Keysight Technologies B1500A Installation guide

Keysight Technologies B1500A
Semiconductor Device Analyzer
Self-paced
Training Manual

Notices
© Keysight Technologies 2005-2014
No part of this manual may be reproduced in
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Manual Part Number
B1500-90040
Edition
Edition 1, September 2005
Edition 2, May 2006
Edition 3, January 2007 
Edition 4, June 2007
Edition 5, February 2008
Edition 6, October 2008
Edition 7, November 2009
Edition 8, August 2014
Keysight Technologies
1400 Fountaingrove Parkway 
Santa Rosa, CA 95403
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In This Manual
This documentis the self-paced training manual to help you to understand what is Keysight
B1500A, what functions the B1500A has, how to use the B1500A, and what applications
the B1500A contributes to.
• Module 1. Introduction
This module explains the product concept and the key features of the B1500A/
EasyEXPERT. You will learn about what is the B1500A.
• Module 2. Basic Measurement
This module explains the basic I-V sweep measurement function and the cabling and
fixturing issues. You will learn how to measure I-V curves in the course exercises.
• Module 3. Low Current Measurement
This module explains the low current measurement technique. You will learn how to
measure the low current in the course exercises.
• Module 4. Capacitance Measurement
This module explains the capacitance measurement function. You will learn how to
measure the capacitance in a course exercise.
• Module 5. SPGU Control and Applications
This module explains the SPGU Control classic test. You will learn how to create the
classic test setup and the applications using SPGU in the course exercises.

Class Exercises
Class exercises use the test setup listed below. The test setup data are only examples and
included in the Demo.xpg file stored in Keysight B1500 Series Product Reference
CD-ROM.
NOTE Demo.xpg file
Demo.xpg file is required to create the Demo preset group which contains the test setup
data used by the class exercises. And it is stored in the \data folder on Keysight B1500
Series Product Reference CD-ROM.
The Demo preset group should be created before starting the class exercise. To create the
preset group, launch EasyEXPERT and import the file by using the Preset Group Import
dialog box opened by clicking My Favorite Setup > Preset Group > Import Preset Group.
The test setup data are only examples for the class exercises.
Module Exercise Device Test setup/definition/data Page
Module 1 no exercise
Module 2 Id-Vd measurement MOSFET IDVD, Id-Vd 2-7
Id-Vd measurement MOSFET Trace IdVd 2-10
Id-Vd measurement MOSFET Trace IdVd 2-16
SMU series connection 511 kohm IRVR 2-28
SMU parallel connection 1 ohm Parallel 2-32
SMU series resistor 511 kohm IV-res 2-37
Re measurement, kelvin connection Bipolar Tr REKELV 2-50
Module 3 Leak current measurement -Zero-check 3-9
Ultra low current measurement -Zero-check-ASU 3-19
Id-Vg measurement MOSFET IDVG 3-20
Gummel plot Bipolar Tr GUMMEL 3-25
Module 4 C-V sweep measurement MOSFET CV-1MHz 4-6
Module 5 Charge pumping MOSFET Charge Pumping 4T 0.1V
step 5-20
Flash memory MOSFET Demo-S-NorFlash
Endurance 5-29
ALWG output 511 kohm ALWG monitor 5-36

NOTE .xtd files
The \data folder stores some .xtd files. They are the application test definitions used by
some class exercises. To use the definition file, import the file by using the Test Definition
Import dialog box opened by clicking Library > Import Test Definition. The test definition
data are only examples for the class exercises.
NOTE .xtr files
The \data folder also stores some .xtr files. They are the sample test results created by
executing the test setup which has the same name as the result data. To display these
sample test results, import the files by using the Test Result Import dialog box opened by
clicking Results > Transport Data > Import.
NOTE About sample data
The test setup data described in this manual are only examples. If these example data
damage your devices, Keysight is NOT LIABLE for the damage.

Required Devices for Class Exercises
To perform the class exercises, you need the device set (Keysight part number
04156-87001) which contains the following devices.
Description Quantity
N-channel MOSFET 2 ea.
NPN Bipolar Transistor 1 ea.
Red Miniature LED 1 ea.
0.1 F Capacitor 50 V 1 ea.
1.0 Resistor 1/8 W 1 ea.
1.1 kResistor 1/8 W 1 ea.
511 kResistor 1/8 W 1 ea.
NPN bipolar TransistorN-ch MOSFET LED
1 ohm Resistor
Brown
Black
Black
Silver
1.1 kohm Resistor
Brown
Brown
Black
Brown
511 kohm Resistor
Green
Brown
Brown
Orange
0.1 uF Capacitor

Required Accessories for Class Exercises
To perform the class exercises, you need the following accessories. Prepare the accessories
shown below.
Designation Description Model No. Qty.
1Test Fixture a16442A or
16442B
(B1500A-A5F)
a. The 16058A Test Fixture for the 4145A/B may be substituted for the
16442A/B Test Fixture. If you use the 16058A, you also need the 16435A
Interlock Adapter.
1 ea.
28 pin socket module 1 ea.
Connection wire 6 ea.
2Triaxial Cable 16494A 4 ea.
3Interlock Cable 16493J 1 ea.
4Kelvin Triaxial Cable, for Module 2 16493K 1 ea.
5CMU Cable, for Module 4 N1300A 1 ea.
6Atto Sense/Switch Unit, for Module 3 E5288A 1 ea.
ASU control cable, triax cable, for Module 3 16493M 1 ea.
16442A/B Test Fixture (1ea.)
Triaxial Cable (4ea.)
INTLK Cable (1ea.)
Connection Wire (6ea.)
28 pin DIP Socket Module (1ea.)
2
3
1
4
5CMU Cable (1ea.)
6
E5288A ASU (1ea.)
Triaxial Cable (1ea.)
Control Cable (1ea.)
Kelvin Triaxial Cable (1ea.)

To perform the flash memory class exercise in Module 5 and if you use the ASU, you need
the following accessories.
To perform the flash memory class exercise in Module 5 and if you use the selector, you
need the following accessories.
Description Model No. Qty.
ASU (Atto Sense/Switch Unit) with control cable E5288A Total
3sets
Triaxial Cable 16494A or
equivalent Total 7ea.
BNC-SMA Cable 16493P 3 ea.
SMA-SMA Cable, for synchronization of SPGU 16493Q 2 ea.
Description Model No. Qty.
SMU/PG selector with control cable 16440A
(B1500A-A04) 2 sets
Selector adapter with control cable 16445A 1 set
Triaxial Cable 16494A or
equivalent Total 7ea.
BNC-SMA Cable 16493P 3 ea.
SMA-SMA Cable, for synchronization of SPGU 16493Q 2 ea.

Contents
Contents-1
Module 1. Introduction
•New Features
•EasyEXPERT
•To Perform Easy Application Test
•User Interface
•Modular Mainframe
•SCUU/GSWU
•ASU
•SMU/Pulse Generator Selector
•B2200/E5250 Switch Control
•Desktop EasyEXPERTagi
Module 2. Basic Measurement
•SMU Fundamentals
•Tracer Test Environment
•Classic Test Environment
•SMUs Connected in Series or Parallel
•SMU Series Resistor
•Cabling and Fixture Issues
•Kelvin and Driven Guard
•Probes and Prober Connections
•Triax and Coax Adapters
•Safety Interlock Issues

Contents
Contents-2
Module 3. Low Current Measurement
•Low-Current Measurement Challenges
•Calibration and Zero Cancel
•Effect of Cable Movement
•ASU for Ultra Low-Current Measurement
•Low-Current Subthreshold
•Trade-Off Speed Vs Accuracy
•Low-Current Gummel Plot
•Low-Current Gate Oxide Leakage
Module 4. Capacitance Measurement
•CMU Fundamentals
•Classic Test Environment
•CMU Calibration
•SCUU for IV/CV Switching
•GSWU for Accurate Capacitance Measurement
•ASU for IV/CV Switching

Contents
Contents-3
Module 5. SPGU Control and Applications
•High Voltage SPGU
•SPGU Control
•Pulse Generator Mode
•Charge Pumping
•Flash Memory Test
•ALWG Mode

1Introduction

Module 1
Introduction
1-2
Note:

Module 1
Introduction
1-3
Note:

Module 1
Introduction
1-4
EasyEXPERT software
•Task-oriented, “top-down” approach to device characterization
•Curve tracer like operation
•415x like operation
•Multiple test execution
•Automatic measurement, auto-analysis functions
•Test sequencing without programming
Versatile Modular Mainframe
•Flexible & expandable (10 slots)
•Multiple SMU types
•Atto-sense and Switch Unit (ASU)
•Multi frequency CMU
•SMU CMU Unify Unit for IV/CV probing
•High voltage SPGU, 2-channel Pulse Generator or Arbitrary Linear Waveform Generator (ALWG)
•SMU/Pulse Generator Selector
•4.2 Amp Ground Unit
Convenient User Interface
•Touch screen operation (with optional stylus pen)
•Contextual softkeys & knob control
•Optional USB keyboard & mouse
Desktop EasyEXPERT software
•Controlling B1500A, B1505A, 4155B/C, or 4156B/C by an external computer
•Offline test development and data analysis
415x Setup File Converter
Creating the EasyEXPERT test setup file by using the 4155/4156 MES/DAT file
•

Module 1
Introduction
1-5
Instead of setting up the instrument hardware, the EasyEXPERT software focuses on the real task at
hand for the engineer ---device characterization. All that you need to do is to connect the instrument
to the device terminals as shown in the EasyEXPERT test parameters area.
The EasyEXPERT software also provides the classic test mode that allows the 4155/4156 like
measurement setup operation and the tracer test mode that suggests the new concept curve tracer
operation.

Module 1
Introduction
1-6
Step 1: Click Application Test tab.
Step 2: Select one or more technology categories, and select a desired test from the list of tests
associated with the selected technology categories.
Step 3: Change the setup parameters (Device parameters and Test parameters) if you want.
Step 4: Connect DUT, and click the Start button. The B1500A starts the selected test.
Step 5: Analyze the measurement result data displayed on the Data Display window automatically
opened after the test.
The measurement result record is automatically stored in the internal hard disk drive when the Auto
Recode mode is ON.