JEOL JEM-1200EX User manual

INSTRUCTIONS
JEM - I 200EX
ELECTRON MICROSCOPE
dEOL.
No. IEM1200EX-2
(EM157012)
JEOL LTD. / 19*il 
F5(Afke--cLf")
Tokyo Japan

E(eetelp.„,
8309081 HP

To the user:
4
This instruction manual covers the operating
procedures for the basic JEM-1200EX Electron Mi-

4
croscope. That is to say, if the instrument delivered

6
4

1
to your institution has been modified in any way to
4

satisfy your specific research requirements, certain
aspects of the manual will require certain (minor)
amendments. If in any doubt, please contact your
4 
nearest JEOL Service Center.
1
1200EX-1

1
AMENDMENTS TO INSTRUCTION MANUAL
JEM-1200EX
No. CI1EM1200EX-2
(EM157012)
The instrument has undergone certain modifications in order to improve performance and facilitate
operation. Please, therefore, note the following changes and correct your manual accordingly. We regret any
inconvenience caused.
1.
Although the parts listed below are optional accessories, they are described as standard items in this manual
for the sake of convenience. They are: anti-contamination device, refrigerant funnel, refrigerant drainer,
beam stopper, specimen grid case, hexagonal screwdrivers, activated alumina trap and tweezers.
2. Some controls on control panel LI have been changed as follows:
Ll- C) : ROOM LIGHT:
Used for turning on/off the room light.
Ll- C) : BRIGHT ZOOM: For the zoom circuit (see Subsect. 5.2.11q).
Ll- C) : BRIGHT 16X:
When this button is switched on, the button lamp lights up and the 2nd con-
denser lens current range, variable by the BRIGHTNESS knob (control panel
L1), enlarges 16 times.
3.
To set the magnification when the MAG2 button (control panel R1) is depressed (this magnification is called
"basic magnification") at 5,000 times, refer to Subsect. 5.2.11r.
4.
The name of the knobs, IW ADJ, on control panel R2 has been changed to "IMAGE WOBBLER ADJ".
5. The names of the keys, C/R,
1 and 
on the keyboard have been changed to "RETURN", "<—" and "—>"
respectively.
6.
Change Steps 8 and 9 in Subsect. 6.1.2 as follows:
Step 8: Depress the GUN AIR button (L2-4). Air is admitted into the anode chamber.
Step 9: Make sure that the PI2 value (indicated on PAGE-1) has increased to 250, then turn the LIFT switch
(L2-1) to ON.
7.
Change Steps 2 and 3 in Subsect. 6.7.7b as follows:
Step 2: Make sure the electron gun has not been lifted and camera chamber door is closed.
Step 3: Switch off the COL AIR button (L2-5).
8.
In Subsect. 6.8, add another step, Step 19, after Step 18.
Step 19: Make the objective lens pole piece name displayed on PAGE-1 coincide with the name of the pole
piece being installed in the objective lens (see Subsect. 5.2.11e).
9.
The aperture disk and aperture holder of the Wehnelt assembly have been removed.
10.
Two types of objective lens aperture, 20-50-80 bunO aperture for the SHP pole piece and 50-100-150 linicb
aperture for the SAP pole piece, have been provided.
8309081

11. Correct the related items as follows:
Page
Line
Before amendment
Amended to
3-7
Fig. 3.3-2
Image wobbler coil
Spot alignment coil
3-9
Fig. 3.4-2
V22
V18
3-10 Fig. 3.4-3
Turbomolecular pump
Turbomolecular pump or oil diffusion pump
4-8
22 — 23 ... image wobbler coil ... beam
deflector coil
... the 1st and 2nd beam deflector coils
4-9
30
.. . a magnification of 5,000X is
obtained.
. . . the basic magnification (generally 5,000X) is ob-
tained.
4-9
32 from 5,000X with ... from the basic magnification with .. .
5-1 18 — 19
vacuum system . .. restored. instrument is not restored to its original state.
5-17
17 Depress the SP PO key (KB-1)
and ...
Obtain PAGE-2 with the PAGE key (see Subsect.
5.2.11a) and ..-.
5-21 14 — 15 . .. , repeatedly depress the MAG
. . . , display the same pole piece name, referring to
... displayed.
Subsect. 5.2.11e.
5-24
8 Depress ... (L1-10).
Set to the OUF mode (Subsect. 5.2.110).
5-24
9 By using this switch . .. By using this mode .. .
5-63
16 . .. the large condenser .. . . .. the smallest condenser . ..
6-12 1 ... pump oil replacement .. . pump (when the EM-TMP is used)
6-12 2 The pump oil .. . 5,000 hours.
-
When pump operation has exceeded 5,000 hours the
pump oil, and when it has exceeded 20,000 hours the
bearings must be replaced.
6-24
8 5.2.6), and . . .
5.2.6).
6-25 Step 7 .. . one hour more. . . . three hours more.
F-14 Condenser aperture .. . largest
Condenser aperture . . . smallest
F-17 Leave for 1 hour Leave for 3 hours
2
CI1EM1200EX-2

CONTENTS
1. GENERAL

1.1  Introduction 
Fig. 1.1 
Signals generated by interactions between electron beam and
specimen 
Table 1.1 
Main attachments 
Table 1.2 
Electron microscope system


1.2 
Principle of electron microscope

1-  1
1-  1
1- 2
1- 3
1- 4
1.2.1 
General principles 
1- 4
1.2.1a 
Comparison between electron microscope and optical microscope

1- 4
Table 1.3

EM and OM comparison chart
 1- 4
Fig. 1.2

Comparison of image formation

1- 5
1.2.1b 
Resolving power and resolution

1- 6
Fig. 1.3

Limit of resolving power

1- 6
1.2.1c 
Principle of the electron lens

1- 8
Fig. 1.4 
Electron trajectories 
1- 8
Fig. 1.5 
Trajectories of electrons emitted obliquely in a uniform
magnetic field 
1- 9
Fig. 1.6 
Electrons passing through a uniform magnetic field
 1-10
Fig. 1.7 
Types of magnetic electron lenses

1-11
Fig. 1.8 
Electrons passing through magnetic lens

1-11
Fig. 1.9

Magnetic field distribution and image formation graphs
 1-12
1.2.1d 
Interaction between electron beam and substances

1-13
Fig. 1.10 
Interaction between electrons and substances

1-13
1.2.1e 
Image formation and contrast

1-14
Fig. 1.11

Scattering absorption (mass thickness) contrast

1-15
Fig. 1.12 
Contrast in crystalline specimens

1-16
Fig. 1.13 
Formation of equal inclination fringes

1-16
Fig. 1.14 
Dynamical effect of electron waves

1-17
Fig. 1.15 
Image of specimen having periodic structure

1-19
Fig. 1.16

Formation of Moire patterns by double diffraction
 1-20
1.2.1f 
Electron diffraction

1-21
Fig. 1.17 
Electron diffraction

1-22
Fig. 1.18 
Selected area electron diffraction

1-23
1.2.2
Outline of structure

1 24
1.2.2a 
Electron gun 
1 24
Fig. 1.19

Generation of electron beam

1 24
1.2.2b 
Condenser lens

1-25
Fig. 1.20 
Electron beam illumination

1 25
1.2.2c 
Specimen chamber 
1-26
0-1
1200EX-1

0-2
1-27

Fig. 1.21 
Use of lenses and ray diagrams

1-28
1.2.2e Viewing chamber and camera chamber

1-27
1.2.2f Vacuum system

1-29

Fig. 1.22 
Structure of a Gaede oil rotary pump

1-29

Fig. 1.23  Sputter-ion pump

1-30

Fig. 1.24 
Turbomolecular pump

1-31

Fig. 1.25

Schematic diagram of vacuum system

1-31
1.2.2g Electrical system

1-32

Fig. 1.26 
Schematic diagram of high voltage circuit

1-32

Fig. 1.27 
Schematic diagram of lens circuit

1-33

Fig. 1.28 
Schematic diagram of beam deflector circuit

1-33

Fig. 1.29

Schematic diagram of exposure circuit

1-34
2. SPECIFICATIONS

2.1 Performance 
2- 1
2.2 
Electron optical system 
2- 1
2.2.1 Illuminating system 
2- 1
2.2.2 Image forming system

2- 1
2.3  Specimen stage 
2- 2
2.4

High resolution diffraction chamber

2- 2
2.5 
Viewing chamber 
2- 2
2.6 Camera chamber 
2- 2
2.7 Vacuum system 
2 2
2.8 
Installation requirements 
2 3
2.8.1 Power supply and cooling water

2- 3
2.8.2 Installation room 
2- 3
2.8.3 Dimensions and weight 
2- 3
2.9 Warranty  2- 3
1.2.2d Image forming lens system
3. COMPOSITION AND CONSTRUCTION

3.1 Composition 
Fig. 3.1-1
3.2 Accessories

Fig. 3.2-1 
Accessories (1)

Fig. 3.2-2 
Accessories (2)

Fig. 3.2-3

Accessories (3)
3- 1
3- 1
3- 2
3- 2
3- 3
3- 5
3- 6
3- 6
Cross section of microscope column

3- 7
3- 8
3- 8
Composition and layout diagram
3.3 
Construction of column
Fig. 3.3-1
Fig. 3.3-2
External view of column
3.4 System diagrams
Fig. 3.4-1 
Vacuum system
1200EX-1

Fig. 3.4-2  Compressed air system
 3- 9
Fig. 3.4-3 
Cooling water system 
3-10
Fig. 3.4-4  Electrical system

3-11
3.5 
Location of control panels 
3-12
Fig. 3.5-1
 Control panels

3-12
4.
DESCRIPTION OF COLUMN AND PANEL CONTROLS
4.1 Column

4- 1
Fig. 4.1-1  Aperture assembly

4- 1
Fig. 4.1-2  Specimen selecting device

4- 2
Fig. 4.1-3
 Goniometer

4- 2
Fig. 4.1-4  Pedal switches

4- 4
4.2  Control panels

4- 5
4.2.1 Control panel Ll

4- 5
Fig. 4.2-1 
Control panel Ll

4- 5
4.2.2 Control panel R1

4- 8
Fig. 4.2-2 
Control panel RI

4- 8
4.2.3 Control panel L2

4-11
Fig. 4.2-3
 Control panel L2

4-11
4.2.4 Control panel R2

4-12
Fig. 4.2-4 
Control panel R2

4-12
4.2.5 Keyboard (KB)

4-14
Fig. 4.2-5 
Keyboard

4 14
4.2.6 CRT display

4-16
5. OPERATION
5.1 Emergencies 5- 1
5 1
5- 1
5 1
5- 2
5-
2
5-
3
5-
3

5 3
5- 4
5. 4
5-
4
5 
5
5- 6
5 
6
5.1.1 Power suspension
5.1.2 Cooling water suspension
5.1.3 Faulty operation
5.2 Method A 
5.2.1 Startup procedure 
5.2.2 Film loading 
5.2.2a Loading films into the dispensing magazine 
Fig. 5.2-1  Loading films into the dispensing magazine
5.2.2b Inserting (or removing) the magazines into (or from) the camera chamber
Fig. 5.2-2 
PAGE-1 
Fig. 5.2-3  Camera chamber 
Fig. 5.24
Magazine stand
Fig. 5.2-5  Magazines 
Fig. 5.2-6 Writing the UNUSED number
0-3
1200EX-2

5- 7
Fig. 5.2-7 EM-SQH specimen holder box and stand

5- 7
Fig. 5.2-8 
Installing the specimen exchange mount

5- 8
Fig. 5.2-9  Specimen exchange

5- 8
5- 9
Table 5.1 
Accelerating voltage and related detecting current values

5- 9
Fig. 5.2-10 Accelerating voltage and spot size

5- 9
Fig. 5.2-11 Aperture assembly

5-10
Fig. 5.2-12 Specimen holder installed on the column

5-10
Fig. 5.2-13 PAGE-3

5-11
Fig. 5.2-14 Condenser lens alignment

5-13
5.2.5 Inserting the condenser lens aperture into the beam path

5-14
Fig. 5.2-15 Condenser lens aperture assembly

5-14
Fig. 5.2-16 Condenser lens aperture alignment

5-15
5.2.6 Specimen holder insertion

5-16
Fig. 5.2-17 X-tilt scale

5-16
Fig. 5.2-18 Goniometer

5-16
Fig. 5.2-19 Specimen selecting device

5-17
Fig. 5.2-20 Adjusting the field of view

5-18
5.2.7 Inserting the objective lens aperture into the beam path

5-19
Fig. 5.2-21 Caustic spot

5-19
Fig. 5.2-22 Objective lens aperture assembly

5-19
Fig. 5.2-23 Objective lens aperture alignment

5-20
5.2.8 Image observation

5-21
5-21
5.2.9 Image recording by automatic exposure

5-23
Fig. 5.2-25 Photographing area

5-23
Fig. 5.2-26 Fields allowing information to be written

5-23
Fig. 5.2-27 Binoculars

5-24
Fig. 5.2-28 Focusing with the image wobbler

5-25
Fig. 5.2-29 Optimum underfocus

5-26
Fig. 5.2-30 Exposure time

5-27
5.2.10 Film processing

5-28
Fig. 5.2-31 Removing the film from the cassette

5-28
Fig. 5.2.32 Film processing

5-29
Table 5.2  Consequence of faulty film processing

5-30
5.2.11 Keyboard operation

5-31
5-31
5.31
5-31
5-31
5-31
5.2.3 Specimen preparation
5.2.4 Electron beam generation
Fig. 5.2-24 PAGE-1
5.2.11a PAGE change 
5.2.11b ALIGN display 
5.2.11c Recording by printer 
5.2.11d PC board check 
5.2.11e Changing the name of pole piece
1200EX-2
0-4

0-5
Fig. 5.2-33 PAGE-1

5-32
5.2.11f Character writing  5-32
5.2.11g Writing the specimen name
 5-33
Fig. 5.2-34 TEXT writing 
5-33
5.2.11h Setting the minimum increment of accelerating voltage  5-33
5.2.11i Storing the position of the field of view in the memory
 5-33
Fig. 5.2-35 PAGE-2 
5-34
5.2.11j Setting the film number and number of unused films

5-34
5.2.11k Selecting the camera

5-34
5.2.11/ Setting the exposure index (bentus
i.4-.Wif-3. ) 
5-34
5.2.11m Storing the lens system condition and setting the lens system
at the stored condition  5-35a
5.2.11n Setting the through-focus series conditions

5-35a
5.2.110 Setting the amount of OUF (optimum underfocus) 
5-35a
5.2.11p Setting the mode of minimum exposure operation

5-35b
5.2.11q Using the BRIGHT ZOOM system

5-35b
5.2.11r Setting the basic magnification

5-35b
5.2.11s Writing USER'S COMMENTS

5-35c
5.2.12 Shutdown procedure
 5-36
5.2.13 Data printout on micrograph  5-36
Fig. 5.2-36 Data printout on micrograph  5-36
5.3 Method B 
5-37
5.3.1 CRT display  5-37
5.3.2 Column alignment  5-38
Fig. 5.3-1 
Beam displacement compensating screws 
5-40
5.4 Method C
 5-43
5.4.1 Column alignment

5-43
Fig. 5.4-1 
Filament image  5-46
5.4.2 Objective lens astigmatism correction 
5-46
Fig. 5.4-2 
Test hole for astigmatism correction

5-47
Fig. 5.4-3  Objective lens astigmatism  5-47
5.4.3 Focusing 
5.48
Fig. 5.4-4 
Focusing with the aid of the Fresnel fringe

5.49
Fig. 5.4.5 
Schematic diagram showing various focus conditions
 5-49
Fig. 5.4-6 
Practical example of focusing  5-50
5.4.4 Image recording
 5-51
5.4.4a Manual exposure

5-51
5.4.4b Continuous photography  5-51
5.4.4c Multiple exposure

5-51
5.5 
Conditions for high magnification/high resolution microscopy

5-53
Fig. 5.5-1 
Effect of voltage center alignment

5-53
Fig. 5.5-2 
Effect of objective lens aperture insertion

5-54
Fig. 5.5-3 
Effect of objective lens astigmatism

5-54
1200EX-2

Fig. 5.5-4 
Effect of image drift

5 55
Fig. 5.5-5

Fresnel fringe and background structure variation

5 56
5.6  Special observations 
5-57
5.6.1 Low magnification images

5-57
Fig. 5.6-1
 Field limiting aperture assembly 
5-58
Fig. 5.6-2

Low magnification image 
5-58
5.6.2 Dark field images

5-59
Fig. 5.6-3
 Comparison of bright and dark field images 
5-59
5.6.3 Through-focus method 
5-60
5.6.4 Minimum exposure operation (MDS) 
5-61
5.7  Electron diffraction 
5-62
5.7.1 Selected area electron diffraction 
5-62
Fig. 5.7-1 
Selected area electron diffraction 
5-63
5.7.2 Microbeam electron diffraction 
5-63
Fig. 5.7-2 
Microbeam electron diffraction 
5-64
5.7.3 High dispersion electron diffraction

5-64
Fig. 5.7-3 
High dispersion electron diffraction 
5-65
5.8  How to use the anticontamination device 
5-66
5.8.1 Filling the refrigerant tank 
5-66
Fig. 5.8-1  Pouring in liquid nitrogen refrigerant 
5-66
5.8.2 Raising the refrigerant tank temperature to room temperature

5-67
Fig. 5.8-2 
Draining off the refrigerant 
5-67
5.9  How to use the gonicimeter 
5-68
5.9.1 Specimen tilting 
5-68
Fig. 5.9-1 
X-tilt knob  5-68
5.9.2 Tilt axis alignment
 5-69
Fig. 5.9-2 
Lamp, motor, and Z control knob

5-69
Fig. 5.9-3 
Axis alignment screws 
5-70
5.10 Use of the objective lens pole piece SAP

5-71
Fig. 5.10-1 Objective lens pole pieces

5 71
0-6
6- 1
6- 1
6- 1
6- 2
6- 2
6- 2
6- 3
6- 3
6 4
6 4
6. MAINTENANCE
6.1  Electron gun filament replacement
6.1.1 Ascertaining the electron gun filament burnout
Fig. 6.1-1  PAGE-3 
6.1.2 Admitting air into the anode chamber 
Fig. 6.1-2  Flat bars 
6.1.3 Filament replacement

Fig. 6.1-3 
Cylinder and Wehnelt assembly
Fig. 6.1-4 Exploded view of Wehnelt assembly
6.1.4 Adjusting the Wehnelt cap
Fig. 6.1-5 
Wehnelt cap adjustment
1200EX-1