JEOL JSM-35C User manual

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INSTALLATION INSTRUCTIONS FOR JSM-35C
SCANNING MICROSCOPE
dEOL U.S.A. IN(.
TECHNICAL SERVICE DIVISION
(OFFICIAL USE ONLY)

TABLE OF CONTENTS
Page
A.
Installation
1
1. Layout
2. Water Supply
3. Wiring
B.
Vacuum Sequence
4
C. Electronics Adjustments •••.....•.•...••• 8
1. Scan Generator Adjustment
2. Brightness Adjustment
3. CSI Focus Adjustment
4. CSI Pincushion Adjustment
5. Line Scanning Profile (LSP) Image
6. WFM Adjustment
7. Magnification Adjustment
8. Auto Focus Adjustment
9. Dynamic Focus Adjustment
10. Numbering
11. Attachments
D. Column Cleaning ••••••••.••....•••....•.. 23
E. Resolutlon Pictures ••.•••...•••.•..••.•. 24
Installation should be conducted according to the above
steps, making sure that each step has been properly com-
pleted. Check appropriate box upon completion. The
standard installation time including the instruction
should be about 8 days. If the adjustments outlined in
this booklet are performed in the presence of the cutomer,
the instruction time will be reduced.

A. INSTALLATION
1. Layout
If', a. Leave working space between the main console
and the surrounding room as shown in Figure 1.
The minimum distance around the instrument is
30 inches.
I)LI b. Install the variac on the wall, at least 7 feet
from the column. (See Figure 1.)
~ c. Be sure to place the rubber mounts under the
four corners of the column console.
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(Figure 1)
-1-

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(Figure 2)
3. Wiring
f$ a.
Wiring must be done neatly and correctly.
connect the cables for ease of your future service
work.
f;1- b.
Make sure that all modules
without any trouble.
can be pulled out
III c.
Install an anode chamber, main evacuation pipe,
and H.V. cable. Tighten the four screws on the
H.V. cable.
-EJ d.
Make sure that the gun chamber is clean.
Mount the wehnelt assembly, with a filament.
'f<'] e. Check AC IOOV in the pump box.
Red - Hot
Black - Neutral
-3-

B. VACUUM SEQUENCE
1.
2.
o 3.
Ell 4.
tIs.
B 6.
.f#1-. 7.
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G., 8.
ill- 9.
8
10
.
q.Lll.
f
Turn on the"Unattended Operation" switch (upward).
Turn on the "Key" switch and the water supply.
Check 24V in the pump box.
Make sure that the DP indication lamp located on
the vacuum panel comes on for 20 minute warm-up.
Attach the digital volt meter Fluke (2mA range) or
data precision (lmA range) to the jack on the
vacuum circuit located on the left inside of the
column console.
Depress the VENT button and make sure that the
multimeter reading indicates about 250pA at
atmosphere. If not,. adjust R7 housed in the
VG-07L vacuum control circuit. (See Figure 3.)
Depress the "Pump-down" button. Make sure that
the meter reading reaches close to 25pA in 10 -
15 minutes with Vl open.
Depress the VENT button again and make sure that
the meter reading indicates about 250pA.
Depress the Pump-Down button and make sure that
Vl valve opens and V3 valve closes at 170pA.
If not, adjust R4. (To lower the switch over
point, turn R4 counterclockwise.)
Within 10 minutes (it may take longer at first)
after the vacuUm system is set to DP pumping,
the meter reading should drop to 25).lA. .
Pump
down for 1 hour. Then, check the leak rate
in accordance with the following directions, with
the Sanwa multimeter. The permissable leak rate
is less than 4pA/minute.
-4-

9
12
.
[2J 13.
-Etf 14.
b/.I. 15.
Procedure for checking vacuum leak rate:
(1) Turn on the DP, RP, V2 and V4 switches
located on the vacuum circuit panel.
(2) Set the Valve Lock/Auto switch on the
vacuum circuit panel to Manual. (At this
time, the pumping is stopped with all
remaining valves closed.)
(3) Check the leak rate every minute with the
digital volt meter for 5 minutes and figure
out the average by dividing the total leak
rate by 5.
(4) In order to go back to the Auto operation,
turn the valve lock switch to Auto. Wait
for the red warning lamp on the vacuum system
to go off. Then, turn off the DP, RP, V2
and V4 switches.
If the meter reading is not 25pA with the ready
lamp on, adjust R3. (See Figure 3.)
The h~ ready lamp should be on now. If not,
adjust R5. (See Figure 3.)
Vent the column, then, pump down again. Double-
check that the HV ready lamp comes on when the
meter is about 27 - 30~A. If a vacuum gauge is
available, adjust R5 to turn on the r~~dy lamp
when the vacuum is better than 4 x 10 torr.
Check V4 function according to the following
procedure:
a. Close the gun isolation manual valve.
b. Turn the valve fully clockwise.
c. Depress the VENT button.
d. Then, V4 valve closes andLVl valve opens.
If not, pump down again, and adjust R6.
-5-

Then, repeat steps c and d until the valve
sequence is proper.
e. Depress the PUMP button.
f •. VI valve closes and V3 valve opens, with
V4 valve closed.
g. About 2 - 3 minutes later, V3 valve closes,
VI valve opens, and V4 valve opens.
NOTE: When this procedure is conducted, the column
must be under high vacuum and the HV ready
lamp has to be ON. Only the gun chamber is
being leaked at this time, and the specimen
chamber remains under high vacuum.
0
16
.
Overnight leak rate test - It usually takes over-
night to obtain good vacuum leak rate indication
becuase of the outgassing from inside the column.
You can simply check the vacuum leak rate, however,
by jUdging the pumping sound of the rotary pump
in the following manner:
(1) Pump the column for 2 - 3 hours.
(2) Turn off and leave the instrument overnight.
(3) Turn on the instrument again the next morning.
Listen for the pumping sound when V3 valve
opens.
(4) If the column is under high vacuum, you can
hardly hear the pumping sound or no sound
at all.
-6-

( .
Potentiometers
R3
R4 R6 R5
(Figure 3)
I
--~
R5 (Ready Pot)
- Adjusts H.V. ready
point. (Maximum torr.
is 4 x 10-
4
.)
R6 (Shutter Pot)·
- Controls V4. To be
used when V4 is checked
for proper filament
exchange sequencing.
R4 (High Vac.Pot) - To be used to establish
the proper VI/V3
switching point.
R7 (Meter H Pot) - Adjusts meter reading
to get 250pA at atmosphere.
R3 (Meter L Pot) - Adjusts
to 25pA
(pi rani
meter reading
at high vacuum
saturating point).
-7-

------ ----------._---
C. ELECTRONICS ADJUSTMENTS
Push down the Unattended Operation switch, and check
all the voltages on the back of the power supply.
The Unattended Operation switch must be turned on
every time a unit has to be pulled out or to be
replaced.
1. Scanning Generator Adjustment
Pullout the SCAN GENERATOR unit.
The most important thing about the scan-generator
is .thatthe Slow 2 horizontal speed is synchronized
to. 60HZ.
Checking procedure:
a. Evacuate the airlock chamber and open the door.
b. Turn the PMT switch on. This PMT detects any
light leak through the airlock chamber.
c. Observe 60HZ (light) noise on the screen.
~
At Slow 2, the 60HZ noise should appear like
Figure 8 with vertical bars. If not, adjust
the SYNC. or H. FREQ. potentiometer on the top
of the scan-generator. (If horizontal sweep
is not synchronized, black stripes should
appear horizontally.) .
d.
Check Vertical Scan Speed at Slow 2. Decrease
~
the vertical size, using Selected Area Y-width.
Then, time the line movement from top to bottom
(it should be 25 seconds). If not, adjust
V. FREQ. on the Scan Generator unit.
-8-

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(Figure e)
2. Brightness Adjustment (Line, Spot, WFM)
Before starting this adjustment, be sure to pull
out the display unit, remove the two side panels,
connect the power extension cable, and turn off
the Unattended Operation switch.
a. Display
(1) Set the contrast to 12:00 and the birght-
ctJ
ness to 3:00 on the Display unit.
[b
(2) Depress SLOW 1 and Wave Form Monitor (WFM).
Adjust VR3 on DU05c in order to make WFM in
a comfortable brightness (see Figure 5).
(3) Adjust brightness on SEI to locate the
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signal line between the seco?d and the
third lines from the bottom of WFM.
-.- ... ------------.-----.----.. WFM
Signal
(4) Depress the Normal button. Adjust VIEW
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PIC brightness VR7, and make the raster
visible on the monitor. *The raster should
not be too bright nor too dark.
-9-