JEOL JSM-35C User manual

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INSTALLATION INSTRUCTIONS FOR JSM-35C
SCANNING MICROSCOPE
dEOL U.S.A. IN(.
TECHNICAL SERVICE DIVISION
(OFFICIAL USE ONLY)

TABLE OF CONTENTS
Page
A.
Installation
1
1. Layout
2. Water Supply
3. Wiring
B.
Vacuum Sequence
4
C. Electronics Adjustments •••.....•.•...••• 8
1. Scan Generator Adjustment
2. Brightness Adjustment
3. CSI Focus Adjustment
4. CSI Pincushion Adjustment
5. Line Scanning Profile (LSP) Image
6. WFM Adjustment
7. Magnification Adjustment
8. Auto Focus Adjustment
9. Dynamic Focus Adjustment
10. Numbering
11. Attachments
D. Column Cleaning ••••••••.••....•••....•.. 23
E. Resolutlon Pictures ••.•••...•••.•..••.•. 24
Installation should be conducted according to the above
steps, making sure that each step has been properly com-
pleted. Check appropriate box upon completion. The
standard installation time including the instruction
should be about 8 days. If the adjustments outlined in
this booklet are performed in the presence of the cutomer,
the instruction time will be reduced.

A. INSTALLATION
1. Layout
If', a. Leave working space between the main console
and the surrounding room as shown in Figure 1.
The minimum distance around the instrument is
30 inches.
I)LI b. Install the variac on the wall, at least 7 feet
from the column. (See Figure 1.)
~ c. Be sure to place the rubber mounts under the
four corners of the column console.
C
• .-1
o
("t") g.
'QRIAC
z
~<\, •
~"
r /.~. <\,0/"
~o~Y
I r- ...
I ...
I .. ...,
I
I
I
I
...... J
(Figure 1)
-1-

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11
I
""- ...
.........
I ..,
I I
II I
I
-... I
... - ...... J
(Figure 2)
3. Wiring
f$ a.
Wiring must be done neatly and correctly.
connect the cables for ease of your future service
work.
f;1- b.
Make sure that all modules
without any trouble.
can be pulled out
III c.
Install an anode chamber, main evacuation pipe,
and H.V. cable. Tighten the four screws on the
H.V. cable.
-EJ d.
Make sure that the gun chamber is clean.
Mount the wehnelt assembly, with a filament.
'f<'] e. Check AC IOOV in the pump box.
Red - Hot
Black - Neutral
-3-

B. VACUUM SEQUENCE
1.
2.
o 3.
Ell 4.
tIs.
B 6.
.f#1-. 7.
/
G., 8.
ill- 9.
8
10
.
q.Lll.
f
Turn on the"Unattended Operation" switch (upward).
Turn on the "Key" switch and the water supply.
Check 24V in the pump box.
Make sure that the DP indication lamp located on
the vacuum panel comes on for 20 minute warm-up.
Attach the digital volt meter Fluke (2mA range) or
data precision (lmA range) to the jack on the
vacuum circuit located on the left inside of the
column console.
Depress the VENT button and make sure that the
multimeter reading indicates about 250pA at
atmosphere. If not,. adjust R7 housed in the
VG-07L vacuum control circuit. (See Figure 3.)
Depress the "Pump-down" button. Make sure that
the meter reading reaches close to 25pA in 10 -
15 minutes with Vl open.
Depress the VENT button again and make sure that
the meter reading indicates about 250pA.
Depress the Pump-Down button and make sure that
Vl valve opens and V3 valve closes at 170pA.
If not, adjust R4. (To lower the switch over
point, turn R4 counterclockwise.)
Within 10 minutes (it may take longer at first)
after the vacuUm system is set to DP pumping,
the meter reading should drop to 25).lA. .
Pump
down for 1 hour. Then, check the leak rate
in accordance with the following directions, with
the Sanwa multimeter. The permissable leak rate
is less than 4pA/minute.
-4-

9
12
.
[2J 13.
-Etf 14.
b/.I. 15.
Procedure for checking vacuum leak rate:
(1) Turn on the DP, RP, V2 and V4 switches
located on the vacuum circuit panel.
(2) Set the Valve Lock/Auto switch on the
vacuum circuit panel to Manual. (At this
time, the pumping is stopped with all
remaining valves closed.)
(3) Check the leak rate every minute with the
digital volt meter for 5 minutes and figure
out the average by dividing the total leak
rate by 5.
(4) In order to go back to the Auto operation,
turn the valve lock switch to Auto. Wait
for the red warning lamp on the vacuum system
to go off. Then, turn off the DP, RP, V2
and V4 switches.
If the meter reading is not 25pA with the ready
lamp on, adjust R3. (See Figure 3.)
The h~ ready lamp should be on now. If not,
adjust R5. (See Figure 3.)
Vent the column, then, pump down again. Double-
check that the HV ready lamp comes on when the
meter is about 27 - 30~A. If a vacuum gauge is
available, adjust R5 to turn on the r~~dy lamp
when the vacuum is better than 4 x 10 torr.
Check V4 function according to the following
procedure:
a. Close the gun isolation manual valve.
b. Turn the valve fully clockwise.
c. Depress the VENT button.
d. Then, V4 valve closes andLVl valve opens.
If not, pump down again, and adjust R6.
-5-

Then, repeat steps c and d until the valve
sequence is proper.
e. Depress the PUMP button.
f •. VI valve closes and V3 valve opens, with
V4 valve closed.
g. About 2 - 3 minutes later, V3 valve closes,
VI valve opens, and V4 valve opens.
NOTE: When this procedure is conducted, the column
must be under high vacuum and the HV ready
lamp has to be ON. Only the gun chamber is
being leaked at this time, and the specimen
chamber remains under high vacuum.
0
16
.
Overnight leak rate test - It usually takes over-
night to obtain good vacuum leak rate indication
becuase of the outgassing from inside the column.
You can simply check the vacuum leak rate, however,
by jUdging the pumping sound of the rotary pump
in the following manner:
(1) Pump the column for 2 - 3 hours.
(2) Turn off and leave the instrument overnight.
(3) Turn on the instrument again the next morning.
Listen for the pumping sound when V3 valve
opens.
(4) If the column is under high vacuum, you can
hardly hear the pumping sound or no sound
at all.
-6-

( .
Potentiometers
R3
R4 R6 R5
(Figure 3)
I
--~
R5 (Ready Pot)
- Adjusts H.V. ready
point. (Maximum torr.
is 4 x 10-
4
.)
R6 (Shutter Pot)·
- Controls V4. To be
used when V4 is checked
for proper filament
exchange sequencing.
R4 (High Vac.Pot) - To be used to establish
the proper VI/V3
switching point.
R7 (Meter H Pot) - Adjusts meter reading
to get 250pA at atmosphere.
R3 (Meter L Pot) - Adjusts
to 25pA
(pi rani
meter reading
at high vacuum
saturating point).
-7-

------ ----------._---
C. ELECTRONICS ADJUSTMENTS
Push down the Unattended Operation switch, and check
all the voltages on the back of the power supply.
The Unattended Operation switch must be turned on
every time a unit has to be pulled out or to be
replaced.
1. Scanning Generator Adjustment
Pullout the SCAN GENERATOR unit.
The most important thing about the scan-generator
is .thatthe Slow 2 horizontal speed is synchronized
to. 60HZ.
Checking procedure:
a. Evacuate the airlock chamber and open the door.
b. Turn the PMT switch on. This PMT detects any
light leak through the airlock chamber.
c. Observe 60HZ (light) noise on the screen.
~
At Slow 2, the 60HZ noise should appear like
Figure 8 with vertical bars. If not, adjust
the SYNC. or H. FREQ. potentiometer on the top
of the scan-generator. (If horizontal sweep
is not synchronized, black stripes should
appear horizontally.) .
d.
Check Vertical Scan Speed at Slow 2. Decrease
~
the vertical size, using Selected Area Y-width.
Then, time the line movement from top to bottom
(it should be 25 seconds). If not, adjust
V. FREQ. on the Scan Generator unit.
-8-

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(Figure e)
2. Brightness Adjustment (Line, Spot, WFM)
Before starting this adjustment, be sure to pull
out the display unit, remove the two side panels,
connect the power extension cable, and turn off
the Unattended Operation switch.
a. Display
(1) Set the contrast to 12:00 and the birght-
ctJ
ness to 3:00 on the Display unit.
[b
(2) Depress SLOW 1 and Wave Form Monitor (WFM).
Adjust VR3 on DU05c in order to make WFM in
a comfortable brightness (see Figure 5).
(3) Adjust brightness on SEI to locate the
CfJ
signal line between the seco?d and the
third lines from the bottom of WFM.
-.- ... ------------.-----.----.. WFM
Signal
(4) Depress the Normal button. Adjust VIEW
'$
PIC brightness VR7, and make the raster
visible on the monitor. *The raster should
not be too bright nor too dark.
-9-

--- ----
b. Recording CRT.
(1) Remove
the camera.
~
i"-i-J
(2) Set the brightness to 5.00 and the contrast
L-..<..-:
to 5.00 on CSI.
N1
(3) Use WFM and set SEI signal between the
1+-2
second and the third lines (grey).
(4) Depress NORMAL and PHOTO. Use exposure
~.
setting 6-6.
(5) Adjust CSI PIC VR8 so that the raster is
~
not too bright nor too dark. (See Figure 5.)
.--;
i~ti (6) Then, go to SPOT. Depress PHOTO.
[£ (7) Increase the CSI brightness slowly until
!
the spot is visible. Then adjust CSI SPOT
VR9
to decrease the brightness of the spot.
Repeat these two steps until the spot is
visible but not too bright when the CSI
brightness is set to 10.00.
fE
(8) Set the brightness back to 5.00.
(9) Go to Line mode.
~
)-r4 (10) Depress PHOTO. Gradually increase the
brightness to 10.00 and adjust CSI LINE
VRlO
so that the line is not too bright.
~(ll) Replace the camera.
-11-

.. \.&e/
C
b.
Set the F stop aperture to 5.6.
f
Put a ground-glass focusing plate on the camera
c.
and focus the beam on the focusing plate by
adjusting camera length and using an eye-lupe.
=t
Check the spot size with an eye-lupe (use at
d.
least a 15x peak lupe). Obtain as a small
spot as possible by adjusting the CSI static
focus potentiometer VR7 (CSI FOcus) located
on the display unit DFC-d*c board.
:sf e. Remove the camera. Set the selected area
switch to ON, bring the spot to the top, center
of the CRT, and adjust the sput size to make
it as small as possible with the dynamic focus
"Y" potentiometer (vR1O located on the display
unit DFC-08C board.
:Xi
f.
Bring the spot to the right hand side, center
of CSI CRT and adjust the spot size as before,
using the dynamic focus "X" potentiometer (V~)
on the display unit DFC-08C board.
~( g. Bring the spot to center.
4. CSI Pincushion Adjustment
--:j
; -!- a. Remove CSI and turn off the photo blanking .
switch on the rear panel of the display module.
---"'-
~b. Depress the RAPID 2 button and set magnification
to above 10
2
Set the X and Y width to maximum. 0
Use Selected Area Mode and Picture (I I) Mode.
Co A vertical line will appear on CSIo (DO not
increase brightness too much. (If the line is
too dim, adjust the brightness potentiometer
on the SEI unit.)
-13-

~ h.
Make sure that the line is.§!traight. __ IJ the
line is not straight, adjJ~ ~(~~~Hk DFC-08C
housed in the display unit. (See Figure 6.)
T
~ ~.
Bring the line to the bottom of CSI. Make
sure that the line is straight. If not,
adjust the balance with VR5.
--r-
~
j.
Repeat it at the top of CRT.
--+-
~ k.
Center the line.
Turn on the Photo Blanking
switch. Set the
Scan Mode switch CD to
P ict ure (I I).
When the above adjustments are all done, set
~ 1.
the brightness potentiometer located on CSI
to 5.0, and set the camera-f stop to 16.
Then, take one photograph at Picture Mode
(speed 7.7 or 6.6). (Adjust the brightness
potentiometer on the SEI unit to obtain a
good photograph.) This picture is supposed
to be high resolution picture of which corners
are clear with all numbering characters. (PHOTO)
]i1DPi P e- #3508
mo
Replace the side panels on the display unit.
Replace the Display unit and the camera.
5. Line Scanning Profile (LSP) Image
a. Obtain the mesh image at 200x magnification.
b. Switch to LINE mode.
c. Adjust the Brightness and contrast potentio-
meters on the SEI unit to place LSP image
in the middle of the Display screen.
-15-
./

70 Magnification Adjustment
Check magnification over all magnification coarse
ranges (lOl, 10
2,
10
3,. &
10
4)
also WD1S and WD39.
If magnification is off the same percentage in all
magnification coarse ranges, correct magnification
by adjusting the H amp. or Vamp. potentiometer.
If magnification of one of the ranges is off,
correct magnification by adjusting the range.
Magnification can be changed by changing camera
focus. Therefore, be sure to focus the camera
before checking magnification.
Magnification adjustment procedure:
Before starting this adjustment, be sure to pull
out the magnification unit, connect the power
extension cable, and turn off the unattended
Operation switch.
Use SLOW 1 to measure the horizontal distance on
the Display.
a. Set Working Distance (WD) to lSmm. Set the
Coarse magnification button to 10
2•
Take a
photograph at 200x magnification. (lOOp is
20mm when photographed.) Measure 4 meshes
on the X and Y axes on the ?hotograph (Xp &
Yp). Also measure 4 meshes on the X and Y
axes on the Display (Xd and Yd).
Xd . Yd .
Xp = XO relatlon
-yp- = Yo relatlon
/
Record XO I U
tJ1q1 and Yo U,iN
NOTE: If XO and Yo are not equal (within 4%) adjust CSI
scan width.
-17-

..
d.
Check the above with the coarse magnification
~
by setting to 10
2
(200x), 10
3
(2,OOOx), and
10
4
(20,OOOx) with WD at 15. If any of these
magnifications is off, adjust the appropriate
potent iometer. (S'ee Figure 8.)
e.
After the above adjustments, take a 200x
~
magnification picture with lOOp mesh. The
micron bar size should be the same as the
mesh size. If not, adjust the micron bar by
the potentiometer VR8 on the PNU-03L board.
DJi'iItIl
( PHOTO)
#3505
8. Auto Focus Adjustment
a. Pullout the LENS unit. Set magnification to
600x, WD to lSmm, O.L. to 5.0, and HV to 3SKV.
IX· /,
If-J b.
Focus the image by adjusting the IIOL ADJ
II
potentiometer on the top of the lens unit.
(See Figure 9.)
~ c.
Switch high voltage to 2SKV and adjust focus
with the 2SKV potentiometer.
Adjust focus at lSKV and SKV in the same way.
~ d.
'~ e.
Turn high voltage to 2SKV again and change
WD to 39mm. Adju~t focus with the II STAGE
II
potentiometer.
9. Dynamic Focus Adjustment (Fully FOCUS)
a. Set WD to lSmm, Objective Lens aperture to
240~m (#2) and magnification to 200x. Tilt
the specimen to 60°.
b. Focus the image on the center of the displayo
-19-

.-
U-MARKER
P_=J'1~JIKER LENGTH,
r-V-POSITION
i
H-POSITION U-MARKER WIDTH
--------;------ .---------- p_-=-M.tmK~
I j . CHARACTE~JNTERVAL I H-POSITIC
- -.i _ _ _J "J
U DC <-L]uO
YR4
vi':, IJRb
"JP-1 v Ril
VR'1 VRIO
4ch. V-POSITIQN@
~., H-GAIN
@
'IRll.
V1'(2!
~GA_IN IvRII
~t~_MASK _ ®
~
'1~:-'1-
VR'5
CHARACTERS SIZE/INTERVAL
(ONLY RAPID 2 ~
y
(@
~
ABOVE MAG 10
2)
~..L
I)'RI(;,
'iF. 22
V'R It
CHARACTERS SIZE/INTERVAL
J
(ONLY RAPID 2
MAG 10
1) ~@
~.
®
~ vR20
vR
I8 1_\,:,\11
f-
....li=..EOSll.I..QN._--.l J
(ONLY RAPID 2)
I
I PNU-03L
_J2FZI'E_CTI~G RbPIJ) 2
[
(Figure 10)
10 Numbering
0
Set numbering characters according to the customer's
request. Adjust the switches on PNU-02L. Refer
to the table on the next page.
-21-

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1 ·1
o
j
I
I .0
0 0
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0 0
d 0 0
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o I
.' <.~ './ .... 0 '. 0
.: ... <1 . ",' I: .. ': I I
·0 '. 0.: 0 . 0
, .
(66LOOOdV)
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FOCUS ADJ.
o 5kv
Ol5kv
025kv
o STAGE
o lOv ADJ
o CL ADJ
o OL ADJ
LENS
AMP 0
LEVEL 0
SEP 0
(Figure 9)
rf,
~
c.
Set the AMPLITUDE ~nob in front to all the way
counterclockwise. Depress the FULLY FOCUS
button. Check if the image stays in focus.
If not, adjust LEVEL adjustment on the LENS
unit.
----,
~. d. Turn the AMPLITUDE knob to 2 o'clock position.
Adjust AMP in order to bring the whole image
in focus. Use SLOW 2.
D eo
Take a picture with magnification at 200x.
-20-

•
Now, you can determine the magnification
relationship between the Display and Record-
ing CRT.
M b. Set the WD to 39mm, coarse magnification to
10
1 ,
and fine magnification to 50, using a
100U mesh. Measure 4 meshes on the X and Y
axes on the display (Xdl and Ydl). xdl must
be 20mm times Xo, and Ydl must be 20mm times
yo. If not, correct magnification, adjusting
the H~V amp. potentiometer on the top of the
magnification unit. (See Figure 8.')
Set WD to 15, coarse magnification to 10
1,
~ c.
and fine magnification to 100. Repeat
Step a above. Measure over four grids. If
the magnification is off, adjust with the WD
15 H Vamp. potentiometers. (See Figure 8.)
010
2
~ ::.:1 V
o 102
-
J
010
3 H
010
4
vO
OV]
AMP.
OR
;
~----------------~
(Figure 8)
-18-
IC'J lAMP.

d. Set BRIGHTNESS on CSI to Maximum.
f
e.
Photograph LSP image at 7-7 exposure setting.
(
PHOT!}]
RM'f-
#3508
6. WPM Adjustment
See SEM-INST-3 of "Quick References for JSM-35C
Operat ions" •
1,11 Set the brlghtness and contrast potentiometers
f on CSI to 5.00 as the initial setting.
STANDARD F STOP SETTING
F
ASA
16 400 (Polaroid 52)
11
200
8
100
5.6 50
(Polaroid 55)
Upon completion of this adjustment, take one
picture. Record the contrast and brlghtness
settings. Use 6.7 setting unless the customer
desires 50 second exposure.
(PHOTO)
_@Ie
-16-