Keithley 595 User manual

Model 595 Quasistatic CV Meter
Instruction Manual
A GREATER MEASURE OF CONFIDENCE

WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year
from date of shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable
batteries, diskettes, and documentation.
During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service
facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for
the balance of the original warranty period, or at least 90 days.
LIMITATION OF WARRANTY
This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or
misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from
battery leakage, or problems arising from normal wear or failure to follow instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PRO-
VIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS
INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIM-
ITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY
PERSON, OR DAMAGE TO PROPERTY.
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1-888-KEITHLEY (534-8453) • www.keithley.com
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2/03

Model 595 Quasistatic CV Meter
Instruction Manual
©1986, Keithley Instruments, Inc.
All rights reserved.
Cleveland, Ohio, U.S.A.
November 1986, Second Printing
Document Number: 595-901-01 Rev. B

Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some in-
struments and accessories would normally be used with non-haz-
ardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recog-
nize shock hazards and are familiar with the safety precautions re-
quired to avoid possible injury. Read and follow all installation,
operation, and maintenance information carefully before using the
product. Refer to the manual for complete product specifications.
If the product is used in a manner not specified, the protection pro-
vided by the product may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use
and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for en-
suring that operators are adequately trained.
Operators use the product for its intended function. They must be
trained in electrical safety procedures and proper use of the instru-
ment. They must be protected from electric shock and contact with
hazardous live circuits.
Maintenance personnel perform routine procedures on the product
to keep it operating properly, for example, setting the line voltage
or replacing consumable materials. Maintenance procedures are de-
scribed in the manual. The procedures explicitly state if the operator
may perform them. Otherwise, they should be performed only by
service personnel.
Service personnel are trained to work on live circuits, and perform
safe installations and repairs of products. Only properly trained ser-
vice personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as de-
scribed in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O sig-
nals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient over-volt-
ages. Installation Category II connections require protection for
high transient over-voltages often associated with local AC mains
connections. Assume all measurement, control, and data I/O con-
nections are for connection to Category I sources unless otherwise
marked or described in the Manual.
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock
hazard exists when voltage levels greater than 30V RMS, 42.4V
peak, or 60VDC are present. A good safety practice is to expect
that hazardous voltage is present in any unknown circuit before
measuring.
Operators of this product must be protected from electric shock at
all times. The responsible body must ensure that operators are pre-
vented access and/or insulated from every connection point. In
some cases, connections must be exposed to potential human con-
tact. Product operators in these circumstances must be trained to
protect themselves from the risk of electric shock. If the circuit is
capable of operating at or above 1000 volts, no conductive part of
the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When con-
necting sources to switching cards, install protective devices to lim-
it fault current and voltage to the card.
Before operating an instrument, make sure the line cord is connect-
ed to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.
When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power dis-
connect device must be provided, in close proximity to the equip-
ment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jump-
ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the com-
mon side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated
surface capable of withstanding the voltage being measured.
The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equip-
ment may be impaired.
Do not exceed the maximum signal levels of the instruments and ac-
cessories, as defined in the specifications and operating informa-
tion, and as shown on the instrument or test fixture panels, or
switching card.
When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.
Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is ap-
plied to the device under test. Safe operation requires the use of a
lid interlock.
5/02

If or is present, connect it to safety earth ground using the
wire recommended in the user documentation.
The symbol on an instrument indicates that the user should re-
fer to the operating instructions located in the manual.
The symbol on an instrument shows that it can source or mea-
sure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.
The WARNING heading in a manual explains dangers that might
result in personal injury or death. Always read the associated infor-
mation very carefully before performing the indicated procedure.
The CAUTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and
all test cables.
To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instru-
ments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that se-
lected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.
To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to in-
structions. If the board becomes contaminated and operation is af-
fected, the board should be returned to the factory for proper
cleaning/servicing.
!

SPECIFICATIONS
CAPACITANCE (C) ACCURACY* MAylMuMALI.cwABLE
0 Yen, Q/tATHALFRANGEc
IBws’c DEf.m!TIME=o.m
RANGEREScmmON +t?ag+munrr) STEP” 5 0.10”
mPF 10 fF 1.0 + 10 5lxQpA
2°F 1w fF 0.8 + 2 0.900 “A
20°F 1 PF 0.6 + 2 9~..wo“A
+Exdusiveof noise, for STEPv am5v and DELAYTIME 51 remnd. Forother
parm~w, derateby(~m”,-V)x(DELAY1IMUlrecand) inpFat7.K. Double
the deratingfor every 10°C rise in ambienttemperatureabove 23’C.
MkylMuM P-P NOISE (with supplied cable):
k(O.O25% rdg + 0.075pF) x (ltiV/STEP V) +2 counts With filter off,
o.lHz to 1oHz.
Q,t: Measures non-equilibrium current and leakage current in the device
under test during a capacitance measurement.
Display: 3 digits typical; resolution from O.MfA to O.OlnA per count
depending on range, STEP V, and DELAY TIME
Measurement Time: DELAY TIME/S or 0.044s, whichever is greater.
Sampled at the end of each capacitance measurement.
Accuracy E1Year, W-WC% * (1.0% rdg + 2 counts) exclusive of input
bias current and noise.
TEMPERATURE COEFPICIBNT lO”lB”C & 2S”-400Ch
+(O.OZ% rdg + 0.1 count)l°C.
CURRENT Q ACcuRAcK* TEMPERATURE
” Year) COEFFICIENT
W-WC o=wc k 28’MV
RANGE IlESOLuTfON *wdg+cou*) *mdg+m”“ts)PC
20 PA 1 fA 1.5 + 14 0.15 + 3
ZWPA 10 fA 1.5 + 2 0.15 + 0.3
2”A ml fA 0.25 + 6 0.015 + 3
20 Il.4 IPA 0.25 + 1 0.015 + 03
ml”* 10oQ 0.1 + 4 0.01 + 3
2PA *w PA 0.1 + 1 0.01 + 0.3
20 PA 1 “A 0.1 + 4 0.01 + 3
*wja 10“A 0.1 + I 0.01 + 0.3
NMRR: 70dB on pA ranges, 6OdB on nA and pA ranges,
at 50 or 6OHz +O.l%.
VOLTAGE SOURCE 0
OUTPET: -2O.OOV to ZO.OOVin O.OlV increments.
ACCURACY (1 Year, lB%WO: i(O.296 + 1OmV.
TEMPERATURE COEPFICIENT to=--WC & 28~4oTb
*(O.COj% + ZOOpVVT.
MAXIMUM OITI-IWT CURRENI: &ZmA; active current Iiit at <4mA
with annunciation.
SE’ITLING TIME: c3ms to rated accuracy.
NOISE: <(lppm of output voltage + lO@V) p-p from 0.1 to 1OHz.
STEP Voltage: Selectable as O.OlV, O.OZV,O.O5V,or O.lOV (iZ%). Polarity
selectable + or -_
DELAY TIME: 0.07s to 199.59s in 0.01s increments (*O.ffi%).
SITP TIME: DELAY TIME plus 0.04s typical.
- WAVEFORM: OFF: Outputs O.OV kO.OlV.
DC: Outputs the programmed voltage.
- STER Outputs changes in inaements of STEP V from pr*
grammed voltage in either staircase or squarewave.
SQUAREWAVE: Repeatedly toggles between the programmed voltage
and the programmed voltage plus STEP V, dwelling at each level for
step Time.
STAIRCASE: Repeatedly inuements the output by SlEP V until the upper
or lower LIMIT ii reached, dwelling at each iwei for ‘Step Time.
ANALOG OUTPUTS
c, I OUTPUT LEVEL: 1v = 10,wo counts on x 1 gain; 1v = 1Ococounts
on x10 gain.
” OUTPUT LEVEL: 1V = 1OV on voltage sowce output.
MAXMUM OUTPUT VOLTAGE: f7.V.
OUTPUT RESISTANCE: lkn.
ACCURACI: r(O.25% of displayed reading + 2mV).
RESPONSE TIME: Follows display.
ISOLATION: 30V peak from chassfs cmGUARD to ANALOG OurpuT
LO, which is connected to IEEE COMMON.
IEEE-488 BUS IMPLEMENTATION
MULTILINE COMMANDS: DCL, LLO, SDC, GFI; GTL, UNT, UNL,
SPE, sm.
UNILINE COMMANDS: IFC, REN, EOI, SRQ, ATN.
INTERFACE FUNCTIONS: SHI, AHl, T5, ‘CEO,I.4, LEO, SRl, RJR, PPU,
Xi, ‘ml,c28,El.
PROGRAMMABLE PARAMETERS: Function, RANGE, ZERO CHECK,
CORRect, SLi’PPRESS, C/Co, STORE Co, Voltage Source Parameters,
WAVEFORM, Display Parameter, Filter, Trigger, Analog Output x 10,
PEN LIFT, Capacitance Correction, Calibration, Self Test, Output For-
mat, SRQ. Status, ASCII Terminator, EOI.
PLOTTER: Controls HF747OA plotter or equivalent using HPGL via IEEE-
488 for real time plotting of C, Q/t, OTI vs. V curves. Accessed by select-
ing Mode, 595 address 42 or 43. Talks to plotter on address 05. HPGL
commands used are IN, Ip, IW, PA, PD. PU, SC, SI, SP.
GENERAL
DISPLAY: 4%-d@ numeric LEDs with appropriate decimal point and
aolaritv indication. Sikned Zdkit al~hanuneric exponent.
- -.
IJiD‘iTp RATE: In I, one reading wh step Tiie.
In c, one reading each 2x step Time.
OVERRANGE INDICATION: Display reads OL.
INPUT BIAS CURRENT @I functions): c5fA (5 x 10.‘IA) at 23°C.
/,~pmi$~Iy doubles for every 1O’C increase in ambient temperahue
0
1NP”T VOLTAGE BURDEN: <lmV.
MEASUREMENT SETiUN G TIMEz Within one reading except 2.5s
(to 1% of step change) on pA ranges.
PROGRAMS: Rovide front panel access to mter; Trim+; tiog Output
x10, Corrected Capacitance, BXEa88 address, Alpha or Numeric Ex-
ponent, plotter Y Hi Li+t, Y Lo Limit, Grid, 50/6OHz selection, and
Digital Calibration.
FILTER: ReAngP Typid White
Code we&ted Noise Rechei.m Typid “se
0 1 NO”e OFF
1 3 1.7 c or I YS.” meas-ents
2 9 2.5 c or I YS.” meanueme”ts
3 24 5 Steady c, I measluemenh

MAXIMUM INPUTz 3oV peak, dc to @IF& sine wave.
nl- COMMON MODE VOLTAGE: 3OV nwimum, dc to 6OHz
sine wave.
NPLT CONNECTOR Isolated BNC on rear panel.
3UTFWT CONNECTORS: Mated BNCs on rear panel for VOLTAGE
SOURCE OUTPUT, EXTERNAL TRIGGER, and METER COMPLETE.
5way binding posts on rear panel for ANALOG OUTPUTs, PEN LIFT,
GUARD, and Chassis.
~rmRHAL TRIGGER: 777, comptiile EXTERNAL TRIGGER and
METER COMPLETE.
-nNIRONMENTz Operating: 0’ to 40°C, relative humidity 70% non-
condensing up to 35OC. Storage: -25O to +WC ;~~
XRMUP: 2 hours to rated accuracy (see manual for recommended
pmcedure).
POWER: 105125V or 21~25OV (internal switch selected), 5OI-k to M)&,
15VA max. 9&llOV and 18X22OV version available upon request.
DIMENSIONS, WEIGHT: l27mm high x 216mm wide x 359mm deep
(5 in. x 8% in. x 14% in.). Net weight 3.2kg (6 Ibs., 14 oz.).
ACCESSORY SUPPLIED: Two Model 4801 Low Noise BNC Input Cables.
ACCESSORIES AVAILABLE:
Model iO19A: Universal Fixed Rack Mounting Kit
Model 10195: Univenal Slide Rack Mounting Kit
Model 4801: Low Noise Input Cable, 1.2m (4 ft.), BNC to BNC
Model 4803: Low Noise Cable Kit
Model 5955: Calibration Standards
Mcdel61134: Test Shield
Model 7007-k Shielded IEEE-488 Digital Cable, lm (3.3 ft.)
Model 7037-Z Shielded IEEE-488 Diittal Cable, 2m (6.6 ft.)

595 SPECIFICATION CLARIFICATIONS
U VOLTAGE SOURCE WAVEFORM: (Tiies shown are for 6OHz)
< c 9.38 I j---s~p------
2) MAXIMUM ALLOWABLE Q/t ATHALFRANGEC: The~input dynamic
range available for the Q/t measurement is reduced by the amount re-
quired to make the capacitance measurement (see chart below).
3) WHEN PROPERLY ZEROED: The instrument is zero CORRected on
the 2OpA range under the following conditions:
a. The instrument has warmed up for at least two hours.
b. Repeat as needed every 24 hours or if the ambient temperature
changes by more than 1°C.
41 NMRR: For on-range normal mode sine wave inputs only.
NMRR = 20 log [(peak-to-peak current input)@?&-to-peak current
display)] at 50 or 6OH.z +O.l%.
*Use STEP TIME 1 for each step while measuring current.
t,, = DELAY TIME, .05% stability
b, = t,, + 3ms ; -0, +ZOms
STEP TIME 1 = bx + 31ms (6OHz). ton.+ 331x (5OHz)
Q/t Measurement Time (to.,) = torr + 8; 44ms minimum
STEP TIME 2 = t,, + 34nxs; -0, +ZOms @Hz), t,, + 36ms; -0, +20ms
(5OHz)
t, = 16.67ms (6OIiz). ZO.Wms (5OHz)
ALLOWABLE Q/t IN % OF Q/t (maw)vs. DELAY TIME
0.0, 0.1
--- Indicates change of Q/t display resolution.
1 10 100 200
DELAY TIME (seconds)

-
- TABLE OF CONTENTS
SECTION l-GENERAL INFORMATION
1.1 J.N”IRODUCTION ................................................. ._____ ................ _._ ....... l-l
1.2 FEATURES ....................................................................... .._ .............. l-l
1.3 MANUAL ADDENDA ..................... _.____
.. _.......................................... ___ ... l-l
1.4 SAFETYTERMS ........................................................ ..,__ ...................... l-1
E UNPACKING AND INSPECTION ............................................................... l-l
REPACKING FOR SHPMENT l-2 .. .... ______
.......... .._ ...............................................
1.7 WARRANlY INFORMATION ..................................................... ____..... _. ... l-2
1.8 ACCESSORIES ................................................................. ._ ............. l-2
SECTION 2-GETTING STARTED
2.1
2.2
2.2.1
2.2.2~~
2.2.3
2.3
23.1
2.3.2
a 2.3.3
2.4
- 2.5
2.51
2.5.2
2.5.3
2.5.4
2.55
2.56
2.5.7
INTRODUCTION.. ................... _............................................. .._ ........... 2-l
PREPARHION FOR USE ....................................................................... 2-l
LinePower.. .................................. _
............................... _._l .,_.____. ., .. ~2-1~
LineVoltage Selection ........................................................................ 2-l
LieFrequency ................................. . ..... . .................................... ..~2- 1
POWERUPPROCEDURE .............. ..~.__r______ ............................ _._~_.______._. ... 2-l
PowerCord.........................~....................~....--.........................~ .... 2-l
Defaults.. ............. _______................. ..__ ....... _._~_
................................. 2-2
RAM and ROM Test Messages ......................................... _,
........ __.............. 2-2
GENERAL DISPLAY MESSAGES ................................ ~:
............................. ;...~2- 2
INSTRUMENT FAMILIARIZATION. ........ _. ................................................ _~__. 2-2
Model595FrontPanel...............................---......-......-..-..........-....~~~~ .. 2-4
Model595RearPanel.. .............. . . ______..._....._........_~ ............................. 2-6
Test Cormxtions for Capacitance and Ctient Measurements .................................... 2-7
Capacitance Example .......................................................................... 2-8
CVExample.. .................................. ___._ . .,._ ...... .._ .............................. 2-9
Measurin‘g Current: AnExample .............................................
IV Example ............... ._. ._..__ ._
................................ . . . .
. .
................. 2-n
................ 2-12 . . .
.
. .
. .
SECTION 3-OPERATION
3.1 ;i INTRODUCTION ___._......~..___._........................... ___. . . .
PART i-Front and Rear Panel Description
. .
. .
. .
.
. .
_.-
3.2 TEST CONNECI-IONS ..... _,___._.I_____~~.. _. ....... _
............... __.,___.. . . . .._-... 3-l
3.2.1 Cap&zitance C$yeclions ................................ ; ; ............... ~.. . . . . 3-l
3.2.2 Connections for Cment Measurements ......................................... ___
............. 3-2
3.3 DETAILED FRONT PANEL CONTROL DESCRlPnONS ........................................... 3-2
3.3.1 .. CURRENT .................................................... ..~ ... ~;.;. ...................... 3-2
3.3.2 CAPACITANCE.. ..................... _______.__. ............................................. 3-2~
33.3 ~cl~-mREc,. ............................................................ ..- ...... _._ ...... 3-3
y. : SUPPRESS ........................................................................ .__. ....... 3-3
ZERO CHECKand CORRect.......~..........~.........................I ....................... 3-3
- z; RANGE A, v.. ......................................... _..__ ................ .._............. 3-4
A LIM.IT, v LIMIT and PRESET .................................................... __. _
....... 3-5
- 3:3.8 STEPV ..................................................................................... 3-5
3.3.9 DELAY TIME ....................... ___. ...................................................... 3-5
. . . . . . . . . 3-l

3.3.10
3.3.3.11
3.3.12,
3.4
3.4.1
3.4.2
3.4.3
3.4.4
3.4.5
3.4.6
3.4.7
3.4.8
3.4.9
3.4.4.10
3.5
3.5.1
35.2
3.5.3
DISPLAY SOURCE .......................................................... .:~.~..;..I~; ....... 3-6
ADJUST A , V ................................................................................. 3-6
+I-, Front Panel Trigger .......................... ._ ........................................... 3-6
FRONT PANEL PROGRAMS ................... :_ ..__._........................................... 3-6
Power LimeFrequency.. ............... ..___ ... .._.._._ ................... .._. ................... 3-8
Calibration .......................... ..~.~---------................~.~............~~~ ........ 3-8
Filter. ................................. ..~~-.........................~ ........................ 3-8
Trigger .............................. ~...;.~..;.;~. ....................... . ............. :.~..:.~ .. 3-10
Andog output xlmo ........................................................................ 3-71
C~irectedCapacitance ........................................................................ %J.I
IEEE-488Address..~..................................................................~..~ .... 3-11
Display (Alpha or Numeric) .................................................................. 3-11
Grid ....................................................................................... 3-13
Y HI-YLO ................................................................................ 3-13
REAR PANELS
FEATURES.. ......................................................................... 3-13
ExternalTrigger.. ........................................................................... 3-13
MeterComplete....................................................................~--.- .... 3-14
Analog Output .............................................................................. 3-M
PART 2-MAKING CV, IV or Q/t-V Plots
3.6 SETTE’JG UP THE TEST FIXTURE .............................................................
3.7 SETTING UP MEASUREMENT PARAMETERS .................................................. ::
3.8 BEGINNINGTHEMEASUREMENT..
D.&TALPLOTTING ...................... . ....................................
3.9 ................................................................... 3%
~;
....... 3%
3.10 ANALOG PLOTTING .......................................................................... 3-19
3.11 PRINTING RESULTS .......................................................................... 3-19
3.12 USE OF JXI’ER ON CURVES ........................................... : ...................... 3-20
3.13 MEASUREMENTCONSID~ONS..;..~ ... .._. .......... .._._ ...................... . ......... 3-22
3.X3.1 Ground Loops .............................................................................. 3-22
3.X3.2 Electrostatic Interferences ....................................................................... 3-22
3.13.3 The~~EMFs.............................~...;...........~ .................................. 3-23
3.X3.4 RFI ........................................................................................ 3-23
3.13.5 Source Capacitance ......................................................................... 3-23
3.X3.6 Engineering Units Conversion .................. 1.. ....................... ;. ..... ;~.;. ............. 3-24
SECTION 4-IEEE-488 PROGRAMMING
4.1
4.2
4.3
4.3.1
4.3.2
4.4
4.5
4.6
4.6.1
4.6.2
4.7
4.7.1
4.7.2
4.7.3
4.7.4
4.8
4.8.1
4.8.2
ii
INTRODUCTION .............................................................................. &l
SHORTCUT TO IEEE-488 OPERATION .......................................................... 41
BUS CONNECTIONS ....................... _.,_-,_...................................... .~_........ 41
Typical Controlled Systems ................................... .; ................................ 41
Cable Connections .. .._ ...................................................................... 42
PRIMARY ADDRESS PROG RAMMING ......................................................... 4-4
INTERRACEFUNCTIONCODES..;.;..;;. ............. . ............................. ..;. ........ 4-4
CONI’ROLLER PROGRAMMIN G ................................................................. 45
Controller Handler Software ..................... :. ............................................ 45
Interface BASIC Programming Statements ........................................................ 4-6
FRONT PANEL ASPECTS OF IEEE-488 OPERATION ............................................. 4-6
BusError........................................................................~ ............ 46
TriggerOvemmE~or ........................................................................ 47
Number and Conflict Errors ................................................................... &7
WaitingforTriger ........................................................................... 47
GENERAL BUS COMMAND S ...................................................................... 48
REN (Remote Enable) ........................................................................ 48
IFC (Interface clear) .......................................................................... 48

- 4.83 LLO (Local Lockout) ......................................................................... 49
- 4.8.4 GTL (Go To Local) and Local .................................................................. 49
4.8.5 DCL(D&ce Clear) .......................................................................... 49
4.86 SDC(SelectiveDevice clear) ................................................................. 4-10
4.8.7 GET (Group Execute Trigger) ................................................................. 410
ES ~; SPE, SPD (Serial Polling). ..................................................................... 4-10 DEVICE-DEPENDENT COIvcGANDs :..: ......................................................... 4u
4.9.1
4.9.2
4.9.3
4.9.4
4.9.5
4.9.6
;:;; ~:
4.9.9
4.9.10
4.9.n
4.9.12
4.9.13
4.9.14
49.15
49.16
4.9.37
4.9.18
4.9.19
4.9.20
- 4.9.21
- 4.9.22
4.9.23
4.9.24
Programming Overviav........~ .............................................................. 4ll
Execute (X) ................................................................................. 4-16
Display (D) ................................................................................. 417
FundionO.................................; ............................................... 4-18
Ran@(R). .................................................................................... 419
ZeroCheck,ZeroCorrect(Z). ...... . ............ ;.~...... I..................... Y. ..i.. ....... 420
Suppress (N) ................................................................................ 421
F&r(r). ....................... ;..~.~.l~.~....~.:. .... . ................ . ......................... 422
Egh Limit (H) ............................................................................. 423
Low Limit (L). ................................................................................ 424
Voltage Source (V) ........................................................................... 425
Step Voltage (S) ............................................................................. 4-26
Delay Tie (I) .............................................................................. 427
wavefoml (W) .............................................................................. 428
c/c,J (C) ................................................................................... 429
CapacitanceModifiers ................................................ . ............... :1~.~~430
Pr&s (G) ........................ .~I~.
....................................... ; .............. ; 431
Analog output (0). ......................................................................... 433
TriggerModeo.............~.....~............................................; ............ 434
SRQ Mask (M) and Serial Poll Byte Format. .................................................... 435
EOI and Bus Hold-off Modes (K) ............................................................. 438
Terminator(y). ............................................................................. 4-40
status (u) .................................................................................. 44
Digital Calibration (A) ....................................................................... 446
4.9.25 Self-Test and Permanent Memory Storage u) .................................................... 4-47
4.10 PROGRAMMIN GEXAMYLES .................................................... :.~:. ........... ~4-48
4.10.1 Square Wave Capacitance Measurements ....................................................... 4-48
4.10.2 StaircaseMeasurements ...................................................................... 4-48
4.10.3 Cti@ntMeasurements ........................... . ........................................... 4-49
4.11 TALK ONLY.................................................................................. 4-49
4.12 IEEE-PLOT.. .................................................................................... 4-49
4.13 BUS DP;TZ1TRANSMISSIONTIMES ............................................................ 450
SECTION 5-APPLICATIONS
5.1 INTRODUCTION .............................................................................. 5-l
5.2 APPLICATIONS OF THE CURRENTFUNCTION ...... __._._ ................ . .................... 5-l
5.2.1 HighResistanceMeasurements...................................~ ............................. 5-1
5.2.2 Voltage Coefficients of High Resistances .......................................................... 5-l
5.2.3 IVCharacteristicsofDiodes ................................................................... 5-2
5.2.4 IV Characteristics of Transistors ............................................................... 5-4
5.25 ~w LevelLeakageCurrentMeasurements ..................................................... 5-6
5.3 APPLICATIONS OF THE CAPACITANCE FUNCTION ............................................... 5-S
5.3.1 Ccmsiderationsfor CapadtanceMeasurem~nfS;.~.;;~.~;. ........... 1.~. ............ .:.............. 54
5.3.2 Characterizing the MOS Capacitor in Depletion and Accumulation ............................... 5-8
5.3.3 Characterizing the MOS Capacitor in Inversion .................................................. 5-9
5.3.4 Determining Delay Tiie for Equilibrium Measurement .......................................... 510
5.3.5 ~: MOS Non-equilibrium and Roper Use of the Corrected Capacitance Program .................... 5-13
5.3.6 Comparison of the Feedback Charge Method with the Traditional Ramp Method .................. 5-17
5.3.7 Comparison of the Feedback Charge Method with the Static or Q-V Method ...................... 5-19
5.4 BIBLIOGRAPHY OF QUASISTATIC CV MEASUREMENTS AND RELATED TOPICS ................ 5-21
iii

SECTION C-PERFORMANCE VERIFICATION
6.1 INTRODUCTION.. ............................................................................
6.2 ENVIRONMENTAL CONDITIONS ..............................................................
6.3 INITIALCONDITIONS.. ...................... ____;...........................................
6.4 RECOMMENDEDTESTEQUIPMENT.. ............... .,.:. .......................................
El VERIFICATION PROCEDURES ...................... :.............................................
InputCurrentVerification....................:.........................................~ ......
6.5.2 Current Verification ...................... .~___.
..................................... _,
.........
65.3 Q/t Verification...............................................................................
6.5.4 Capacitance Verification ................................................. .,_.......... .,,
.........
6.5.5 Voltage Source Verification .................... ;. ....... .I .. ;. . .: ... . . . . . . . . . . . . . . . . . . _.
SECTION 7-THEORY OF OPERATION
7.1
7.2
z3
%4
%4.1
%4.2
%4.3
7.4.4
7.5
z5.1
Z5.2
z5.3
z5.4
76
7.7
Z8
z9
ZlO
7.10.1
7.102
z10.3
ZlO.4
z10.5
ZlO.6
7.11
7.12
INTRODUCTION ............................. _. ...............................................
CVMEASUREMENTMETHOD.. ...............................................................
OVERALL FUNCTIONAL DESCRIPTION .............................. _
............... .,_._, .........
VCKTAGESOURCE.. ........... ................. ._ ..__ ........... .., .. ._ ........ ______,_________
D/AConverter ....................................................... __........................
PrecisionStep Source.................................................~...............~ .........
Output Stage.. ........................... ..-_ ._ ................... . _,.____.___.__~. ..............
ResetCircuit.. ......................... i..;.; .... .1.~. .... .;....... -y..;...;; ..... 1-..~
..........
PREAMPHFIER.. ......................... _~.._
....................................................
PreamplifierConfiguration.. ............ .1..~ ............................ ;.;. ... .1..~....‘.....1.....
InputandGain Stages................................................~ ......................
FeedbackElements.. ..................... ~.~.~._~._~_~.~._~.
.............. .._ ........................
Past Discharge Bridge .................. . .................. .~;~I..
..................... ..: ........
Xl0 AMPLIFIER ........................ .~;.Z;; __.......................... .__-____ ............
MUITIPLFXER and BUFFERAMFLIFIER ........................................................
-2VREF!.XF!NCESOURCE _.......... :.:::.:.‘; .... ~-..:;...;.~...:‘...:.:.:..:_..:.;..;.~;....::;..I~;’ ....
A/D CONVERTER.. .................. .: .:.~.:~I~.
................... _._._ ..:.............. .._ .........
DIGITAL CIRCUITRY ...........................................................................
Microcomputer...........................~...-......................................- ........
Memory Elements ................................... ..~................-.--.........~ .......
Device Selection.......................................................................~ .....
IEEE488Bus..........................~..~..~.~ .................................................
Input/output circuitry.. ..................... ,^.,...,- ......... ..__ .................................
-. . -. .~
64
E
6-1
6-2
6-2
6-3
6-6
66
6-7
7-1
7-1
7-2
7-Z
7-2
7-5
7-5
7-a
7-8
7-8
7-10
Ku
7-12
7-14
7-14
7-26
7-16
7-18
%I8
7-18
%I8
7-19
7-19
I&play cacti ............................................................................ 7-20
ANALOG OUTPUTS ................... _. ................. _. ...................................... 7-20
MAIN POWER SUPPLY ....................................................................... 7-22
SECTION 8-MAINTENANCE
8.1
8.2
8.3
8.4
8.5
85.1
8.5.2
8.53
8.5.4
8.5.5
8.5.6
INTRODUCTION ..................................................... _,
......................... 8-l
LINE FREQUENCY SELECTION ..................................... __........ _................. 8-l
LINE VOITAGE SELECTION ...................................................................... 81
FUSE REPLACEMENT ....................... ~..I~.:.~:. .................... .; ....................... 8-2
CALIBRATION ....................... ._ ..... __. ............................................... 8-2
Recommended Calibrated Equipment .......................................................... 8-2
Environmental Conditions ................... .,................................................ 8-3
Warm-Up Period ......................................................... _. .................. 8-3
Ca&ration Jumper ...................... .~.~_._-~__
............................................ 8-3
;Frt$yr ........................................... _ ..... _
..... _. .............. 8-5
ration.. ..................................................... ................... 8-5
iv

-
8.5.7 Calibration Sequence ............. .. ._~.
........ _ .. __..... _
.................................... 8-6
8.58 DigitalCalibration....................................................~ ........................ 8-6
8.5.9 Input Offset Voltage Adjustment ............................................................... 8-6
8.5.10 Zen,HopCompensation......................................-....- .......................... 8-7
8.5X Input Current Adjustment .................................................................... 8-8
8.5.12 Capacitance Offset Compensation ............................................................. 8-8
8.5.73 Voltage SourceCalibration.. .................................................. ..- ............. 8-8
8.5.14 Current Calibration ............................................................................ a10
8.5.15 1,CAnalogOutputAdjustment ............................................................... 813
8.5.16 Q/t CaIibration ........................................................ ___. .................... &I3
8.5.17 Capititance Calibration ...................................................................... &I.3
8.5.18 Storage of Calibration Parameters ......................... _,
................................... 8-14
8.5.19 Additional Calibration Points ................................................................. 815
8.6 ... DISASSEMBLY INSTRUCTION .................................................................. M5
8.7 SPECIAL HANDLING OF SIXTIC SENSITIVE DEVICES. ..... ._ ... _. ............................ 8-17
8.8 TROUBLESHOOTING ........................ __.__.; ....... .._. ................................ &l7
8.8.1 RecommendedTest Equipment ................................................................ &I8
8.8.2 Power UpSeIfTest .......................................................................... 8-18
8.8.3 Self DiagnosticProgram ...................................................................... 818
8.8.4 Power Supply Checks. .......... .._ ..... :;.~....................................... ___.._.._ ... 8-19
8.85-- AIDConverterChecks.. ............... .._ ................................................... 8-19
8.8.6 Voltage Source Checks ................. ~....; .... . ..... _.__.: .................................... ~8-19
8.8.7 Relay Configuration........~ ................................................................. 8-24
8.8.8 Input Conditioning Circuitry Checks .......................................................... 8-24
8.8.9 Digital Ciitry ............................................................................. 8-24
8.8.10 DisplayBoard Checks .............. .._..............~....~..................~............~ ... 8-30
8.9 INPUT STAGE BALANCING PROCEDURE ....................................................... 8-31
8.10 HANDLING AND CLEANING PRECAU'IIONS .................................................. 8-31
SECTION 9--REPLACEABLE PAFiTS
9.1 ~~.INTRODUCTION. . . . . . . . . . . . . .___. . __. _. _. _. _. . . .__. . . . . . .__. _. . . . . . . . . 9-l
9.2 PARTS LIST . .._...._.... . . . . . ._ .___..__.._._.._._. .,. ..~._._._____.___.. . .._. .__.. . . . . . 9-l
9.3 ORDERING INFORMATION . . . . . . . . . . __. . . . . . . __. . . ._. . . . . . . . . . . . . . . . . 9-1
9.4 ~~ FACTORY SERVICE . __. ..____ .__~__~.~____.___~_______________. __. . __. .___. . . . . . . . . . . . . . . . . . 9-l
9.5 S-C DIAGRAMS AND COMPONENT LOCATION DRAWINGS . . _. . . . ___. _. . . _. ____. __~. . 9-l
APPENDIX A ....................................................................................... A-l
APPENDIX B .......................................................................................... B-l
APPENDIX C ...................................................................................... C-l
APPENDIX D ...................................................................................... D-l
APPENDIX E ....................................................................................... E-l
APPENDIX F ....................................................................................... F-l
APPENDIX G ........................................................................................ Gl
APPENDIX H ...................................................................................... H-l
v/vi

LIST OF TABLES
SECTION 2-GETTING STARTED
2-I. Display Messages . . . . . . . . . . . . . . . . . . . .;~.- .._.. ____............_............. . . . .._ .. ..~.....~.~Y ..,.,..2-3
SECTION 3-OPERATION
z FrontPanelPrograms.................................................~.......................- .. 3-7 Display ExponentValues ....................................................................... 3-12
3-3 Engineering Units Conversion ........................... 1. ................................... :. .. 3-24
SECTION 4-IEEE-488 PROGRAMMING
41 IEEE488 Contact Designation ........................................................... _........ 44
42 Model 595 Interface Function Codes. ............................................................ 45
43 BASIC Statements Necessary to Send Bus Commands ............................................... 46
4-4 IEEE-488FrontPanelMessages ............................................................... ..- 46
45 General Bus Commands and Associated BASIC Statements ......................... .,.............. 48
- 46 Device-Dependent Command Summary ......................................................... 4-13
t73 Bus Hold-Off Ties ................ ____....... _................................................ 438
- Trigger to Reading Ready ‘Iiies~ (in Ksec) .......................................... .-I.......... .,
. 450
SECTION B-PERFORMANCE VERIFICATION
2 Recommended Test Equipment for Performance Verification. ........................................ 6-2
Liits for Current Verification........................................... _.......... : ............. 6-3
6-3 DeterKnin g Capacitance Limits .................................................................... 6-6
6-I CapacitanceVerification ......................................................................... 6-7
6-5 ... Limits for Voltage Source Verification ................................................................ 6-7
SECTION 7THEORY OF OPERATION
7-1 RelaySwitchConfiguration.. ................................... ~..~.;.:..Y.~ .._. ...... .I ........... ~..~?ll
7-2 Memory Mapping .............................................................................. 7-1
SECTION S-MAINTENANCE
8-1 Lie Voltage Selection (50~&X-Iz)................................................................ _ 8-l
8-2 Line Fuse Selection ............................................................................. 8-2
8-3 .. Recommended Calibration Equipment ........................................................... 8-3
8-4 Current Calibration .............................................................................. 8-u)
- 8-5 Capacitancecalibration ........................................................................ 8-X
8-6 Recommended Troubleshooting Equipment ...................................................... 8-18
- 8-7 DiagnosticProgramPhases.........~ ............................................................ 8-19
vii

8-8 PowerSupplyChecks .-__-___ _.,..-. _,_._. 8-19
............................... ........................ ......
A/D~~ConverterChecks .............................. ................. ..___.__. _..__.............. 8-20
Voltage Source C,hecks ........................................................................
Relay Confiitihon ..................... - .. - ................ - i$
Amplifier Cams .................... ........... ..__. _.~-. .......
.._...........~~.~.~.........~.~..............~~.~...............~ 8-25
833 Capacitance Circuitry Checks ........................................................ .,
... _,_ .... 8-25
a14 Cu&ntCktiitryChecb 8-27
............. .......................................... . ...............
845 Digital Circuitry Checks ........................... __~.~~.-~_~~__.
........................... .~.~...~.~__
. 8-28
846 DisplayCircuitryChecks.. ............. ~___~. ...................................................
al7 InputStageBalancing................-......~...........--...........-.-........~----...-~~~ ... %3:
SECTION g--REPLACEABLE PARTS
9-1
9-2
9-3
9-4
MotherBoard,Parts List....................................~~.~~..~ ............................. 9-2
Display Board, Parts List.. ............................................. ..~.
............. . ......... 9-15
Preamp Board, Parts List ........................ : .. .‘. I............ : ...... _...................... 9-21
Miscellaneous Parts, Parts List ............................................................ ._ .... 9-27
APPENDIX D
D-l BASIC Staten-tents Necessary to Send Bus Commands . . . . . . _ . . . __. . . . . . _:. . _. . D-l
APPENDIX F
Fl IEEE488 Bus Command Summary . . . . . . . . . . .,~.,__~___.~__....__.._... .____.. ._. _. ___..~..____ “TV... W (
F2 Hexadecimal and Decimal Command Codes.. . . __. . __. __. . . _. . . __. _~_. . . . . . _. . . . . _. . F7
~-3 Typical Addressed Command Sequence.. . . . . . . . . . ..~.~_,.. _.~_.__ *. . . . _. . . . . . . . . . . . . . . . . . . . . . . . . . F7
M Typical Device-Dependent Command Sequence. . . _. _ . . . _. . . . . _____. ____________ _. __ M
F-5 IEEE Command Group . . . . __. _. . . . . _. __. . ___. _~_._ . . . _ .. . . _. . . . . . . . . . _. . _. . . . . F7
APPENDIXG
Device-Dependent Command Summary . . . _ . . _. . . ___. _____ . . . . ____..- _________~___. . G-l

LIST OF FIGURES
SECTION 2-GETTING STARTED
2-l Model 595 Front Panel .._. . . . . . . . . . . . ..._..___... ... . . . . . . . . . . . . . . .._.... . . .~.-~.._... _.__,...
2-2 Model 595 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . ..-................................... z-j
2-3 Typical Capacitance Measurement Corinetions . . . . .~.. . _. _. . _. . . . . . . . _. . . . . . . . . . . . . . . . . . . . . . 2-7
2-4 Typical Cment Measurement Confections . . . . . . . . . . . .___. . . _. .,-- .,. . .,. --. . .,.,. . . . . . . . . . . .~. 2-7
SECTION 3-OPERATION
ii CapacitanceMeasurementConnections. ........... . ...................................... ....... 3-l Cbnnections for Current Measurements. ................. ._,____.. _,__.
............. ___,_
.............. 3-2
3-3 Integrator Charge vs Tme Cur+ Ior a Capacitance Measurement .................................. 3-3
3-4 VoltageOutput Waveform .................. . ........................................ .~~.------ .. 3-5
3-5 Exainple:[email protected]. ................................ _.._ .......... 3-9
34 Coefficients in Filter 2 ......................... ..-......................-.~..~...~~.-.~ ..... ..- 3-10
3-7 &&md Trigger P&e Specifications ............. ..,................................................. 3-14
3-8 Meter Complete Pulse Specifications ......................................................... _~_
.. 3-14
3-9 NCurvesofa6.3VZenerDiode.. ............................... . ... ............ . ........ .._ ... 3-18
tt MOSDeviceCVCurvewithFilters. ........................ .._._.., ......... .._ _____..... .._._..._. 3-21 ~MultipleGroundPointsCreatingaGroundLoop.. ....................... ..~ ........ __..___,._._.,.._~.~3-22
3-z EliminatingGrotidLoops. ........ . ....... . __
..
~...~_.._.~.._........................ ;.m.
.............. 3-22
SECTION 4-IEEE-488 PROGRAMMING
41 SystemTypes ................. ..~..~.-.~-~........~.....-~-.-.-..-.~.............- ............. 42
42 ~IFXE-488 Connector.............................................................---.~....~.~..~~4 2
43 IEE.E-488~connections.. .................................. _____~__,.-_...., ......................... 43
44 Model 595 Rear Panel IEEE-488 Connedor ................................. .,
..... __,__
. _~^.
........ 43
45 ContactAssignments...........................................--.-.....-........~- ............. 44
4-6 GeneralDataFormat............................----.......................- .................. 432
47 SRQ Mask and Serial Poll ByteFormat.......................- .................................. 437
z UOMachine Status Word (Default Conditions Shown). ........................................... 442
~UlErrorStatusWord ............................ _..,_ ......................... .._....._..,._ .... 443
4la U2 Data Status Word .......................................................................... 443
4l.l U3DelayTme
zg .... . ............... ..-......-.-- ............. .,
................................. . . 4-44
.._
U4VoltageSourceLfrmts ___.~.~
U5 Voltage SourceBlas Se~gs
..................................................... ......................................................................................2
SECTION 5-APPLICATIONS
5-1
5-2
5-3
- 5-4
5-5
-
Current Measurement Corrections Using the Model 595 Voltage Source.. . . . . ___. . . . . . . 5-l
NCharacteristicsofaZenerDiode(5.1V)lN751.....___..___._ ____.___ ____. ..__. _..___.__.._.... 5-3
Connections for Bipolar Common:Emilter N Characteristics . _. _. . . . . _.,_. _ ___. _________. . _. _. 5-4
Typical Bipolar Common-Emitter Characteristics . . . . . . . . . . . . . __. _. . . . . _. . _. . . . . . 5-4
Conmctions for Common-Source FET N Characteristics _ __. . . . .~. . . . . . . . _. __. ___. . . . __ 5-5
ix

5-6 Typical Common-Source FET lV Characteristics ....................... __.,_. ...................... 5-5
5-7 Leakage Current Measurement. ................ ._ .................................... _ .. ._ .. ,_..... 5-7
5-8 Ca~acitorLeakageTests ....................................................................... 5-8
5-9 cvs.vGwe.. ......................... ..-- .-~.~..~_ ................. ..__ ....... .................. 5-9
5-10 Equivalent Circuits of the MOS Capacitor. ............................................... 1~;.
...... 5-9
5-11 Recognizing Equilibrium Using C and Q/t VS. Delay Tie: Inversion: Substrate Voltage = +8V,
Squarewave Test Signal = +O.OZV............................................ _. __.. _,_-__. ... 5-12
5-12 Corrected vs. Uncorrected CV Curves of a SimulatedLeaky Capacitor C(corrected) = C-(Q/t)
(StepTiie)/(VStep). .................. -.~..:. ...... .._ _ ...... YI..; .... .. :~........... --.~. ..... 5-x
5-13 Recognizing Equilibrium Using C vs. V and Q/t,ys,~,V ................
Misuse of Corrected Capacitance Program-on Non-Equilibrium Curves YTT
.. 1 ............. -. ....... 5-15
5-14 ............................. 5-16
5-15 Comparison of ~Quasistatic CV Methods ....................................................... ; ... 5-18
5-16 FrequencyResponse.. .................... . .................. ..~........~.....-.......~ ....... 5-19
5-17 Comparison of Quasistatic~CV Methods ....................................................... 5-20
SECTION 6-PERFORMANCE VERIFICATION
6-l
6-2
6-3
6-4
Test Fixture Construction.. ............................. .: ............................................ 6-l
Setup for Current Verification (2001x.4to 200SA Ranges) .... _. .............. ____. ...... -._~.lT~-
.._ ... 6-4
Setup for Current Verification (2Op.Ato 2OnA Ranges) ........................................... 6-5
Setup for Voltage Source Verification ................................................. __._ ....... 6-8
SECTION 7-THEORY OF OPERATION
7-l
7-2
7-3
7-4
7-5
7-6
7-7
7-8
7-9
7-10
7-11
7-12
7-13
7-14
7-15
7-16
7-17
7-18
7-19
Feedback Charge Method ........................................................................ 7-l
TiingVoltageandChargeWaveforms ............ _~.:. ....................... ~.;........ :.~. ..... 7-2
Model 595 Simplified Diagram ................. :. .......................................... .,
........ 7-3
Voltage Source D/A Converter Circuitry ...... _......... .; ...... I ........................... _
.... 7-4
PrecisionStep Source...............................................~.................~ ........ 7-5
Output Stage Circuitry (Simplified) ............................................ ..I .......... .._ ....... 7-6
Current Limiting for Output Stage .................... ._ ............. _ _,_...... .,
. .~l.-............ 7-7~~
Voltage Source Reset Circuitry ............... : .......... : ............... __....... ._ ...... .,
........ 7-8
BlockDiagramofInputPr~ampIifier.....................................~ ...................... 7-9
Circuit Configuration for Current and Capacitances.................. ; ............ .I ................ 7-9
Input Stage and Gain Stage ........... .~;
................................................ .;. ...... 7-10
FeedbackElement ............................................................................ 7-12
FasfDischargeCircuitry.. .................. :~ ................................... -.:.:: ...... it.. 7-13
XlO~Amplifier Circuirry.......................................................~...........~.~ . 7-14
Multiplexer and Buffer ........................................................................ .,_,7-15
Multiplexer Phases.. .............................................. .., ........ ..:. ............ .__ ...... 7-16,
-2V Reference Source ........................................ _~I
................ : .. :. .. .;. .~I
.... 7-16
A/DConverter ................................... ..; ................. _. ........................ 7-17
Analog Outputs .............................................................................. 7-21
SECTION 8-MAINTENANCE
8-1
8-2
8-3
L-2
8-6
8-7
~TestFiiture~~Conshuction ...................................................
Calibration Jumper and Calibration Pots ...................................
Equipment for Zero Hop Compensation ...................................
Voltage Source Output Calibration Setup ............... - ..................
V Analog Output Calibration Setup ........................................
Current Calibration Setup (200pA and 20nA Ranges) .......................
Current Calibration Setup (20pA to 200& Ranges) .............................
. . .
. . .
. . .
.
.
.
.
,..
. ..~:;. ...... 8-2
............ 8-4~
............ 87
............ 8-9~
............. 8-9
........... 8-11
~812 a ............
x

- C, I Analog Output Calibration Setup ......... ___............................. .,_. .,__- .._.. .,...... 8-13
Model595EqkdedView ................ ..___ .....
.__,._________
. .._ . .__.,._...._._ .................. 816
8-10 Input Stage Balancing .......................................................... _..
. . _...... _,
... 8-32
SECTION g--REPLACEABLE PARTS
9-l ~~Mother Board, Component Location Drawing, Dwg. No. 595-100 _. __. . . _. . . __. . . . ___. . _. . . . _. . _. 9-8
9-2 Mother Board, Schematic Diagram, Dwg. No. 59X06 _. . . . . _____. . ___. . . . . _. _. . . ____. ___._ . . . 9-9
9-3 Display Board, Component Location, Dwg. No. 595~ll0 __. ______. ___. _. . . . _. . . _ . . ___ . .~.___~_. . ___ 9-18
9-4 Display Board, Schematic Diagram, Dwg. No. 595-116 . . . . . ___. . . . . . . _. _. . . _. _ . . . . . __ __. _~___ .9-19
9-5 &amp Board, Component Location, Dwg. No. 595-160 . . . _ . . _ ___. _,____.,. __. __. . . . . _. _. . . . 9-24
9-6 Preamp Board, Schematic Diigram, Dwg. No. 595-166. . . . . _. . .; __. _. ___. . . _________. _. . _. _. . . 9-25
APPENDIX F
iEBE.BusConfiguration . . . .._..__._.._ _,________._._. ~I__.___._ ______.._.... ___...__ ____.__.._.._.. M
IF,EB488HandshakeSequence _......_.__ ~...:~__..__. __._.......___..._ _.._. _____.__ .__.____._ _.__ F3
~3 Co-andcodes . .._......__....__....~. _.._.. _.._. _._.__......_....--. _.-.- ~_-__--.... _.._ .-..... F6
xi/xii

SECTION 1
GENERAL INFORMATION
1.1 INTRODUCTION
The Keithley Model 595 Quasistatic CV Meter is a sensitive
instrument designed to measure capacitance and current.
The Model 595 uses a unique feedback charge method to
stimulate and measure charge steps in the device under
test, from which capacitance is determined. (A DC voltage
is ah availableto make basic current measurements). This
method of measuring capacitance is superior to the tradi-
tional ‘%oltage ramp” method as it allows the user to
distinguish between error currents and the stimulated
signal charge. Correction of capacitance m+surrtients for
the effect of error currents is selectable and can be used
to improve measurement accuracy. The Model 595 has a
built-in &‘OV sowce with four precision ~step~voltage
sources. The measuring range of the Model 595 is O.OlpF
to 2OnF for capacitance measurements and lfA to ZOOfi
for current measurements. A 4% digit displayand standard
- IEEE-488 interface~give the user easy access to instrument
data.
-
1.2 FEATURES
Some important Model 595 features include:
l Built-in VoltageSource-&IV @ 2mA voltagesource with
lOmVresolution.
l Bias Waveforms-DC, square wave, and staircase voltage
bias waveforms allow the user to make stepped current
or capacitance measurements, as well as DC current
measurements.
l VoltageSteps-In -clOmV,2OmV,5OmV,and 1OOmVgrada-
tions at 0.07 to 199.99sec intervals in O.Olsecincrements.
l Q/t Measurement-Q/t monitors current during
capacitance measurement.
l Compensates for Error Currents-Selectable capacitance
correction for leakage current errors.
l 4% Digit Display-An easy-to-read front panel LED
display includes a 4% digit mantissa with selectable
alphanumeric or scientific range annunciation.
l Zero Correct-A front panel zero correct control allows
the user to cancel offsets internal to the Model 595.
l Reading Modifiers-Baseline suppression and C/C, nor-
malization of readings.
l Standard IEEE-488 Inte*ace--The built-in interface allows
full bus operation of the Model 595.
. CV and IV Outputs--Built-in C, Q/tor I vs. V analog out-
puts (with automatic pen lii) or IEEE488 digital plotter
output.
l Digital Calibration-The instrument may be digitally
calibrated from the front panel or over the IEEE-488 bus.
1.3 MANUAL ADDENDA
Information concerning improvements or changes to the
instrument which occur after the printing of this manual
will be found on an addendum sheet included with this
manual. Please be sure that you read thii information
before attempting to operatesor service your instrument.
1.4 SAFETY TERMS
The following safety terms are used in this manual:
The WARNING heading as used in this manual explains
dangers that might result in personal injmy or death.
Always read the associated information very carefully
before perfotig the indicated procedure.
The CAUTION heading used in this manual explains
hazards that could damage the inshument. Such damage
may invalidate the warranty.
1.5 UNPACKING AND INSPECTION
The Model 595~Quasistatic CV Meter was carefully in-
spected before shipment; Upon receiving the instrument,
carefully unpack all items from the shipping carton and
check for any obvious signs of physical damage that might
have occurred during shipment. Report any damage to the
shipping agent at once. Retain the original packing material
in case reshipment becomes necessary.
l-l

The following items are included with every Model 595
shipment:
Model 595 Qua&static CV Meter
Model 595 Instruction Manual
Model 4801 Low Noise Coax Cables with BNC Connectors
(two)
Additional accessories as ordered.
If an additional instruction manual is required, order the
manual package (Keithley Part Number 595-901-00). The
memud package includes an instruction manual and allper-
tinent addenda.
1.6 REPACKING FOR SHIPMENT
Before shipping the instrument should be carefully packed
in its original packing material.
If the instrument is tobe returned to Keithley Instruments
for rep’airor calibration, include the following:
Write XI’ENTION REPAIR DEPARTMENT on the ship-
ping label.
Include the warranty status of the instrument.
Complete the service form at the back of this manual.
1.7 WARRANTY INFORMATION
Warranty information for your Model 595 maybe found in-
side the front cover of this manual. Should you need to
use the warranty, contact your Keithley representative or
the factory for information on obtaining warranty service.
Keithky Jhslmments, Inc. maintains service facilities in the
United States, West Germany, Great Britain, France, the
Netherlands, Switzerland, and Austria. Information con-
cerning the operation, application, or service of your in-
strument may be obtained from the applications engineer
at any of these locations.
1.6 ACCESSORIES
The following accessories are available to enhance Model
595 capabilities.
Model 1019Aand 1019s Rack Mounting Kits-The Model
lOl9A is a fixed or stationary rack mounting kit with two
front panels provided to enable either single or dual side-
by-side mounting of the Model 595 or other similar Keithley
instrument. The Model 10195 is a similar rack mounting
kit with a sliding mount configuration.
Model 4801 Coax Inp~utCables-The Model 48M, two of
which are included with every Model 595 shipment, are
low noise coaxial cables, 1.2m (48 in.) in length, with male
BNC connectors.
Model 4803 Low Noise Cable Kit-Kit includes 50 ft. of low
noise coaxial cable, 10 male BNC connectors, and five
female BNC chassis-mount connectors.
Model 6104 Test Shield-Model 6104 facilitates measure-
ments with 2- or3terminal guarded connections. Provides
electrostatic shielding, high isolation resistance, and easy
connection to Model 595. Clips plug into banana jacks,
allowing modified connections. Shield has BNC connec-
tor on one side, binding posts on the other. Useful when
making current measurements with externalvoltage source.
Model 6105Resistivity Chamber-Guarded test future for
measuring volume and surface resistivitles. Assures good
elechostatic shielding and high insulation resistance.
Model 7007 Shielded IEEE488 Cables-The Model 7007
cables are designed to connect the Model 595 to the
IEEE488 bus and are available in two versions. The Model
7007-1is lrn (3.3 ft.) in length, and Model 700%2is 2m (6:6
ft.) jn length. Cables have shielded connectors on each end.
Model 7051BNC-to-BNC Cables-Available in two lengths.
Model 7051-2 is 1.8m (2 ft.) in length, and Model 7051-S is
15m (5 ft.) in length.
l-2