LEYBOLD TurboDrive TD20 classic User manual

OPERATING INSTRUCTmONS
INTER-
FACE
Turbo.Drive TD20 classic
Frequency Converter for
Turbomolecular Pumps
Part Nos.
B00075V0001 to
B00075V0007
r--.,
b-.Leybold
vacuurTI

Contents
Section
1
1.1
1.2
1.3
1.4
1.5
2
2.1
2.2
2.3
2.4
2.5
3
3.1
3.2
3.2.1
3.2.2
3.2.3
3.2.4
3.2.5
3.2.6
3.2.7
3.2.8
3.2.9
3.2.10
3.3
3.4
3.4.1
3.5
3.6
4
5
Page
Important Safety Information . ................................... 3
Description . .................................................. 4
Design and function ............................................. 4
Supplied equipment ............................................. 4
Technical data .................................................. 6
Ordering information
............................................. 7
Accessories ........... , ....... ,., .... , .. , , ....... , , .... , . , , , , , 7
Installation ................................................... 8
Placement. .................................................... 8
Conforming utilisation
............................................ 8
Providing the connections .......... ' ............................... 9
Replacing the NT 20 ............................................ 10
Replacing the NT 151/361 or NT
361 ............................... 11
Operation ..........•........................................ 13
Start-up ..................................................... 13
Interfaces .................................................... 14
9-way PLC interface
............................................ 14
RS 232 interface ............................................... 15
Profibus interface .............................................. 16
RS 485 interface ............................................... 16
25-way PLC interface
........................................... 18
DeviceNet interface
............................................. 20
EthernetllP interface
............................................ 20
Parameter list ................................................. 21
Specific parameter data for the pumps .............................. 25
Error messages
................................................ 26
Start-up of the TURBOVAC ....................................... 27
Operation
.................................................... 27
Status table at default settings
.................................... 27
Shut-down
of the TURBOVAC .................................... 28
Shut-down olthe TurboDrive TD20 classic .......................... 28
Maintenance . ........................•................•...... 28
Troubleshooting . ............................................. 29
EC Conformance Declaration . .................................. 31
21 GA05228_0302 - 08/2006 -© Leybold Vacuum

Safety Information
mmportant
Safety Information
Indicates procedures that must be strictly observed to prevent hazards to Warning
persons.
Indicates procedures that must be strictly observed to prevent damage to, Caution
or destruction of the product.
The Leybold Turbo.Drive TD20 classic frequency converter has
been designed for
safe and efficient operation when used proper-
ly and in accordance with these Operating Instructions. It is the
responsibility of the user to carefully read and strictly observe all
safety precautions described in this section and throughout the
Operating Instructions. The TurboDrive must only be operated
in the proper condition and under the conditions described
in the Operating Instructions. It must be operated and main-
tained by trained personnel only. Consult local, state, and national
agencies regarding specific requirements and regulations.
Address any further
safety, operation and/or maintenance ques-
tions to your nearest Leybold Vacuum office.
Only qualified personnel or the Leybold Service Department may
carry out work on the frequency converter.
Potentially fatal voltages
are present inside the frequency conver-
ter.
Open the frequency converter only after it has been isolated from
the mains power supply.
We reserve the right to alter the design orany data given in these Operating
Instructions. The illustrations are not binding.
Warning
GA05228_0302 . 08/2006 - © Leybold Vacuum 13

Description
1 Description
1.1 Design and function
The electronic frequency converter Turbo.Drive TD20 classic is used to drive
the following turbo molecular pumps:
TURBOVAC 151, 151 C, 361, 361 C,
TURBOVAC 600, 600 C,
TURBOVAC 1000, 1000 C, 1100 C.
These pumps each comprise a three-phase asynchronous motor with the
appropriate rating to drive the rotor.
The TurboDrive TD20
classic converts the single-phase mains voltage into a
three-phase AC voltage with regulated frequency and amplitude.
Coding Each installed TURBOVAC has been individually coded. The acceleration
sequence, the regulation during operation, and the output speed will vary
depending on the installed pump model.
The Turbo.Drive TD20 classic has a 9-way PLC interface as standard and
additional interfaces
as option. It can be connected directly to mains volta-
ge.
The Turbo.Drive TD20 classic can be connected directly to mains voltage.
1.2 Supplied equipment
TurboDrive TD20 classic table-top electronic frequency converter with hou-
sing, Operating Instructions.
41 GA05228_0302 - 08/2006 -© Leybold Vacuum

o
LOAD ".
__ .. ___ .d.lIlO ..
000000000
SERVICE STOP START
~§§ 00
:LeybOld Turbo.Drive TD20 classic
vLlcul.In'\ ________ ---''-=-:..:::====---=--===-- __
o
green LED STATUS
off: Pump at standstill
or decelerating
flashes 250 ms on,
750
ms off Start delay time
flashes slowly 1
Is: Start command is present (for about 10 s after start)
flashes fast 3/s: Running
up or running down
on: Normal oOl3ration
yellow LED POWER
off: No supply voltage
flashes: Supply voltage too low
on:
red LED ERROR
off:
flashes:
on:
LED chain LOAD
after POST
is
No error, no warning
Warning is present, purnp can be operated
possibly with some restrictions
Fault is present,
pump stopped and can not be operated
, """",",,",,,,/,.,, "/"~~"",,,,--,,,,
LED STATUS flashes (Run-up) indicates the recognized
pump
indicates the TURBOVAC's speed
indicates the
motor current
indicates the error code
LED STATUS on (Normal operation)
LED ERROR on
SERVICE interface
START
Key STOP
RS 232 interface
Staltino the TURBOVAC's
Switching the TURBOVAC off
a failure
Fig. 1 Front panel of the Turbo.Drive TD20 cli;1ssic
Description
o
o
GA05228_0302 - 08/2006 -© Leybold Vacuum 15

Description
1
----213-----1
1----
198
---_
1'<3'1 ijij
TUfbo.D,I~B TD~O ....... €m
Fig. 2 Dimensional drawing for the Turbo.Drive TD20 claSSiC, dimensions in mm
1.3 Technical data
Mains connection 100 to 240 V AC -15%1+10%,
50/60 Hz
Power consumption tolerance including options
Power consumption
of the TURBOVAC < 500
VA
< 400 VA
Power output (motor)
Nominal voltage
Motor current limitation
Acceleration (max. 10 min.)
Continuous operation
Frequency
TURBOVAC speed ratings
TURBOVAC 151
TURBOVAC 361
TURBOVAC 600
TURBOVAC 1000
TURBOVAC 1100
Ambient temperature
Storage temperature
Relative air humidity
Type
of protection to EN 6059
Electrical safety
to EN 61010-1
Interference radiation
to 61326-1
EMC to IEC 801-2
Dimensions
Weight
61 GA05228_0302 - 08/2006 -© Leybold Vacuum
47V
5A
3.5A
o to 835 Hz
49,980 min-1
45,000 min-1
36,000 min-1
36,000 min-1
30,000 min-1
0-45 'C
-25 'C ...+70 'C
5 to 85 % (non-condensing)
IP 20
Class A
Severity 2
1/219",3HU
4 kg

11.4 Ordering information
Frequency converter Turbo.Drive TD20 classic
with 9-way PLC interface
with additional
RS 232 interface
with additional Profibus interface
with additional
RS 485 interface
with additional 25-way PLC interface
with additional DeviceNet interface
with additional EthernetilP interface
1.5
Accessories
Connection line to the TURBOVAC
3 m long
5 m long
10 rn long
20m
Power line cord
2 m long, Euro plug
2
rn long, US plug 6-15 P
3 m long, Euro plug
3rn US 6-15P
Plug for 9-way PLC connector with
integrated ON/OFF switch for the purnp
frame 1
g", 3HU
Adapter cable, 0.2 m long, 25-way PLC
interface-
2x Phoenix connector of the NT 20
Adapter cable, DRIVE connector of the
Turbo.Drive TD20
classic -TURBOVAC connection cable
of the
NT 151/361 or NT 361
Accessories for serial interfaces
PC software "Turbo.Drive Server" for Windows 95 and higher,
CD-ROM
III Display, change, save and compare parameter lists
iii Integration of customer's software
III Record parameter data
(Software supports only
RS 232, RS 485 and Profibus)
The software can also be downloaded from
~1,~X.b?12:S2Ti::t~~T~~~§~RE°rt§ IJ?;':'.~L~,~.~~.,
Part No.
800075V0001
800075V0002
800075V0003
800075V0004
800075V0005
B00075V0006
800075V0007
85765
85766
85767
85768
800102V0001
800102V1001
800102V0002
800102V1002
15248
161 00
800152V0020
800000006
800110V0102
""',',',"",', ..
Description
@J",,,,,,,,,,,,,, ... ~
ill]
g
GA05228_0302 - 08/2006 -© Leybold Vacuum [7

Installation
2 mnstallation
Warning Only qualified personnel or the Leybold Service Department may
Warning
&
Warning
Warning
carry out work on the frequency converter.
Potentially fatal voltages are present inside the frequency conver-
ter.
Open the frequency converter only after it has been isolated from
the mains power supply.
2.1 Placement
Place the Turbo.Drive TD20 classic on a fiat, smooth surface.
For installation in a rack use the mounting frame 1 goo, 3 HU.
The heat dissipation
of the TurboDrive TD20 classic must not be
obstructed. Insure a sufficient ventilation -the ambient tempera-
ture during operation must not exceed
45°C (113 oF).
If the TurboDrive TD20 classic is built into a rack the mains plug is
not within easy reach. Therefore install a separation between the
Turbo.Drive TD20 classic and the mains when you build
it into a
rack.
Do not operate the TurboDrive TD20 classic with the standard
mains lead
in chemically aggressive surroundings. If you operate
the TurboDrive TD20 classic
in chemically aggressive surroundings
replace the mains lead by a resistant one.
2.2
Conforming utilisation
The electronic frequency converter TurboDrive TD20 classic is used to drive
the following turbo molecular pumps:
TURBOVAC 151, 151 C, 361, 361 C,
TURBOVAC 600, 600 C,
TURBOVAC 1000, 1000 C, 1100 C.
Other turbomolecular pumps must not be connected.
81 GA05228_0302 - 08/2006 -© Leybold Vacuum

Installation
Ia
@
~~
~~~
Ground bolt
(( R,~!l);'Mf-----lil- Connection of the
TURBOVAC
~~~
POWER
Power swItch
o "'"I
"'"
~~
""'.J
+ INTER-
FACE
I
I X22
I
Optional
interface
Connection
for power
line cord
~L __ JJII-I ---------------1
1
,,1 \ __ --'~ 9-way PLC intertace
Fig. 3 Turbo.Drive TD20 classic, rear panel
2.3 Providing the connections
Insert and fasten the connection line to the motor of the TURBOVAC.
Connect the interface, see Section 3.2.
Connect the instrument using the ground bolt to the protective
ground system.
Connect the power line cord.
Warning
~
GA05228_0302 - OB/2006 -© Leybold Vacuum [9

Installation
/'
Power switch
o U- POWER
/' FQREPUMP
______ ': 0
QI~1
t]'
11 ~)
PUMP! D. !
VALVE
HEATER FAN
l0 01
-----_ .....
Connection for TURBOVAC
@
~~~
AS 232
~\aooooooooo~~
0000000000
REMOTE
©
240
I·~·.·.·.· ~ ..... + ••• j V
• 22'\;110
.&.
.&.
'&'INTERFACE
DELAY
120 eA
TeA
TeQ
~~:
{ .................. ~J
o M n 6)
PLC interface
Connection for power line cord
Fig. 4 TURBOTRONIK NT 20. rear panel
2.4 Replacing the NT 20
The TurboDrive T020 classic is capable of replacing the NT 20.
The connection for the power line cord is identical, an adjustment to the
mains voltage
is no longer required.
The connection for the TURBOVAC
is identical. You can use the old con-
nection cable.
The connections FOREPUMp, VALVE, HEATER and FAN are no longer pre-
sent
on the TurboDrive T020 classic. Connect corresponding equipment
directly to the system controller.
The OIP switches (INTERFACE) need no longer to be set up, the
TurboDrive
T020 classic is capable of detecting the pumps automatically,
see Section 3.1 Start up.
The
PLC interface REMOTE has been replaced
III for some functions by the standard 9-way PLC interface
REMOTE X1 .
III for all functions by the optional 25-way PLC interface. When wanting to
continue to use the old cable with the Phoenix contact strips, we
are
offering for this purpose an adapter, see Section 1.5 and Fig. 5.
The pin assignments of both interfaces are detailed in Section 3.2.1 and
3.2.5.
10 I GA05228_0302 - 08/2006 -© Leybold Vacuum

25-way
Sub-O
Note
0.2 m
0,2 m
2x 10-way Phoenix
a
a
a
a
a
0
0
a
a
0
o to 10
Coding at pins
4 and 7
11 to 20
Coding at pins
11 and 20
If optional relay 3 shall operate in the
same way as for the NT 20, then set
parameter 318 to 5
(default).
Fig. 5 NT 20 adapter
Installation
Turbo.Drive TD20 classic
Pin Designation
NT 20
<",,,,,,,~",,,,, "
2 StalifHI
(Input)
3
4 Control GND
Pin Designation
2 Remote +
6 Start +
4 +
1,3,5 Remote -, Start -,
10 + 15 V (Voltage changed
to + 24 V
.•. . ... " .................... .
7 not connected
10 11
11 12 Normal (Relay) com.
.......... '~M •• ''''' •••• ~ ••••••.• ~ .• · ..•....••.•••.•••••• ..•• ~ ••••••.••••••••.•..
12 not connected
13
not connected
14 Option1 (Input) (not implemented) not connected
15 Option 2 (Input)(~~:implemented)not connected
16
com. 16 Run-up (Relay) com.
:1Ij7:~~'~;~';~:N~;;~~;i~;;'~;~;;;;;'~; _.- not connected
18 Option relay 3 (n.o.)
20 Option relay 3 (n.c.).
21
22
23 Acceleration (Relay) (n.o.)
24 Speed (Analog input)
Housing Connected with
18 Option (Relay) (n.o.)
20 Option (Relay) (n.c.).
15 Error
not connected
17 Run-up
(Relay) (n.o.)
not connected
Cable shielding
Pins 7 and 8 Heating
not connected
2.5 Replacing the NT 151/361 or NT 361
The Turbo.Drive TD20 classic is capable of replacing the NT 151/361 and the
NT 361.
The connection for the power line cord
is identical, an adjustment to the
mains voltage is no longer required. You can use the old power line cord.
The connection for the TURBOVAC
is different. We recommend using a
new connection cable.
If you want to use the old connection cable you
need the adapter cable 800 000 006.
GA05228_0302 - 08/2006 -© Leybold Vacuum 111

Installation
Turbo.Drive T020 classic
Power line cord
9-way or 25-way interface connection cable
Fig. 6 Connections for the Turbo.Drive T020 classic, schematic representation
Turbo.Drive T020 classic
Mains cord
Old interface cable for the
TURBOTRONIK NT 20
Fig. 7 Connections for the Turbo.Drive T020 classic, with adapter cable, schematic representation
121 GA05228_0302 - 08/2006 -© Leybold Vacuum
TURBOVAC
TURBOVAC

,..--,
•.JLeyboid
vacuum
II
Fig. 6 Pump identification at the LOAD LEOs
3 Operation
Controlling the instrument through the keys START and STOP and the 9-
way PLC interface has equal priority. When controlling the instrument
through optional boards (Profibus or
RS 485, for example), the keys and the
g-way PLC interface are disabled.
3.1 Start-up
Switch the frequency converter on via the switch on the rear.
After doing so, the parameters stored in the EEPROM are read and the
connected pump
is detected. During this process the LEDs LOAD light up
cyclically. After approximately 4 seconds the frequency converter is ready
to start.
If after this process the red LED ERROR is on, then the connected pump
was not detected.
If, moreover, two of the LEDs LOAD flash alternatingly,
then a different pump was detected (long flashing intervals: detected pump;
short fiashing intervals: stored pump; for pump assignments refer to
Fig. 6).
In both cases a special acknowledgement will be necessary: while keeping
the STOP key depressed, press the START key and release it again, there-
after release the STOP
key.
Through this special acknowledgement process the user acknow-
ledges the change of pump and the correctness of the pump
which has been detected.
Upon delivery, the TurboDrive TD20 classic has been preset
to the
TURBOVAC 1100 so the special acknowledgement process will
have to be run when commissioning any other pump for the first
time.
Operation
Caution
Note
GA05228_0302 - 08/2006 ~ © Leybold Vacuum \13

Operation
3.2
Interlaces
The Turbo.Drive TD20 classic is equipped as standard with a 9-way PLC
interface and optionally with one more:
l1li
RS 232
l1li
Profibus
l1li
RS 485
III 25-way PLC interface
III DeviceNet
III Ethernet
The Turbo.Drive TD20
classic is configured through the parameters accor-
ding to the parameter list. Pxxx denotes parameter value xxx.
The PC software "TURBODRIVE Server" allows convenient access by the
user to the parameters of the frequency converter.
For further information on the interfaces refer to the Operating Instructions
which are included with the respective device.
3.2.1 9-way PLC interface
Relay functions
Pin assignment
of the connector Q n.c.
Js
Relay -Normal operation
JIll While deceleration, acceleration, Stop:
4 connected to 5 (as shown; passive)
III During normal operation (f> O.8·f
nom
):
4 connected to 3 (active)
5 4 3 2
\(00000009
9 8 7 6
Pin assignment for the Start/Stop input
-/ffi3
~4
Q n. c. 12
~ n.o. 9
I com. 1
TD20 classic
Relay -Error
III No error: 1 connected to 2 (as shown; passive)
II Error is present: 1 connected to 9 (active)
Contact rating: 2A / 50V DC max. (resistive load)
Start/Stop operation
Example 1: Operation via a PLC
,- _________ -, Switching threshold for
the Start/Stop control
7. Q 5V
I max.BomAV
:k
SkQ
input:
Low level:
High level:
<BV
> 10,S V
Turbo.Drive TD20 classic
Fig. 9 g~way PLC interface
141 GA05228_0302 - 08/2006 -© Leybold Vacuum
OV = STOP
24 V= START
Example 2: Operation via contacts
Contact open = STOP
Contact closed = START
71 Q
BIO
6
TD20 classIc
:1
8
[>
il TD20 classIc

3.2.2 RS 232 interface
Standards DIN 66020
Protocol acc. to VDINDE 3689
Transmission rate
Response delay
Address range
Max. cable length
Interface connector
19200 baud
default setting 10 ms
(parameter 180)
non-addressable
15 m
9 way Sub-D type,
socket on the instrument (female)
thread UNC4-40
Note:
If on the controlling side an RS 232 interface in accordance with the
PC standard with a 9-pin Sub-D male connector is present, then a straight
through cable
as shown in Fig. 11 may be used.
For further information please refer to the Operating Instructions 17200048.
1~
0 6
TxD 2 0 0 7
RxD 3 0 0 8
4 0 0 9
GND 5 Y
Fig. 10 Pin assignment for the socket at the frequency converter (female)
(2)
~ . (2)
, ,
TxD RxD
, ,
, ,
RxD , TxD
(3) , , (3)
, I
, ,
(5) , , (5)
, ,
GND , GND
, ,
TURBO.DRIVE , ,
. Shield
9-pin IBM PC
RS 232
interface
Fig. 11 Providing a RS 232 connection
Operation
GA05228_0302 ~ 08/2006 . © Leybold Vacuum 115

Operation
161 GA05228_0302 - 08/2006 -© Leybold
3.2.3 Profibus interface
Please refer to the Operating Instructions 17200049.
3.2.4 RS 485 interface
Standards ISO/IEC 8482, EIA 485
Protocol acc. to VDINDE 3689
Transmission rate
Response delay
Address range
Max. cable length
Type of cable
Differential voltage levels
(see also "Standards")
I
nterface connector
19200 baud fixed
default setting 10 ms
(parameter 180)
0 ... 15
50 m (with bus termination)
2 wire twisted pair
(twisted pair cable)
logic nOll:
transmitter: 1.5 ... 5 V
receiver: > 0.3 V
logic "1":
transmitter: -1,5 ... - 5 V
receiver: " - 0,3 V
9 way Sub-D type,
socket
on the instrument (male)
thread UNC4-40
Note: After having changed the bus address through the rotary switch, the
frequency converter must be switched off (yellow power
LED off) and then
on again so as to enable the new address setting.
For further information please refer
to the Operating Instructions 17200048.
Unks for activation of the
bus terminator
V? 0,5 A, 24 V DC
/1_ 1
6 0
7 :. 2
TxD/RxD + - ". 3
8 •
TxD/RxD-_ '" 4
:.
9 • .J 5
~--L
Fig. 12 Pin assignment for the socket at the frequency converter for RS 485 interiace
(male)

Operation
Bus terminator
for longer cable runs
~
120Q I
TURBODRIVE
X5 (7) X5 (8)
ITURBO. I
DRIVE
X5 (7C'<)D:=~X:..:.;5 (8)
ITURBO. I
DRIVE
Fig. 13 Connection of the RS 485 bus
GA05228_0302 fi OB/2006 -© Leybold Vacuum ]17

Operation
3.2.5 25-way PLC interface
Observe the EMC requirements when connecting the control cables.
Pin assignment for the 25-way PLC interface
Pin Assignment
'»"~''''~'''.'''',". __ ,.,"_''_ ,,, •. ".'.'-''"Wk._<c_._
Remote[H]
2 Start[H]
3 Stop[L]
4 Control
GND
5 Supply GND
6 PLC-H signal and
power supply
7 Analog output (option)
8
Error
9 Error
10
Normal (relay)
11
Normal
12 Option relay 2
13
14
15
16
17
18 Option
relay 3
19
20
21
22
23 Option
relay 1
24 Frequency (option)
PLC = Programmable logic controller
Function
Activates by a H level the inputs Start[H], Stop[H],
1 to 3
PLC H pulse starts the pump, provided Remote[H] = H
(duration>
PLC L pulse stops the pump, provided Remote[H] = L
Reference
Reference ground of for auxiliary power supply
pin 6,
Reference for the 7 (see below)
Auxiliary power supply for externally connected equipment.
The output voltage corresponds mainly to the input voltage
delivered by the host, output voltage 124v
DC
Current output 80 mA
Current limiting without foldback characteristic, no shutdown
in case of excessively high currents, however shutdown
in case of ov"rtElmr18n3tures.
Programmable analog output 0...10V
Not imrllennen,jerl
Collective error active in case of a fault
Collective error com.
Ref. potential
Control GND
Control GND
Control GND
Supply GND
Supply GND
Pin 8
Final rotational frequency has almost been attained (n.o.). For Pin 11
For function and threshold the parameters 25, 27 and 29 apply.
See 237
Final rotational has almost been attained, com.
Normally open contact (n.o.) enabled with valve and forevacuum;
see 240 Pin 13
com.
Not implemented Control GND
Not Control GND
to com.;
see parameter 239
GND reference for the (difference
Normally open contact (n.o.).assigned with function "FAN";
see 318
Pin 19
com.
n.c. Pin 19
Collective error (active
in case of a fault), (n.c.) Pin 8
Not imrllen1enterl Control GND
Is enabled in case of a speed increase, normally open (n.o.);
see 239
Pin 16
Not implemented Analog GND
Connected to frame
[H] = PLC high level > 11 V
Input resistance 5... 6kQ
[L] = PLC low level < 8 V
External voltage resistance ± 40VDC
181 GA05228_0302 - 08/2006 ~ © Leybold Vacuum

Relays
Pin Relay
10 Normal n.o.
11 Normal com.
8 Fault n.o.
9 Fault com.
21
Fault n.C.
Optional relay 1
23 Run-up n.o.
60
Run-up com.
Optional relay 2
12
Valve and forevacu-
urn n.o.
13
Valve and forevacu-
urn com.
Optional relay 3
18
Fan n.o.
19
Fan com.
20 Fan n.c.
0
...,
~
0
...,
~
0
...,
0
...,
~
Operation
Possible cause
Contact closed: Rotor speed has attained 80% of its nominal speed. (= normal
operation). The relay picks up as soon as the normal operation threshold
is
attained.
Outputs an error message. When the error relay switches, the pump is shut down.
The
relay is energised in the case of normal operation.
Possible error causes:
l1li The pump was overloaded for a longer period of time.
IIiII The minimum rotational speed was not attained within a limited period of time.
III The speed has dropped below the lower limit.
III The rotor or bearing temperature is above the fault limit.
II Internal electrical error.
Switches when the pump is being driven, the pump is running up.
Switches when: start command is present, no error and mains power on.
Can be used to control a valve or the backing pump.
Supplies a start signal for the connected fan.
Contact rating:
2A I 50V DC max. (resistive load)
GA05228_0302 - 08/2006 -© Leybold Vacuum 119

Operation
2 (Start)
Output relay
12 (Optional relay 2)
3 (Stop) 6
(24VDC, BOmA)
11
• FOREPUMP
6 (24VDC)
1 (Remote)
TD 20 classic with
25-way terminal strip
4
5
X22
,uJ::::l-~~
13
19
10
(Normal relay)
18 (Optionsrelais 3*)
5 (GND)
Note: Optional relay 1 and
error relay are not shown
• Set parameter 318 to 3
Fig. 14 Example for external connections compatible with the NT 20
3.2.6 DeviceNet interface
See additional Operating Instructions 17200055.
3.2.7 EthernetilP interface
See additional Operating Instructions 17200056.
20 I GA05228_0302 - 08/2006 -© Leybold Vacuum
MAINS IN