LEYBOLD TURBOVAC 340 M User manual

TURBOVAC
340 M
340 MC
340 MCT
341 MCT
Turbomolecular Pumps
with Magnetic Bearing
Cat. No.
855 80/81/82/83
894 32, 855 97
894 33
894 34
Operating Instructions
Vacuum Pumps Instrumentation Fittings and Valves LEYBOLD VACUUM
GA 05.123/3.02
Pumps International
www.PumpsInt.com

Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Design of the TURBOVAC . . . . . . . . . . . . . . . . 4
1.2 Temperature control . . . . . . . . . . . . . . . . . . . . . 4
1.3 Purge gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.4 Standard specification . . . . . . . . . . . . . . . . . . . 6
1.5 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.6 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . 9
2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.1 Operating environment . . . . . . . . . . . . . . . . . 10
2.2 Connecting the TURBOVAC
to the vacuum chamber . . . . . . . . . . . . . . . . . 10
2.3 Connecting the backing pump . . . . . . . . . . . . 14
2.4 Connecting the cooling . . . . . . . . . . . . . . . . . 15
2.5 Connecting the purge gas valve and
power failure airing valve . . . . . . . . . . . . . . . . 18
2.6 Attaching the flange heater . . . . . . . . . . . . . . 20
2.7 Connecting the TURBOTRONIK . . . . . . . . . . 20
3 Operation and Control . . . . . . . . . . . . . . . . . . 21
3.1 Switching on . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.3 Bake-out . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.4 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.5 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.6 Power failure - Cable break . . . . . . . . . . . . . . 24
4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.1 Replacing the diaphragm filter of the
purge gas and venting valve . . . . . . . . . . . . . 25
4.2 Removing the pump from the system . . . . . . . 26
4.3 Service at Leybold’s . . . . . . . . . . . . . . . . . . . . 26
Warning
Indicates procedures that must be strictly observed to
prevent hazards to persons.
Caution
Indicates procedures that must be strictly observed to
prevent damage to, or destruction of the TURBOVAC.
Figures
The references to diagrams, e. g. (1/2) consist of the Fig.
No. and the Item No. in that order.
Leybold-Service
If a pump is returned to Leybold, indicate whether the
pump is free of substances damaging to health or
whether it is contaminated. If it is contaminated also in-
dicate the nature of hazard. Leybold must return any
pump without a declaration of contamination to the sen-
der’s address.
We reserve the right to alter the design or any data given
in these Operating Instructions. The illustrations are not
binding.
2GA 05.123/3.02 - 12/95
Fig. 1 TURBOVAC 340 M
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Description
3
1 Description
The TURBOVAC 340 M, 340 MC, 340 MCT, and 341
MCT are turbomolecular pumps utilizing magnetic bea-
rings.They are designed to evacuate vacuum chambers
down to pressure values in the high-vacuum range.
The rotor and stator plates of the TURBOVAC 340 MC,
340 MCT, and 341 MCT are protected with a special
ceramic layer.
The TURBOVAC 340 MCT and 341 MCT are equipped
with a temperature control device.
The TURBOTRONIK frequency converter and a backing
pump will be required for the operation of the TURBO-
VAC.
The TURBOVAC 340 M, 340 MC, 340 MCT, and 341
MCT, referred to below simply as “TURBOVAC”, are the
product of joint development activities by Leybold and
the Research Center at Jülich.
Compatibility with pumped media
Turbomolecular pumps are not suitable for pumping ei-
ther liquids or gases which contain dust particles.
Turbomolecular pumps without the protective gas fea-
ture are suitable only for moving air or inert gases. They
are not suitable for pumping corrosive or reactive gases.
The TURBOVAC are fitted with purge gas device. The
gas protects only the bearing section and the TURBO-
VAC motor.
Some media (e.g. aluminium chloride) can sublimate in
the pump and form deposits. Thick coatings can inter-
fere with the clearences required for operation and ulti-
mately cause the pump to seize. Deposits can be pre-
vented in some processes by heating the pump. Please
direct any queries to the manufacturer.
Corrosive gases (such as chlorine) can damage the ro-
tors.
During operation the pressure inside the TURBOVAC is
so low that there is no danger of ignition (at pressures
below about 100 mbar). A hazardous condition will be
created if flammable mixtures enter the hot pump at
pressures above 100 mbar. During operation the pump
can reach temperatures as high as 120°C. Sparks could
occur in case of damage to the pump and these could
ignite explosive mixtures.
We would be glad to consult with you as regards the
media which can safely be handled with this unit, with or
without purge gas.
Fig. 2 TURBOVAC 340 MC TURBOVAC 340 MCT TURBOVAC 341 MCT
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Description
4
1.1 Design of the
TURBOVAC
The TURBOVAC is similar in design to the turbomole-
cular pumps equipped with ball bearings; it comprises
basically the pump housing, the multi-stage rotor with
the stator package, the drive, and a magnetic bearing.
The rotor is made from an aluminum alloy. The pump is
designed for operation with purge gas.
A suspension system without contact between moving
parts was achieved by providing a permanently mag-
netic, passive bearing located near the center of gravity,
this working in conjunction with a permanently magnet-
ized stabilizer with coils effective in the axial direction.
The coils are partially actively regulated by a non-con-
tacting axial sensor with a downline electronic controller.
This bearing concept allows for low-vibration operations
and insures operation of the TURBOVAC in any moun-
ting position.
Two touch-down bearings are provided to stabilize the
rotor mechanically if impacts occur during operation.
These bearings use no lubricant. They also provide axial
support of the pump rotor when the frequency converter
is switched off.
A DC motor without commutator is used to power the
rotor.
Drive voltage for the motor and the operating voltage for
the active magnetic bearing are supplied by the TURBO-
TRONIK frequency converter. It also handles automatic
monitoring of these systems.
1.2 Temperature control -
TURBOVAC MCT
The TURBOVAC MCT are equipped with a temperature
control to keep the temperature at the TURBOVAC con-
stant within a narrow control range. This unit comprises
essentially
- a temperature control unit (TCU),
- a temperature sensor Pt 100
- a heating collar,
- a cooling coil for the pump housing and
- a magnet valve for the cooling water.
The heating collar, the magnet valve, and the cooling coil
are attached to the TURBOVAC MCT, the Pt 100 and the
temperature control unit are accessories.
The temperature sensor measures continuously the tem-
perature at the basic flange. The TURBOTRONIK swit-
ches the heating collar on or opens the magnet valve to
allow cooling water to flow.
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Description
5
Key to Fig. 3
1 High-vacuum connection port
2 Upper touch-down bearing
3 Rotor
4 Stator elements
5 Permanent-magnet bearing
at center of gravity
6 DC motor
7 Bottom touch-down bearings
8 Purge gas connection
9 Stabilizer
10 Axial sensor
Fig. 3 TURBOVAC 340 M turbomolecular pump
1
2
3
4
5
6
7
8
9
10
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Description
6
Key to Fig. 4
1 Purge gas connecting flange
2 Throttle nozzle
3 Sintered metal filter
4 O-rings
5 Diaphragm filter
6 Hose nozzle
7 Venting bypass
8 Solenoid valve
9 Plug
10 Pin
Fig. 4 Purge gas and venting valve fitted to a
TURBOVAC (schematic)
1.3 Purge gas
We recommend a purge gas and venting valve for purge
gas operation. It is a throttle for supplying a dosed quan-
tity of purge gas to turbomolecular pumps, and a venting
valve for turbomolecular pumps.
It is not suitable for shutting off the purge gas con-
nection of a TURBOVAC.
Nitrogen, argon or dry air are used as the purge gas. The
purge gas flows through the filter and the throttle nozzle,
into the purge gas connection (4/1) of the turbomolecular
pump. The motor and bearing area of the pump is pro-
tected with purge gas.
Since the motor and bearing area is connected to the
forevacuum area only by a narrow slit, a pressure higher
can build up there than in the forevacuum area. This
results in continuous gas flow from the motor area to the
forevacuum area. The gas flow prevents aggressive,
corrosive gases or dust entering the motor and bearing
area.
1.4 Standard specification
The turbomolecular pumps are shipped complete, seal-
ed in a PE bag containing a desiccant.
The maximum effective life of the desiccant is one year.
The electronic frequency converter as well as the con-
nection lines required for operation must be ordered sep-
arately.
High-vacuum connection ISO-K
Splinter guard, centering ring with FPM sealing ring,
outer ring.
High-vacuum connection ANSI
Splinter guard, FPM sealing ring.
Forevacuum connection port
Centering ring with FPM O-ring and clamping ring.
Both the purge gas port and the venting port are blanked
off for shipping.
High-vacuum and fore-vacuum connection are sealed
with plastic caps for transport.
PE = Polyethylen
FPM = Fluor caoutchouc, resistant to temperatures of up to 150°C
(302°F)
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Description
7
340 M
100 ISO-K
100 CF
270
370
340
> 109
6.4·104
2.5·103
< 10-10
5·10-1
51,600
3.5
1 / 6
not
required
-
-
-
100/212
any
16
25 KF
10 KF
10 KF
D 16 B
D 25 B/BCS
1.5 Technical data
TURBOVAC
High-vacuum connection flange DN
Pumping speed for
N2l·s-1
He l·s-1
H2l·s-1
Compression for
N2
He
H2
Ultimate pressure as to
DIN 28 400 mbar
Max. forevacuum pressure
at rated speed mbar
Speed min-1
Run-up time min
Braking time with/without venting min
Cooling
Cooling connection,
hose nipple mm
Cooling water temperature °C
(°F)
Cooling water throughput
rate at 15°C/59°F l·h-1
Max. bake-out temperature
at CF flange °C/°F
Mounting position
Weight ca. kg
Forevacuum connection flange DN
Purge gas connection flange DN
Venting connection flange DN
Recommended backing pump
TRIVAC
at normal operation
for purge gas operation
Purge gas valve
Purge gas connection pressure, abs. 1.0 - 1.5 bar
Purge gas dry nitrogen, argon or similar
Purge gas throughput
at purge gas pressure 1.0 bar see
at purge gas pressure 1.5 bar Fig. 17
Purge gas connection, hose nipple 6 mm (1/4“)
340 M
160 ISO-K
160 CF
400
400
370
> 109
6.4·104
2.5·103
< 10-10
5·10-1
51,600
3./2125
1 / 6
not
required
-
-
-
100/212
any
16
25 KF
10 KF
10 KF
D 16 B
D 25 B/BCS
340 MC
100 ISO-K
270
370
340
> 109
6.4·104
2.5·103
< 10-10
5·10-1
43,860
3.5
1 / 6
water
7.5
15 - 25
(59 - 77)
20
-
any
16
25 KF
10 KF
10 KF
-
D 25 B/BCS
340 MC
160 ISO-K
400
400
370
> 109
6.4·104
2.5·103
< 10-10
5·10-1
51,600
3.5
1 / 6
water
7.5
15 - 25
(59 - 77)
20
-
any
32
25 KF
10 KF
10 KF
-
D 25 B/BCS
340 MCT
100 ISO-K
270
370
340
> 109
6.4·104
2.5·103
< 10-10
5·10-1
43,860
3.5
1 / 6
water
7.5
15 - 25
(59 - 77)
20
-
any
16
25 KF
10 KF
10 KF
-
D 25 B/BCS
341 MCT
100 ISO-K
270
370
340
> 109
6.4·104
2.5·103
< 10-10
5·10-1
43,860
3.5
1 / 6
water
7.5
15 - 25
(59 - 77)
20
-
any
16
40 KF
10 KF
10 KF
-
D 25 B/BCS
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
D
B
50
100
60˚
28
111
60˚ F
112
ø178 A
DN
80
114
123
B
E
109
h
C
F1
F2
F3
D162
E
Description
8
Fig. 5 Dimensional drawings
C
D
B
50
ø178 A
DN
93
127
137
B
E
122
176
h
12
C
F1
F2
F3
D
101
99
60˚
28
101
F
60˚
E
E
D
B
114
100
60˚ 111
60˚ F50 186
ø178 A
DN 100
80
114
123
B
109
300
C
F1
F2
F3
D162
E
ø178 A
DN 100
80
114
B
109
300
C
F1
F2
F3
D162
E
ED
B
60˚
111
60˚ 50
111
F
164
123
TURBOVAC 340 MCT
TURBOVAC 340 M TURBOVAC 340 MC
TURBOVAC 341 MCT
Cat. No. Dim. h
——————————
855 80 311
855 81 322
855 82 311
855 83 308
894 32 300
855 97 298
A = High vacuum flange
B = Forevacuum flange
C = Venting flange
D = Purge gas flange
E = Connection for cooling
F1= Connection for DC motor
F2= Connection for stabilizer
F3= Connection for axial sensor
Dimensions in mm
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Description
9
Accessories
Flange heater
DN 100 CF, 230 V 854 27
DN 160 CF, 230 V 854 37
DN 100 CF, 110 V 854 28
DN 160 CF, 110 V 854 38
Purge gas and venting valve
110 V, 50/60 Hz 855 28/48
230 V, 50/60 Hz 855 29/49
24 VDC, 5 W 174 17
Spare diaphragm filter 200 17 876
Spare O-ring;
2 necessary 239 63 110
Power failure airing valve
230 V 174 26
24 V DC, 5 W 174 19
Venting valve, manual 173 24
Adsorption trap, DN 25 KF 854 15
Aluminum oxide; 1.3 kg 854 10
Microfilter
DN 100 ISO-K 887 21
DN 160 ISO-K 887 22
Seal kit 200 91 240
Seal kit + Operating Instructions 200 91 437
1.6 Ordering data
TURBOVAC
with high vacuum connection flange
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
Electronic frequency converter
TURBOTRONIK NT
340 M
855 80
855 81
855 82
855 83
340 M
857 29 (230 V)
857 30 (120 V)
857 31 (100 V)
340 MC
894 32
855 97
340 MA
857 32 (120 V)
340 MCT
894 33
340 MA
857 32 (120 V)
341 MCT
894 34
341 MA
857 34 (208 V)
+ Accessories for temperature
control (see TURBOTRONIK
Operating Instructions)
Connection line motor
859 10 (3 m long)
Connection line bearing
859 11 (3 m long)
Connection line motor
859 12 (20 m long)
Connection line bearing
859 13 (20 m long)
Set of
connection lines
857 70 (3 m long)
857 71 (5 m long)
857 72 (10 m long)
857 73 (20 m long)
Connection lines
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
10
2.2 Connecting the TURBO-
VAC to the vacuum
chamber
Warning The pump must be securely attached. If the
pump were to become blocked, insufficient
attachment could cause the pump to break
away or allow internal pump parts to be dis-
charged. Never operate the pump (in bench
tests, for instance) without its being con-
nected at the vacuum chamber.
If the pump should suddenly seize, the decleration
torque of 880 Nm will have to be absorbed by the sys-
tem. To accomplish this, 8 clamping screws are neces-
sary for fastening the ISO-K high-vacuum flange:
Clamping bolts made of steel must be torqued down to
35 Nm, those made of stainless steel to 50 Nm.
When installing CF flanges, use only the bolts provided
(tightening torque 30 Nm).
You will find the order numbers for the (clamping) bolts
in the Leybold-Catalog.
The TURBOVAC is shipped in a sealed PE bag with
desiccant. Do not open the package until immediately
before installing.
Remove the covers and blanking flanges only just
before attaching, to ensure that the TURBOVAC is instal-
led under the cleanest possible conditions.
Pay attention to maximum cleanliness when connecting.
Fig. 6 Transport
2 Installation
When moving the pumps, a lifting fork can be used at the
lower surfaces on the base flange; see fig. 6. Having
unpacked the TURBOVAC only put it down onto its seal-
ed high-vacuum connection flange. Every other possibi-
lity will be too unstable.
Caution Be careful not to damage the sockets and
coolant connections during transportation.
Do not stand below the pump while connecting or remov-
ing the TURBOVAC.
The noise level when the pump is running is below 70
dB(A). No acoustic insulation is required.
Warning Never expose any parts of the body to the
vacuum.
Caution If not equipped with adequate accessories
the TURBOVACs are not suitable for pump-
ing dusty, aggressive or corrosive media. In
case of aggressive or corrosive media the
pumps must be operated with purge gas.
When pumping media containing dust, in-
sert a microfilter; see Section 1.6.
Observe also Section “Compatibility” at the
beginning of this Operating Instructions.
2.1 Operating environment
When using the TURBOVAC inside a magnetic field, the
magnetic induction at the pump housing must not ex-
ceed 5 mT, up to 8 mT is permissible for intermittent
exposure; (1 mT (milliTesla) = 10 G (Gauß))
Exceeding this limit value can cause excessive rotor
heating due to the eddy currents generated in this situ-
ation. It is therefore necessary to provide suitable shield-
ing in such cases.
The standard version of the TURBOVAC is resistant to
radiation at levels up to 103Gy. (1 Gy (Gray) = 100 rad)
The ambient temperature must not exceed 45°C (113°F).
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
11
max. 100 mm (4 inch)
max. 100 mm
(4 inch)
max. 100 mm
(4 inch)
Wrong
Fig. 7 Flanging the TURBOVAC permanently to the vacuum chamber
Weight of the vacuum chamber > 100 kg (220 Ibs)
Weight of the vacuum
chamber > 100 kg (220 Ibs)
The TURBOVAC runs low in vibration and noise. No
vibrations or resonances from outside equipment may be
allowed to be transferred to the TURBOVAC.
The TURBOVAC is sensitive to low-frequency vibrations.
Foreign objects entering the pump through the high-va-
cuum flange can cause serious damage to the rotor.
That’s why the splinter guard supplied must always be
kept installed.
Damages caused during operation without the splinter
guard are excluded from warranty.
Mount the TURBOVAC as close as possible to the vacu-
um chamber. If the TURBOVAC is permanently flanged
to a vacuum chamber with a weight exceeding 100 kg, it
will not be necessary to secure it in any other way.
In case of lighter vacuum vessels secure the pump addi-
tionally.
Use vibration absorbers when flange mounting the pump
in order to decouple highly sensitive equipment and to
keep external vibrations from being transmitted to the
TURBOVAC. In this case the TURBOVAC is to be moun-
ted separately from the vacuum chamber or use vibra-
tion absorbers for the attachment to the vacuum cham-
ber; refer to Fig. 8 for details.
Do not use the plastic foot to attach the TURBOVAC.
Flanging on ISO-K-flanges
When connecting the high-vacuum flange, fit the O-ring
at the centering ring. The O-ring should be flat and even;
it must not be twisted. Then add the outer ring; see Fig.
9.
Use the clamps to join securely the flange and the ma-
ting flange.
A collar flange is required when using ultra-high-vacuum
sealing washers.
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
12
Fig. 8 Flange mounting using vibration absorbers
Fig. 9 Using ISO-K flanges
Integrating the outer
centering ring
max. 100 mm (4 inch)
Vibration
absorber
max. 100 mm (4 inch)
max. 100 mm
(4 inch)
Permissible only for
TURBOVAC 340 M
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
13
Key to Fig. 10
1 Cooling water connection
2 Connection for axial sensor
3 Stabilizer connection
4 Forevacuum connection flange
5 Red LED, lights when the
magnetic bearing is active
6 DC motor connection
7 Venting flange
8 High-vacuum connection flange
9 Splinter guard
10 Purge gas connection flange
Fig. 10 Connection fittings
7
6
5
4
3
2
1
8
9
10
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
14
2.3 Connecting the backing
pump
A two-stage rotary vane pump is required as the backing
pump to support operation of the TURBOVAC.
We recommend using our TRIVAC-B pumps for this pur-
pose.
It is possible to use the dry-compression DRYVAC
backing pump for operation of the TURBOVAC. Since
the DRYVAC has a higher ultimate pressure than two-
stage rotary pumps, the admissible throughput of the
TURBOVAC will drop when operating with a DRYVAC.
Connect the backing pump connection flange of the
TURBOVAC to the backing pump.
Fig. 12 shows schematically the design of a pump sys-
tem incorporating a TURBOVAC turbomolecular pump
and a TRIVAC backing pump with integral anti-suckback
valve.
When using a backing pump not having an integrated
anti-suckback valve, a separate safety valve should be
used. The safety valve keeps oil from backstreaming
from the backing pump and into the TURBOVAC when
the system is not running.
We recommend installing a sorption trap in the fore-line
to insure that the forevacuum chamber in the TURBO-
VAC remains largely free of oil vapors during operation,
too.
Be sure that there is sufficient vibration decoupling be-
tween the TURBOVAC and the backing pump.
The torque on the forevacuum connection flange must
not exceed the values shown in Fig. 11.
Warning The forevacuum line must be tight. Hazard-
ous gases can escape at leaks or the gases
being pumped can react with the air or
humidity.
Fig. 11 Maximum torques for the screwed-in forevacuum connection flange
Torque with rotating-out-direction
ML< 35 Nm (26 ft-lb)
Torque with fixed direction of rotation
M < 54 Nm (40 ft-lb)
Torque diagonally versus forevacuum
connection axis
Mq< 50 Nm (37 ft-lb)
A
Mq
MLM
View A
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
15
Fig. 12 Layout of a turbomolecular pump system
Key to Fig. 12
1 Turbomolecular pump
2 Forevacuum gauge point
3 Backing pump
4 Anti-vibration bellows
5 Sorption trap
6 Forevacuum valve
7 Venting valve
8 High-vacuum valve
9 Purge gas connection
10 Valve in the roughing line
11 Electronic frequency converter
— — — — roughing line; recommended if
shorter cycle times are to be achieved
— · — · — · — · drive and control line
2.4 Connecting the cooling
In normal operation the TURBOVAC will not require any
cooling.
Water cooling will be needed, however,
- for processes where the pump temperature must be
regulated,
- for processes where an intake pressure of p > 10-3
mbar is maintained over an extended period of time,
- when continuous temperatures in the vacuum chamber
exceed 150°C (302°F) and the pump is mounted on top
of the vacuum chamber,
- when continuous temperatures in the vacuum chamber
exceed 250°C (482°F) regardless of where the pump is
mounted.
- when heating of the basic pump flange is necessary or
wanted.
The maximum permissible temperature in the vacuum
chamber is 300°C (572°F) when operating the TURBO-
VAC with water cooling.
Use only clean, soft water.
Connect the cooling water feed and drain lines at the
hose nipples. Do not mix up water inlet and water outlet.
Use hose clamps to keep the hoses from slipping off.
Coolant water pressure may not exceed 6 bar.
The temperature of the cooling water should be between
15°C and 25°C (59°F and 77°F).
Temperatures which are slightly lower (between 10°C
and 15°C; 50°F and 59°F) are permissible but there will
be danger of condensation on or in the pump.
Pumps International
www.PumpsInt.com

Installation
Slightly higher temperatures (between 25°C and 30°C;
77°F and 86°F) are also acceptable and present no
hazard to the pump. Considerably higher temperatures
may cause a drop in performance, since the TURBO-
TRONIK will slow down pumping speed if temperatues
are too high.
The temperature control (TCU) on the TURBOTRONIK
MA may indicate the operation status FAILURE.
Turn off the cooling water supply before venting the
TURBOVAC and when it is not running in order to avoid
condensate formation in the pump.
If immediate pump shut-down in case of cooling water
supply failure is required, then a flow monitor will have to
be inserted in the drain line. For details, refer to the Ope-
rating Instructions GA 05.299 flow monitor.
Temperature control
(for TURBOVAC 340/341 MCT only)
For connection and operation of the temperature control
see also Operating Instructions for the TURBOTRONIK.
Plug in the connection line heating collar - TURBOTRO-
NIK to the heating collar and at the socket HEATER of
the TURBOTRONIK.
Plug in the connection line cooling water magnetic valve
- TURBOTRONIK at the cooling water magnetic valve
and at the socket COOLER of the TURBOTRONIK.
Screw in the Pt 100 temperature sensor. Maximum tor-
que = 2.5 Nm = 1.8 ft-lb. Insert the plug of the Pt 100
connection line at the socket Pt 100 of the TURBOTRO-
NIK.
Warning The basic flange heater can become so hot
during operation (> 80°C, 176 °F) that they
represent a burn hazard:
Provide protection against contact with the
hot components.
16 GA 05.123/3.02 - 12/95
Fig. 13 TURBOVAC 341 MCT; 340 MCT similar
Key to Fig. 13
1 Cooling coil for pump housing
2 Heating collar
3 Temperature sensor Pt 100
4 Magnetic valve for water cooling
1
2
3
4
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
17
27
l/h 26
25
24
23
22
21
20
19
18 10 20 °C30
Cooling water temperature
Fig. 15 Recommended cooling water flow
Cooling water flow
TPump flange = 100 °C (212 °F)
TVacuum chamber = 300 °C (572 °F)
TPump flange = 100 °C (212 °F)
Fig. 14 Permissible continuous temperature in the vacuum chamber
With water cooling
in all mounting positions
TVacuum chamber = 250 °C
(482 °F)
TPump flange = 100 °C (212 °F)
TVacuum chamber = 250 °C (482 °F)
TPump flange = 100 °C (212 °F)
TVacuum chamber = 150 °C (302
operation window
Pumps International
www.PumpsInt.com

Installation
2.5 Connecting the purge
gas or power failure
airing valve
Connect either a power failure airing valve to venting
flange (10/7) or a purge gas valve to the purge gas flan-
ge (10/10).
Which of the two valves is used will depend on the na-
ture of the process.
When pumping clean, non-corrosive gases you should
install the power failure airing valve. This valve keeps the
TURBOVAC from continuing to run for a long time after
it has been switched off; it also keeps oil from diffusing
back from the fore-line.
Connect a purge gas valve when pumping reactive
media.
Leybold will provide technical support when making the
decision as to which media can be pumped with or with-
out purge gas.
When using purge gas, the larger volume of gas at the
forevacuum port may require the use of a backing pump
providing higher pumping speed; see Section 1.5.
A turbomolecular pump operated with purge gas must
be vented through the purge gas connection when
switched off; hazardous gases may otherwise enter the
motor and bearing area.
Connection of the purge gas valve
Flange the purge gas valve directly onto the purge gas
connecting flange (10/10), (16/1) of the pump.
The arrow on the valve must point in the direction of flow
of the purge gas, i.e. towards the pump.
The pin (16/10) must be in the withdrawn position, and
with the valve fitted must also point towards the pump. If
the pin is pushed in, the bypass of the purge gas valve
cannot be opened. In this case, the valve operates as a
simple purge gas valve, without the venting facility.
Connect the purge gas hose to the hose nozzle (16/6)
and secure using a hose clip.
Set the purge gas pressure at the inlet of the purge gas
valve to 1.0 - 1.5 bar absolute pressure (0.0 psig to 7.5
psig).
When taking purge gas from a pressure tank or a central
supply system, use only combined pressure reducing
and regulating valves with flow meters which can supply
both the low purge gas flow and the considerably larger
ventilation gas volumes.
Electrical connection must only be performed by a quali-
fied electrician in accordance with the local regulations.
Release the M3 retaining screw and withdraw the plug
(16/9).
Connect the 3-core mains lead.
Replace the plug and secure.
The venting bypass (16/7) is open when de-energized.
The purge gas channel (16/2) is permanently open.
Connect the purge gas valve to the TURBOTRONIK.
18 GA 05.123/3.02 - 12/95
Pumps International
www.PumpsInt.com

GA 05.123/3.02 - 12/95
Installation
19
Key to Fig. 16
1 Purge gas connecting flange
2 Throttle nozzle
3 Sintered metal filter
4 O-rings
5 Diaphragm filter
6 Hose nozzle
7 Venting bypass
8 Solenoid valve
9 Plug
10 Pin
Fig. 16 Purge gas and venting valve fitted to a
TURBOVAC (schematic)
Time
not allowed
not allowed
ideal
Ar, Air, N2Purge gas flow
pmax = 1.5 bar
mbar·l·s-1 sccm
0.6 36
0.4 24
Fig. 17 Recommended purge gas flow
Pumps International
www.PumpsInt.com

Installation
2.6 Attaching the flange
heater
(only for pumps with CF flange)
The flange heater is used to bake out, under automatic
control, the high-vacuum port at the TURBOVAC and the
mating flange on the vacuum chamber.
The flange heater is to be mounted directly to the high
vacuum intake flange (10/8) of the TURBOVAC. This is
to be done when the pump is flange-mounted.
Warning The flange heater can become so hot dur-
ing operation (> 80°C, 176 °F) that they
represent a burn hazard. Provide protection
against contact with the hot components.
.
2.7 Connecting the TUR-
BOTRONIK
Refer to the TURBOTRONIK Operating Instructions for
details regarding its mounting, connection and operation.
The electronics for the magnetic bearings will have to be
adjusted to accommodate the particular pump mounting
orientation; information on this is given in the TUR-
BOTRONIK Operating Instructions.
Warning The pump may be operated only with a suit-
able frequency converter and connector
cables.
Peak voltages of up to 130 V may be pre-
sent at the connector line between the fre-
quency converter and the pump; mains volt-
age is present at the fan, the valves and
their feed leads.
Route all cables so as to protect them from
damage.
The protection rating for the connectors is IP20.
Do not expose the pump, the frequency converter or the
connections to dripping water.
20 GA 05.123/3.02 - 12/95
Pumps International
www.PumpsInt.com