Installation ...........................................................................................................19
How To Unpack..............................................................................................................19
Unpacking Checklist..........................................................................................19
Interface Cables ..............................................................................................................20
Generic Shielded Cable Guidelines...................................................................21
Product Location and Requirements...............................................................................23
Fittings............................................................................................................................24
Setup ...............................................................................................................................25
Checking the Transducer Zero...........................................................................25
iii

Table of Contents
Coarse Zero Adjustment....................................................................................26
Dimensions ........................................................................................................28
Electrical Information.....................................................................................................30
Connectors.........................................................................................................31
Chapter Three: Overview............................................................................................................35
General............................................................................................................................35
Sensor..............................................................................................................................35
Signal Conditioner/Electronics.......................................................................................35
Chapter Four: Operation.............................................................................................................36
General............................................................................................................................36
Lowest Suggested Pressure Available for Reading ...........................................36
Lowest Suggested Pressure to Use for Control..................................................36
Type 623B End Cap........................................................................................................37
Hysteresis of Type 623B Trip Relays.............................................................................37
How To Set the Trip Points on Type 623B.....................................................................39
How To Adjust the Trip Point Direction ........................................................................40
How To Adjust the Trip Point Hysteresis on Type 623B...............................................44
Chapter Five: Maintenance and Troubleshooting.......................................................................46
General............................................................................................................................46
Zero Adjustment .............................................................................................................46
Troubleshooting Chart....................................................................................................47
Appendix A: Product Specifications...........................................................................................49
MKS Types 622B and 626B Units .................................................................................49
Type 623B Transducer....................................................................................................50
Appendix B: Model Code Explanation.......................................................................................53
Model Code.....................................................................................................................53
Index ............................................................................................................................................55
iv

List of Figures and Tables
List of Figures and Tables
Figures
Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable..................22
Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable..................22
Figure 3: Metal Single and Double Ferrule Compression-type Vacuum Fittings.......................24
Figure 4: Location of the Zero Pot on Transducer Endcaps.......................................................26
Figure 5: Location of the COARSE ZERO Adjustment Control................................................27
Figure 6: Dimensions of the Types 622B, 623B, and 626B Transducers...................................29
Figure 7: Power, Signal, and Chassis Grounding Scheme..........................................................30
Figure 8: Type 623B Endcap......................................................................................................37
Figure 9: How Hysteresis Affects Accuracy and Relay Chatter.................................................38
Figure 10: How To Measure the Trip Point Voltage for Type 623B..........................................39
Figure 11: The Relay Board........................................................................................................41
Figure 12: The Alternate Relay Board........................................................................................42
Tables
Table 1: Definition of Symbols Found on the Unit ........................................................................2
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole...........................................................6
Tableau 3: Définition des symboles apparaissant sur l'unité ........................................................10
Tabla 4: Definición de los símbolos hallados en la unidad............................................................14
Table 5: Interface Cables ..............................................................................................................20
Table 6: Highest Pressure Suggested for Proper Zero Adjustment...............................................26
Table 7: Required Inputs for Types 622B, 623B, and 626B Transducers....................................30
Table 8: Post Assignments of Type 622B Transducer..................................................................31
Table 9: Pinout of Type 626B Transducer....................................................................................32
Table 10: Post Assignments of Type 623B Transducer, TB1....................................................... 33
Table 11: Post Assignments of Type 623B Transducer, TB2....................................................... 33
Table 12: Suggested Pressures for Reading and Control..............................................................36
Table 13: Factory-Set Positions of the Shorting Jumpers.............................................................43
v

List of Figures and Tables
Table 14: Shorting Jumper Positions for Hysteresis.....................................................................44
Table 15: Troubleshooting Chart..................................................................................................47
vi

List of Figures and Tables
vii

Pressure Transducer Safety Information USymbols Used in This Instruction Manual
1
Pressure Transducer Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like, which,
if not correctly performed or adhered to, could result in injury
to personnel.
Caution
The CAUTION sign denotes a hazard to equipment. It calls attention
to an operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

U Symbols Found on the Unit Pressure Transducer Safety Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007
Off (Supply)
IEC 417, No.5008
Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020
Equipotentiality
IEC 417, No.5021
Direct current
IEC 417, No.5031
A
lternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit