LEYBOLD RUVAC WS 251 User manual

Part Numbers
155007
155009
155042
155043
155053
155054
155066
155110
155111
155112
155113
155114
167007
167026
167042
167043
167044
167056
167097
167129V
167173V
167175V
167187V
167190V
7850009
7850010
20003123
7850011V
11375
11722
11723
11727
11728
11732
11733
11737
11738
11742
11743
11747
11752
11753
11757
11833
11843
11853
12860
15047
15095
15096
RUVAC WS / WSU
251/501/1001/2001
Roots vacuum pump with mineral oil,
synthetic oil or PFPE-filling
Installation and Operating Instructions GA 03108_002_C1

Contents
2 GA03108_002_C1 - 04/2018 - © Leybold
Page
0 Important Safety Information 5
0.1 Mechanical Hazards 5
0.2 Electrical Hazards 6
0.3 Thermal Hazards 7
0.4 Hazards Caused by Materials and Substances 7
0.5 Ignition Risk 9
0.6 Noise Hazard 9
0.7 Danger of Pump Damage 10
1 Description 11
1.1 Design and Function 11
1.1.1 Principle of Operation 11
1.1.2 Design 13
1.1.3 Pressure Balance Line 14
1.1.4 Lubricants 15
1.2 Standard Specification 15
1.3 Technical Data 17
1.3.1 Voltage ranges for the canned motors 18
1.3.2 Limitations of use for frequency converter operation 19
1.3.3 Maximum Pressure Difference 20
1.4 Ordering Information 22
1.4.1 Pumps 22
1.4.2 Accessories 24
2 Transport and Storage 25
3 Installation 27
3.1 Installation 27
3.1.1 Filling in of the Lubricants 28
3.2 Conforming Utilisation 30
3.2.1 Non-conforming Utilisation 30
3.3 Connecting the Cooling Water 32
3.3.1 Water Quality 32
3.4 Electrical Connection 33
3.5 Connecting the Flanges 36

Contents
3GA03108_002_C1 - 04/2018 - © Leybold
These Installation and Operating Instructions are the original instructions.
4 Operation 37
4.1 Start-up 37
4.2 Operation 38
4.3 Shutdown and Storage 39
4.4 Changing from Vertical to Horizontal Flow 39
5 Maintenance 40
5.1 Safety Information 40
5.2 Exchanging the Lubricant 41
5.3 Cleaning the Fan Cowl and the Cooling Fins 42
5.4 Cleaning the Intake Screen 43
5.5 Cleaning the Pumping Chamber 43
5.6 Cleaning the Valve of the Pressure Balance Line 44
5.7 Service at Leybold 45
5.8 Maintenance Schedule 46
6 Troubleshooting 47
7 Wearing and Original Spare Parts 49
8 Waste Disposal 49
EC Declaration of Conformity 50
Declaration of Contamination 51

Safety Information
4 GA03108_002_C1 - 04/2018 - © Leybold
Obligation to Provide Information
Before installing and commissioning the pumps, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold RUVAC WS/WSU has been designed for safe and efficient
operation when used properly and in accordance with these Operating
Instructions. It is the responsibility of the user to carefully read and strictly
observe all safety precautions described in this Section and throughout the
Operating Instructions. The pump must only be operated in the proper
condition and under the conditions described in the Operating
Instructions. It must be operated and maintained by trained personnel only.
Consult local, state, and national agencies regarding specific requirements
and regulations. Address any further safety, operation and/or maintenance
questions to our nearest office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not avoided,
could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
Figures
The references to diagrams, e.g. (4.1/2) consist of Section No., consecutive
Fig. No. within the Section and the Item No. in the figure in that order.
We reserve the right to modify the design and the specified data.
The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
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0 Important Safety Information
0.1 Mechanical Hazards
1 Avoid exposing any part of the human body to the vacuum.
2 Even during standstill of the RUVAC it is dangerous to grasp into the
pump casing. Fingers can easily be squeezed between impellers due
to the high inertia of the parts. Please use caution when grasping into
the pump and make sure that the pump is secured against unwanted
rotation due to differential pressures.
3 The crane eyes of the RUVAC pumps must not be used to lift any
pump combinations (Roots + backing pump). Exceptions are allowed
only with approval from Leybold. Secure the pump by the crane at the
intended eyes until a firm connection has been established with the
backing pump or a corresponding suspension has been installed.
4 Do not operate the pump with any of the covers removed. Serious
injury may result.
5 Never operate the RUVAC without connected intake line or blank
flange at the intake.
6 Make sure that the gas flow from the discharge port is not blocked or
restricted in any way.
7 It is recommended to always only operate the RUVAC with a suitable
discharge line which is properly connected.
8 If discharged gases must be collected or contained, do not allow the
discharge line to become pressurized.
9 When moving the RUVAC always use the allowed means.
Two crane eyes are provided on this pump as standard.
10 Do not allow the ingestion of any objects (screws, nuts, washers, piec-
es of wire, etc.) through the intake port of the pump. The use of the
intake screen is strongly recommended. In case the pump is operated
without intake screen the operator has to make sure that no objects
can enter the pump through the intake port. Objects falling into the
pump can cause severe damage including leaks to atmosphere.
11 Should malfunctions affect the pump, seized impellers in particular
owing to hard deposits or foreign objects, the occurrence of leaks
affecting the housing cannot be ruled out. When pumping hazardous
gases the operator must ensure that the possibility of such an incident
is excluded, respectively that leaks at the pump casing will not pose a
hazard.
12 In order to prevent the destruction of equipment and injuries to the
operating personnel, we urgently recommend to follow the installation
instructions given in these Operating Instructions.
WARNING

Safety Information
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13 First open the cooling water discharge and then the cooling water sup-
ply. Otherwise a water pressure can build up in the pump which is too
high. When shutting off the cooling water supply proceed in the
reverse order: first shut off the water supply and then shut off the
drain.
14 The pumps must only be operated at the permitted speeds. Especially
when using frequency converters which have not been specifically
approved by Leybold, you need to ensure an effective protection
against overspeeding.
0.2 Electrical Hazards
1 Potentially lethal voltages are present at the mains connections.
Before beginning with any maintenance or service work on the
RUVAC, disconnect the pump from all power supplies (lockout/tagout).
2 The electrical connections must only be provided by a trained electri-
cian as specified, for example, by the regulations EN 50110-1. Note
the national regulations of the country in which the equipment is in
being operated.
3 Before initial commissioning install a suitable motor protection switch
for the electric motor. Please note the information given in these
Operating Instructions and on the electric motor (terminal diagram).
4 Before commissioning, check the junction box to ensure that it is
undamaged, perform a visual inspection on the seals.
5 Install add-on parts (pressure switches, for example) without any ten-
sions and protect these against damage by impacts, for example.
6 Lay the connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid thermally stressing
the lines due to unfavourable laying. Observe the required standards
when designing and laying the electrical connections.
7 Provide strain relief for the connecting lines so that the plugs and the
line connectors are not exposed to excessively high mechanical stress-
es.
8 Lay the electric lines so that there is no risk of tripping over these.
9 The RUVAC must be integrated in the system control arrangement so
that the pump can not run-up automatically after it has been shut
down due to overtemperature of the motor. This applies equally to
emergency shut-down arrangements. After having determined the fault
cause, the pump should be switched on manually again.
10 The following applies to pumps being operated with a frequency con-
verter: after a mains power failure the pump will automatically start up
again once the power returns.
11 The temperature sensors (PTC, PTO) have basic insulation to the
motor winding. The operator must guarantee protection in the case of
indirect contact. For this purpose a monitoring device with galvanic
isolation can be provided from the temperature sensor to the pump
control, e.g. through thermistor machine protection devices by Eaton,
type EMT6-DBK.
WARNING

Safety Information
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0.3 Thermal Hazards
1 Hot surfaces, risk of suffering burns.
Under certain ambient conditions the pump may attain temperatures
over 80° C. There then exists the risk of suffering burns. Note the dan-
ger symbols on the pump and in the case of a hot pump wear the
required protection equipment.
If there is the risk of touching hot surfaces inadvertently, install corre-
sponding protection. When working on a pump which is still warm
from operation, always wear protective gloves.
2 The pump must only be operated at ambient temperatures between
12 and 40 °C. It needs to be ensured that the thermal radiation pro-
duced by the pump can be dissipated sufficiently. If the pump has to
be operated at higher ambient temperatures than 40 °C for any rea-
son, reduced max. differential pressures apply (derating). Please con-
sult Leybold for further details.
3 Operating the pump with less than the specified amount of cooling
water will result in excessively high surface temperatures which can
damage the pump. Moreover, there exists the risk of suffering burns.
4 Before disassembling the cooling water lines, let the pump cool down
first and shut off the supply line.
5 Before any servicing and maintenance work always let the pump cool
down first.
6 Note the warning information on the housing surface. If these warning
notices have been removed, are covered or obstructed, include corre-
sponding additional warning information.
0.4 Hazards Caused by Materials and Substances
1 The vacuum line must be leaktight. Hazardous process gases may
escape or the pumped gases can react with air or atmospheric humid-
ity. After installation of the pump and after servicing work on the vacu-
um system, a leak test will always be necessary.
When pumping hazardous gases we recommend a leak test on a reg-
ular basis. Leaks in the pump cannot be ruled out under all circum-
stances. When pumping hazardous gases, the operator must ensure
that leaks at the pump will not be a hazard.
2 Since not all application related hazards for vacuum systems can be
described in detail in these Operating Instructions, Leybold has availa-
ble a separate document (Safety Booklet) in which the hazards and
general safety concepts for design, operation and maintenance of vac-
uum systems are explained.
When planning to pump hazardous substances with this pump, read
the related chapters in the Safety Booklet and in these Operating
Instructions first. You can download the Safety Booklet from our
homepage.
CAUTION
DANGER

Safety Information
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3 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
4 The user has to ensure that all appropriate safety codes and all safety
procedures are applied in case of pumping toxic, chemically reactive,
corrosive gases and/or pyrophoric substances. Before using the
RUVAC pumps with toxic and/or aggressive gases, it is imperative that
you consult your local Leybold office.
5 Leybold is not in a position to perform servicing (repairs) and waste
disposal of radioactively contaminated pumps. Both needs to be
ensured from the side of the user.
6 When pumping hazardous gases you must assume the presence of
corresponding residues in the pump.
7 After having operated the pump, the cooling water lines may suffer
from microbiological contamination. Introduce corresponding safety
precautions.
8 The intake and the discharge lines should be checked regularly for
leaks. There exists the danger of escaping gas.
9 The cooling water used must not attack stainless steel (note the cool-
ing water quality).
10 When changing the oil, remove any escaped oil as otherwise there
exists the risk of slipping.
11 After having completed the installation work we recommend running of
a leak test on the complete installation at an absolute pressure of 1100
mbar. Otherwise the possibility of escaping of process gases cannot
be completely ruled out.
12 Some Roots pumps use perfluoropolyether (PFPE) as lubricant.
When handling PFPE you should observe the following:
During thermal decomposition at temperatures over 290 °C toxic and
corrosive gases are released. When handling PFPE keep it way from
open fires. Do not smoke in the work area.
Touch the inner sections of the pumps only while wearing clean gloves,
and use clean tools;
do the necessary work in clean and dry rooms;
after having removed the pump from its packaging, start it up as
quickly as possible;
as cleaning agents solvents based on hydrofluorether compounds may
be used.

Safety Information
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0.5 Ignition Risk
1 Basically the RUVAC pumps must not be used with flammable or
explosive gases and vapors. In particular cases the composition of the
substances may not be critical. In any case the user is obliged to ana-
lyse the situation carefully and to take appropriate precautions intro-
duced by competent experts.
2 2Before pumping oxygen (or other highly reactive gases) at concentra-
tions exceeding the concentration in the atmosphere (> 21 % for oxy-
gen) it will be necessary to use a special pump. Such a pump will have
to be modified and degreased, and an inert special lubricant (like
PFPE) must be used.
3 3Before commissioning the RUVAC, make sure that the media which
are to be pumped are compatible with each other so as to avoid haz-
ardous situations. All relevant safety standards and regulations must
be observed.
4 4The standard version of the RUVAC is not suited for operation in
explosion hazard areas. Contact us before planning to use the pump
under such circumstances
0.6 Noise Hazard
1 The noise level produced by the RUVAC is between 63 and 75 dB(A).
When operating the pump temporarily at pressures above 100 mbar
the noise level can be much higher. Make sure that suitable protection
measures are taken to protect your hearing.
2 When the pump is being started with open flanges, a noise level which
is detrimental to health will be produced. If such operation is unavoida-
ble, then it is mandatory to wear hearing protectors (ear muffs).
CAUTION
CAUTION

Safety Information
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0.7 Danger of Pump Damage
1 Do not use the pump for applications that produce abrasive or adhe-
sive powders or condensable vapors that can leave adhesive or high
viscosity deposits. Please contact Leybold Sales for selecting the right
separator.
2 Vapors which condense upon being compressed within the pump to
liquids must be avoided when their vapor pressure exceeds the vapor
tolerance of the pump.
3 Before pumping vapors, the RUVAC should have attained its operating
temperature. The pump will have attained its operating temperature
about 1 hour after starting the pump. During this time the pump
should be separated from the process by a valve in the intake line, for
example.
4 In order to prevent the transfer of vibrations from the RUVAC to other
parts of the system we recommend the use of corrugated hoses or
compensators on both the intake and the discharge sides.
5 Do not use the RUVAC pumps in combination with backing pumps
that have an ultimate pressure above 10 mbar. This prevents exces-
sively high temperatures of the RUVAC in idle mode operation.
6 The maximum cooling water pressure must not exceed 6 bar.
Otherwise there exists the risk of leaks.
7 In the case of wet processes we recommend the installation of liquid
separators upstream and downstream of the pump so as to avoid a
massive influx of liquid into the pump.
8 The discharge line should be laid so that it slopes down and away
from the pump so as to prevent condensate from backstreaming into
the pump.
9 The ingress of particles and liquids must be avoided under all circum-
stances.
10 Before installing, all flange covers must be removed.
11 The location where the RUVAC is installed must be selected such that
all controls are easily accessible.
12 In order to ensure an adequate supply of oil, the location at which the
RUVAC (including its accessories) is operated should be such that
angles over > 1° from the vertical are avoided.
NOTICE

Description
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1 Description
1.1 Design and Function
The RUVAC WS and RUVAC WSU are Roots pumps driven by a canned
motor.
The WSU types have a pressure balance line between the discharge and
intake flanges.
The RUVAC WS and WSU are lubricated with mineral oil, synthetic oil or per-
fluorized polyether (PFPE) in the case of the PFPE models. Apart from the
lubricant the mineral oil and PFPE models are identical in type.
Only the RUVAC WS/WSU PFPE can be used for pumping greater than
atmospheric concentrations of oxygen or very aggressive or hazardous
gases.
1.1.1 Principle of Operation
Roots pumps - also known as Roots blowers - contain in their pump casing
(1.1/3) two symmetrical impellers (1.1/4) rotating in opposite directions. The
impellers have roughly the cross section of a figure “8” and are synchronised
by a toothed gear so that they move past each other and the casing without
contact but with a small clearance.
The principle of operation is explained in fig. 1.2.
Fig. 1.2 Functional diagram of a Roots pump (vertical flow)
Fig. 1.1 Schematic cross-section of a Roots pump (vertical flow)
1
2
3
4
5
1 Intake flange
2 Pumping chamber
3 Casing
4 Impeller
5 Discharge flange

Description
12 GA03108_002_C1 - 04/2018 - © Leybold
In impeller positions I and II, the volume in the intake flange is increased.
When the impellers rotate further to position III, part of the volume is sealed
off from the intake side.
In position IV, this volume is opened to the discharge side, and gas at
backing pressure (higher than the intake pressure) flows in. The inflowing gas
compresses the gas volume pumped from the intake side. As the impellers
rotate further, the compressed gas is ejected via the discharge flange. This
process occurs twice per complete revolution of each of the two impellers.
Due to the non-contacting rotation in the pumping chamber, Roots pumps
can be operated at high speeds (standard n = 3,000 rpm at a mains
frequency of 50 Hz). Thus a relatively high pumping speed is attained with
small pumps.
The pressure differential and compression ratio between the intake and
discharge sides are limited on Roots pumps. If the allowable pressure
differential is exceeded, the pump overheats.
Fig. 1.3 Longitudinal section of a RUVAC WS 1001 (horizontal flow)
1 Gearwheels 8 Fan cowl
2 Bearings 9 Fan
3 Impeller seals 10 Drive shaft
4 Impellers 11 Centrifugal disc lubricator
5 Driven impeller shaft 12 Equalisation passage
6 Stator 13 Intake port
7 Can 14 Centrifugal disc lubricator

Description
13GA03108_002_C1 - 04/2018 - © Leybold
In practice, the maximum attainable pressure differential is significant only in
the rough vacuum range (p > 10 mbar), whereas for pressures in the fine
vacuum range (p < 1 mbar) the attainable compression ratio is decisive.
RUVAC WS/WSU pumps have been specifically designed for operation in the
rough and fine vacuum ranges. They are thus either used in connection with
backing pumps or in closed gas cycles.
Power consumption of the pump depends on
■the volume of the pump chamber
■the speed of the pump
■the existing pressure range
■the pressure difference between the inlet and the discharge flange (see fig. 1.7)
■and the type of gas to be pumped.
1.1.2 Design
RUVAC Roots pumps can pump gas in the vertical or horizontal direction.
Although the pumping chamber of Roots pumps is free of sealing agents and
lubricants, the two gearwheels of the synchromesh gearing (1.3/1) and the
bearings (1.3/2) are lubricated with mineral oil, synthetic oil or with PFPE. The
gearwheels and bearings of the RUVAC are located in two side chambers
which also contain the oil supply.
These two side chambers are separated from the pumping chamber by the
impeller seals (1.3/3). During operation of the pump, the side chambers are
evacuated via the impeller seals.
The side chambers are linked to each other by two passages (1.3/12). These
passages are arranged so that for either horizontal or vertical flow the pressu-
re will be equalised between the oil supplies.
In both side chambers there are integrated oil pumps to ensure that the bea-
rings and gearwheels receive sufficient lubricant at all recommended speeds.
RUVAC WS/WSUs are driven by an air or water cooled canned motor. In
such a motor, the rotor and stator coils (1.3/6) are separated by a vacuum-
tight can (1.3/7) made of non-magnetic material. The rotor runs in the vacu-
um on the pump’s drive shaft (1.3/10); thus a shaft feedthrough to the atmo-
sphere is not needed.
With the standard motors, the RUVAC WS/WSUs can run on either 50 Hz or
60 Hz power supplies.
When operating with frequency converters even higher speeds are possible.
Built into the stator coil of the motor is, depending on the version, a tempera-
ture switch, respectively three PTCs and a temperatures switch which will
shut down the pump when the motor temperature gets too high.
The pump section of the RUVAC WS/WSU is air cooled. The air flow cooling
the motor and the pump is produced by a fan (1.3/9) having its own drive
motor under the fan cowl (1.3/8).

Description
14 GA03108_002_C1 - 04/2018 - © Leybold
When operating the pump with a frequency converter, then generally the
drive motor of the fan must be operated at the normal mains frequency.
1.1.3 Pressure Balance Line
The RUVAC WSU has an integrated pressure balance line. It links the dis-
charge and intake flanges via a pressure balance valve.
If the pressure differential between the flanges is too large, the valve opens.
Some of the gas which has already been pumped then flows back through
the line to the intake flange.
The valve is weight- and spring-loaded so that it works with both vertical and
horizontal flow of the pump.
In the case of 50/60 Hz operation and due to the pressure balance line, no
additional controlling equipment will be needed to protect the pump against
pressure differences which are too high. The RUVAC WSU pumps can then
be switched on together with a backing pump at atmospheric pressure. Thus
the pumping speed of the pump combination is increased also at high intake
pressures.
Some models are equipped with an ACE shock absorber in the pressure
balance line. In the case of pressure bursts this prevents the valve from
making contact at the cover. This reduces valve noise and increases its dura-
bility.
The pressure balance valve will not protect the pump from thermal over-
load if opened continuously.
NOTICE
Fig. 1.4 Schematic diagram of a Roots pump with pressure balance line
Pressure balance valve
Pressure balance line

Description
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1.1.4 Lubricants
RUVAC WS/WSU pumps are, as standard, prepared either for operation with
mineral oil, synthetic oil or the special lubricant perfluoropolyether PFPE).
Other types of oil (white oil, for example) upon request.
If mineral oil and PFPE come into contact they will emulsify. That’s why the
pumps must only be run with the type of lubricant specified for the pump.
If you want to change the type of lubricant Leybold should do the change.
In case of operation with mineral oil we recommend our vacuum pump oil
LVO 100.
When the RUVAC is operated at a pressure difference of Dp > 10 mbar or at
> 60 Hz.then LVO 210 should be used.
In case of operation with PFPE we recommend our LVO 400. PFPE pumps
are marked by an additional red label at the oil-fill screw.
1.2 Standard Specification
RUVAC WS/WSU are supplied for vertical flow.
Before delivery the oil has been drained out. The quantity of mineral oil,
synthetic oil or PFPE which is required for operation, is supplied separately
with the pump.
All pumps are equipped in their intake flange with an intake screen and have
been vented with nitrogen so as to protect the pump against corrosion. The
flanges are sealed by a zinc coated metal cover plate with polymer seal.
All pumps are equipped with a standard motor in accordance with the IEC
standard.
NOTICE

Description
16 GA03108_002_C1 - 04/2018 - © Leybold
Fig. 1.6 Pumping speed characteristics for operation at 50 Hz
The ultimate pressure (Pult.) depends on the backing pump used. Fig. 1.7 Power consumption of the RUVAC WS/WSU
Pumping speed
b b1b2b3b4b5b6b71) b8b9
WS/WSU 251 mm 250 270 210 280 230 170 24 305 285 7.5
WS/WSU 501 mm 310 299 229 320 271 201 24 390 313 7.5
WS/WSU 501H mm 310 299 229 320 271 201 24 414 330 7.5
WS/WSU 1001 mm 376 352 278 370 320 246 24 494 366 7.5
WS/WSU 1001H mm 376 352 278 370 320 246 24 524 398 7.5
WS/WSU 2001 mm 463 518 388 460 422 292 24 638 456 7.5
WS/WSU 2001H mm 463 518 388 460 422 292 24 642 460 7.5
WS 2001 FC mm 463 518 388 460 422 292 24 – – 7.5
Type DN/DN1 DN1a a1a2a3a4a5
WS/WSU 251 mm 65 63 ISO-K 694 405 365 14 212 120
WS/WSU 501 mm 65 63 ISO-K 752 486 450 14 237 155
WS/WSU 501H mm 65 63 ISO-K 752 486 450 14 237 155
WS/WSU 1001 mm 100 100 ISO-K 885 560 520 16.5 298 180
WS/WSU 1001H mm 100 100 ISO-K 885 560 520 16.5 298 180
WS/WSU 2001 mm 150 160 ISO-K 1042 800 740 18 367 220
WS/WSU 2001H mm 150 160 ISO-K 1042 800 740 18 367 220
WS 2001 FC mm 150 160 ISO-K 1042 800 740 18 367 220
d h h1h2h3h4h51) h6
WS/WSU 251 mm 50 300 160 280 180 306 360 307
WS/WSU 501 mm 50 340 180 320 194 348 430 332
WS/WSU 501H mm 50 340 180 320 194 348 450 350
WS/WSU 1001 mm 50 396 211 370 227 414 532 392
WS/WSU 1001H mm 50 396 211 370 227 414 564 424
WS/WSU 2001 mm 50 530 300 460 351 578 760 523
WS/WSU 2001H mm 50 530 300 460 351 578 753 530
WS 2001 FC mm 50 530 300 460 351 578 – –
DN1= ND 6 pump flange in
accordance with
DIN 2501
DN1= Collar flange with gasket
for connecting ISO-K
standard components
1) RUVAC WSU only
Outside dimensions ± 3mm
Fig. 1.5 Dimensional drawing for the RUVAC WS/WSU
Total pressure
Partial pressure
Pressure

Description
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1.3 Technical Data
RUVAC WS/WSU 251 501 1001 2001
50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz
Nominal pumping speed 1) 2) m3. h-1 253 304 505 606 1000 1200 2050 2460
Max. pumping speed m3. h-1 210 251 410 530 800 1000 1850 2100
nwith backing pump TRIVAC D 65 B - - -
nwith backing pump SOGEVAC - SV 200 SV 300 SV 630 F
Ultimate partial pressure 3) mbar < 2 x 10-5 < 8 x 10-3 < 8 x 10-3 < 8 x 10-3
Ultimate total pressure 3) mbar < 8 x 10-4 < 4 x 10-2 < 4 x 10-2 < 4 x 10-2
Possible cut-in pressure – RUVAC WS see Section 4.1
Maximum allowable pressure differential
in continuous operation4) mbar 80 80 80 50
Leaktightness mbar·l·s-1 ≤1.10-4
Permissible ambient temperatures °C 12 - 40
Permissible voltage at the motor’s fan AC 230 V / 50/60 Hz and 265 V / 50 (60) Hz
Mains voltage at the Motor, 50 Hz D/Y V 200/-
D/Y V 230/400
Mains voltage at the Motor, 60 Hz D/Y V 200-208/-
D/Y V 265/460
Temperature class F F F F
Motor power, 50/60 Hz kW 1.1/1.4 2.2/2.4 4.0/4.4 7.5/8.5
Nominal speed, 50/60 Hz min-1 3000/3600 3000/3600 3000/3600 3000/3600
Max. permissible speed min-1 6000 6000 6000 4200
5)
Min. permissible speed9) min-1 1200 1200 1200 1200
Motor protection category IP 20 20 20 20
Lubricant filling 6) 1. Filling7) / 2. Filling 1. Filling7) / 2. Filling 1. Filling7) / 2. Filling 1. Filling7) / 2. Filling
nPFPE - vertical flow l 0.6 / 0.55 0.85 / 0.75 1.85 / 1.65 3.0 / 2.7
- horizontal flow l 0.5 / 0.45 0.75 / 0.7 1.1 / 1.0 2.1 / 1.9
nother types of oil - vertical flow l 0.65 / 0.6 0.9 / 0.8 2.0 / 1.8 3.85 / 3.6
- horizontal flow l 0.5 / 0.45 0.75 / 0.7 1.2 / 1.1 2.6 / 2.4
Weight WS / WSU kg 90 / 95 130 / 135 228 / 233 458 / 465
Connection flanges DN 63 ISO - K 63 ISO - K 100 ISO - K 160 ISO - K
Noise level 8) dB (A) < 63 < 63 < 68 < 72
1) To DIN 28 400 and subsequent numbers
2) In the case of deviating frequencies, please contact us
3) With double-stage rotary vane vacuum pump TRIVAC, resp. single-stage rotary vane vacuum pump SOGEVAC
(Type of backing pump look at max. pumping speed). When using 2-stage backing pumps the ultimate pressures will be
correspondingly lower
4) Applicable for ratio up to 1 : 4 between backing pump and Roots vacuum pump at 3000 rpm
5) Upon request also available with a max. speed of 6000 rpm (see table “differential pressures” in Section 1.3.2
and part nos. for 100 Hz versions of the WS(U) 2001
6) Authoritative, however, is the oil level at the oil-level glass, see Fig. 3.2 to 3.5
7) After a complete disassembly
8) At an operating pressure below < 10-1 mbar and 50/60 Hz operation
9) The minimum permissible speed is relevant for the oil lubrication system of bearings and gears and has to be considered if the speed
is constant for more than 1 hour. Running the pump at less than the minimum speed for more than 1 hour can cause damage to the
pump due to a lack of lubrication.

Description
18 GA03108_002_C1 - 04/2018 - © Leybold
The motor overload protection switch must be set to the nominal current
stated in the table in each case. The separate fan current may only be
operated within the permissible voltage range (230 V, 50 Hz and 265 V, 60
Hz) as otherwise the fan will be damaged, especially so when using a fre-
quency converter. In the case of deviating voltages you must use a trans-
former.
NOTICE
1.3.1 Voltage ranges for the canned motors
Nominal power / Nominal current at Nominal power / Nominal current at
50 Hz 60 Hz
Pump model 200 V 230 V 400 V 200-208 V 265 V 460 V
kW A kW A kW A kW A kW A kW A
WS/WSU 251 0.9 4.8 1.1 5.5 1.1 3.2 0.9 4.8 1,4 5,5 1.4 3.2
WS/WSU 501 1.6 7.8 2.2 9 2.2 5.2 1.6 7.8 2.4 10 2.4 5.8
WS/WSU 1001 3 13 4 15.7 4 9.1 3 13 4.4 14.7 4.4 8,5
WS/WSU 2001 5 21 7.5 26 7.5 15 5 21 8.5 26 8.5 15

Description
19GA03108_002_C1 - 04/2018 - © Leybold
U
f
UN
Umin
fmin fN
Imax
Fig. 1.8 U/f profile
1.3.2 Limitations of use for frequency converter operation
When using a frequency converter, we recommend setting a U/f profile. For a
guide to settings please refer to the following table. The specified current
limits should not be exceeded even for a short time by ensuring suitable set-
tings in the frequency converter. Regardless of these current limits, the maxi-
mum pressure differentials listed in Section 1.3.3 must be observed.
Voltage range ~3∆200-265V ~3 Y 400-480 V
Rated voltage UN265 V 460 V
Minimum voltage Umin 10 V 18 V
Rated frequency fN60 Hz
Minimum frequency fmin 0-5 Hz
Imax
WS(U) 251 5.5 A 3.2 A
WS(U) 501 10 A 5.8 A
WS(U) 1001 14.7 A 8.5 A
WS(U) 2001 26 A 15 A

Description
20 GA03108_002_C1 - 04/2018 - © Leybold
1.3.3 Maximum Pressure Difference
The maximum differential pressure at which the RUVAC can be operated at is
limited by two factors:
1. The installed motor power
2. The thermal limitations of the pump
The thermal limits of the RUVAC can be exceeded for a limited time if this is
followed by a period of time that allows it to cool down at a rather low pres-
sure.
The percentage of time within a repeating cycle for which the RUVAC is ope-
rated at high differential pressure is called the duty cycle.
If the duty cycle is for example 25 %, the pump runs at high differential pres-
sure for a time period of 1 minute followed by a time period 3 minutes at a
discharge pressure of less than 1 mbar. If a cycle time of 20 minutes is
exceeded, the pump has to be considered in continuous operation.
Further factors can influence the maximum differential pressure as for examp-
le the pump ratio, the rotational speed of the RUVAC, the gas intake tempe-
rature, the ambient temperature and the gas type.
The given values are valid for air with a maximum intake temperature of
40°Candamaximumambienttemperatureof40°C.
With the evacuation of vented vacuum chambers in short cycle or load lock
applications the RUVAC must only be operated at max. 60 Hz (air inrush).
Example
Max. allowable differential pressure in duty cycle:
RUVAC WS 2001 at 50 Hz / DV 650
Operation: 10 minutes at high differential pressure
10 minutes at a discharge pressure of less then 1 mbar
Nominal pumping speed DV 650 650 m3· h-1
P u m p e r a t i o = —————————————————————— = ————————— = 1 : 3
Nominal pumping speed WS 2001 2050 m3· h-1
Duty cycle is 50 %. The maximum allowable differential pressure resulting
from the table above is Δpmax = 75 mbar.
See also Section 4.1 for calculating the cut-in pressure.
Short cycle operation below 2 minutes should only be implemented using a
WSU pump; in the case of longer pumpdown times we recommend a WS
pump in combination with a frequency converter.
Do not allow the WSU pumps to operate for longer periods of time at high
pressures. The bypass line has been optimised for rapid pumpdowns and
has not been designed to protect the pump at higher pressures!