JEOL JSM-T200 User manual

7912003KP
\ INSTRUC1'IONS I
dEDL
JSM-T200
SCANNING MICROSCOPE
No.ISM·T200-1
(EP165001)
~? JEOL L TD./ JEOL TECHNICS L TO .
Tokyo Japan

The Model T200 Scanning Microscope has been developed under the design
philosophy of combining simple operation, simple maintenance, and high
performance. Accordingly, quality micrographs comparable to those obtainable
by a large instrument can be readily obtained without any special skill.
These features together with the various advantages peculiar to the
scanning microscope, such as very large depth of focus, wide magnification
range, and minimal specimen preparation, make the T200 a most effective
instrument for research work, quality control, and as a visual education aid.
T200

CONTENTS
Page
l o INTRODUCTION · ....... . .................. . ....................... 1- 1
1 . 1
General ..................................•........•....... 1 -1
1. 2 Specifications ...................•..•....•....•........... 1 -3
1. 3 Layout , dimensio ns and weight ...........•..••..........•.. 1 -6
2. DESCRIPTION OF MAIN UN IT S ...................................... 2-1
2.1 Column and specimen s t a ge •....................•.........•. 2-2
2 . 2 Display panel .....................................•....... 2- 3
2. 3
Checker •.... .. ....... . .....................••..•........ ' .' 2- 5
2 . 4
Control panel ··········· · ··················· . . ............ 2-7
3. OPERATION · .. .... . .. .. .......................................... 3 -1
· 3. 1 Startup and shutdo wn ...................•...... . .. . ........ 3-1
3. 1 . 1 Star t up '" ................•........................ 3-1
3 . 1 . 2 Shutdown ···· ··· ······· · ················· · ·· · ······· 3-1
3.1 . 3 Power failure .........•............................ 3 -1
3. 1 . 4 Water failure •................... . .......... ... .... 3 -1
3.2 Specimen mounting . . .... . ...................•.............. 3 -2
3. 2.1 Specimen preparation .... . ... . .................•.... 3- 2
3.
2.2 Eucentric specimen stage· ············ · ·· ... . ....... 3- 2
3. 2. 3
Large specimen stage . ... . ... . ...........•...... . . . . 3-3
3. 3 Image observation .... . ......................... . .. . ......• 3- 5
3.3 . 1 Secondary electron image (SEI) . . ...... . ....... . .... 3- 5
3.3 . 2 Backscattered electron image (BEl) . . ....•.......... 3-7
3.3 . 3 Adjusting the rapid ex posure marker . . .. ... .. ..•. . . .. 3-8
3.3.4 Astigmatism correct i on ... . .... . ..... .. . . ...... .. .. . 3- 9
3. 3. 5
Autom a tic foc us mode ............................... 3-1 0
3. 4
FULL AUTO SEM image ..................... . ......... . •...... 3-1 0
3. 5
Photograph y··.·· ...... . .................• . .. . ... . ... . ..... 3- 11
3. 5 .1 Photographic recording sy stems ..................... 3-1 1
3. 5
.2 Photog r aphing the sca n nin g image .... . ... . . . ........ 3 -1 4
3. 5. 3
Film speed and f-numb er .. ...... . .... . .. . ... . .. . .... 3- 15
3. 5 . 4 Use of ultrahigh speed Polaroid Land sheet film
(type 107 , 57 , etc .) .. .. .. . ........ . ............. . . 3- 15
3. 5 . 5 Data readout on micr ogr aph ....... . ...... . .......... 3-1 6
3. 6
Aligning the mi c ros c op e ...... . ........... . ..... . . ... . .. ... 3-18
4. MAINTENANCE I (General Precautions) ...... . ....... . •....... . .. . . 4 -1
5. MAINTENANCE II (Parts Replaceme n t) . . ........... . ..... .. ...... .. . 5 -1
5 . 1 Electron gun filament r eplacement .................•....... 5- 1
5 . 2
Removing the condense r l ens aper t ure ......... .. ... . ...... . 5- 4
5 . 3
Removing the objective lens aperture ... ................... 5- 6
5.4 Disassembling the beam deflecto r . . ........ . ......... . .. . . . 5-8
5.5 Replacing the scintill a tor ........ . .. .. .............. . .... 5- 9
5 . 6
Replacing the oil diffusion pump heater . . .. .. . ........ . ... 5- 11
5 . 7 Oil rotary pump maintenance .... . .. . .. . ......... . ... ... . . .. 5-12
5.8 Fuse replacement .... . ... . . . ............. . . . ... . .. . .... .... 5- 13
7907001
01
T200

02
6. MAINTENANCE III (Column Disassembly, Reassembly and cleaning) ... 6-1
6.1
Column··· . . . . . . . . . . . . . . . . . . . . . . . . • . • . . • . . . • . • . . . . . . . . . . . . .. 6-1
6.1.1 Disassembly and reassembly·············· ··········· · 6-1
6.2
Cleaning·· . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .• 6-2
6.2.1 Cleaning materials, tools, etc. ................••... 6-2
6.2.2
Cleaning frequency and procedures .....•......•...... 6-3
6.2. 3 Cleaning me thods .........................•.......... 6-3
APPENDICES
A.1 Specimen preparation ....... .............. .... .............. A-1
A. 2 Standard tools and acces sories ............................. A- 3
T200

CHAPTER 1 I NTRODUCTION
1.1 GENERAL
The scanning electron microscope is a comparativel y recent addition to
the microscope family and is pr oving to be ver y popula r along with the long
established light and transmission type electron m icroscopes .
In spite of their merits and demerits , each type of microscope has its
role to play depending on the field of application . For example , if a high
resolving power and large depth of focus is not called for, a light micro -
scope would be ideal. Where a very high resolving power is required , a
transmission electron microscope would be necessary . However, when using a
transmission electron microscope, the specimen must be very thin (less than
1 ~m (10,000 A) in thickness) , a factor which requires a great deal of skill
on the part of the user in order to prepare such specimens.
The scanning electron microscope, on the other hand, offers a fairly
high resolution and moreover, since it is possible to use bulk specimens
(specimen thickness being of no consequence), specimen preparation is easy .
In addition to which, the depth of focus is large, thereby enabling 3-D
observation.
The operational principle of the scanning electron microscope is
illustrated in Fig. 1.1. A finely focused electron probe is made to scan
the specimen, resultant upon which, secondary and backscattered electrons,
etc. (Fig . 1.2) are emitted from the surface of the specimen. These signals
are then detected by a detector and outputted via an amplifier to a synchro-
nously scanned CRT as an intensity variation signal . The CRT raster width
divided by the electron probe scanning width gives the image magnification.
By adding an appropriate detector (optional) to the standard T200,
transmitted electron images, cathodoluminescence images, etc. can be
observed in addition to secondary and backscattered electron images.
Further, by incorporating an X- ray detector, X-ray analysis becomes
possible.
T200
E1ec tron gun -~ __
Condenser
Objective
Beam deflector
coils ---- ~~
Incident electron
beam
Specimen
Amplifier
Secondary electrons,
other signals
CRT
Fig. 1.1 Principle of scanning electron microscope
1-1

1-2
Electromotive force
Fig. 1.2
Specimen 1-------,
~
Q)
Absorbed electrons
~ ~ Transmitted electrons
Q)~
+.J
+.J
~
'g2
CIJ +.J
~ ()
CIlQ)
~..-I
H Q)
Signals emitted by specimens
T200

1.2 Specifications
1. Technical data
Performance
Resolution:
Magnification:
Electron optical system
Accelerating voltage:
Electron gun filament:
Lens system:
Alignment:
Stigma tor:
Image fine shift:
o
10 nm (100 A) at 25 kV and 20 rom working
distance.
l5
x
to 100,000x (15
x
available at work-
ing distance 48 rom only).
2, 5, 10, 15, 25 kV.
Precentered cartridge tungsten filament.
3-stage demagnifying system (2-stage
condenser lens and objective lens).
Mechanical.
8-pole electromagnetic type.
Up to ±10 ~m (25 kV) in any direction;
electromagnetic, joystick control •
•
Specimen stage (twin stage)
Specimen stage I (Eucentric specimen stage)
II
(Large
specimen
stage)
Specimen
Up
to 76 . 5 dia.
x
accomodation
Up to
10
dia.
x 10 thick*(rom)
25.5 thick**
(rom)
T200
Range
of X:
10
rom
X:
40
rom
movement Y: 20
mm
Y:
40
rom
Tilt
-40
0
to
+900~h'o~
-
Rotation
3600 -
Working
20 rom
48 rom
distance
Specimen
By
drawing out
the stage
ex change
Signal
Optional
(max. 48 pins)
terminal
32 dia., 51 dia., 76 . 5 dia. (rom) optionally available.
Up to 127.5 dia. x 25.5 thick (rom) possible.
2200 possible.
1-3

1-4
. Scanning system
Secondary and backscattered
electron detection*:
* Backscattered electron
detector, which is capable
of obtaining topographic
and composition images,
transmitted electron
detector, cathodolumines-
cence detector, specimen
current detector, X-ray
By a detector (comprizing a
scintillator, a light pipe, a photo-
multiplier and a collector).
detector: Optionally available.
Scanning modes: Frame scan (including TV scan), line
scan and Y modulation.
Scanning speeds:
Magnification:
Viewing area:
Cathode ray tube:
• TV signal output terminal:
• Recording system (complete
with electromagnetic shutter
and shutter button)
CSI-l:
CSI-2:
CSI-3:
CSI-4:
Visual TV scan; 0.2, 0.33, 10 sec/
frame.
Line scan 0.2, 0.33, 10 sec/frame.
Record ..• 60 sec/frame.
35
x
to 100,000x (23 steps; series of 35,
50, 75, 100, 150, 200, 350, •••••• ).
(15
x
available at WD = 48 mm).
135
mm x 180 mm.
230 mm, green phosphor CRT (used for
viewing and recording*).
* A CRT exclusively used for recording
is optionally available •
BNC-R connector; VTR available; compo-
site video signal output; positive
polarity; output voltage 1 Vp-p; use of
75 ohm coaxial cable; scanning
frequency horizontal: 15. 75 kHz,
vertical: 60 Hz •
Standard; Brownie roll film; 1 to 1/2
photographing ratio.
Polaroid pack film; 1 to 3/4 photo-
graphing ratio (optional).
35 mm roll film; 1 to 1/4 photographing
ratio (optional).
Polaroid sheet film; 1 to 1 photograph-
ing ratio (optional).
T200

.Vacuum system
Operation:
Ultimate pressure:
Vacuum gauge:
Pump-down time:
Oil rotary pump:
Oil diffusion pump:
.
Safety devices:
. Miscellaneous:
2. Installation requirements
. Power and water
Power:
Ground terminal:
Cooling water:
• Installation room
Room temperature:
Relative humidity:
Floor vibration:
T200
Fully automatic.
7 x 10-
4
Pa (5 x 10-
6
Torr).
Pirani gauge.
About 30 minutes (from cold).
Specimen exchange: About 2.5 minutes.
100 .R. /min
420 .R. /sec
1 unit.
1 unit.
Devices for power failure, water
failure and vacuum deterioration:
built-in.
Service outlet: built-in (100 V, 2 A;
used for operating optional attach-
ments) .
The
instrument can be wheeled on its
own casters.
100 V, 50/60 Hz, single phase, 2 kVA
(basic instrument: 1.2 kVA;
attachments: 0. 8 kVA).
Starting current 60 A (0.2 sec.)
Fluctuation: less than ±10% (that also
includes initial operation).
1 terminal, less than 100 Q.
Flow rate ... 2 .R./min at 0.05 - 0.2 MPa
(0.5 - 2 kg/cm
2
).
Temperature ..• 20 ±5 °c (water
temperature at the
outlet: not greater
than 35°C).
Faucet .. .•.. . 1, 12 mm O.D.
Drain .....•.• 1•
20
±5 °C.
Less than 80%.
Less than 2 ~m p-p (5 Hz) in the X, Y
and Z directions, less than 3 ~m p-p
1-5
(10 Hz) in the X, Y and Z directions,
and less than 8 ~m p-p (50 Hz) in the X,
Y and Z directions (with the instrument
installed).

1-6
Stray magnetic fields:
Less than 0.3 ~T (3 mG).
Note: The above specifications are subject to change without notice.
1.3 Layout, dimmensions and weight
o
o
o
'"
N
t
o
o
'"
2,000
~- 600 ---+-..-----
1,100 ------.I Distribution board
I~ I KS2P30A
/
GrOUnid terminal
c,...,
Faucet Y ~ Drain
Water hose
I I
I I
Line cable
terminal
~~
~
Table
~ (height: 750 mm)
Column
r-----...,
I \
Specimen stage I I
\ J
,....... )( Operator
r---,
'---_.I
(height: 1250 mm from floor)
I +
Line cable
Unit: mm
Doorway (800 wide x 1800 high)
Overall weight (basic instrument: about 280 kg)
T200

2-1
CHAPTER 2 DESCRIPTION OF MAIN UNITS
Column
Checker
anel
Specimen stage
Attachment housing
Control panel
Power switch
Vacuum control switch
Fig. 2.1 General view of T200
T200

2-2
2.1 Column and specimen stage
Ali
t screw
Photomult lier
Front cover f
screw>'~
Lar
Eucentric specimen stage
fixin screw
Twin s
Eucentric
Front cover
ecimen chamber
WD selection switch
Fig. 2.2 Column and specimen stage
Electron un
Evacuation
e
Vacuum control switch
* Used during transportation and when an attachment is attached.
T200

2.2 Display panel
Fig.
2.3 Display panel
CD CRT
~ CSI photographic recording system mounting pin
Cl) Connector for CSI
~ Blank plate (to be removed when mounting an optional CRT for photo-
g raph y)
The
display panel lamps indicate the operating state, etc. of the
microscope as follows:
o PUMP DOWN
® VENT
Lights up and remains lit during column
evacuation.
Lights up when the specimen chamber is
exposed to the atmosphere.
2-3
AUTOMATIC
The following lamps light up, indicating
that the related function is being auto-
matically controlled, when the respective
buttons are depressed as indicated.
(j) FULL
® CONT
T200
Lights up when the IACCELERATING VOLTAGE I
ION/OFFI button is depressed.
Lights up when the I CONTRAST II AUTO /MAN!
button is depressed.

2-4
® BRT
@ FOCUS
@ EXPOSURE
~ MAGNIFICATION
QJ ACCELERATING VOLTAGE
@ WORKING DISTANCE
~ FILM COUNTER
Lights up when the
I BRIGHTNESS II
AUTO/MAN I
button is depressed.
Lights up when the
I FOCUS II AUTO /MAN I
button is depressed.
Lights up and remains lit during photo-
graphy.
These LEDs (5), which do not function
unless the microscope is in vacuo , are
for digitally displaying the magnifica-
tion of the CRT image. If the displayed
magnification includes a decimal point ,
the displayed value is incorrect .
The
ON lamp lights up when an accelerat -
ing voltage is applied to the electron
gun, and the respective lamps light up in
accordance with the selected voltage .
The
selected voltage is printed out on
the film.
The respective lamps light up in
accordance with the selected working
distance. The selected working distance
is printed out on the film .
In the I MAN I mode, all four digits of the
film identification number must be set
manually by means of the four thumbwheels
as provided.
In the I AUTO I mode, however, the last two
digits (displayed by LEDs) of the film
identification number increase automa-
tically each time a film is exposed until
the displayed number reaches 99. However,
the first two digits must be set manually .
T200

2.3 Checker
This checker enables the operator to pinpoint a faulty circuit or unit
by monitoring 21 voltages and currents.
1. Auto checker
The auto checker automatically makes known a failure in any of the six
main power supplies (check points 6, 7, 8, 9, 10 and 15 in Fig. 2. 4).
That is, if any of the voltages deviate by ±10% or more from the value
listed, the POWER lamp goes off to indicate an abnormality. The actual
power supply at fault is identified by positioning the POSITION selector
at the above check points and noting the meter reading at each position.
2-5
2. The POSITION selector enables the operator to monitor 21 voltages and
currents, including the above six main power supply voltages and various
other operational parameters such as 0 V, mains power voltage, vacuum,
load current, CRT and PMT high tensions, and CL and OL exciting currents.
Check points 22 to 24 have been allotted for attachments.
T200
Note: Wh en calling in yo ur nearest JEOL Service Center in connection
with th e above, please ind icat e the check point/points at fault
and the voltage or current reading/readings in question.
lamp
selector
al select button
SEI: For observation of secondary electron images
BEl: For observation of backscattered electron images
Fig. 2.4 Checker panel

2-6
Check point table
No.
FULL SCALE
Measured value
1
ZERO CHECK
2
POWER AC
200 V
3
VACUUM
6 V
4
LOAD CURR 200
JlA
5
CRT HT
20 kV
6
78 V
7
-78 V
8
30
V
9
-30
V
10 10 V
11
60 V
12
-60
V
13
60 V
14
-60
V
15 48 V
16 1100 V
17
CL
CURR 2 A
18
OL
CURR 2 A
19 15 V
20
-15
V
21
PMT HT
-2200
V
22
}
23
For attachments
24
T200

2.4 Control panel
CD I FILAMENT I control
Controls the electron gun filament heating current.
Caution: To prevent overhea tin g th e filament which curtails the fila ment
service life, avoid turn ing th e control excessively.
When the filament burns out, the monitor lamp goes out.
o IIMAGEIIMODEI buttons
LSP
YMD
PIC
TV
For observation of signal waveforms (slow scan only).
For observation of Y-modulated images (slow scan only).
For observation of slow-scan and TV-scan images.
CD I IMAGEIISIZEI
buttons
EXP: For image focusing, astigmatism correction and exposure determi-
nation (by Rapid Exposure Marker).
PHOTO : For checking the photographing area.
FULL: For selecting the field of view.
(0 ISTIGMATORI controls
2- 7
Used to
probe) •
exhibi t
carried
correct astigmatism (that is, to obtain a perfectly round electron
When the astigmatism is corrected, the defocused image does not
directional blurring. It is recommended that correction be
out at a ma gn ification of 10,000 x or higher.
G) I IMAGE SHIFTI joystick
T200
The joystick allows the image to be shifted electromagnetically up to flO
f.Jm.

2-8
G[) IACCELERATING VOLTAGE I control
Selects the accelerating voltage.
(]) ISPOT SIZEI control
Changes over the size of the electron probe. Normally, this control is
set at the 9 o'clock position. However, if the image appears grainy, turn
the control clockwise until the graininess disappears.
SPOT SIZE
For magnifications of r;
less than 5000 x ~ 0
For backscattered
electron images
For magnifications of higher than 5000x and
when observing biological specimens
To obtain high resolution images, turn the knob
fully counterclockwise (clicking position).
~ !CONTRAST! and I BRIGHTNESS! controls
These controls adjust the image contrast and brightness. When the IMAGE
!SIZEI !Expi button is depressed, a rapid exposure marker appears on the
CRT screen. By optimizing the exposure marker (as illustrated below) with
the ICONTRASTI and IBRIGHTNESSI controls, an optimum image is obtained
when the respective IAUTOI buttons are depressed.
- -+-- ,.----- _-1 Contrast
~- --- ~ Brightness
® I FOCUS I controls
These controls are for focusing the image on the CRT screen. By depres-
sing the center and right I AUTO I buttons, the automatic focusing mode is
established.
@ I MAGNIFICATION ! cotnrol
. Selects the magnification of the CRT screen image. The magnification is
displayed on the display panel.
T200