JEOL JSM-T200 User manual

7912003KP
\ INSTRUC1'IONS I
dEDL
JSM-T200
SCANNING MICROSCOPE
No.ISM·T200-1
(EP165001)
~? JEOL L TD./ JEOL TECHNICS L TO .
Tokyo Japan

The Model T200 Scanning Microscope has been developed under the design
philosophy of combining simple operation, simple maintenance, and high
performance. Accordingly, quality micrographs comparable to those obtainable
by a large instrument can be readily obtained without any special skill.
These features together with the various advantages peculiar to the
scanning microscope, such as very large depth of focus, wide magnification
range, and minimal specimen preparation, make the T200 a most effective
instrument for research work, quality control, and as a visual education aid.
T200

CONTENTS
Page
l o INTRODUCTION · ....... . .................. . ....................... 1- 1
1 . 1
General ..................................•........•....... 1 -1
1. 2 Specifications ...................•..•....•....•........... 1 -3
1. 3 Layout , dimensio ns and weight ...........•..••..........•.. 1 -6
2. DESCRIPTION OF MAIN UN IT S ...................................... 2-1
2.1 Column and specimen s t a ge •....................•.........•. 2-2
2 . 2 Display panel .....................................•....... 2- 3
2. 3
Checker •.... .. ....... . .....................••..•........ ' .' 2- 5
2 . 4
Control panel ··········· · ··················· . . ............ 2-7
3. OPERATION · .. .... . .. .. .......................................... 3 -1
· 3. 1 Startup and shutdo wn ...................•...... . .. . ........ 3-1
3. 1 . 1 Star t up '" ................•........................ 3-1
3 . 1 . 2 Shutdown ···· ··· ······· · ················· · ·· · ······· 3-1
3.1 . 3 Power failure .........•............................ 3 -1
3. 1 . 4 Water failure •................... . .......... ... .... 3 -1
3.2 Specimen mounting . . .... . ...................•.............. 3 -2
3. 2.1 Specimen preparation .... . ... . .................•.... 3- 2
3.
2.2 Eucentric specimen stage· ············ · ·· ... . ....... 3- 2
3. 2. 3
Large specimen stage . ... . ... . ...........•...... . . . . 3-3
3. 3 Image observation .... . ......................... . .. . ......• 3- 5
3.3 . 1 Secondary electron image (SEI) . . ...... . ....... . .... 3- 5
3.3 . 2 Backscattered electron image (BEl) . . ....•.......... 3-7
3.3 . 3 Adjusting the rapid ex posure marker . . .. ... .. ..•. . . .. 3-8
3.3.4 Astigmatism correct i on ... . .... . ..... .. . . ...... .. .. . 3- 9
3. 3. 5
Autom a tic foc us mode ............................... 3-1 0
3. 4
FULL AUTO SEM image ..................... . ......... . •...... 3-1 0
3. 5
Photograph y··.·· ...... . .................• . .. . ... . ... . ..... 3- 11
3. 5 .1 Photographic recording sy stems ..................... 3-1 1
3. 5
.2 Photog r aphing the sca n nin g image .... . ... . . . ........ 3 -1 4
3. 5. 3
Film speed and f-numb er .. ...... . .... . .. . ... . .. . .... 3- 15
3. 5 . 4 Use of ultrahigh speed Polaroid Land sheet film
(type 107 , 57 , etc .) .. .. .. . ........ . ............. . . 3- 15
3. 5 . 5 Data readout on micr ogr aph ....... . ...... . .......... 3-1 6
3. 6
Aligning the mi c ros c op e ...... . ........... . ..... . . ... . .. ... 3-18
4. MAINTENANCE I (General Precautions) ...... . ....... . •....... . .. . . 4 -1
5. MAINTENANCE II (Parts Replaceme n t) . . ........... . ..... .. ...... .. . 5 -1
5 . 1 Electron gun filament r eplacement .................•....... 5- 1
5 . 2
Removing the condense r l ens aper t ure ......... .. ... . ...... . 5- 4
5 . 3
Removing the objective lens aperture ... ................... 5- 6
5.4 Disassembling the beam deflecto r . . ........ . ......... . .. . . . 5-8
5.5 Replacing the scintill a tor ........ . .. .. .............. . .... 5- 9
5 . 6
Replacing the oil diffusion pump heater . . .. .. . ........ . ... 5- 11
5 . 7 Oil rotary pump maintenance .... . .. . .. . ......... . ... ... . . .. 5-12
5.8 Fuse replacement .... . ... . . . ............. . . . ... . .. . .... .... 5- 13
7907001
01
T200

02
6. MAINTENANCE III (Column Disassembly, Reassembly and cleaning) ... 6-1
6.1
Column··· . . . . . . . . . . . . . . . . . . . . . . . . • . • . . • . . . • . • . . . . . . . . . . . . .. 6-1
6.1.1 Disassembly and reassembly·············· ··········· · 6-1
6.2
Cleaning·· . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .• 6-2
6.2.1 Cleaning materials, tools, etc. ................••... 6-2
6.2.2
Cleaning frequency and procedures .....•......•...... 6-3
6.2. 3 Cleaning me thods .........................•.......... 6-3
APPENDICES
A.1 Specimen preparation ....... .............. .... .............. A-1
A. 2 Standard tools and acces sories ............................. A- 3
T200

CHAPTER 1 I NTRODUCTION
1.1 GENERAL
The scanning electron microscope is a comparativel y recent addition to
the microscope family and is pr oving to be ver y popula r along with the long
established light and transmission type electron m icroscopes .
In spite of their merits and demerits , each type of microscope has its
role to play depending on the field of application . For example , if a high
resolving power and large depth of focus is not called for, a light micro -
scope would be ideal. Where a very high resolving power is required , a
transmission electron microscope would be necessary . However, when using a
transmission electron microscope, the specimen must be very thin (less than
1 ~m (10,000 A) in thickness) , a factor which requires a great deal of skill
on the part of the user in order to prepare such specimens.
The scanning electron microscope, on the other hand, offers a fairly
high resolution and moreover, since it is possible to use bulk specimens
(specimen thickness being of no consequence), specimen preparation is easy .
In addition to which, the depth of focus is large, thereby enabling 3-D
observation.
The operational principle of the scanning electron microscope is
illustrated in Fig. 1.1. A finely focused electron probe is made to scan
the specimen, resultant upon which, secondary and backscattered electrons,
etc. (Fig . 1.2) are emitted from the surface of the specimen. These signals
are then detected by a detector and outputted via an amplifier to a synchro-
nously scanned CRT as an intensity variation signal . The CRT raster width
divided by the electron probe scanning width gives the image magnification.
By adding an appropriate detector (optional) to the standard T200,
transmitted electron images, cathodoluminescence images, etc. can be
observed in addition to secondary and backscattered electron images.
Further, by incorporating an X- ray detector, X-ray analysis becomes
possible.
T200
E1ec tron gun -~ __
Condenser
Objective
Beam deflector
coils ---- ~~
Incident electron
beam
Specimen
Amplifier
Secondary electrons,
other signals
CRT
Fig. 1.1 Principle of scanning electron microscope
1-1

1-2
Electromotive force
Fig. 1.2
Specimen 1-------,
~
Q)
Absorbed electrons
~ ~ Transmitted electrons
Q)~
+.J
+.J
~
'g2
CIJ +.J
~ ()
CIlQ)
~..-I
H Q)
Signals emitted by specimens
T200

1.2 Specifications
1. Technical data
Performance
Resolution:
Magnification:
Electron optical system
Accelerating voltage:
Electron gun filament:
Lens system:
Alignment:
Stigma tor:
Image fine shift:
o
10 nm (100 A) at 25 kV and 20 rom working
distance.
l5
x
to 100,000x (15
x
available at work-
ing distance 48 rom only).
2, 5, 10, 15, 25 kV.
Precentered cartridge tungsten filament.
3-stage demagnifying system (2-stage
condenser lens and objective lens).
Mechanical.
8-pole electromagnetic type.
Up to ±10 ~m (25 kV) in any direction;
electromagnetic, joystick control •
•
Specimen stage (twin stage)
Specimen stage I (Eucentric specimen stage)
II
(Large
specimen
stage)
Specimen
Up
to 76 . 5 dia.
x
accomodation
Up to
10
dia.
x 10 thick*(rom)
25.5 thick**
(rom)
T200
Range
of X:
10
rom
X:
40
rom
movement Y: 20
mm
Y:
40
rom
Tilt
-40
0
to
+900~h'o~
-
Rotation
3600 -
Working
20 rom
48 rom
distance
Specimen
By
drawing out
the stage
ex change
Signal
Optional
(max. 48 pins)
terminal
32 dia., 51 dia., 76 . 5 dia. (rom) optionally available.
Up to 127.5 dia. x 25.5 thick (rom) possible.
2200 possible.
1-3

1-4
. Scanning system
Secondary and backscattered
electron detection*:
* Backscattered electron
detector, which is capable
of obtaining topographic
and composition images,
transmitted electron
detector, cathodolumines-
cence detector, specimen
current detector, X-ray
By a detector (comprizing a
scintillator, a light pipe, a photo-
multiplier and a collector).
detector: Optionally available.
Scanning modes: Frame scan (including TV scan), line
scan and Y modulation.
Scanning speeds:
Magnification:
Viewing area:
Cathode ray tube:
• TV signal output terminal:
• Recording system (complete
with electromagnetic shutter
and shutter button)
CSI-l:
CSI-2:
CSI-3:
CSI-4:
Visual TV scan; 0.2, 0.33, 10 sec/
frame.
Line scan 0.2, 0.33, 10 sec/frame.
Record ..• 60 sec/frame.
35
x
to 100,000x (23 steps; series of 35,
50, 75, 100, 150, 200, 350, •••••• ).
(15
x
available at WD = 48 mm).
135
mm x 180 mm.
230 mm, green phosphor CRT (used for
viewing and recording*).
* A CRT exclusively used for recording
is optionally available •
BNC-R connector; VTR available; compo-
site video signal output; positive
polarity; output voltage 1 Vp-p; use of
75 ohm coaxial cable; scanning
frequency horizontal: 15. 75 kHz,
vertical: 60 Hz •
Standard; Brownie roll film; 1 to 1/2
photographing ratio.
Polaroid pack film; 1 to 3/4 photo-
graphing ratio (optional).
35 mm roll film; 1 to 1/4 photographing
ratio (optional).
Polaroid sheet film; 1 to 1 photograph-
ing ratio (optional).
T200