Keithley 595 User manual

Model 595 Quasistatic CV Meter
Quick Reference Guide
A GREATER MEASURE OF CONFIDENCE
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of
Keithley Instruments, Inc. All other trademarks and trade names
are the property of their respective companies.
Keithley Instruments, Inc.
28775 Aurora Road • Cleveland, Ohio 44139
440-248-0400 • Fax: [phone]
1-888-KEITHLEY (534-8453) www.keithley.com
© Copyright 2000 Keithley Instruments, Inc.
Printed in the U.S.A. 04/2001
Model 595 Quasistatic CV Meter
Quick Reference Guide
A GREATER MEASURE OF CONFIDENCE
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of
Keithley Instruments, Inc. All other trademarks and trade names
are the property of their respective companies.
Keithley Instruments, Inc.
28775 Aurora Road • Cleveland, Ohio 44139
440-248-0400 • Fax: [phone]
1-888-KEITHLEY (534-8453) www.keithley.com
© Copyright 2000 Keithley Instruments, Inc.
Printed in the U.S.A. 04/2001
595-903-01A 2UP Covers 2/19/03 2:02 PM Page 1

INTRODUCTION
Thisreferenceand programmingguide containscondensed
specifications, descriptionsof the variousfeaturesandin-
formationfor usingthe Model 595. Also, IEEE-488program-
minginformationandseveralexampleprogramswritten for
commonly used controllers are also included to get the
Model 595 "up and running" on the bus.
The Model 595Quasistatic CV Metermeasurescapacitance
usingauniquefeedbackchargemethod.This methodcor-
rectscapacitancereadings for backgroundleakagecurrent.
A built-inIEEE-488interface, plotterdriver andlabeledgrid
programenablethe Model 595to plot IV or quasistatic CV
curves for a variety of semiconductor materials and
components.
01986, Keithley Instruments, Inc.
Instrument Division
Cleveland, Ohio, U.S.A.
Document Number: 595-903-01 Rev. A
1

TABLE OF CONTENTS
CONDENSED SPECIFICATIONS .................. 3
MODEL 595 FEATURES ..................... 7-20
FRONT PANEL PROGRAMS ................. 21-26
MEASUREMENT CONNECTIONS ............. 29-34
IEEE PROGRAMMING ...................... 35-49
PROGRAMS ................................ 50
IBM
PC or XT .......................... 51
Applell
............................... 53
HP85 ................................ 55
HP9816
.............................. 57
HP9825A ............................. 59
DEC El 11 ............................ 61
PETICBM 2001 ......................... 63
2

CONDENSED SPECIFICATIONS
CAPACITANCE
Maximum Allowable
Wt at Half Range C
Reso- (1 bar) 18-28OC Delay Time=O.Oirsec
Accuracy'
Range lution +(%rdg+counts) Step
V=O.lV
200pF lOfF 1.0 + 10 9O.OOOpA
2nF lOOfF
0.8 + 2 0.900nA
20nF OF 0.6 + 2 9.000nA
*Exclusive of noise, for Step V 2 0.05V and
Delay Time 5 one second.
CURRENT
Temperature
Accuracy' Coefficient
Reso- (1 Bar) 18-28OC 0-18OC
& 28-4OoC
Range lution
? (%rdg+counts) f (%rdg + counts)l°C
20pA 1fA
200pA lOfA
2nA 1OOfA
20nA 1pA
200nA lOpA
2pA 100pA
20pA 1nA
200pA lOnA
1.5 + 14
1.5 + 2
0.25 + 6
0.25 + 1
0.1 + 4
0.1 + 1
0.1 + 4
0.1 + 1
0.15 + 3
0.15 + 0.3
0.015 + 3
0.015 + 0.3
0.01 + 3
0.01 + 0.3
0.01 + 3
0.01 + 0.3
*When properly zeroed.
3

VOLTAGE SOURCE
OUTPUT: -2O.OOV to 20.00V in 0.01V increments.
ACCURACY (1 YEAR, 18-28OC): 2(0.2% + 1OmV).
MAXIMUM OUTPUT CURRENT k2mA; active currentlimit
at <4mA.
ANALOG OUTPUTS
C,l OUTPUT LEVEL: 1V represents 10,000 display counts
VOLTAGEOUTPUT LEVEL 1V represents 1OV on voltage
MAXIMUM OUTPUT VOLTAGE: k2V.
on X1 gain; 1000 display counts on X10 gain.
source output.
GENERAL
MAXIMUM INPUT: 30V peak, DC to 60Hz sine wave.
MAXIMUM COMMON MODE VOLTAGE 30Vmaximum, DC
to 60Hz sine wave.
ENVIRONMENT: Operating: Oo to 4OoC, relative humidity
70% non-condensing up to 35OC. Storage: -25O to
65OC.
WARM UP 2 hours to rated accuracy except input bias
current ( < 10fA after 2 hours, < 5fA after 8 hours, at
23OC)
POWER 105-125V or 210-250V (internalswitchselected).
50Hz to 60Hz. 15VA max. 90-11OV and 180-220V ver-
sion available upon request.
4

Thefollowingsafetyprecautionsshould be observedbefore
using
this product and any associatedinstrumentation Al-
though some instruments and accessoria would normally
be used with non-hazardous voltages, there are situations
where hazardousconditionsmay he. present.
This productisintendedfor use by qualifiedpersonnelwho
recognize shock hazards and are familiar with the safety
precautions
required to avoidpossibleinjury.Readandfol-
low
all installation,operation,andmaintenance information
carefullybefore using the product.Refer to the mauualfor
completeproductspecificatiom.
If the product is used in a manner not specified,the protec-
tionprovidedby the productmay
be impaired.
The
types of productusen are:
Responsiblebody is the individual or group responsiblefor
the
use and maintenance of equipment, for ensuring that the
equipment is operated with its specifcations and operating
limits, andforensuring that operators are adeqatelytrained.
Operators use the product for its intended function. They
must
be trained in electricalsafety procedures andproper use
of the instrument. They must be protected from electric
shock and contact with hazardouslive Circuits.
Maintenance personnel performroutine procedures on the
productto
keep it operating properly,forexample, setting the
line voltage or replacing collsumable materials. Maintenance
procedms are described in the manual.Theproceduresex-
plicitly
state if the operatormay perform them. othenvise,
they shouldbe performed onlyby service personnel.
Service personnel are trained to work on livecircuits, and
perform safe installations and repairs of products. Only
properlytrainedservicepersonnelmay performinstallation
and serviceprocedws.
Keithleyproducts
are designed for use with electrical sig-
nals that are rated Installation Category I and Installation
5/02

Category II, as described in the International Electrotechni-
cal Commission (EC) Standard IEC 60664. Mostmeasure-
ment, control,and data
YO signals are InstallationCategory
I and must not be directly connected to mains voltage or to
voltage
sources with high transient over-voltages. Installa-
tion Category II connections qubt protection for high
transientover-voltagesoften associated withlocal AC mains
connections.Assume all measuremenfcontrol,and data YO
COM~C~~OUS are for connection to Category I sources unless
otherwise marked or described inthe Manual.
Exercise extremecaution when a shock hazard is present.
Lethal voltage may be present on cable connectorjacks or
test fixtures. The American National Standards Institute
(ANSI) states that a shockhazard existswhen voltagelevels
greater than 30V RMS, 42.4V peak, or 6OVDC are present.
A good safety practice is to expect that hazardous voltage
is present in any unknown circuit before meamring.
Operators of this product must be protected from electric
shock a! all times. The responsible body must ensure that
operators are prevented access and/or insulated from every
connection point.
In some cases, connectionsmust be ex-
posed to potentialhuman contact.Product operators in these
circumstancesmust
be trained to protect themselves from
the
risk of electric shock. If the circuitis capable of operat-
ing at or above loo0 volts, no conductive part of the cir-
cuit maybe exposed.
Donot COMect switching cards directly to lmlialite4lpowercir-
cuits. They are intended to be used witb impedance limited
sources. NEVER connect switching cards directly to AC
mains. When connecting so- to switch cards, install
proteCrivedevices tolimitfaultCUlTent andvoltage to the card.
Before operating an instrument,make sure the linecord is
connected to a properlygroundedpowerreceptacle. Inspect
the connectingcables,test leads, and jumpers for possible
wear, cracks,
or breaks before each use.
When installing equipment where access to the main power
cord
is restricted, such as rack mounting,a separate main in-
put power disconnectdevicemust be provided,
in closeprox-
imity to the equipmentand within easyreachof the operator.

For maximum safety, donot touch the product, test cables,
or anyotherinstrumentswhilepower is appliedtothecircuit
under
test ALWAYS removepowerfromtheenfiretest sys-
tem and dischargeanycapacitorsbefore: connectingor dis-
connecting cables or jumpers, installing or removing
switching
cards, ormakinginternalchanges,such as install-
ing
or removing jumpers.
Do not touch any object that couldpruvideacurrent path to the
common side of the circuit under test or power line (earth)
ground. Always make measllrements with dry hands while
standing on a dry, insulated slnface capableof withstanding the
voltage bkng measured
Theinstrumentand accessoriesmust be usedin accordance
withits specificationsandoperatinginstructions
or the safe-
ty of the equipmentmay he impaired.
Do notexceedthe maximum signal levelsof theinstruments
and accessories, as definedin the specificationsand operat-
ing information, and as shown ontheinstrumentor test fix-
ture panels, or switchingcard.
When fuses
are used in a product, replace with same ty-pe
and rating for continuedprotectionagainst fire hazard.
Chassis connections must only be used as shield connec-
tions for measuring circuits, N(TT as safety earth ground
connections.
If you are using a test fixture, keepthelidclosedwhilepow-
er
is appliedtothedevice under test.Safeoperation requires
the use of a lidinterlock.
If @orb ispresent,connectittosafetyearthgromd
usingthe wire recommendedinthe user documentation.
The A symbolon an instrumentindicatesthat the user
shouldrefertotheoperatinginstructionslocatedin theman-
ual.
The A symhol on aninstrumentshows that it can source
or measure lo00 voltsormm,including the combinedeffect

of normal and common mode voltages. Use standad safety
pmtionstoavoid
personal contact with thesevoltages.
The
WARNING headingin a manual explains dangers that
mightresultin personalinjury
or death. Always read the as-
sociated information very carefullybefore performing the
indicatedprocedure.
The
CAUTION beadingin a manual explainshazardsthat
coulddamagethe instrument. Such damage may invalidate
the warranty.
Instrumentation and accessories shall not be connectedto
humans.
Before
performing any maintenance, disconnect the line
cord and all test cables.
To maintain protectionfromelectricshockand lire, replace-
ment components in mains circuits, including the power
transformer,
test leads, and input jacks, must be purchased
fromKeithleyInstruments.
Standard fuses, with applicable
nationalsafetyapprovals,may
be used if the rating and type
are the same. Other componentsthat are not safety related
may
be purchasedfrom other suppliers as long as they are
equivalent to the original component. (Note that selected
parts should
be purchased only through Keithley Instru-
ments to maintain accuracy and functionalityof the prod-
uct.) If you
are unsure about the applicability of a
replacementcomponent,call a Keithley Instrumentsoffice
for
information.
To clean an instnunent, use a dampcloth or mild, water based
cleaner. Clean theexteriorof the instrumentonly. Do not ap
ply cleanerdirectlytothe instrument
or allowliquidstoenter
or spill
on the instrument.products that consist of a circuit
board with no caseorchassis(e.g., data acquisition board for
installationintoa computer)shouldnever requhe cleaning if
handledaccording to instructions. If the board becomes con-
taminated and operation is affected,the board should be re-
turned tothe factoryforpropercleaning/servicing.

SAFETY PRECAUTIONS
1. Before operation, groundthe instrument through a prop-
erly earth-grounded power receptacle.
2. Before servicing, disconnect the instrument from the
power line and all other equipment. Consult the Model
595 Instruction Manual for service information.
3. Do nottouch anyterminals whilethe instrumentisturned
on or connected to any test equipment.
WARNING
The maximumcommonmode
input voltage(the
voltagebetweeninput
low andchassisground)
is
30V peak. Exceedingthis value may createa
shock hazard.
CAUTION
The maximumvoltage betweeninput highand
input lowis
30V peak. Exceedingthisvaluemay
causedamage
to the instrument. Current inputs
that exceed3mA maybeerroneouslydisplayed
as an on-scale reading.
5