JEOL JSPM-5200 User manual

JSPM
-
5200
SCANNING PROBE
MICROSCOPE
For the proper use of the instrument, be sure to
read this instruction manual. Even after you
read it, please keep the manual on hand so that
you can consult it whenever necessary.
ITMPM5200-2
MAY2004-17110074
Printed in Japan
INSTRUCTIONS

JSPM-5200
SCANNING PROBE
MICROSCOPE
TMPM5200-2

NOTICE
• This instrument generates, uses, and can radiate radio-frequency energy and, if
not installed and used in accordance with the instruction manual, may cause
harmful interference to the environment, especially radio communications.
• This instrument must not be modified, and products other than those manufac-
tured by JEOL Ltd. must not be attached to this instrument, without prior writ-
ten permission. If any such modification or attachment is made, all the stipu-
lated warranties and services contracted by JEOL Ltd. or its affiliated company
will be void.
• Replacement parts for maintenance of the instrument performance are available
for seven years from the date of installation. Thereafter, some of those parts may
be available for a certain period of time, and in this case, an extra service charge
may be applied for servicing with those parts. Please contact your JEOL service
office for details.
• After installation of the instrument, when the instrument will be moved or
transported, be sure to contact your JEOL service office. If the instrument is
moved or transported by people other than engineers employed or specified by
JEOL, JEOL Ltd. cannot accept responsibility for any of the accidents and
problems with the instrument after transport.
• The information in this manual, which is based on specifications believed cor-
rect at the time of publication, is subject to change without notice due to im-
provements made in the instrument.
• In order to assist us in preparing future documentation, please advise your JEOL
service office if you find any errors in this manual. Kindly note that while the
instrument can be used in combination with various attachments to serve a
number of purposes, this special feature of the instrument is only briefly de-
scribed in this manual, which chiefly provides information on basic operations.
• In no event will JEOL Ltd. be liable for direct, indirect, incidental or conse-
quential damages resulting from the use of software described in this manual.
• This manual is copyrighted. All rights are reserved. This document may not, in
whole or part, be copied, photocopied, reproduced, translated or reduced to any
electronic medium or machine readable form without prior consent, in writing,
from JEOL Ltd.
• When this manual or the software described in this manual is furnished under a
license agreement, it may only be used or copied in accordance with the terms
of such license agreement.
Copyright ©2004 JEOL Ltd.
TRADEMARK
• Windows is a trademark of Microsoft Corporation.
• All other company and product names are trademarks or registered trademarks
of their respective companies.
MANUFACTURER
JEOL Ltd.
1-2 Musashino 3-chome Akishima Tokyo 196-8558 Japan
Telephone: [phone]
Facsimile: 81-42-546-3353
Note: For servicing or inquires, please contact your JEOL service office.
TMPM5200-2

NOTATIONAL CONVENTIONS AND GLOSSARY
■
General notations
WARNING : A potentially hazardous situation which, if not avoided, could result
in death or serious injury.
CAUTION : A potentially hazardous situation which, if not avoided, could result
in minor injury or material damage. Material damage includes, but
is not limited to, damage to related devices and facilities, and to
acquired data.
— CAUTION — : Points requiring great care and attention when operating the device
to avoid damage to the device itself.
": Additional points to remember regarding the operation.
): A reference to another section, chapter or manual.
1, 2, 3: Numbers indicate a series of operations that achieve a task.
◆: A diamond indicates a single operation that achieves a task.
“File” : The names of menus, commands, or parameters displayed on the
screen are enclosed in double quotation marks.
“File” – “Exit” : Selecting a menu item from a pulldown menu is denoted by linking
the menu and the item with a dash (–).
For example, “File” – “Exit” means selecting Exit from the File
menu.
■
Mouse terminology
Mouse pointer: A mark, displayed on the screen, which moves following the
movement of the mouse. It is used to specify a menu item, com-
mand, parameter value, and other items. Its shape changes accord-
ing to the situation.
Click: To press and release the left mouse button.
Right-click: To press and release the right mouse button.
Double-click: To press and release the left mouse button twice quickly.
Drag: To hold down the left mouse button while moving the mouse.
TMPM5200-2 N-1

CONTENTS
SAFETY PRECAUTIONS
PRECAUTIONS FOR USE
1. GENERAL
1.1 INTRODUCTION..................................................................................1-1
2. SPECIFICATIONS AND INSTALLATION REQUIREMENTS
2.1 PRINCIPAL SPECIFICATIONS............................................................2-1
2.2 COMPOSITION.....................................................................................2-2
2.3 INSTALLATION REQUIREMENTS....................................................2-5
2.4 STANDARD INSTALLATION DIAGRAM..........................................2-6
3. CONFIGURATION AND DESCRIPTIONS OF COMPONENTS
3.1 OVERALL CONFIGURATION ............................................................3-1
3.2 MAIN UNIT...........................................................................................3-2
3.2.1 SPM Unit.........................................................................................3-2
3.2.2 AFM Amplifier ...............................................................................3-9
3.3 OPERATION UNIT .............................................................................3-13
3.3.1 SPM CONTROL System ..............................................................3-14
3.3.2 Computer System ..........................................................................3-16
3.3.3 Oscilloscope (Optional).................................................................3-17
4. PREPARATION FOR OBSERVATION
4.1 PREPARATION FOR STM OBSERVATION........................................4-1
4.1.1 Outline.............................................................................................4-1
4.1.2 Mounting the Specimen Holder ......................................................4-3
4.1.3 Mounting the Scanner Holder .........................................................4-4
4.1.4 Mounting the SPM Head Unit.........................................................4-5
4.1.5 Mounting the Cantilever..................................................................4-5
4.1.6 Mounting the Tip.............................................................................4-6
4.1.7 Inserting the Cantilever Holder or the Tip Holder into
the SPM Head Unit .........................................................................4-7
4.1.8 Mounting a Specimen......................................................................4-8
4.1.9 Specimen Exchange ........................................................................4-9
4.2 ADJUSTMENT FOR AFM OBSERVATION......................................4-10
4.2.1 Adjusting the Laser Beam Position ...............................................4-10
4.2.2 Adjusting the Photodiode Position ................................................4-14
4.2.3 Rough Approaching ......................................................................4-17
5. MEASUREMENT OPERATION
5.1 BASIC USAGE OF WINSPM ...............................................................5-1
5.1.1 Before use........................................................................................5-1
5.1.2 Glossary...........................................................................................5-1
5.1.3 Setting the User Name.....................................................................5-4
TMPM5200-2 C-1

CONTENTS
C-2 TMPM5200-2
5.2 STARTING THE SCAN (MEASUREMENT ) MODE .........................5-7
5.2.1 Selecting SPM Operation Mode......................................................5-7
5.2.2 SPM Parameters Window (Measurement Setting Window)............5-9
5.2.3 Shortcut Icons................................................................................5-11
5.2.4 Software Oscilloscope...................................................................5-12
5.2.5 Lock-In Amplifier .........................................................................5-13
5.2.6 Specimen Temperature Controller (for JSPM-5200).....................5-18
5.2.7 CCD Camera .................................................................................5-18
5.2.8 Digital Control MFM unit .............................................................5-19
5.3 PREPARING FOR MEASUREMENT.................................................5-20
5.3.1 Starting the System in Measurement Mode...................................5-20
5.3.2 Resetting the Controller.................................................................5-21
5.3.3 Confirming Settings of the Device Setup Dialog Box...................5-21
5.3.4 Opening the SPM (Measurement) Parameters Window................5-21
5.3.5 Checking the Stage Position ..........................................................5-22
5.3.6 Setting an Optional Oscilloscope ..................................................5-23
5.4 AC AFM MODE ..................................................................................5-26
5.4.1 AC Mode Tab.................................................................................5-26
5.4.2 MFM Tab .......................................................................................5-37
5.4.3 VE-AFM Tab .................................................................................5-42
5.4.4 SKPM Tab .....................................................................................5-46
5.4.5 Advanced Tab ................................................................................5-55
5.5 CONTACT AFM MODE .....................................................................5-81
5.5.1 Contact Mode Tab..........................................................................5-81
5.5.2 Viscoelasticity Tab.........................................................................5-92
5.5.3 Lateral Modulation FFM Tab ........................................................5-96
5.5.4 Electrostatic Force Tab ................................................................5-100
5.5.5 Advanced Tab ..............................................................................5-103
5.6 STM MODE .......................................................................................5-133
5.6.1 STM Tab ......................................................................................5-133
5.6.2 Advanced Tab ..............................................................................5-144
5.7 GENERAL PRECAUTIONS FOR IMAGE ACQUISITION ............5-160
5.8 TERMINATING MEASUREMENT..................................................5-166
5.9 TERMINATING OPERATION..........................................................5-167
5.10 REFERENCE .....................................................................................5-168
5.10.1 SPM Scan Menu..........................................................................5-168
5.10.2 SPM Parameters (Simple)............................................................5-178
5.10.3 SPM Parameters (Advanced).......................................................5-203
5.10.4 Setting Lock-in Amplifier ...........................................................5-254
5.10.5 Controlling Specimen Temperature .............................................5-260
5.10.6 CCD Camera ...............................................................................5-264
6. ANALYSIS OPERATION
6.1 PROCESS MODE ..................................................................................6-1
6.2 IMAGE PROCESSING AND DATA PROCESSING FUNCTIONS ....6-2
6.3 EXAMPLE OF PROCESS FUNCTION ................................................6-4
6.3.1 Example of Using the Image Processing Function..........................6-4
6.3.2 Example of Using the Data Processing Function ..........................6-11
6.3.3 Arranging the Measured Data........................................................6-14

CONTENTS
TMPM5200-2 C-3
6.4 FILE MENU.........................................................................................6-17
6.5 EDIT MENU ........................................................................................6-25
6.6 PROCESS MENU (IMAGE PROCESSING FUNCTION).................6-26
6.6.1 Filter ..............................................................................................6-26
6.6.2 Edge Enhance................................................................................6-29
6.6.3 Differentiate ..................................................................................6-30
6.6.4 Normalise ......................................................................................6-30
6.6.5 Normalise S.D. ..............................................................................6-30
6.6.6 Median...........................................................................................6-31
6.6.7 Subtract Background.....................................................................6-32
6.6.8 Single Math ...................................................................................6-33
6.6.9 Double Math..................................................................................6-34
6.7 ANALYSE MENU (IMAGE PROCESSING FUNCTION) ................6-35
6.7.1 Profile............................................................................................6-35
6.7.2 Measure.........................................................................................6-45
6.7.3 Zoom .............................................................................................6-47
6.7.4 Trim...............................................................................................6-48
6.7.5 FFT (Fast Fourier Transformation) ...............................................6-49
6.7.6 Particle Analysis............................................................................6-56
6.7.7 Draw Mesh....................................................................................6-60
6.7.8 Roughness .....................................................................................6-61
6.8 GEOMETRY MENU (IMAGE PROCESSING FUNCTION) ............6-63
6.8.1 Translate........................................................................................6-63
6.8.2 Rotate ............................................................................................6-63
6.8.3 Mirror ............................................................................................6-64
6.8.4 Resize ............................................................................................6-65
6.8.5 Pad Points......................................................................................6-66
6.8.6 Drift Correction.............................................................................6-67
6.8.7 Average Unit Cell .........................................................................6-67
6.8.8 Extract Area ..................................................................................6-68
6.8.9 Replace Area .................................................................................6-69
6.9 LUT (HEIGHT INFORMATION) .......................................................6-70
6.9.1 Brightness/Contrast .......................................................................6-70
6.9.2 Set Window...................................................................................6-71
6.9.3 Histogram......................................................................................6-72
6.9.4 Display Image LUT.......................................................................6-73
6.9.5 Linearise Image LUT ....................................................................6-74
6.9.6 LUT Math......................................................................................6-75
6.9.7 Fix Z scale.....................................................................................6-75
6.10 DISPLAY MENU (IMAGE PROCESSING FUNCTION)..................6-78
6.10.1 Display ..........................................................................................6-78
6.10.2 Display Parameters........................................................................6-78
6.10.3 Full Display...................................................................................6-81
6.10.4 3D Display ....................................................................................6-82
6.10.5 Display Colours.............................................................................6-87
6.10.6 Clear Memory (FS) .......................................................................6-88
6.10.7 Grab from Memory (FS) ...............................................................6-89
6.10.8 Change Parameters........................................................................6-90

CONTENTS
C-4 TMPM5200-2
6.10.9 Display SPS Measurement Position ..............................................6-91
6.11 MAPPING MENU (IMAGE PROCESSING FUNCTION) ................6-92
6.11.1 Display Parameters........................................................................6-93
6.11.2 Special Displays ............................................................................6-94
6.11.3 SPS Mapping Select ......................................................................6-95
6.11.4 Edit SPS Mapping Data Set...........................................................6-96
6.11.5 Average Images.............................................................................6-99
6.11.6 Duplicate Data Set.........................................................................6-99
6.11.7 Extract Spectra...............................................................................6-99
6.12 PROCESS MENU (DATA PROCESSING FUNCTION)..................6-101
6.12.1 Smooth.........................................................................................6-101
6.12.2 Math X, Math Y ..........................................................................6-102
6.12.3 2 Spec Math.................................................................................6-103
6.12.4 Differentiate.................................................................................6-104
6.12.5 Remove DC Bias .........................................................................6-104
6.13 ANALYSE MENU (DATA PROCESSING FUNCTION) .................6-105
6.13.1 Fit Polynomial .............................................................................6-105
6.13.2 Zoom ...........................................................................................6-105
6.13.3 Measure .......................................................................................6-106
6.13.4 Group Plot ...................................................................................6-107
6.13.5 Show FFT ....................................................................................6-108
6.14 DISPLAY MENU (DATA PROCESSING FUNCTION)...................6-109
6.14.1 Plot...............................................................................................6-109
6.14.2 Plot Parameters............................................................................6-109
6.15 SELECT MENU.................................................................................6-111
6.16 WINDOW MENU..............................................................................6-112
6.17 SPM SCAN MENU............................................................................6-113
6.18 HELP MENU......................................................................................6-117
7. APPENDIX
7.1 WINSPM SOFTWARE REINSTALLATION METHOD......................7-1
7.1.1 Before Re-installing the WinSPM Software....................................7-1
7.1.2 Re-installing Windows ....................................................................7-2
7.1.3 Installing the A/D Board Device Driver in the PC..........................7-2
7.1.4 Reinstalling the WinSPM Software.................................................7-7
7.2 SETTING UP THE WINSPM PROGRAM ...........................................7-9
7.2.1 Selecting the instrument ..................................................................7-9
7.2.2 Saving and Loading the Scanner-Sensitivity Settings...................7-11
7.2.3 Saving and Loading the Motor-Drive
Position Calibration Values............................................................7-13
7.3 CANTILEVER .....................................................................................7-15
7.4 FILE FORMAT.....................................................................................7-19
7.4.1 Standard TIFF File Structure.........................................................7-19
7.4.2 WinSPM image file .......................................................................7-21
7.4.3 Spectrum data file..........................................................................7-50
7.4.4 Image file with spectrum data .......................................................7-51
7.4.5 Report file......................................................................................7-52

CONTENTS
TMPM5200-2 C-5
8. GENERAL
8.1 STORAGE..............................................................................................8-1
8.1.1 Instrument .......................................................................................8-1
8.1.2 Cantilever ........................................................................................8-1
8.1.3 Handling the Instrument..................................................................8-1
8.1.4 Maintenance Parts ...........................................................................8-1
8.2 VIBRATION ISOLATOR ......................................................................8-2
8.2.1 Compressor （optional）..................................................................8-2
8.2.2 Vibration-Isolation Table.................................................................8-2
8.3 SPM HEAD............................................................................................8-3
8.3.1 Laser Beam Focusing......................................................................8-3
8.3.2 Mirror Angle Adjustment................................................................8-4
8.4 CCD CAMERA (OPTIONAL) ..............................................................8-5
8.4.1 Installing the CCD Camera .............................................................8-5
8.4.2 Replacing the Source Lamp ............................................................8-8
8.5 LOCATIONS OF PORTS.....................................................................8-10
8.6 USER PORTS.......................................................................................8-10
8.7 PIN CONNECTION.............................................................................8-11
8.8 TOOL SET (OPTIONAL)....................................................................8-12

SAFETY PRECAUTIONS
For the proper use of the instrument, be sure to read the following safety precautions
prior to starting operation or maintenance. They contain important information related to
safety. Contact your JEOL service office whenever you are unclear about any operation
or maintenance.
The signs for safety precautions and their meanings used in this instruction manual are as
follows:
DANGER: An imminent hazardous situation which, if not avoided, will result
in death or serious injury.
WARNING: A potentially hazardous situation which, if not avoided, could re-
sult in death or serious injury.
CAUTION: A potentially hazardous situation which, if not avoided, could re-
sult in minor or moderate injury. Also could mean a potentially
hazardous situation which could result in serious damage to facili-
ties and acquired data.
Parts of this instrument where safety precautions are required are labeled with illustration
signs as shown below. Do not touch the parts labeled with these signs:
Beware of
electric shock
Beware of high
temperature
Beware of
getting caught
Do not
disassemble
Use the instrument in a proper manner and within the scope of the purposes and usage
contained in the brochures and instruction manuals. Never make modifications such as
removing protective parts, exchanging component parts, and defeating safety measures.
Be sure to read the “Safety Precautions” given in the instruction manuals of the optional
attachments for information about the attachments of this instrument.
WARNINGS
• A Class 2 laser is used in this microscope. Do not look directly in the
observation instruments such as the optical microscope. Look in the
observation instrument indirectly by using a detecting device with CCD.
• Be careful not to get irradiation bombardment from the laser radiation
aperture locating near the laser source position adjusting knobs.
• Look in the AFM head more than 20 cm away from the AFM head since a
Class 2 laser is provided in the AFM head.
TMPM5200-2 S-1