LEYBOLD TURBOVAC i(X) User manual

Part Nos.
84007xVxxxx
84008xVxxxx
84009xVxxxx
84010xVxxxx
850092Vxxxx(U)
850102Vxxxx(U)
850122Vxxxx(U)
850132Vxxxx(U)
x = 0 to 9
TURBOVAC i(X)
TURBOVAC 850 i(X), 950 i(X), 1350 i, 1450 i
Turbomolecular Pumps with Integrated
Frequency Converter
Operating Instructions 300855170_002_C8

Contents
2 300855170_002_C8 - 08/2021 - © Leybold
Page
0 Important Safety Information 5
Safety symbols 5
0.1 Mechanical hazards 6
0.2 Electrical hazards 7
0.3 Thermal hazards 7
0.4 Danger through materials and substances 7
0.5 Dangers in connection with safety-related
measures and precautions 7
1 Description 8
1.1 Design 10
1.2 Standard equipment 10
1.3 Technical data 11
1.3.1 Technical data for the integrated drive electronics 12
1.3.2 Pumping speed curves 13
1.3.3 Operation diagrams 15
1.4 Ordering data 19
2 Transport and storing 23
3 Installation 24
3.1 Conforming utilization 24
3.1.1 Non-conforming utilization 24
3.2 Operating environment 25
3.3 Fitting accessories 26
3.4 Attach the pump to the vacuum chamber 27
3.5 Forevacuum connection 35
3.6 Connect the cooling 36
3.6.1 Air cooling 36
3.6.2 Water cooling 37
3.6.3 Water quality 38
3.7 Connect a power failure venting valve or a venting valve 40
3.8 Connect purge gas 41
3.9 Connect a flange heater 42
3.10 Connect a vacuum gauge head (only for TURBOVAC iX) 43
3.11 Electrical connection 44

Contents
3300855170_002_C8 - 08/2021 - © Leybold
The TURBOVAC allows through both standard and optional interfaces con-
trolling of the pump and setting up of some pump functions according to
specific requirements. The Operating Instructions 300450826 Serial
Interfaces for TURBOVAC i/iX offers detailed information on the RS 232,
RS 485, Profibus and USB interfaces of the TURBOVAC.
The Operating Instructions 300687441 TURBOVAC iX EtherCAT Interface
offers information on the EtherCAT Interface.
The Operating Instructions 300905828 TURBOVAC i Interface Module
describes the Anybus modules.
These Operating Instructions are a translation of the German original instruc-
tions 300855170_001_C8.
4 Operation 49
4.1 Media compatibility / purge gas 49
4.2 Interfaces 49
4.3 Switching on 51
4.4 Shutting down 52
4.5 Venting 53
4.6 Bakeout 54
4.7 Operation after a longer storage period 54
4.8 Removing the pump from the system 55
5 Maintenance 56
5.1 Cleaning 56
5.2 Leybold Service 56
5.3 Bearing monitoring and conditioning 57
6 Troubleshooting 59
7 Waste Disposal 61
Certificates 62
EU Declaration of Conformity 63

Safety Information
4 300855170_002_C8 - 08/2021 - © Leybold
Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold TURBOVAC has been designed for safe and efficient operation
when used properly and in accordance with these Operating Instructions. It is
the responsibility of the user to carefully read and strictly observe all safety
precautions described in this section and throughout the Operating
Instructions. The pump must only be operated in the proper condition and
under the conditions described in the Operating Instructions. It must be oper-
ated and maintained by trained personnel only. Consult local, state, and
national agencies regarding specific requirements and regulations. Address
any further safety, operation and/or maintenance questions to our nearest
office.
“Trained personnel” for the operation of this pump are
■skilled workers with knowledge in the fields of mechanics, electrical engi-
neering and vacuum technology and
■personnel specially trained for the operation of vacuum pumps.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
WARNING
CAUTION
NOTICE

Safety Information
5300855170_002_C8 - 08/2021 - © Leybold
0 Important Safety Information
Safety symbols
The safety symbols on the products shows the areas where care and atten-
tion is necessary.
The safety symbols that follow are used on the product or in the product
documentation.
General warning sign
Warning vacuum
Warning of falling loads
Warning - Dangerous voltage
Warning - Hot surfaces
Warning - Risk of explosion

Safety Information
6 300855170_002_C8 - 08/2021 - © Leybold
0.1 Mechanical hazards
WARNING: EJECTION OF PARTS
If the mounting is not sturdy enough, pump blockage could cause the pump to break loose;
internal pump components could be thrown in all directions.
Mount the pump firmly to the vacuum chamber. Never operate the pump without proper flanging
to the vacuum chamber (in bench testing, for example).
In case of rotor destruction a sudden twisting of the entire pump is possible. The vacuum cham-
ber must be able to absorb the torque of max. 5 kNm (TURBOVAC 850/950 i) or 9 kNm
(TURBOVAC 1350/1450 i) around the rotor‘s axis of rotation in the event of sudden rotor
destruction.
CAUTION: CUTTING AND CRUSHING
When reaching into open flanges there is a risk of cutting and crushing your fingers.
Do not operate the vacuum pump with open flanges. Do not reach into the pump.
When installing the vacuum pump, first mechanically connect the inlets and outlets and then
make the electrical connections.
Disconnect the vacuum pump from the power supply before servicing. Only use trained service
personnel.
Before servicing, ensure that gas cannot flow through the pump. Only open the pump system
when it is under atmospheric pressure.
CAUTION: EJECTION OF PARTS
Ejection of parts through bursting of vacuum system as a result of excessive pressure.
When using the pump with purge gas, protect the purge gas supply such that in the event of a
malfunction no overpressure can occur within the system. The pressure in the pump must not
exceed 1.4 bar (absolute).
CAUTION: VACUUM
Pulling into the vacuum can cause injury to hands or fingers.
Do not operate the vacuum pump with open flanges.
CAUTION: FALLING PARTS
Errors during transport can cause the pump to fall down.
Transport the pump only in its transport packaging or at the eye-bolts provided for this purpose.

Safety Information
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0.2 Electrical hazards
CAUTION: ELECTRICAL SHOCK
Contact with live parts may lead to electrical shock.
The electrical connection may only be carried out by a trained person. Observe the national reg-
ulations in the user country, e.g. for Europe EN 50110 - 1. Prior to servicing, disconnect the
vacuum pump from the power supply.
Electrical shock due to interruption of the protective conductor system. In the event of a fault,
life-threatening voltages may be present on electrically conductive components.
Before commissioning, check the resistance of the earthing cable and the suitability of the
assigned overcurrent protection device.
The pump must only be connected to power supplies which meet the requirements for functional
extra-low voltages with positive isolation in accordance with IEC 60364-4-41 (or local regulations)
(PELV). All interfaces must only be operated with PELV-fed components and devices.
0.3 Thermal hazards
CAUTION: BURNS
Touching hot surfaces may lead to burns.
Handle the pump only when ventilated and cooled down.
Wear suitable protective equipment.
0.4 Danger through materials and substances
WARNING: HAZARDOUS SUBSTANCES
Pumped process gases may escape from the exhaust and leaks in the vacuum system.
During servicing, toxic deposits may be present in the pump. The gases, vapours or substances
may be hazardous to health.
The pumping of toxic / explosive / flammable / pyrophoric / radioactive / oxidizing / corrosive
gases or gas mixtures, as well as oxygen of more than atmospheric concentration (21 %) is gen-
erally prohibited. The operator is responsible for assessing the hazard potential of the process
media or mixtures.
0.5 Dangers in connection with safety-related
measures and precautions
CAUTION: AUTOMATIC START-UP
The frequency converter is not equipped with its own emergency shut down switch. This may
lead to an unwanted pump start-up.
Install an emergency shut down switch in the system. The emergency shut down switch must be
■present in the building installation
■suitably arranged and easily accessible for the user
■marked as the disconnecting device for this device.

Description
8 300855170_002_C8 - 08/2021 - © Leybold
1 Description
The TURBOVAC 850 i(X), 950 i(X), 1350 i and 1450 i are turbomolecular
pumps designed to evacuate vacuum chambers down to pressure levels in
the high vacuum and ultra-high vacuum range.
They are suitable for pumping air and clean gases. A forevacuum pump and
a power supply are required for their operation.
Fig. 1.1 TURBOVAC models
TURBOVAC 850 i
DN 160 ISO-K
TURBOVAC 850 i
DN 160 CF
TURBOVAC 950 i
DN 200 ISO-K
TURBOVAC 950 i
DN 200 CF
TURBOVAC 850 iX
TURBOVAC 850 i
with optional interface

Description
9300855170_002_C8 - 08/2021 - © Leybold
Fig. 1.2 TURBOVAC models
TURBOVAC 1350 i
DN 200 ISO-K
TURBOVAC 1350 i
DN 200 ISO-F
TURBOVAC 1450 i
DN 250 ISO-K
TURBOVAC 1450 i
DN 250 ISO-F
TURBOVAC 1350 i
with optional interface

Description
10 300855170_002_C8 - 08/2021 - © Leybold
1.1 Design
The TURBOVAC models are wide-range TMPs equipped with an additional
Holweck stage.
With the built-in frequency converter as the electronic drive the TURBOVAC
forms one single unit. The electonic drive governs the pump’s speed and
serves as a monitor for all functions of the pump. Moreover, the TURBOVAC
iX is equipped with an integrated vacuum system controller for connection
and operation of various accessory components.
At the high vacuum side the bearing is of a non-wearing permanent magnetic
bearing type, at the forevacuum side a lifetime lubricated oil-free ceramic ball
bearing is used.
Water cooling or an air cooling fan is available for the TURBOVAC 850 i and
950 i as optional equipment. The TURBOVAC 1350 i and 1450 i are water-
cooled as standard.
The intake flange should be fitted with a wire mesh inlet screen to protect the
pump against mechanical damage caused by foreign objects.
The pumps are equipped with a venting and a purge gas facility. The connec-
tions are blanked off by default with G1/8” closure screws.
Venting and purge gas valves, or a venting screw, or a pressure regulator can
be connected directly to the pump.
1.2 Standard equipment
Turbomolecular pump with integrated electronic drive unit, two eye-bolts
High and fore-vacuum flanges are protective-capped.
Flange mounting elements and the inlet screen are not enclosed, but are
available as accessories.

Description
11300855170_002_C8 - 08/2021 - © Leybold
1.3 Technical data
TURBOVAC 850 i(X) 950 i(X) 1350 i 1450 i
High-vacuum connection DN 160 ISO-K
160 CF
200 ISO-K
200 CF
200 ISO-K
200 ISO-F
250 ISO-K
250 ISO-F
Forevacuum connection DN 25 KF 25 KF 40 KF 40 KF
Pumping speed*
N2
Ar
He
H2
I · s-1
720
655
850
755
900
840
925
770
1250
1150
1350
1150
1380
1280
1390
1210
Gas throughput*
N2
Ar
He
H2
mbar · I · s-1
14
3.5
21
> 15
> 24**
12
18
10
Compression ratio*
N2
Ar
He
H2
> 1·1011
> 1·1011
1.3·108
4.4·106
> 1·108
> 1·108
4·105
2·104
Ultimate pressure with 2-stage oil-sealed rotary
vane pump ISO-K, ISO-F / CF
mbar 3·10-8 / 3·10-10 < 7.5·10-9
Max. permissible
forevacuum pressure for N2
mbar 15 15 4 4
Operating speed min-1 49 200 49 200 42 000 42 000
Minimum speed min-1 30 000 30 000 23 100 23 100
Run-up time, approx. min 2.5 2.5 2.5 2.5
Max. power consumption W500 (default).
600 (max.)
500 (default).
600 (max.)
600 (default).
800 (max.)
600 (default).
800 (max.)
Power consumption at ultimate pressure W 40 40 50 50
Type of protection
for versions with optional interface
Type1 (UL 50E)
IP 40
54
1
Ambient temperature
during operation
storage
°C
+5 bis +401)
-15 bis +70
Cooling standard Convection1) Convection1) Water Water
Cooling optional Air or water1) Air or water1) − −
Cooling water connection plug connection for 6x1 hose /
alternatively G 1/8-in. screw-in thread
Cooling water consumption l/h 60
Permissible cooling water pressure
(bar(g): bar (gauge) is overpressure,
i.e. atmospheric pressure = 0 bar(g))
bar(g) 6
Permissible cooling water temperature °C 15 to 35
* Please contact us when using Argon or other “heavy” gases as process gas.
** For a high gas throughput with N2please contact Leybold.
1) Depending on the ambient temperature, the gas throughput and the type of gas, forced air cooling or water cooling may be necessary.

Description
12 300855170_002_C8 - 08/2021 - © Leybold
TURBOVAC 850 i(X) 950 i(X) 1350 i 1450 i
Weight ISO-K / ISO-F / CF kg 14.6 / −/
19.6
15.4 / −/
21.7
23.5 / 24.3 /
−
24.4 / 25.5 /
−
Recommended forevacuum pumps ECODRY 65 plus. TRIVAC D 65 B.
SCROLLVAC 7 plus. DIVAC 3.8 HV3
Noise level
with convection or water cooling
with radial air cooler
dB(A)
< 40
< 55
< 40
< 55
< 44
−
< 44
−
Max. bake-out temperature of the CF version, at
the high-vacuum flange, water cooled °C 100
Max. rel. air humidity approx. 85% (non-condensing)
Purge gas flow mbar · I · s-1
sccm
0.4
24
Purge gas connection G 1/8"
Venting connection G 1/8“
1.3.1 Technical data for the integrated drive electronics
TURBOVAC i TURBOVAC iX
Drive electronics Drive electronics and vacuum
system control unit
Supply voltage 48 V DC +5 % / -10 % 48 V DC +5 % / -10 %
Max. current consumption 11 A (default), 13 A (max.)
at 48 V DC
11 A (default), 13 A (max.)
at 48 V DC
Max. power consumption
TURBOVAC 850/950 i
TURBOVAC 1350/1450 i
500 W (default), 600 W (max.)
600 W (default), 800 W (max.)
500 W (default), 600 W (max.)
Interfaces see ordering data see ordering data
Residual ripple < 3 % < 3 %
Max. length of the DC cable
(for variants with removable front end)
0,5 m –
Max. contact rating of the relays 48 V, 0.5 A
24 V, 1.0 A
48 V, 0.5 A
24 V, 1.0 A
Overvoltage category II II
Contamination grade 2 2
Accessory connections 1 pc. M8 connector, 24 V DC 3 pcs M8 connector, 24 V DC
Maximum load rating for the 24 V DC outputs
(powering accessories, e.g. cooling unit or valves)
24 V, max. 18 W 24 V, 12 W
Vacuum gauge head connection –15 pin Sub-D

Description
13300855170_002_C8 - 08/2021 - © Leybold
0
200
400
600
800
1.000
10-6
Pumping speed
Inlet pressure
10-5 10-4 10-3 10-2 10-1 1
l/s
mbar
TURBOVAC 850 i
Helium
Hydrogen
Nitrogen
Argon
Fig. 1.3 Pumping speed curves for the TURBOVAC 850 i
1.3.2 Pumping speed curves
0
200
400
600
800
1.000
10-6
Pumping speed
Inlet pressure
10-5 10-4 10-3 10-2 10-1 1
l/s
mbar
TURBOVAC 950 i
Helium
Hydrogen
Nitrogen
Argon
Fig. 1.4 Pumping speed curves for the TURBOVAC 950 i

Description
14 300855170_002_C8 - 08/2021 - © Leybold
0
200
400
1200
600
1400
800
1600
1000
Pumping speed
l/s
TURBOVAC 1350 i
10-6
Inlet pressure
10-5 10-4 10-3 10-2 10-1 1
mbar
Helium
Nitrogen
Argon
Hydrogen
Helium
Nitrogen
Argon
Hydrogen
Fig. 1.5 Pumping speed curves for the TURBOVAC 1350 i
Fig. 1.6 Pumping speed curves for the TURBOVAC 1450 i
0
200
400
1200
600
1400
800
1600
1000
Pumping speed
l/s
10-6
Inlet pressure
10-5 10-4 10-3 10-2 10-1 1
mbar
Nitrogen
Argon
Hydrogen
Helium
TURBOVAC 1450 i
Nitrogen
Argon
Hydrogen
Helium

Description
15300855170_002_C8 - 08/2021 - © Leybold
1.3.3 Operation diagrams
How to read the operating diagram for nitrogen for the
TURBOVAC850i:
With deploying a SCROLLVAC 7 plus backing pump gas flows may be trans-
ported permanently with maximum throughput quantities of
■0.2 mbar·l/s (with convection cooling),
■0.5 mbar·l/s (with air cooling at 40 °C), and
■approx. 5 mbar·l/s (with cooling water at 35 °C).
These values result of the intersection between the limitations of the individu-
al cooling variant and the pumping speed of the backing pump given. As can
be seen, maximum permanent gas flows are not solely a TMP characteristic,
but are dependent from the installed backing pump, too.
Gasdurchsatz in mbarl/s
Druck in mbar
Saugleistung TURBOVAC 850i
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Lüfterkühlung 24 °C
Lüfterkühlung 40 °C
Konvektion 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
10-6 10-4 102
10-2 1 10-10 10-8
10-6
10-4
10
10-2
1
10-8
Operationsdiagramm TURBOVAC 850i für Stickstoff
Fig. 1.7 Operation diagram for TURBOVAC 850 i
Operation diagram for nitrogen for the TURBOVAC 850i
Throughput TURBOVAC 850i
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Air cooling 24 °C
Air cooling 40 °C
Convection 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
Gas throughput in mbar·l/s
Pressure in mbar

Description
16 300855170_002_C8 - 08/2021 - © Leybold
Gasdurchsatz in mbarl/s
Druck in mbar
Operationsdiagramm TURBOVAC 850i für Argon
Saugleistung TURBOVAC 850i
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Lüfterkühlung 24 °C
Lüfterkühlung 40 °C
Konvektion 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
10-6 10-4 102 10-2 1 10-10 10-8
10-6
10-4
10
10-2
1
10-8
Fig. 1.8 Operation diagram for TURBOVAC 850 i
Operation diagram for argon for the TURBOVAC 850i
Throughput TURBOVAC 850i
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Air cooling 24 °C
Air cooling 40 °C
Convection 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
Gas throughput in mbar·l/s
Pressure in mbar

Description
17300855170_002_C8 - 08/2021 - © Leybold
Gasdurchsatz in mbarl/s
Druck in mbar
Saugleistung TURBOVAC 950i
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Lüfterkühlung 24 °C
Lüfterkühlung 40 °C
Konvektion 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
10-6 10-4 102
10-2 1 10-10 10-8
10-6
10-4
10
10-2
1
10-8
Operationsdiagramm TURBOVAC 950i für Stickstoff
Gasdurchsatz in mbarl/s
Druck in mbar
Operationsdiagramm TURBOVAC 950i für Argon
Saugleistung TURBOVAC 950i
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Lüfterkühlung 24 °C
Lüfterkühlung 40 °C
Konvektion 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
10-6 10-4 102
10-2 1 10-10 10-8
10-6
10-4
10
10-2
1
10-8
Fig. 1.9 Operation diagrams for TURBOVAC 950 i
Operation diagram for nitrogen for the TURBOVAC 950i
Throughput TURBOVAC 950i
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Air cooling 24 °C
Air cooling 40 °C
Convection 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
Gas throughput in mbar·l/s
Pressure in mbar
Operation diagram for argon for the TURBOVAC 950i
Throughput TURBOVAC 950i
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Air cooling 24 °C
Air cooling 40 °C
Convection 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
Gas throughput in mbar·l/s
Pressure in mbar

Description
18 300855170_002_C8 - 08/2021 - © Leybold
Gasmode: leichte Gase
Gasdurchsatz in mbarl/s
10-6
10-4
100
10-2
Druck in mbar
10-6 10-4 10010-2 1
10-9 10-8
1
Saugleistung
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Saugleistung TRIVAC D 4 B
Saugleistung ECODRY 65 plus
Saugleistung DIVAC 3.8 HV3
Operationsdiagramm TURBOVAC 1350/1450i für Stickstoff*
Gasdurchsatz in mbarl/s
10-6
10-4
100
10-2
Druck in mbar
10-6 10-4 10010-2 1
10-9 10-8
Operationsdiagramm TURBOVAC 1350/1450i für Argon
1
Saugleistung
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Saugleistung TRIVAC D 4 B
Saugleistung ECODRY 65 plus
Saugleistung DIVAC 3.8 HV3
Fig. 1.10 Operation diagrams for TURBOVAC 1350 i and 1450 i
Operation diagram for nitrogen* for the TURBOVAC 1350/1450i
Throughput
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Throughput TRIVAC D 4 B
Throughput ECODRY 65 plus
Throughput DIVAC 3.8 HV3
Gas throughput in mbar·l/s
Pressure in mbar
Operation diagram for argon for the TURBOVAC 1350/1450i
Throughput
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Throughput TRIVAC D 4 B
Throughput ECODRY 65 plus
Throughput DIVAC 3.8 HV3
Pressure in mbar
Gas throughput in mbar·l/s
* For a high gas throughput with N2please contact Leybold.

Description
19300855170_002_C8 - 08/2021 - © Leybold
1.4 Ordering data
TURBOVAC 850 i 950 i
RS 485, USB+, 15-pin digital I/O interface
High-vacuum flange 160 ISO-K 200 ISO-K
Part No.
Pump with optional interface
840071V1000
840071V2000
840091V1000
840091V2000
High-vacuum flange 160 CF 200 CF
Part No.
Pump with optional interface
840081V1000
840081V2000
840111V1000
840111V2000
Optional interface (RS 232, Profibus, Ethernet/IP, Profinet, EtherCAT), USB+,
15-pin digital I/O interface: on request
TURBOVAC 850 iX 950 iX
RS 485, USB+, 15-pin digital I/O interface
High-vacuum flange 160 ISO-K 200 ISO-K
Part No.
Pump with dummy in the Anybus slot
Pump with RS 485 in the Anybus slot
840071V3000
840071V3300
840091V3000
840091V3300
High-vacuum flange 160 CF 200 CF
Part No.
Pump with dummy in the Anybus slot
Pump with RS 485 in the Anybus slot
840081V3000
840081V3300
840111V3000
840111V3300
TURBOVAC 1350 i 1450 i
RS 485, USB+, 15-pin digital I/O interface
High-vacuum flange 200 ISO-K 250 ISO-K
Part No.
Pump with optional interface
850092V1000
850092V1000U
850092V2000
850092V2000U
850122V1000
850122V1000U
850122V2000
850122V2000U
High-vacuum flange 200 ISO-F 250 ISO-F
Part No.
Pump with optional interface
850102V1000
850102V1000U
850102V2000
850102V2000U
850132V1000
850132V1000U
850132V2000
850132V2000U
Optional interface (RS 232, Profibus, Ethernet/IP, Profinet, EtherCAT), USB+,
15-pin digital I/O interface: on request
TURBOVAC 850 i and 950 i pumps can be mounted in any orientation.
TURBOVAC 1350 i and 1450 i pumps can be mounted
■horizontally or vertically with the high-vacuum flange on top and in any ori-
entation in between or
■horizontally or vertically with the high-vacuum flange on the bottom and in
any orientation in between (U versions)

Description
20 300855170_002_C8 - 08/2021 - © Leybold
62
62
42,5
149,5
h
59
135
105
56,7 54
116
45°
45°
Ø 124
54
PURGE
G 1/8"
VENT
G 1/8"
M6
4x M8 -14
48 V DC Stromanschlusskabel,
Länge 0,6 m inkl. Stecker
DN 25 KF
X
4x M5 - 8
X
Ø 26
Ø a
Ø 213
DN a h
160 ISO-K 180 255
160 CF 202,5 266
200 ISO-K 240 250,5
200 CF 254 261,3
Fig. 1.11 Dimensional drawings, dimensions in mm
116
62
62
186,5
118,5
h
59
135
65,6 63,3
117
54
PURGE
G 1/8"
VENT
G 1/8"
M6
4x M8 -14
DN 25 KF
X
48 V DC Stromanschlusskabel,
Länge 0,6 m inkl. Stecker
Ø a
Ø 213
Ø 26
TURBOVAC 850 i and 950 i with optional interface
TURBOVAC 850 i and 950 i
48 V Power supply cable,
0.6 m long incl. plug
48 V Power supply cable,
0.6 m long incl. plug