3
6. Restore the scan speed to the FAST to save the image data on the MO disk.
Notice: If the scan speed is not restored to the FAST, the data cannot be saved.
7. Press the INS key, and type the file name in the space following the SAVE|A:.
Press the RETURN key to save the image data on the MO disk.
*To confirm the detail of the image capturing, refer to the manufactures instructions.
The axis adjustment
①The adjustment of the movable diaphragm of the objective lens, and the processing.
1. Set the magnification to 10,000 times, and move the marker object on the center of the CRT
screen.
2. Focus the SEM on the marker object, and press the WOBBLER button.
3. To minimize the shaking of the marker object on the CRT, adjust the movable diaphragm
using the fine adjustment knob (X, Y).
②The correction of the astigmatism
1. Minimize the blur in the image, using the FOCUS knob.
2. Minimize the blur in the image, using the STIGMATOR(X) knob.
3. Minimize the blur in the image, using the STIGMATOR(Y) knob.
If the blurry in the image (the astigmatism) is not corrected, repeat the process mentioned
above (1-3).
③The adjustment of the beam axis
1. Press the EOSーMODE button once to select the SEM1 mode.
Set the magnification to 1,000,000 times using the MAGNIFICATION knob.
2. While the ( ) value of the CL COARSE (EOS menu, EOS-1, OPTICS) is increased from
3×10-12 to 6×10-10 using the PROBE CURRENT knob, maximize the image brightness,
using the GUN ALIGNMENT (X, Y) knobs.
3. Set the magnification to 6,000 times, and repeat the operations mentioned above (2).
4. While the ( ) value of the CL COARSE (EOS menu, EOS-1, OPTICS) from 3×10-12 to
6×10-10 is increased using the PROBE CURRENT knob, minimize the moving of the
central object, using the GUN ALIGNMENT (X, Y) knobs. (When the current is increased,
center the moved objects.)
5. Set the value of the CL COARSE to 1×10-11, using the PROBE CURRENT knob, and then
perform the adjustments of the movable diaphragm of the objective lens, mentioned above,
①.
