LEYBOLD MAG Series User manual

v
acuum
OPERATING INSTRUCTIONS
GA05141_0702
Turbomolecular Pumps
with Magnetic Bearing
MAG.DRIVEdigital
Electronic Frequency Converter
LINE

GA05141_0702 - 09/2004
2
Contents
Page
General safety information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1 System overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Compatibility with pumped media . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Function and design of the MAG.DRIVEdigital . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.5 Standard specification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.6 Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.7 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Pump configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
2.1 Unpacking - storing - transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.2 Operating environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.3 Connecting the MAG to the vacuum chamber . . . . . . . . . . . . . . . . . . . . . . . . 45
2.4 Connecting the backing pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
2.5 Connecting the cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
2.6 Connecting the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
2.7 Installing the MAG.DRIVEdigital . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
2.7.1 Power supply connection X19. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
2.7.2 Pump connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
2.7.3 Control plug X14. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Emergency off. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
2.7.4 Interface connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.1 General operation rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.2 Temperature Management System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
3.3 Power control system (PCS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
3.4 Operation at high gas throughput or high forevacuum pressure . . . . . . . . . . . 70
3.5 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
3.6 Operation with the START and STOP keys . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
3.7 Remote control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Section

GA05141_0702 - 09/2004 3
Contents
3.8 Operation with plug-in control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
3.9 Operating statuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
3.10 Operating menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
3.10.1 Basic Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
3.10.2 Menü System Info . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
3.10.3 Menu Failure Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
3.10.4 Menu Set Converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
3.10.5 Menu Set Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
3.10.6 Menu Set TMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
3.10.7 Menu Set Purge / Vent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
3.10.8 Frequency settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
3.10.9 Total view of the menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
4.2 Changing the rotor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
4.3 Changing the touch-down bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
4.4 Cleaning the frequency converter internally . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
4.5 Removing the pump from the system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
4.6 Service at Leybold’s . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
4.7 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
5Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
5.1 Warning messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
5.2 Failure messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
5.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
EC Manufacturer’s Declaration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
EC Conformance Declaration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
Operating Instructions for MAGdigital-series . . . . . . . . . . . . . . . . . . . . . . . . . 110
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111

GA05141_0702 - 09/2004
4
Safety information
General
safety information
Indicates procedures that must be strictly observed to prevent hazards to
persons.
Indicates procedures that must be strictly observed to prevent damage to,
or destruction of the MAG.
The Leybold MAGdigital vacuum pump system is designed for safe
and efficient operation when used properly and in accordance
with this manual. It is the responsibility of the user to carefully read
and strictly observe all safety precautions described in this section
and throughout the manual. The turbomolecular pump must only
be operated in the proper condition and under the condi-
tions described in the Operating Instructions. It must be ope-
rated and maintained by trained personnel only. Consult local,
state, and national agencies regarding specific requirements and
regulations. Address any further safety, operation and/or mainte-
nance que-stions to your nearest Leybold Vacuum office.
Never expose any parts of the body to the vacuum.
The standard version of the equipment is not suited for operation
in explosion hazard areas. Contact us before planning to use the
pump under such circumstances.
The pump must be securely attached. If the pump should sud-
denly seize, inadequate attachment could cause the pump to
break away or allow internal pump parts to be discharged.
The rotor has to be changed after 40,000 hours of operation or
after 5000 starts/ stops or cycles at the latest. See also Section
“3.4 Operation at high gas throughput or high forevacuum pres-
sure”.
Due to high-speed and temperature, the service life of the rotor is
limited.
If the rotor is changed too late, it may be destroyed. Thus in the
flange mounts high forces and torque conditions can occur.
The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with compo-
nents above the housing, sudden twisting of the entire pump can
be experienced.
Warning
Caution
Warning
Warning
Warning

GA05141_0702 - 09/2004 5
Safety information
Parts of the pump can become so hot during operation (> 70 °C,
> 158 °F) that they represent a burn hazard:
Provide protection against contact with the hot components.
The converter has dangerous voltage levels.
Failure to strictly follow the instructions in this Manual can result in
death, severe bodily injuries or significant material damage.
Unauthorizes opening of the frequency converter voids the war-
ranty.
Before opening the converter, always disconnect it from the mains
and the pump!
Before disconnecting any cables make sure that the converter is
switched off and the pump has come to a standstill.
When applying external voltage in excess of 42 V to terminals of
the device, observe local safety regulations!
Unauthorized device conversion and modifications are prohibited
for safety reasons.
Only suitably qualified personnel are permitted to work on the
pump or converter. Personnel must be completely knowledgeable
of all warning information and measures which are specified in this
Instruction manual for transporting, installing, and operating the
unit.
Qualified personnel
Qualified electrical personnel in this instruction manual means a person
who has received electrical engineering instruction or is an electrical expert
in accordance with EN 60204, Part 1, 3.30 respectivly 3.55.
The device contains electrostatically sensitive devices (ESD)!
Ensure that no items like bolts, nuts, washers, pieces of wire, for
example, enter into the inlet of the pump. Foreign objects which
enter into the pump will generally cause severe damage. Damage
caused by the intake of foreign objects is not covered by our war-
ranty. For this reason always leave the supplied inlet screen in
place.
The equipment must not be exposed to drip or spray water.
Caution
Warning
Warning
Warning
Caution

GA05141_0702 - 09/2004
6
Figures The references to diagrams, e. g. (1/2) consist of the Fig. No. and the Item
No. in that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
The Operating Instructions are included with the pump and the
converter. If they have different editions, the version delivered with
the pump describes the pump correctly and the version delivered
with the converter describes the converter correctly. The version
number is either the digit behind the “/” in the GA No. or the first
two digits behind the “_”. Example: GA 05.141/6.02 is the sixth
edition and GA05141_0702 the seventh.

GA05141_0702 - 09/2004 7
Description
1Description
1.1 System overview
The Leybold MAG pumping system consists of:
■The MAG turbo pump
The MAG are turbomolecular pumps utilizing magnetic bearings.They
are designed to evacuate vacuum chambers down to pressure values
in the high-vacuum range and to pump high gas throughputs.
The versions without letter behind the number are designed for
clean applications only.
The C versions have a coated rotor and are designed for clean or light
corrosive applications.
The CT versions are additionally equipped with a temperature
management system (TMS) to control the pump temperature. They are
prepared for use in medium to harsh corrosive applications.
The pumps are available with 2 different rotors:
MAG version: Turbo pump
MAG W version: Turbo pump stages and an active drag stage.
See table “Pump configuration” for an overview on the available models.
■The MAG.DRIVEdigital frequency converter
The electronic converter converts the single-phase line supply voltage
into a three-phase DC voltage to drive the pump motor. It also evalua-
tes measured signals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
The MAG.DRIVEdigital can be operated with the START and STOP keys,
via a plug-in control, or via a network interface.
■A cable set consisting of:
- DRIVE/BEARING cable
- TMS or Purge/Vent cable if required
MAG ... C ... CT

GA05141_0702 - 09/2004
8
Description
MAG 1500 CT
MAG W 1500 CT
MAG W 2200 C MAG W 2800 CT
MAG W 3200 CT
Fig. 1 MAG turbopumps
MAG W 830 C
MAG W 1300 C
Each Fuse 4 A
digital
Fig. 2 MAG.DRIVEdigital Front panel

GA05141_0702 - 09/2004
Materials
Caution
Layers
Caution
9
Description
1.2 Compatibility with
pumped media
The MAG are specifically designed for the needs of the semiconductor
industry.
All materials used inside the pump are compatible with typical gases used
for semiconductor processes.
Please consult Leybold for recommendations on pump models for
specific processes and application requirements.
Corrosion protection
To protect the pump from corrosive gases it is mandatory to use dry
Nitrogen purge during operation of the pump.The purge gas protects the
bearing section and the motor from corrosive gases.
The rotor and the stator of the pump are KEPLA®-coated to prevent corro-
sive attack caused by the process gases. The corrosion protection of the
pump is effective only when the pump is protected from moisture during
standstill and storage. If the process gas contains moisture, contact
Leybold for recommendations.
Sublimation
Some media (e.g. AlCl3) can sublimate in the pump and form deposits.
Thick coatings can infringe on the required operating clearence and ultima-
tely cause the pump to seize. These deposits can also react with moisture
and generate corrosive gases (e.g. HCl).This can become very critical when
the pump is exposed to air. Deposits can be avoided in many processes by
heating the pump with TMS (Temperature Management System).
The TMS is integrated in all CT-versions. The purpose of the TMS is to keep
the pump temperature in a constant range. To achieve the temperature the
pump is equipped with a heaterband.
Some media ( e.g. metall organic compounds ) can decompose at the hot
surface of the pump and build layers. Please direct any inqueries to the
manufacturer.
In order to handle gases or media (e.g. AlCl3) which can form
deposits inside the pump it is required to use the TMS (Tempera-
ture Management System). The temperature selected for such
processes has to be set to the maximum value.
Ignition danger
During operation the pressure inside the MAG is so low that there is no dan-
ger of ignition (at pressures below about 100 mbar). A hazardous condition
will be created if flammable mixtures enter the hot pump at pressures
above 100 mbar. During operation the pump can reach temperatures as
high as 120 °C (248 °F). If the pump is damaged, sparks could occur which
could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
Purge gas

GA05141_0702 - 09/2004
10
Description
1.3 Design of the MAG
The MAG comprises basically the pump housing, the multistage rotor with
the stator package, the drive, and a magnetic bearing.
Rotor
The rotor is made from a high strength aluminium alloy. The rotor and the
lower stator plates are protected with a special ceramic layer ( KEPLA-
COAT®). The standard rotor is a multi-stage axial-flow turbine. In addition
to the turbine stage the wide range rotor has a screw stage.
Both rotors are machined from one piece and the geometry of the the bla-
des is optimized for high compression and pumping speed of the typical
gases used in semiconductor manufacturing processes.
Bearings
The MAG has a built-in precision 5-axes controlled magnetic bearing. The
rotor is suspended by trouble-free magnets:
■along two orthogonal axes in each of two radial planes
■and completely in the axial direction
The bearing concept allows for low vibration operations and insures opera-
tion of the pump in any mounting position. Magnetic bearings also guaran-
tee ultra-clean vacuum because no grease is used for lubrication of bea-
rings.
Two touch down bearings are provided to stabilize the rotor mechanically if
impacts occur during operation. They are only used in case of the breaking
of the power supply or BEARING cable during operation, strong shocks, or
faulty electronics.
Motor and control
A DC motor without commutator is used to power the rotor.
Drive voltage for the motor and the operating voltage for the magnetic bea-
ring are supplied by the MAG.DRIVEdigital frequency converter. It also hand-
les the automatic monitoring of these systems.
The pump is equipped with a data storage device which stores the impor-
tant operating parameters during the complete operation time of the pump.
The converter monitors continously all important operating parameters and
provides warning and alarm signals in case the operating conditions
exceed the specification or the set threshold.
Touch down bearings
Ceramic layer
Magnetic bearing
Data storage

GA05141_0702 - 09/2004 11
Description
Motor
Fig. 3 Section of a MAG
Wide range rotorStandard rotor

GA05141_0702 - 09/2004
12
Description
1.4 Function and design of the
MAG.DRIVEdigital
The MAG.DRIVEdigital electronic converter is used to drive the MAG pumps
from MAG 830 to MAG 3200.
The electronic converter converts the single-phase line supply voltage into
a three-phase DC voltage to control and monitor the electronically-com-
mutated DC motor. It also evaluates measured signals and controls (open-
loop and closed-loop) the pump functions.
The temperature management system (TMS) and the magnetic bearing
control system are integrated into the converter. The TMS regulates the
pump temperature by switching the heating on/off or cooling the pump.
The digital magnetic bearing control system actively controls the pump
rotor in five axes (closed-loop control).
All parameters required for pump operation and the listed faults and ope-
rating hours are stored in a non-volatile memory in the pump. When the
converter is switched on, the data are loaded into the converter from the
pump.
The outputs of the electronic converter are no-load and short-circuit proof.
For remote control via control connector X14 we recommend that either a
relay or optocoupler is used to provide electrical decoupling.
Housing
The converter is supplied with a closed housing. It can be installed in a 19”
cabinet; see Section 2.7.
Front panel
Main switch
9-pin connecting socket for the plug-in control or for connection of a serial
interface
2 short-stroke keys
1 green/red STATUS LED
1 green COM LED (communications interface)
1 green MAIN LED (line supply voltage)
2 fuses TMS
The optional plug-in control has 10 keys and 1 LCD with 2 lines, each 16
characters. The plug-in control displays operating statuses and failures and
allows the configuration of the pumping system.
Rear panel
X14 50-pin D socket connector for remote monitoring and open-loop con-
trol
X19 3-pin Hirschmann connector for the connection to the mains supply
X20 MIL standard socket connector for internal sensors, magnetic bearing
connection, motor drive, and communication to the memory chip
X21 MIL standard socket connector for the TMS and purge valve connec-
tion
Spare slot for optional network cards, e.g. Device Net
TMS
DC motor.
Plug-in control

GA05141_0702 - 09/2004 13
Description
X19
X14 X20
X21
Each Fuse 4 A
digital
Start Stop
Esc Mon Prog Enter
+
_
Each Fuse 4 A
digital
Fig. 4 Front panel
X14 Connection control plug
X19 Mains connection
X20 Connection magnetic
bearing / pump motor /
memory chip
X21 Connection TMS / purge gas
valve
X22 Network connection (optional)
MAG.DRIVEdigital
MAG.DRIVEdigital with Plug-in control
(X22)
Fig.5 Rear panel with connections

GA05141_0702 - 09/2004
14
Description
1.5 Standard specification
MAG
The turbomolecular pumps are shipped complete, sealed in a PE bag con-
taining a desiccant.
The maximum effective life time of the desiccant is one year.
The intake flange is sealed with a transport seal, the forevacuum flange with
a plastic cap.
For the intake flange, a centering ring with FPM O-ring, outer ring, and a
splinter guard are enclosed.
We also provide the bolts for attaching the pump to your tool. To avoid any
safety risk we highly recommend using only the bolts provided with the
pump. Refer also to Section 2.3 “Connecting the MAG ...”.
The electronic frequency converter MAG.DRIVEdigital, the cables required
for operation and a seal kit to seal the pump tightly if it is removed from the
process must be ordered seperately.
MAG.DRIVEdigital
■Converter
■Line supply cable with USA connector, approx. 3m
■Line supply cable with EURO connector, approx. 3 m
■2 spare fuses for the TMS (miniature fuses 5 x 20 mm, F4A; according
to IEC 127-2/1) and 2 fuse holders 6.3 x 30 mm
■Connector for control plug X14 (pins 47/48 bridged)

GA05141_0702 - 09/2004 15
Description
1.6 Technical data
MAG W 830 C W 1300 C W 1300 C
High-vacuum flange DN 160 ISO-F 200 ISO-F 250 ISO-F
250 ISO-K
Pumping speed (PNEUROP)
for N2l·s-1 700 1100 1220
for Ar l·s-1 650 1050 1180
for H2l·s-1 300 920 1020
Compression for N2> 5·107> 108> 108
Ultimate pressure as to DIN 28 400 mbar < 10-8 < 10-8 < 10-8
Max. forevacuum pressure with N2mbar 2 2 2
Rotor speed min-1 24,000 36,000 36,000
Run-up time min < 4 < 6 < 6
Braking time with/without venting min 1 / < 4 1 / < 6 1 / < 6
Cooling water
Cooling connection, threads G 1/4“
with Swagelok for tube OD mm 6.4 (1/4“) 6.4 (1/4“) 6.4 (1/4“)
or with John Guest fitting for tube mm – 6 6
Cooling water temperature °C10 – 30
°F50 – 86
Weight approx. kg 32
Max. high-vacuum flange temperature
short-time °C85
°F185
for continuous operation °C60
°F140
Vibration level at high-vacuum flange
at max. speed µm < 0.01
Forevacuum flange DN 40 KF 40 KF 40 KF
or - 25 KF -
Recommended backing pump
Dry commpressing pump with
pumping speed m3/h 100
or rotary vane pump TRIVAC D 65 BCS
Admissible ambient temperature °C5– 40
°F40 – 104
Storage temperature °C-10 – +60
°F14 – 140
Max. relative air humidity 95% (non-condensing)
Degree of protection (EN 60529) IP 20

GA05141_0702 - 09/2004
16
Description
Technical data (continued)
MAG 1500 CT W 1500 CT 1500 CT W 1500 CT
High-vacuum flange DN 200 ISO-F 200 ISO-F 250 ISO-F 250 ISO-F
200 CF
Pumping speed (PNEUROP)
for N2l·s-1 1100 1100 1220 1220
for Ar l·s-1 1000 1050 1180 1180
for H2l·s-1 920 920 1020 1020
Compression for N2>108>108>108>108
Ultimate pressure as to DIN 28 400 mbar < 10-8 < 10-8 < 10-8 < 10-8
Max. forevacuum pressure with N2mbar 1.7 2.6 1.7 2.6
Rotor speed min-1 36,000
Run-up time min < 6
Braking time with/without venting min 1 / < 6
Cooling water
Cooling connection, threads G 1/8“
with Swagelok elbow for tube OD mm 6,4 (1/4“)
Cooling water temperature °C10 – 30
°F50 – 86
Base flange temperature °C20 – 90
°F68 – 194
Weight approx. kg 32
Max. high-vacuum flange temperature
short-time °C (°F) 85 (185)
for continuous operation °C (°F) 60 (140)
for bake-out (CF flange only) °C (°F) – 120 (248) – –
Vibration level at high-vacuum flange
at max. speed µm < 0.01
Forevacuum flange DN 40 KF
Recommended backing pump
Dry commpressing pump with
pumping speed m3/h 100
or rotary vane pump TRIVAC D 65 BCS
Admissible ambient temperature °C5– 40
°F40 – 104
Storage temperature °C-10 – +60
°F14 – 140
Max. relative air humidity 95% (non-condensing)
Degree of protection (EN 60529) IP 20

GA05141_0702 - 09/2004 17
Description
Technical data (continued)
MAG W 2200 C W 2200 C W 2800 CT W 3200 CT
High-vacuum flange DN 200 ISO-F 250 ISO-F 250 ISO-F 320 ISO-F
Pumping speed
for N2l·s-1 1600 2000 2650 3200
for Ar l·s-1 1450 1900 2450 3000
for H2l·s-1 1650 1800 2100 2250
Compression for N2> 108
Ultimate pressure as to DIN 28 400 mbar < 10-8
Max. forevacuum pressure mbar 2,0
Rotor speed min-1 29,400 29,400 28,800 28,800
Run-up time min < 8 < 8 < 10 < 10
Braking time with/without venting min 1 / <7 1 / <7 2 / <9 2 / <9
Cooling water
Cooling connection, threads G 1/8“
with Swagelok elbow for tube OD mm – – 6.4 (1/4“) 6.4 (1/4“)
with stainless steel hose nipples
for tube ID 1/2“ 1/2“ – –
Cooling water temperature °C10 – 30
°F50 – 86
Base flange temperature °C20 – 80
°F68 – 176
Weight kg 48 48 64 65
Max. high-vacuum flange temperature
short-time °C85
°F185
for continuous operation °C60
°F140
Vibration level at high-vacuum flange
at max. speed µm < 0.01
Forevacuum flange DN 40 KF
Recommended backing pump
Dry commpressing pump with
pumping speed m3/h 100
or rotary vane pump TRIVAC D 65 BCS
Admissible ambient temperature °C5– 40
°F40 – 104
Storage temperature °C-10 – +60
°F14 – 140
Max. relative air humidity 95% (non-condensing)
Degree of protection (EN 60529) IP 20

GA05141_0702 - 09/2004
18
Description
Technical data (continued)
MAG W 830 W 1300 W 2200 W 2800
High-vacuum flange DN 160 CF 200 CF 250 CF 250 CF
Pumping speed for N2measured
without splinter guard (PNEUROP) l·s-1 900 1170 1800 2400
Compression for N21.5 · 1081.5 · 1083.5 · 1051 · 109
Compression for H27.5 · 1027.5 · 1021 · 1041.6 · 103
Ultimate pressure as to DIN 28 400 mbar < 1·10-10
Max. forevacuum pressure with N2
water cooled mbar 2213
air cooled mbar 0.2 0.2 0.1 0.3
Rotor speed min-1 36,000 36,000 29,400 28,800
Run-up time min < 8 < 8 < 10 < 10
Weight kg 30 30 60 75
Max. high-vacuum flange temperature
short-time °C (°F) 85 (185)
for continuous operation °C (°F) 60 (140)
for bake-out (CF flange only) °C (°F) 120 (248)
Forevacuum flange DN 40 KF
Admissible ambient temperature °C5– 40
°F40 – 104
Storage temperature °C-10 – +60
°F14 – 140
Max. relative air humidity 95% (non-condensing)
Degree of protection (EN 60529) IP 20

GA05141_0702 - 09/2004 19
Description
Technical data (continued)
Purge gas
see Section 2.6
MAG.DRIVEdigital
Voltage range 200 - 240 V +10% -15%
Line supply frequency 50 / 60 Hz
Load
Stand-by approx. 100 W
Maximum heated pumps 1800 W
Maximum non-heated pumps 1100 W
Max. voltage motor 60 V
Maximum pump current 15 A rms
Internal main fuse 16 A
Rated braking capacity 200 kA
System fuse L or G characteristic
Maximum frequency 600 Hz
Load capability, relay output 42 V, 1 A
Temperature during operation 0-45 °C
Storage temperature - 10 °C to + 60 °C
Relative air humidity 95% (non condensing)
Overvoltage category II
Contamination level in accordance with EN 61010 2
Weight 10 kg
Degree of protection (EN 60529) IP20

GA05141_0702 - 09/2004
20
Description
0
500
1000
1500
2000
2500
3000
3500
1,00E-04 1,00E-03 1,00E-02 1,00E-01
Inlet pressure [mbar]
Pumping speed [l/s]
MAG W 3200 CT DN 320
MAG W 830 C DN 160
MAG (W) 1300 / 1500 C/CT DN 250
MAG W 2200 C DN 250
MAG W 2800 C/CT DN 250
MAG (W) 1300 / 1500 C/CT DN 200
MAG W 2200 C DN 200
Fig. 6 Pumping speed curves for Nitrogen
With purge gas
with splinter guard
Forepump 100 m3/h
Pipe 1 m DN 40
according to PNEUROP
109
108
107
106
105
104
103
102
101
10-6 10-4 10-5 10-3 10-1 10-2 100101
mbar
He
H2
N2
MAG W 2800
MAG W 2200
MAG W 830/1300
Fig. 7 k0curves
Compression k0
Forevacuum pressure