JEOL JSPM-5200 User manual
JSPM
-
5200
SCANNING PROBE
MICROSCOPE
For the proper use of the instrument, be sure to
read this instruction manual. Even after you
read it, please keep the manual on hand so that
you can consult it whenever necessary.
ITMPM5200-2
MAY2004-17110074
Printed in Japan
INSTRUCTIONS
JSPM-5200
SCANNING PROBE
MICROSCOPE
TMPM5200-2
NOTICE
• This instrument generates, uses, and can radiate radio-frequency energy and, if
not installed and used in accordance with the instruction manual, may cause
harmful interference to the environment, especially radio communications.
• This instrument must not be modified, and products other than those manufac-
tured by JEOL Ltd. must not be attached to this instrument, without prior writ-
ten permission. If any such modification or attachment is made, all the stipu-
lated warranties and services contracted by JEOL Ltd. or its affiliated company
will be void.
• Replacement parts for maintenance of the instrument performance are available
for seven years from the date of installation. Thereafter, some of those parts may
be available for a certain period of time, and in this case, an extra service charge
may be applied for servicing with those parts. Please contact your JEOL service
office for details.
• After installation of the instrument, when the instrument will be moved or
transported, be sure to contact your JEOL service office. If the instrument is
moved or transported by people other than engineers employed or specified by
JEOL, JEOL Ltd. cannot accept responsibility for any of the accidents and
problems with the instrument after transport.
• The information in this manual, which is based on specifications believed cor-
rect at the time of publication, is subject to change without notice due to im-
provements made in the instrument.
• In order to assist us in preparing future documentation, please advise your JEOL
service office if you find any errors in this manual. Kindly note that while the
instrument can be used in combination with various attachments to serve a
number of purposes, this special feature of the instrument is only briefly de-
scribed in this manual, which chiefly provides information on basic operations.
• In no event will JEOL Ltd. be liable for direct, indirect, incidental or conse-
quential damages resulting from the use of software described in this manual.
• This manual is copyrighted. All rights are reserved. This document may not, in
whole or part, be copied, photocopied, reproduced, translated or reduced to any
electronic medium or machine readable form without prior consent, in writing,
from JEOL Ltd.
• When this manual or the software described in this manual is furnished under a
license agreement, it may only be used or copied in accordance with the terms
of such license agreement.
Copyright ©2004 JEOL Ltd.
TRADEMARK
• Windows is a trademark of Microsoft Corporation.
• All other company and product names are trademarks or registered trademarks
of their respective companies.
MANUFACTURER
JEOL Ltd.
1-2 Musashino 3-chome Akishima Tokyo 196-8558 Japan
Telephone: 81-42-543-1111
Facsimile: 81-42-546-3353
Note: For servicing or inquires, please contact your JEOL service office.
TMPM5200-2
NOTATIONAL CONVENTIONS AND GLOSSARY
■
General notations
WARNING : A potentially hazardous situation which, if not avoided, could result
in death or serious injury.
CAUTION : A potentially hazardous situation which, if not avoided, could result
in minor injury or material damage. Material damage includes, but
is not limited to, damage to related devices and facilities, and to
acquired data.
— CAUTION — : Points requiring great care and attention when operating the device
to avoid damage to the device itself.
": Additional points to remember regarding the operation.
): A reference to another section, chapter or manual.
1, 2, 3: Numbers indicate a series of operations that achieve a task.
◆: A diamond indicates a single operation that achieves a task.
“File” : The names of menus, commands, or parameters displayed on the
screen are enclosed in double quotation marks.
“File” – “Exit” : Selecting a menu item from a pulldown menu is denoted by linking
the menu and the item with a dash (–).
For example, “File” – “Exit” means selecting Exit from the File
menu.
■
Mouse terminology
Mouse pointer: A mark, displayed on the screen, which moves following the
movement of the mouse. It is used to specify a menu item, com-
mand, parameter value, and other items. Its shape changes accord-
ing to the situation.
Click: To press and release the left mouse button.
Right-click: To press and release the right mouse button.
Double-click: To press and release the left mouse button twice quickly.
Drag: To hold down the left mouse button while moving the mouse.
TMPM5200-2 N-1
CONTENTS
SAFETY PRECAUTIONS
PRECAUTIONS FOR USE
1. GENERAL
1.1 INTRODUCTION..................................................................................1-1
2. SPECIFICATIONS AND INSTALLATION REQUIREMENTS
2.1 PRINCIPAL SPECIFICATIONS............................................................2-1
2.2 COMPOSITION.....................................................................................2-2
2.3 INSTALLATION REQUIREMENTS....................................................2-5
2.4 STANDARD INSTALLATION DIAGRAM..........................................2-6
3. CONFIGURATION AND DESCRIPTIONS OF COMPONENTS
3.1 OVERALL CONFIGURATION ............................................................3-1
3.2 MAIN UNIT...........................................................................................3-2
3.2.1 SPM Unit.........................................................................................3-2
3.2.2 AFM Amplifier ...............................................................................3-9
3.3 OPERATION UNIT .............................................................................3-13
3.3.1 SPM CONTROL System ..............................................................3-14
3.3.2 Computer System ..........................................................................3-16
3.3.3 Oscilloscope (Optional).................................................................3-17
4. PREPARATION FOR OBSERVATION
4.1 PREPARATION FOR STM OBSERVATION........................................4-1
4.1.1 Outline.............................................................................................4-1
4.1.2 Mounting the Specimen Holder ......................................................4-3
4.1.3 Mounting the Scanner Holder .........................................................4-4
4.1.4 Mounting the SPM Head Unit.........................................................4-5
4.1.5 Mounting the Cantilever..................................................................4-5
4.1.6 Mounting the Tip.............................................................................4-6
4.1.7 Inserting the Cantilever Holder or the Tip Holder into
the SPM Head Unit .........................................................................4-7
4.1.8 Mounting a Specimen......................................................................4-8
4.1.9 Specimen Exchange ........................................................................4-9
4.2 ADJUSTMENT FOR AFM OBSERVATION......................................4-10
4.2.1 Adjusting the Laser Beam Position ...............................................4-10
4.2.2 Adjusting the Photodiode Position ................................................4-14
4.2.3 Rough Approaching ......................................................................4-17
5. MEASUREMENT OPERATION
5.1 BASIC USAGE OF WINSPM ...............................................................5-1
5.1.1 Before use........................................................................................5-1
5.1.2 Glossary...........................................................................................5-1
5.1.3 Setting the User Name.....................................................................5-4
TMPM5200-2 C-1
CONTENTS
C-2 TMPM5200-2
5.2 STARTING THE SCAN (MEASUREMENT ) MODE .........................5-7
5.2.1 Selecting SPM Operation Mode......................................................5-7
5.2.2 SPM Parameters Window (Measurement Setting Window)............5-9
5.2.3 Shortcut Icons................................................................................5-11
5.2.4 Software Oscilloscope...................................................................5-12
5.2.5 Lock-In Amplifier .........................................................................5-13
5.2.6 Specimen Temperature Controller (for JSPM-5200).....................5-18
5.2.7 CCD Camera .................................................................................5-18
5.2.8 Digital Control MFM unit .............................................................5-19
5.3 PREPARING FOR MEASUREMENT.................................................5-20
5.3.1 Starting the System in Measurement Mode...................................5-20
5.3.2 Resetting the Controller.................................................................5-21
5.3.3 Confirming Settings of the Device Setup Dialog Box...................5-21
5.3.4 Opening the SPM (Measurement) Parameters Window................5-21
5.3.5 Checking the Stage Position ..........................................................5-22
5.3.6 Setting an Optional Oscilloscope ..................................................5-23
5.4 AC AFM MODE ..................................................................................5-26
5.4.1 AC Mode Tab.................................................................................5-26
5.4.2 MFM Tab .......................................................................................5-37
5.4.3 VE-AFM Tab .................................................................................5-42
5.4.4 SKPM Tab .....................................................................................5-46
5.4.5 Advanced Tab ................................................................................5-55
5.5 CONTACT AFM MODE .....................................................................5-81
5.5.1 Contact Mode Tab..........................................................................5-81
5.5.2 Viscoelasticity Tab.........................................................................5-92
5.5.3 Lateral Modulation FFM Tab ........................................................5-96
5.5.4 Electrostatic Force Tab ................................................................5-100
5.5.5 Advanced Tab ..............................................................................5-103
5.6 STM MODE .......................................................................................5-133
5.6.1 STM Tab ......................................................................................5-133
5.6.2 Advanced Tab ..............................................................................5-144
5.7 GENERAL PRECAUTIONS FOR IMAGE ACQUISITION ............5-160
5.8 TERMINATING MEASUREMENT..................................................5-166
5.9 TERMINATING OPERATION..........................................................5-167
5.10 REFERENCE .....................................................................................5-168
5.10.1 SPM Scan Menu..........................................................................5-168
5.10.2 SPM Parameters (Simple)............................................................5-178
5.10.3 SPM Parameters (Advanced).......................................................5-203
5.10.4 Setting Lock-in Amplifier ...........................................................5-254
5.10.5 Controlling Specimen Temperature .............................................5-260
5.10.6 CCD Camera ...............................................................................5-264
6. ANALYSIS OPERATION
6.1 PROCESS MODE ..................................................................................6-1
6.2 IMAGE PROCESSING AND DATA PROCESSING FUNCTIONS ....6-2
6.3 EXAMPLE OF PROCESS FUNCTION ................................................6-4
6.3.1 Example of Using the Image Processing Function..........................6-4
6.3.2 Example of Using the Data Processing Function ..........................6-11
6.3.3 Arranging the Measured Data........................................................6-14
CONTENTS
TMPM5200-2 C-3
6.4 FILE MENU.........................................................................................6-17
6.5 EDIT MENU ........................................................................................6-25
6.6 PROCESS MENU (IMAGE PROCESSING FUNCTION).................6-26
6.6.1 Filter ..............................................................................................6-26
6.6.2 Edge Enhance................................................................................6-29
6.6.3 Differentiate ..................................................................................6-30
6.6.4 Normalise ......................................................................................6-30
6.6.5 Normalise S.D. ..............................................................................6-30
6.6.6 Median...........................................................................................6-31
6.6.7 Subtract Background.....................................................................6-32
6.6.8 Single Math ...................................................................................6-33
6.6.9 Double Math..................................................................................6-34
6.7 ANALYSE MENU (IMAGE PROCESSING FUNCTION) ................6-35
6.7.1 Profile............................................................................................6-35
6.7.2 Measure.........................................................................................6-45
6.7.3 Zoom .............................................................................................6-47
6.7.4 Trim...............................................................................................6-48
6.7.5 FFT (Fast Fourier Transformation) ...............................................6-49
6.7.6 Particle Analysis............................................................................6-56
6.7.7 Draw Mesh....................................................................................6-60
6.7.8 Roughness .....................................................................................6-61
6.8 GEOMETRY MENU (IMAGE PROCESSING FUNCTION) ............6-63
6.8.1 Translate........................................................................................6-63
6.8.2 Rotate ............................................................................................6-63
6.8.3 Mirror ............................................................................................6-64
6.8.4 Resize ............................................................................................6-65
6.8.5 Pad Points......................................................................................6-66
6.8.6 Drift Correction.............................................................................6-67
6.8.7 Average Unit Cell .........................................................................6-67
6.8.8 Extract Area ..................................................................................6-68
6.8.9 Replace Area .................................................................................6-69
6.9 LUT (HEIGHT INFORMATION) .......................................................6-70
6.9.1 Brightness/Contrast .......................................................................6-70
6.9.2 Set Window...................................................................................6-71
6.9.3 Histogram......................................................................................6-72
6.9.4 Display Image LUT.......................................................................6-73
6.9.5 Linearise Image LUT ....................................................................6-74
6.9.6 LUT Math......................................................................................6-75
6.9.7 Fix Z scale.....................................................................................6-75
6.10 DISPLAY MENU (IMAGE PROCESSING FUNCTION)..................6-78
6.10.1 Display ..........................................................................................6-78
6.10.2 Display Parameters........................................................................6-78
6.10.3 Full Display...................................................................................6-81
6.10.4 3D Display ....................................................................................6-82
6.10.5 Display Colours.............................................................................6-87
6.10.6 Clear Memory (FS) .......................................................................6-88
6.10.7 Grab from Memory (FS) ...............................................................6-89
6.10.8 Change Parameters........................................................................6-90
CONTENTS
C-4 TMPM5200-2
6.10.9 Display SPS Measurement Position ..............................................6-91
6.11 MAPPING MENU (IMAGE PROCESSING FUNCTION) ................6-92
6.11.1 Display Parameters........................................................................6-93
6.11.2 Special Displays ............................................................................6-94
6.11.3 SPS Mapping Select ......................................................................6-95
6.11.4 Edit SPS Mapping Data Set...........................................................6-96
6.11.5 Average Images.............................................................................6-99
6.11.6 Duplicate Data Set.........................................................................6-99
6.11.7 Extract Spectra...............................................................................6-99
6.12 PROCESS MENU (DATA PROCESSING FUNCTION)..................6-101
6.12.1 Smooth.........................................................................................6-101
6.12.2 Math X, Math Y ..........................................................................6-102
6.12.3 2 Spec Math.................................................................................6-103
6.12.4 Differentiate.................................................................................6-104
6.12.5 Remove DC Bias .........................................................................6-104
6.13 ANALYSE MENU (DATA PROCESSING FUNCTION) .................6-105
6.13.1 Fit Polynomial .............................................................................6-105
6.13.2 Zoom ...........................................................................................6-105
6.13.3 Measure .......................................................................................6-106
6.13.4 Group Plot ...................................................................................6-107
6.13.5 Show FFT ....................................................................................6-108
6.14 DISPLAY MENU (DATA PROCESSING FUNCTION)...................6-109
6.14.1 Plot...............................................................................................6-109
6.14.2 Plot Parameters............................................................................6-109
6.15 SELECT MENU.................................................................................6-111
6.16 WINDOW MENU..............................................................................6-112
6.17 SPM SCAN MENU............................................................................6-113
6.18 HELP MENU......................................................................................6-117
7. APPENDIX
7.1 WINSPM SOFTWARE REINSTALLATION METHOD......................7-1
7.1.1 Before Re-installing the WinSPM Software....................................7-1
7.1.2 Re-installing Windows ....................................................................7-2
7.1.3 Installing the A/D Board Device Driver in the PC..........................7-2
7.1.4 Reinstalling the WinSPM Software.................................................7-7
7.2 SETTING UP THE WINSPM PROGRAM ...........................................7-9
7.2.1 Selecting the instrument ..................................................................7-9
7.2.2 Saving and Loading the Scanner-Sensitivity Settings...................7-11
7.2.3 Saving and Loading the Motor-Drive
Position Calibration Values............................................................7-13
7.3 CANTILEVER .....................................................................................7-15
7.4 FILE FORMAT.....................................................................................7-19
7.4.1 Standard TIFF File Structure.........................................................7-19
7.4.2 WinSPM image file .......................................................................7-21
7.4.3 Spectrum data file..........................................................................7-50
7.4.4 Image file with spectrum data .......................................................7-51
7.4.5 Report file......................................................................................7-52
CONTENTS
TMPM5200-2 C-5
8. GENERAL
8.1 STORAGE..............................................................................................8-1
8.1.1 Instrument .......................................................................................8-1
8.1.2 Cantilever ........................................................................................8-1
8.1.3 Handling the Instrument..................................................................8-1
8.1.4 Maintenance Parts ...........................................................................8-1
8.2 VIBRATION ISOLATOR ......................................................................8-2
8.2.1 Compressor （optional）..................................................................8-2
8.2.2 Vibration-Isolation Table.................................................................8-2
8.3 SPM HEAD............................................................................................8-3
8.3.1 Laser Beam Focusing......................................................................8-3
8.3.2 Mirror Angle Adjustment................................................................8-4
8.4 CCD CAMERA (OPTIONAL) ..............................................................8-5
8.4.1 Installing the CCD Camera .............................................................8-5
8.4.2 Replacing the Source Lamp ............................................................8-8
8.5 LOCATIONS OF PORTS.....................................................................8-10
8.6 USER PORTS.......................................................................................8-10
8.7 PIN CONNECTION.............................................................................8-11
8.8 TOOL SET (OPTIONAL)....................................................................8-12
SAFETY PRECAUTIONS
For the proper use of the instrument, be sure to read the following safety precautions
prior to starting operation or maintenance. They contain important information related to
safety. Contact your JEOL service office whenever you are unclear about any operation
or maintenance.
The signs for safety precautions and their meanings used in this instruction manual are as
follows:
DANGER: An imminent hazardous situation which, if not avoided, will result
in death or serious injury.
WARNING: A potentially hazardous situation which, if not avoided, could re-
sult in death or serious injury.
CAUTION: A potentially hazardous situation which, if not avoided, could re-
sult in minor or moderate injury. Also could mean a potentially
hazardous situation which could result in serious damage to facili-
ties and acquired data.
Parts of this instrument where safety precautions are required are labeled with illustration
signs as shown below. Do not touch the parts labeled with these signs:
Beware of
electric shock
Beware of high
temperature
Beware of
getting caught
Do not
disassemble
Use the instrument in a proper manner and within the scope of the purposes and usage
contained in the brochures and instruction manuals. Never make modifications such as
removing protective parts, exchanging component parts, and defeating safety measures.
Be sure to read the “Safety Precautions” given in the instruction manuals of the optional
attachments for information about the attachments of this instrument.
WARNINGS
• A Class 2 laser is used in this microscope. Do not look directly in the
observation instruments such as the optical microscope. Look in the
observation instrument indirectly by using a detecting device with CCD.
• Be careful not to get irradiation bombardment from the laser radiation
aperture locating near the laser source position adjusting knobs.
• Look in the AFM head more than 20 cm away from the AFM head since a
Class 2 laser is provided in the AFM head.
TMPM5200-2 S-1
SAFETY PRECAUTIONS
• Be sure to turn off the power to the SPM CONTROL unit in advance when
mounting or dismounting the scanner holder, specimen holder or SPM
head unit.
There is a risk of electric shock due to the high voltage applied to the connector pins
from the SPM CONTROL unit.
• Never exchange a specimen while a high bias voltage is being applied to
the specimen.
You might get an electric shock due to the high voltage applied to the specimen.
• When storing the instrument, avoid high humidity.
Excess humidity brings deterioration of insulation at the tunneling current detector
and scanner high-voltage circuits, causing insufficient instrument performance or
electric shock.
• Be careful not to put your hand under the base plate.
You might get your fingers caught.
• To avoid burns, allow the lamp to cool down for at least 30 minutes be-
fore removing it. Never touch the lamp with bare hands because it is very
hot immediately after the filament burns out.
• When handling the instrument, be sure to wear nylon gloves.
Grease from hands may cause deterioration of the vacuum especially when you ob-
serve a specimen in the vacuum using an optional evacuation system. At the worst,
there is a risk of deterioration of insulation at the tunneling current detector and
scanner high-voltage circuits, causing insufficient instrument performance or elec-
tric shock.
If any parts happen to have hand grease on them, softly wipe it off with etha-
nol-soaked lint-free tissue or cloth.
CAUTIONS
• Do not install this instrument in a place where any fluorescent lamps di-
rectly illuminate the SPM head.
Fluorescent lamps blink at 100 Hz (if the line frequency is 50 Hz) or at 120 Hz (if
the line frequency is 60 Hz) and this noise may appear on the displayed image.
Concerning the installation and layout plan, please consult your local JEOL service
personnel.
• Handle the scanner holder very carefully since it is a precision device.
It could be easily damaged by a mechanical shock.
• The bias voltage to be applied to the specimen is superposed on the
"B+" wire in the heating cable. Therefore, the heating power supply must
be electrically isolated from the ground (GND).
If one of the heating cable wires is grounded, the bias voltage circuit might be
damaged.
• If the Sample Bias is set by using the slider during image observation, be
careful not to move the slider button across 0 V.
The tip would collide with the specimen surface if the bias voltage became 0 (zero).
S-2 TMPM5200-2
SAFETY PRECAUTIONS
TMPM5200-2 S-3
• When you move the tip close to the specimen using the Coarse Stage
window, the tip never stops even if a tunneling current or atomic force is
actually detected.
• The specimen stub is gold-plated. Be careful not to scratch the stub
surface.
• Insert or remove the specimen stub horizontally with care.
If an excessive force is applied to the scanner holder, the scanner inside it might be
damaged.
• Do not turn off the power while the WinSPM software is running.
The software may be damaged if the power is turned off.
• In order to prevent the tip from colliding with the specimen surface, the
speed of the tip movement must not be faster than 200 nm/s.
• Upon completion of observation, turn off the computer after terminating
the software. Wait 10 seconds or more before restarting the computer.
• The software must be terminated before the power is turned off. Never
turn off the power while the software is in operation.
• To turn off the power of the SPM CONTROL system, first turn off the
LD-ON switch of the AFM AMP and then turn off the power of the SPM
CONTROL system.
The laser luminescence part may be damaged.
• When you select and use a short cantilever out of two cantilevers, long
and short, be sure to remove the long one with a pair of tweezers.
Otherwise, the top of the long cantilever touches the specimen before the short one
does.
• Be sure to insert the cantilever along with the groove.
Otherwise, the cantilever may be damaged due to an excessive force being applied
when the spring retainer is released.
• Never touch the area around the cantilever on the cantilever holder with
bare fingers.
If that part is contaminated with hand grease, that might give rise to insufficient in-
sulation, thus possibly causing tunneling current leakage or incorrect operation of
the piezoelectric element.
• Push the spring retainer vertically.
If you force it diagonally, the ceramic might be damaged.
• When applying conductive paste to the cantilever and the cantilever
holder, be sure not to apply the conductive paste to the cantilever piezo-
electric element. When replacing a cantilever, be sure to confirm that no
previously used conductive paste remains on the holder.
Otherwise, the cantilever will tilt, causing the reflected laser beam not to irradiate
the right position.
• Cantilevers must be stored in a desiccator when they are not in use.
If they are stored at high humidity, the cantilevers could bend, causing the reflected
laser beam not to reach the correct position. Especially, a gold-coated Si3N4 cantile-
ver is prone to deteriorate with humidity.
SAFETY PRECAUTIONS
The labels concerning the operation of the laser
S-4 TMPM5200-2
• This instrument uses a class 2 laser device
and emits 670 nm laser (1 mw power).
Follow the instruction manual to avoid
getting laser irradiation bombardment.
The following labels are found on the AFM base
unit side panel.
• Two ports for laser irradiation are provided on this instrument and the
labels shown bellow are found on the AFM base unit top and front.
AFM base unit to
p
A
p
erture
A
p
erture
AFM base unit front
PRECAUTIONS FOR USE
Important precautions, which, if not followed, may result in damage to the device itself,
are described below.
• The software must be terminated before the power is turned off. Never
turn off the power while the software is in operation.
Wait 10 seconds or more before restarting the system.
• During initialization, the sample stage can move significantly. Prior to
implementing initialization, therefore, separate the probe from the
sample to prevent the probe from coming into contact with the specimen
or stage, causing damage to the probe.
• When you use a short cantilever, be sure to remove the long one with a
pair of tweezers. Otherwise, the top of the long cantilever touches the
specimen before the short one does.
• When applying conductive paste to the cantilever and the cantilever
holder, be sure not to apply the conductive paste to the cantilever
piezoelectric element. When replacing a cantilever, be sure to confirm
that no previously used conductive paste remains on the holder. Other-
wise, the cantilever will tilt, causing the reflected laser beam not to
irradiate the right position.
• If the Sample Bias is set by using the slider during image observation, be
careful not to move the slider button across 0 V. The tip would collide
with the specimen surface if the bias voltage became 0 (zero).
• If you move the motor drive greatly, the tip gets too close to the
specimen surface or gets too far from the specimen.
• When you move the tip close to the specimen using the Coarse Stage
window, the tip never stops even if a tunneling current or atomic force is
actually detected.
TMPM5200-2 P-1
1 GENERAL
1.1 INTRODUCTION
The JSPM−5200 Scanning Probe Microscope is designed not only to meet researchers’
increasing demands for applied observation modes but also to make the most of the
intrinsic functions of a scanning probe microscope. This instrument is easy to use and is
superb in its expandability, enabling a number of people from novices to professional
SPM researchers to use it.
The following are the main features of this instrument.
• It is possible to observe specimens under various conditions, from in a liquid to under
high vacuum, not to mention under atmospheric pressure, by attaching optional
accessories without making any modification of the basic unit.
• Moreover, it is possible to observe a specimen that is being heated or cooled by
attaching a simple optional accessory.
• You can handle quite a variety of modes such as AFM (Contact and AC modes), phase
image, FFM, STM, CITS and I-V using the standard instrument configuration. In
addition, you can use the observation modes for Kelvin-probe microscope images,
viscoelasticity images and pulsed force images by installing appropriate optional
accessories on the instrument.
• The control software operates under Windows, and the control panel is of the tab type,
with only the minimum necessary controls, thus being easy to use even to SPM
novices.
• A personal login function with which you can create your own environment, greatly
simplifies the operation of the instrument.
TMPM5200-2 1-1
2
SPECIFICATIONS
AND INSTALLATION
REQUIREMENTS
2.1 PRINCIPAL SPECIFICATIONS........................................................................ 2-1
2.2 COMPOSITION................................................................................................. 2-2
2.3 INSTALLATION REQUIREMENTS ................................................................ 2-5
2.4 STANDARD INSTALLATION DIAGRAM...................................................... 2-6
TMPM5200-2
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
TMPM5200-2 2-1
2.1 PRINCIPAL SPECIFICATIONS
•Resolution
AFM: Atomic resolution (mica atomic image in contact mode)
STM: Atomic resolution (HOPG atomic image)
•System drift: 0.05 nm/s or less
•Measurement modes
AFM: Contact mode
Topography image, force image, FFM, force curve,
friction-force curve, I-V, CITS, contact electric-current
image
AC mode
Topography image, phase image, amplitude image,
point-by-point lift mode
Lateral-modulation FFM (optional)
Viscoelasticity (optional)
Surface potential difference (optional)
Electrochemistry (optional)
Line-by-line lift mode (optional)
STM: STM mode
Topography image, electric-current image, CITS
Spectroscopy
I-V, S-V, I-S
•X, Y scanning range: 0 to 10 µm (when the standard scanner is used)
Driving voltage: ±150 V
Resolution: 25 bits (image offset included)
•Z range: 0 to 3 µm (when the standard scanner is used)
Driving voltage: ±150 V
Resolution: 21 bits (at a gain of 32×)
•Specimen size
Standard: 10 mm
×10 mm ×3 mm (thickness)
Maximum: 2-inch wafer
•Specimen movement
X, Y specimen movement: ±3 mm
Z specimen movement: 5 mm
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
2-2 TMPM5200-2
2.2 COMPOSITION
SPM Base Unit
•Coarse movement:
Z coarse-movement distance:
Manually operated up to 5 mm (motor approach in-
cluded)
Approach function: Motor approach up to 1.5 mm
X, Y coarse movement function:
Manually operated up to ±3 mm
•Stage: Drift-free stage
•Ports: Gas introduction and exhaust port (1 each)
Exclusive-only port (1)
Utility ports (2)
Port for cooling option (1)
SPM Head
•Scanning method: Specimen scanning
•Scanner: Tube-type scanner (replaceable)
X, Y = 10 µm, Z = 3 µm (one standard scanner provided
as standard)
•Detection method: Light lever
Laser-beam source: Class-2 semiconductor laser beam (red)
Laser detector: Four-segment photodiode
•Cantilever holder: Holder used in common for contact mode and AC mode
Cantilever mounting method:
One-touch push-in
Current detection terminal: Built-in
Mounting method: Slide-in
•Tip holder
Tip: 0.3 mm diameter
Tip mounting method: Push-in knock-on
Holder mounting method: Slide-in
Vibration Isolation System
•Air suspension: Gimbals piston type, automatic leveling
•Gel damper: Built-in
•Air compressor: Included as standard
Console Box
•Rack
Controller housing rack and operation table:
Included as standard
•Power: Single-phase AC100 V, 50/60 Hz, 1.5 kVA (one
receptacle with a grounding terminal)
•Power cable: 2.5 m to basic unit
2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS
TMPM5200-2 2-3
SPM Control System
• Scanning capabilities
Scanning range: Continuously variable from 0 to maximum scanning
range (25 bits)
Scanning speed: 0.00167 ms to 200 s/point
Bias voltage: Continuously variable from 0 to ±10 V, 0 to ±150 V (16
bits)
Scanning in a region of 1024×1024, 512×512, 256×256
and 128×128 pixels and Top Mirror scanning
Line scanning in 1024, 512, 256 and 128 pixels
Maximum 4 channels simultaneous input and simulta-
neous displayed
Automatic distortion correction, automatic tilt correction,
automatic contrast and brightness control
Zooming at any position
Scanning rotation: ±180°, in 1°step
Lithography function
• AFM capability
Contact mode, Constant-force mode, constant-height
mode, force-curve mode and friction-force curve mode
Force setting: 10-8 to 10-11 N
AC mode:
Detection method: Amplitude detection, phase detection and FM detection
Excitation frequency: 1 kHz to 1MHz
• STM capability
Constant-current mode, constant-height mode, I-V, CITS, S-V and I-S
Current setting: 30 pA to 1 µA
• Optional capabilities available
Surface potential difference, lateral-modulation FFM, viscoelasticity and magnetic
force
• Map scan capability
I-V mapping (CITS), I-S mapping, S-V mapping, force-curve mapping, fric-
tion-force curve mapping
Computer Control System
•Computer: IBM-PC/AT compatible
•High-resolution color display:21 inches, 1,280×1,024 pixels
•Keyboard and mouse: Provided
•External storage: Magneto-optical disk (optional)
SPM Software
• File operations
File writing: TIFF, BMP, Binary and ASCII
File reading
File searching
Table of contents
Other JEOL Microscope manuals
