LEYBOLD TURBOLAB 80 User manual

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Instra

Part Nos.
501592Vxxxxxxxx
TURBOLAB
TURBOLAB 80, 90, 250, 350, 450
Turbomolecular Pump Systems
Operating Instructions 300554859_002_C0
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Contents
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0 Important Safety Information 5
0.1 Mechanical Hazards 5
0.2 Electrical Hazards 5
0.3 Hazards Caused by Materials and Substances 6
0.4 Danger of Damages to the Pump System 6
1 Description 10
1.1 Design 10
1.2 Standard Specification 11
1.3 Technical Data 13
1.3.1 Backing pumps 13
1.3.2 Pump systems 13
Product identification 13
1.4 Ordering Information 18
1.5 Accessories 21
2 Transport and Storing 24
3 Installation 25
3.1 Placement 25
3.2 Conforming Use 27
3.3 Ambient Conditions 27
3.4 Installing the Backing Pump 28
3.5 High Vacuum Connection 30
3.5.1 Removing the TURBOVAC Pump from the Pump System 32
3.6 Connecting the Exhaust Line 34
3.7 Connect the Cooling 34
3.7.1 Cooling Water 35
3.8 Connect a Power Failure Venting Valve or a Venting Valve 37
3.9 Connect Purge Gas 38
3.10 Connect a Flange Heater 40
3.11 Connect a Gauge 41
3.12 Connect a PC/Mobile Device 41
3.13 Electrical Connection 42
Page
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Contents
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4 Operation 43
4.1 Media Compatibility / Purge Gas 43
4.2 Interfaces 44
4.3 Switching On 46
4.4 Operation 47
4.4.1 Menu 47
4.4.2 Function Codes of the Accessory Connections 51
4.4.3 Relay Functions 57
4.4.4 Parameter list 58
4.4.5 Monitoring of the Operation Conditions 60
4.5 Shut-down 60
4.6 Venting 61
4.7 Bakeout 62
4.8 Webserver 63
4.9 Data Viewer 72
5 Maintenance 75
5.1 Cleaning 75
5.2 Oil of the Rotary Vane Pump 76
5.3 Removing the Backing pump 76
5.4 Leybold Service 76
6 Troubleshooting 77
7 Waste Disposal 80
EC Declaration of Conformity 81
These Operating Instructions are a translation of the German instructions
300554859_001_C0.
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Safety Information
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Obligation to Provide Information
Before installing and commissioning the pump system, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold turbomolecular pump system has been designed for safe
and efficient operation when used properly and in accordance with these
Operating Instructions. It is the responsibility of the user to carefully read and
strictly observe all safety precautions described in this section and through-
out the Operating Instructions. The pump system must only be operated in
the proper condition and under the conditions described in the Operating
Instructions. It must be operated and maintained by trained personnel only.
Consult local, state, and national agencies regarding specific requirements
and regulations. Address any further safety, operation and/or maintenance
questions to our nearest office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICENOTICE
DANGER
WARNING
CAUTION
NOTICE
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Safety Information
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0 Important Safety Information
Note also the safety information given for the individual pumps and compo-
nents.
0.1 Mechanical Hazards
1 Avoid exposing any part of the human body to the vacuum.
2 The pressure in the pump system must not exceed atmospheric pres-
sure.
3 The pump system is intended for generating a vacuum only. If there is
a risk of an overpressure within the system and the pump, then it must
be protected against this, by way of an overpressure safety valve, for
example.
4 The maximum pressure on the inlet side must not exceed atmospheric
pressure (approximately 1013 mbar).
5 While the pump is running, the exhaust of the backing pump must not
be blocked in any way and the pressure in the exhaust line must not
exceed atmospheric pressure.
6 After having removed the Plexiglas panel do not reach into the turbo-
molecular pump since there is the risk of suffering injury at sharp
edges.
7 Operate the pump system only after having connected it to the corre-
sponding piping first.
8 The turbomolecular pump must, when removed from the pump sys-
tem, always be firmly attached to a vacuum chamber. If the mounting
is not sturdy enough, pump blockage could cause the pump to break
loose; internal pump components could be thrown in all directions.
Never operate the pump (in bench testing, for example) without proper
flanging to the vacuum chamber.
9 The construction on the TURBOLAB may weigh no more than 25 kg.
In case of greater weight, please inquire as to the load capacity of dif-
ferent TURBOLAB versions.
10 The pump system must only be detached from the vacuum chamber
and moved, provided the pump has been allowed to run down com-
pletely and is at a full standstill.
11 For the TURBOLAB 90 and 250 models, the safety strap must be
mounted around the pump.
0.2 Electrical Hazards
1 The system must only be connected to a power supply the specifica-
tions of which match those stated on the nameplate.
2 Do not open the switchbox and do not remove any covers from the
electrical equipment. Do not disconnect any earth connections.
WARNING
WARNING
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Safety Information
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0.3 Hazards Caused by Materials and Substances
1 The product in its standard version is not suited for operation in explo-
sion hazard areas.
2 The product is not suited for pumping of
combustible and explosive gases and vapours
radioactive and toxic gases and vapours
pyrophrous substances
oxygen which exceeds the concentration in the atmosphere
(> 21%).
3 When using oil lubricated backing pumps, there is the risk of escaping
oil mist. Use a suitable exhaust filter or an exhaust line, see
Accessories.
4 If the system has previously pumped hazardous gases take the appro-
priate safety measures before opening the intake or exhaust ports.
Use gloves, a breathing mask or protective clothing and work under a
fume hood.
0.4 Danger of Damages to the Pump System
1 The pump system is not suited for pumping of liquids or of dusty,
aggressive or corrosive media.
2 The pump system must only be detached from the vacuum chamber
and moved, provided the pump has been allowed to run down com-
pletely and is at a full standstill.
3 Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
4 The pump must only be opened by such persons who have been
authorised by Leybold to do so.
5 Ensure that no items like bolts, nuts, washers, pieces of wire, for
example, enter into the inlet of the pump. Foreign objects which enter
into the pump will generally cause severe damage. Damage caused by
the intake of foreign objects is not covered by our warranty.
6 The equipment must not be exposed to drip or spray water.
7 Set the device up securely at its place of operation, so that it will not
fall or tip over in the event of any incident.
DANGER
NOTICE
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Description
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Fig. 1.1 Turbomolecular pump systems TURBOLAB
TURBOLAB 80 TURBOLAB 350/450
TURBOLAB 350/450 CartTURBOLAB 80 Cart
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Description
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Fig. 1.2 Turbomolecular pump systems TURBOLAB
TURBOLAB 90 Cart
TURBOLAB 90
TURBOLAB 90 Cart without backing pump
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Description
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Fig. 1.3 Turbomolecular pump systems TURBOLAB
TURBOLAB 250 Cart
TURBOLAB 250
TURBOLAB 250 Cart without backing pump
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Description
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1 Description
The TURBOLAB pump systems are turnkey vacuum units for pumping vacu-
um vessels to pressures in the high-vacuum range.
1.1 Design
The TURBOLAB pump systems consist of the following components as
standard:
■Turbomolecular pump TURBOVAC
The TURBOVACs are turbomolecular pumps with lifetime lubricated ceram-
ic ball bearings. A built-in thermal switch switches off the TURBOVAC if the
permissible temperature is exceeded.
■The frequency converter is integrated into the TURBOVAC and is supplied
with 24 VDC and controlled via RS 485 interface by the TURBOLAB.
■Backing pump
The TRIVAC is a two-stage rotary vane pump. It is fitted with a gas ballast
valve and an anti-suckback valve. The anti-suckback valve shuts off the
vacuum line to the turbomolecular pump in the event of power failure or
when the unit is switched off.
The SOGEVAC SV 16 D and SV 25 D are single stage, oil-sealed rotary
vane pumps. The anti-suckback valve, gas ballast valve and an exhaust fil-
ter, oil return circuit are integrated functional elements of the SOGEVAC.
The SCROLLVAC pumps are dry compressing scroll pumps.
The DIVAC pumps are two to four-stage, oil-free diaphragm pumps.
Some TURBOLAB pump systems are delivered without backing pump.
■Vacuum connection between TURBOVAC and backing pump: flexible
stainless-steel line. The connection can be broken, for example to enable
an adsorption trap to be fitted.
■Frames: Cart with baseplate, mounting column & castors or benchtop
frame with rubber feet.
■TPU Turbo Pressure Unit
Every TURBOLAB comes standard with the TPU for control, configuration
& monitoring of the turbomolecular pump system.
The backing pump is connected depending on the specific type at X211
(110/230VAC) or at X20 (24VDC) and it starts when the turbomolecular
pump is started.
A safety valve can be connected at X210 (110/230VAC) and this safety
valve is switched in parallel with the backing pump.
The function for the accessory connection is set by default to “Active at
Start Command” and this setting can be changed through Menu →
Accessory →VV Pump.
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Description
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The turbomolecular pump systems are designed to mount further compo-
nents:
■vacuum gauges: TTR 101, TTR 91, PTR 91, TTR 101N, TTR 91N,
PTR91N. Two vacuum gauges can be operated simultaneously.
■adsorption trap
■exhaust filter
■air cooling
■water cooling
■flange heater
■vent valve
■purge valve
■foreline safety valve: SECUVAC Valve DN 16/25/40 ISO-KF
Fitting of further components beyond the scope detailed here requires an
approval from Leybold.
1.2 Standard Specification
The following are supplied with the pump system:
■Transport lock at the high vacuum flange by way of a Plexiglas disc
■Covering caps for the threads of the transport lock
■exhaust side: centering ring and clamping ring
■documentation
■The TRIVAC and SOGEVAC are filled with LVO oil.
Bench-top devices are equipped with a securing element to hold the backing
pump in place during transport. This must be removed before initial startup.
Mains cables are not supplied, and must be ordered separately.
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Description
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Vacuum gauge
Gate valve
Flange heater
TURBOVAC
Shut-off valve
Vacuum gauge
Metal hose
Adsorption trap
Backing pump
Exhaust filter
Equipment with accessories
TPU not shown
Fig. 1.4 Schematic diagram of the turbomolecular pump systems TURBOLAB
Shut-off valve
Venting valve or purge gas valve or
purge gas and venting valve
Bypass line
TPU TURBOVAC
Metal hose
Backing pump
TURBOLAB
with TPU
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Description
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1.3 Technical Data
1.3.1 Backing pumps
DIVAC SCROLLVAC TRIVAC SOGEVAC
Backing pump 0.8 T 3.0 SC 5 D SC 15 D SC 30 D D 4 B D 8 B SV 16 D
Pumping speed m3/h 0.7 3.0 5.4 15.0 30.0 4.8 9.7 16
Noise level dB(A) 49 54 52 58 62 52 52 59
Exhaust connection G 1/8" thread
(silencer)
DN 16 KF DN 16 KF DN 25 KF DN 16 KF DN 16 KF G 1/2"
thread
1.3.2 Pump systems
TURBOLAB 80 TURBOLAB 90 TURBOLAB 250
Inlet flange DN 63 ISO-K 63 CF 63 ISO-K 63 CF 100 ISO-K 100 CF
Forevacuum
connection
DN 16 KF 16 KF 16 KF 16 KF 16 KF 16 KF
Pumping speed l·s-1 65 65 90 90 225 225
Ultimate pressure mbar 8·10-8 5·10-10 8·10-8 5·10-10 8·10-8 5·10-10
Mains Supply
50/60Hz
V AC 110 ± 10 % / 230 ± 10 %
TURBOLAB 350 TURBOLAB 450
Inlet flange DN 100 ISO-K 100 CF 160 ISO-K 160 CF
Forevacuum
connection
DN 25 KF 25 KF 25 KF 25 KF
Pumping speed l·s-1 290 290 430 430
Ultimate pressure mbar 8·10-8 5·10-10 8·10-8 5·10-10
Mains Supply
50/60Hz
V AC 110 ± 10 % / 230 ± 10 %
Rated power con-
sumption
110 V
230 V
VA
1760
3680
1760
3680
Product identification
To correctly identify the product when communicating with Leybold, always
have the information from the rating plate available. The nameplate is located
next to the power supply connection MAINS X20.
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Description
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300554859_002_C0 - 11/2016 - © Leybold
465
404
154
144
190
280
275
371
Fig. 1.5 Dimensional drawing TURBOLAB 80, dimensions in mm
1240
985
480 390
611
580
465
480
371
144 105
Fig. 1.6 Dimensional drawing TURBOLAB 80 Cart, dimensions in mm
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Description
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300554859_002_C0 - 11/2016 - © Leybold
371
465
283
250
Ø 95
133
DN 63 ISO-K
DN 16 KF
MAINS (X20)
184
Fig. 1.7 Dimensional drawing TURBOLAB 90, dimensions in mm
Ø 95 DN 63 ISO-K
DN 16 KF
MAINS (X20)
DN 25 KF
238
1089
1285
104
480 580
238
133
Fig. 1.8 Dimensional drawing TURBOLAB 90 Cart, dimensions in mm
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Description
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300554859_002_C0 - 11/2016 - © Leybold
371
465
283
250
Ø 130
133
459
275
190
280
DN 100 ISO-K
DN 16 KF
MAINS (X20)
184
Fig. 1.9 Dimensional drawing TURBOLAB 250, dimensions in mm
480
104 1089
1297
238
Ø 130
DN 100 ISO-K
DN 16 KF
MAINS (X20)
580
238
133
Fig. 1.10 Dimensional drawing TURBOLAB 250 Cart, dimensions in mm
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Description
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658
289
440120
390 240
360
723
Fig. 1.11 Dimensional drawing TURBOLAB 350/450, dimensions in mm
1091
440
480
120
990
580
611
480 390
667
Fig. 1.12 Dimensional drawing TURBOLAB 350/450 Cart, dimensions in mm
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Description
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1.4 Ordering Information
Pump System TURBOVAC
& Frequency
converter
Backing Pump High Vacuum
Connection
Frame Part No.
230 V 50/60 Hz
Part No.
110 V 50/60 Hz
TURBOLAB 80 SL 80 H,
TD 400
DIVAC 0.8 T DN 63 ISO-K
Table
501592V02000000
DN 63 CF 501592V03000000
DIVAC 3.0 DN 63 ISO-K 501592V02001000
DN 63 CF 501592V03001000
SCROLLVAC
SC 5 D
DN 63 ISO-K
Cart
501592V02020000 501592V02030000
DN 63 CF 501592V03020000 501592V03030000
SCROLLVAC
SC 15 D
DN 63 ISO-K 501592V02040000 501592V02050000
DN 63 CF 501592V03040000 501592V03050000
SCROLLVAC
SC 30 D
DN 63 ISO-K 501592V02060000 501592V02070000
DN 63 CF 501592V03060000 501592V03070000
TRIVAC D 4 B DN 63 ISO-K 501592V02120000 501592V02080000
DN 63 CF 501592V03120000 501592V03080000
TRIVAC D 8 B DN 63 ISO-K 501592V02130000 501592V02090000
DN 63 CF 501592V03130000 501592V03090000
SOGEVAC
SV 16 D
DN 63 ISO-K 501592V02100000
DN 63 CF 501592V03100000
without
backing
pump
DN 63 ISO-K Table 501592V02200000
DN 63 CF 501592V03200000
DN 63 ISO-K Cart 501592V02210000
DN 63 CF 501592V03210000
Pump System TURBOVAC
& Frequency
converter
Backing Pump High Vacuum
Connection
Frame Part No.
230 V 50/60 Hz
Part No.
110 V 50/60 Hz
TURBOLAB 90 90 i
DIVAC 3.0 DN 63 ISO-K Table 501592V00001000
DN 63 CF 501592V01001000
SCROLLVAC
SC 5 D
DN 63 ISO-K
Cart
501592V00020000 501592V00030000
DN 63 CF 501592V01020000 501592V01030000
SCROLLVAC
SC 15 D
DN 63 ISO-K 501592V00040000 501592V00050000
DN 63 CF 501592V01040000 501592V01050000
SCROLLVAC
SC 30 D
DN 63 ISO-K 501592V00060000 501592V00070000
DN 63 CF 501592V01060000 501592V01070000
TRIVAC D 4 B DN 63 ISO-K 501592V00120000 501592V00080000
DN 63 CF 501592V01120000 501592V01080000
TRIVAC D 8 B DN 63 ISO-K 501592V00130000 501592V00090000
DN 63 CF 501592V01130000 501592V01090000
SOGEVAC
SV 16 D
DN 63 ISO-K 501592V00100000
DN 63 CF 501592V01100000
without
backing
pump
DN 63 ISO-K Table 501592V00200000
DN 63 CF 501592V01200000
DN 63 ISO-K Cart 501592V00210000
DN 63 CF 501592V01210000
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Description
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300554859_002_C0 - 11/2016 - © Leybold
Pump System TURBOVAC
& Frequency
converter
Backing Pump High Vacuum
Connection
Frame Part No.
230 V 50/60 Hz
Part No.
110 V 50/60 Hz
TURBOLAB
250 250 i
DIVAC 3.0 DN 100 ISO-K Table 501592V08001000
DN 100 CF 501592V09001000
SCROLLVAC
SC 5 D
DN 100 ISO-K
Cart
501592V08020000 501592V08030000
DN 100 CF 501592V09020000 501592V09030000
SCROLLVAC
SC 15 D
DN 100 ISO-K 501592V08040000 501592V08050000
DN 100 CF 501592V09040000 501592V09050000
SCROLLVAC
SC 30 D
DN 100 ISO-K 501592V08060000 501592V08070000
DN 100 CF 501592V09060000 501592V09070000
TRIVAC D 4 B DN 100 ISO-K 501592V08120000 501592V08080000
DN 100 CF 501592V09120000 501592V09080000
TRIVAC D 8 B DN 100 ISO-K 501592V08130000 501592V08090000
DN 100 CF 501592V09130000 501592V09090000
SOGEVAC
SV 16 D
DN 100 ISO-K 501592V08100000
DN 100 CF 501592V09100000
without
backing
pump
DN 100 ISO-K Table 501592V08200000
DN 100 CF 501592V09200000
DN 100 ISO-K Cart 501592V08210000
DN 100 CF 501592V09210000
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