LEYBOLD DRYVAC 50 S User manual

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DRYVAC 50 & 100 S
GA 01.413/1.02

2
DRYVAC50/100SManual
Contents Page
Safety Information ......................................................2
1 Description ............................................................4
1.1 DesignandFunction .........................................4
1.2 StandardEquipment .........................................6
1.3 TechnicalData ..................................................8
1.4 OrderingData ...................................................9
2 Installation ........................................................... 10
2.1 AdaptingthePumptotheProcess ..................10
2.2 SettingupthePump .......................................10
2.3 ElectricalConnections ....................................11
2.3.1 SettingthePumptothe
OperatingVoltage ..................................12
2.3.2 ConnectinganExternal
RemoteControl .....................................13
2.4 ConnectingtheCoolingWater ........................15
2.5 ConnectingtheInertGasand
CompressedAirSupply ..................................15
2.6 SettingthePumptoMatchtheProcess ..........16
2.7 CheckingtheDirectionofRotation .................17
2.8 ConnectingtheIntakeandExhaustLines .......18
2.8.1 ConnectingtheIntakeLine ...................18
2.8.2 ConnectingtheExhaustLine .................18
2.9 Options(Standby,Flush,LTO,&Battery) .......18
2.9.1 StandbyOption .....................................18
2.9.2 FlushValveOption .................................20
2.9.3 LTOOption ............................................21
2.9.4 BatteryBackupOption ..........................21
3 Operation............................................................. 22
3.1 Start-up ........................................................... 22
3.2 PumpingNon-AggressiveGases .....................23
3.3 Shutdown ........................................................23
3.4 ResponsetoMalfunctions ...............................23
3.4.1 ProcessTemperatureFault ...................23
3.4.2 Warnings ..............................................24
3.4.3 Alarms ...................................................24
3.4.4 OilPressureWarningandAlarm ..........24
3.5 ShutdownforanExtendedPeriod ..................25
3.6 StoringandShipping ......................................25
3.7 Report(REPORTbutton) .................................26
4 Maintenance......................................................... 28
4.1 RoutineMaintenance ......................................28
4.2 ReplacingtheExhaustSilencer ......................28
5 Troubleshooting .................................................. 29
Note:
Referencesto illustrationsconsistof(figurenumber/item
number). For example, (1/2) refers to Figure 1, Item 2.
SafetyInformation
Hazard analyses per European standard EN 1012 were
conducted for the DR YVAC 50 and 100 S pumps. Every
personinvolvedwith connecting,operatingormaintain-
ing these pumps shall have read and understood this
DRYVACoperatinginstructionmanualinorder to avoid
hazardsandoperatingmalfunctions.
DRYVAC pumps are designed to pump down vacuum
chambers to pressure values in the rough and fine
vacuumranges,andare intended forindustrialuse.
Precautionary notes in these instructions:
Warning – This indicates procedures and operations
which must be strictly observed to prevent hazards to
persons.
Caution – This indicates procedures and operations
which must be strictly observed to prevent damage or
destructionofthepump.
Media compatibility
DRYVACpumpsareauthorized for useonlyinthoseap-
plicationsandprocesses whicharelistedin thedescrip-
tionsectionofthis instruction manual. ContactLeybold
beforeusingaDR YVAC for applications and processes
whicharenotlisted.
Warning Standard DRYVAC pumps are not
suited for pumping media which
could ignite or explode. If these
pumps are nonetheless used in such
applications, the owner / operator
must take the precautionary mea-
sures required for explosion protec-
tion in compliance with legal
requirements.
Electrical Safety
Warning Disconnect the pump from the main
power supply before beginning any
assembly or disassembly work. Take
measures to ensure that the pump
cannot be started. The electrical con-
nections shall be made only by a
qualified and licensed electrician, in
accordance with VDE standard 0105
and as per the VDE 0100 guidelines
and local codes.

3
DRYVAC50/100SManual
Mechanical Safety
Warning Do not expose any parts of the body to
the vacuum. In particular do not oper-
ate the pump with flanges open, or
loosen any flange, oil filling or drain
screws when a vacuum is present,
even if the pump is switched off.
Remove the cover panels only when the pump is
switchedof f.
Do not remove the pump or perform any maintenance
work before it has been vented and has come to a com-
pletestop.
Protection Against Hazardous Gases
Theexhaustlineconnectionsmustbetight.Hazardous
gasescouldescapeat leaksorthegases being pumped
couldreactwith humid air .
The pump’ s overall leak rate is <1·10 -5 mbar·l·s -1. Install
a housing evacuation unit when pumping hazardous
gases.
Wheneverthepumpisopenedto:
• refitthepurge-control plate
• checkthedirection ofrotation
• removetheintakeorexhaustline
• removethepumpfromthe system
thefollowingsafetyinstructionsmust beobserved:
Warning If the DRYVAC has pumped hazard-
ous gases, you must determine the
nature of the hazard and take the ap-
propriate safety precautions. Comply
with all safety regulations. Take ad-
equate safety precautions before
opening the intake or exhaust.
If necessary, use gloves, a respirator
and/or protective clothing and work
under an exhaust hood.
DRYVACsthatareusedin semiconductorprocesses,for
example,canbecontaminatedwithprocessgases.These
gasesmaybe toxicandhazardousto health.Inaddition,
depositswith similarlydangerouspropertiescanformin-
side the pump. Many of these gases and deposits can
seriously corrode the pump, especially when they are
mixedwithhumidair .
Toavoidhealthhazardsand corrosiondamagewhen the
pump is detached from the system, lay a container of
desiccant on the inlet splinter guard and then seal the
pump immediately at all flange connections. Store the
pumpwithadesiccant,in a polyethylenebag.
Handling PFPE
Since PFPE is used when pumping corrosive media, it
canbecontaminatedwith thesemediaduringuse. Thus
it is necessary to take appropriate precautionary mea-
suresdependingonthemediumthathas been pumped
(see“Protectionagainsthazardousgases”).
Warning Hazardous decomposition products
may be formed at temperatures ex-
ceeding 350°C (660°F). Thus smok-
ing is prohibited in rooms where
PFPE is being used or handled; do
not expose cigarettes or other to-
bacco products to PFPE.
Allsafetyregulations applicabletohandling themedium
beingpumpedshallalsobe observedwhenworkingwith
PFPE and the pump.
PFPE must be reclaimed or disposed of as a toxic
waste.
Returning Equipment
Complete the form at the back of this manual before re-
turningequipmentto Leyboldforservice. Thisformnoti-
fiesusof anytoxicor otherharmfulproducts (asdefined
bytheapplicableregulations such astheCommonMar-
ket Guideline L360, 1976/1979 or VBG 16) that may ex-
istinor neartheequipment.Attach theformto thepump
orencloseitwith the pump.Thisstatementdetailing the
contamination is required to satisfy legal requirements
andtoprotect our employees.

4
DRYVAC 50/100 S ManualSection1—Description
1 Description
1.1 Design and Function
The DRYVAC 50S and 100S are dry-compression
vacuumpumpsdesignedespeciallyforsemiconductor
etchingandCVD processes.
Each of these DR YVACs are four-stage hook-and-claw
vacuumpumps.
AlthoughbothDR YVACpumpsare similarindesignand
operation, there are differences, and these differences
aredetailedinSection1.3 Technical Data.
Pump operating principle
Figure1illustratestheDR YVAC’soperatingprinciple.
Thetworotors (1/1)turnin oppositedirectionsinside the
pumping chamber .As they rotate, they open and close
theintake(1/5)andoutlet (1/4) slotswitheachcycle.
The pumping chamber is divided by the rotors. Gas is
drawninontheonesideoftherotorsandcompressedon
theotherside.
The top sketch shows the beginning of the suction and
compressioncycle. Astherotorsrotate,thesealedspace
above the rotors (1/2) is reduced in size and the gas is
compressed. At the same time, the right rotor begins
openingtheinlet slot andgasisdrawn intothepumping
chamberbelowtherotors.
Inthecentersketch,theleftrotorisstarting to open the
outletslot,andcompressedgasisbeingdischargedfrom
thepumpingchamber .
Inthebottomsketch,the cycle hasbeencompletedand
theinletandoutletslots areclosed.Once therotorshave
passed through the neutral position, the cycle starts
again.
Design
There are four pumping stages (2/5) located one above
theother .The stages arepinnedtogether .
The gas enters the pump through the intake port, is
pumpedthroughfourpumpstages,flowsthroughanex-
haustsilencer(2/1),andthrough a non-return valve into
theexhaust.
Therotorsare drivenbytwovertical shaftsconnectedto
themotor(2/6) andsynchronizedbygears. The gearsof
the DRYVAC 100S are dif ferent for the 60 Hz and 50 Hz
modelsso thatboth pumpmodels rotateat 3000rpm. The
gears of the DR YVAC 50S are the same for all pump
models.
Thepumpingchamber isfreeof sealantsandlubricants;
however,PFPE(perfluoropolyether)is used to lubricate
thegearingandthelowerbearings. The upper bearings
arePFPE-greaselubricated.
Pistonringsareusedto seal each shaft whereitpasses
through the stages. The gear box is isolated from the
pumpingchamberby pistonringsandradial shaftseals.
Theupperbearingsareisolated by shaftseals.
Thebearingsand seals aremountedinthe water-cooled
upperandlowerend plates.Thesupplyof cooling water
is regulated by a thermostat (2/3). The pump stages are
aircooled.
The pump is fully enclosed by panels, which can easily
beremovedformaintenancepurposes.An air outlet for
cabinetventilationisonthetopoftheDR YVAC.
Figure1 Pumpoperatingprinciple
Key to Figure 1
1 Rotors
2 Compressionchamber
3 Intakechamber
4 Outletslot
5 Intakeslot

5
DRYVAC 50/100 S ManualSection1—Description
Key to Figure 2
1 Exhaustsilencer 5 Pumpstages
2 Pressureregulator 6 Motor
3 Thermostatvalve 7 Controlunit
4 Shutoffvalvefortheexhaust 8 Coolingwaterdrainport(50Sonly)
Figure2 SectionaldrawingofaDRYVAC50S(the100Smodelissimilar)
Exhaustshutoffvalve
Theexhaustvalve(2/4)closestheexhaustwhenthepump
isnotrunning. Itoperatesoncompressed airandis con-
trolledbyasolenoidvalve.Thevalve’spositionindicators
signalwhether thevalveisopenorclosed.
Inert Gas Barrier and Purge Gas Device
The DRYVAC has a mechanism for barrier gas and for
purgegas.
Inertgasforthesedevicesisconnected atthebackofthe
pump.Itflowsintothepump through the main inertgas
valveandtwopressureregulators.
Thebarriergasprotectsthe lower radial shaft sealsand
bearingsagainstaggressivemediaandparticles.Inaddi-
tion, the barrier gas is pumped to the exhaust pressure
switchesandprotectsthemagainstcontamination.
Thepurgegas flowsthroughtheinterstage purgeblock,
the purge control plate, connecting pipes and nozzles,
andinto thethreelowerpumpstages.
Electrical Equipment
TheDRYVACis monitoredbyseverallimitswitchesanda
PT100temperaturesensor(referto Table 1).
Thetemperature sensormeasurestheoutlettemperature
ofthe coolingwater .Thepumpmonitorstheprocess’ set-
tingwiththissensorandwiththepurge-gasflowindicator .
Thesignalsofallmonitoringequipmentare brought to-
getherinthe controlunit(2/7)where theyareprocessed.
The control unit includes pushbutton controls and a
three-linedisplaywhich shows theDR YVAC’soperating
status in clear text; you have the option of English or
German.

6
DRYVAC 50/100 S ManualSection1—Description
Figure3 SimplifiedschematicoftheDRYVACpump
ThecontrolunitismountedontheDR YVAC.Itcanalsobe at-
tached up to 2.5 meters (8 feet) away . Its front panel fits
intoonehalf of astandard19"rack (3heightmodules).
During the initial start-up, you must set the DR YVAC to
the desired process. Thereafter , it can be switched on
and of f with the ST ART and STOPbuttons. Run-up, op-
eration,andrun-downare then automatically controlled
asappropriateforthe relevantprocess.
Whenunacceptableconditions arise, theDR YVACauto-
maticallyswitchesof f. Theerror messagesarestoredto
simplifytroubleshooting.
The DRYVAC’s parallel interface allows you to connect
thepumpto acentralcontrolsystem (seeFigure8).
The DRYVAC’s transformer and rectifier generate the
DC voltages required for control and operation. Each
controlvoltagehasaseparate fuse.
TheDRYVACalsofeaturesa lockablemainswitch.
1.2 StandardEquipment
The DRYVAC is delivered ready for operation with its
gearboxfilledwith PFPE(perfluoropolyether)lubricant.
A sealing disk with dirt trap and a union flange are at-
tachedtotheintakeport.
Theintakeand exhaustportsandthe inertgasfittingare
sealedforshipping.
Thepumpis shippedwiththe following:
• 2-meter(6.5-foot)mainpowercable without plug
• Extensioncablefor thecontrolunit
• Allenkeyforremovingorinstallingtheexhaust
silencer

7
DRYVAC 50/100 S ManualSection1—Description
Table 1 — Switches and Valves
Component Component Namein Display(1) Switching Plug
label Figure 3 point (2) label
Temperature sensor PT100 B10 PT 100 “Process temp. <tmin >tmax” Refer to 2X3
Sec. 3.4.1
Thermal switch, pump Alarm S17 (N.C.) TSH “A Temperature” T ≥95/125°C(3) 2X8
Thermal switch, pump W arning S16 (N.C.) TSH “W Temperature” T ≥85/115°C(3) 2X7
Exhaust pressure switch, Alarm S14 (N.C.) PSH “A Exhaust pressure” p ≥1.5 bar 2X5
Exhaust pressure switch, W arning S12 (N.C.) PSH “W Exhaust pressure” p ≥1.3 bar 2X4
Pressure switch, lubrication S10 (N.O.) PSL “W Lubrication/A Lubrication” p ≤1.5 bar 2X11
Pressure switch, inert gas pressure S13 (N.O.) PSL “W N2 pressure” p ≤1.3 bar 2X10
Flowindicator ,inert gas,3rdstage S20 (N.O.) FSL “W Flow3rdstage” ≤300Nl/hr 2X9
Flowindicator ,inertgas, 4th stage S18 (N.O.) FSL “W Flow4thstage” ≤1500 Nl/hr 2X13
Position indicator , exhaust shutof f valve S15 (N.O.) — “A Shutof f valve” 2X6
Standby set detection — “Standby installed” (4) 2X15
Flushvalvedetection — “Flushvalveinstalled” (4) 2X14
LTO set detection — “LTOinstalled” (4) 2X9
Motorcontactor 1K1 — Closed in caseofoperation
Auxiliarycontact,motorcontactor 1K1 — “AMotorcontactor” —
Motorprotectionswitch,drivemotor 1Q1 MPS “AMotorprotectionswitch” Nominal —
motorcurrent
Motorprotectionswitch,transformer 1Q2
Compressedairvalve Y18 opens in case of RUN-UP 1 2X18
Main inert gas valve Y20 opens in case of RUN-UP 1 2X20
Purgegasvalve,2ndstage(option) Y17 — closedincaseofST ANDBY 2X17
Purgegasvalve,3rdstage(option) Y16 — closedincaseofST ANDBY 2X16
Purgegasvalve,4thstage(option) Y15 — closedincaseofST ANDBY 2X15
Flush valve (option) Y14 — opens in case of FLUSH 2X14
(1) When the first letter in the display is “W” (W arning), the pump is approaching a critical value;
when the first letter is “A” (Alarm), the pump shuts down because it exceeded a critical value.
(2) All pressures listed in bar are absolute values.
(3) Temperature values for the DR YVAC 50S/100S.
(4) Displayedonly inREPOR T.
N.O.= NormallyOpen
N.C.= NormallyClosed

8
DRYVAC 50/100 S ManualSection1—Description
1.3 Technical Data
DRYVAC Model 50S
PumpingSpeed:
60Hzoperation ........................ 55 m3 · h-1 (32 cfm)
50Hzoperation ........................ 45 m3 · h-1 (26 cfm)
Ultimatepressure:
60Hzoperation ....≤2.5 · 10-2 mbar (1.9 x 10-2 Torr)
50Hzoperation .......... ≤4 · 10-2 mbar (3 x 10-2 Torr)
Maximumintakepressure
incontinuousoperation* .......... 500mbar(375Torr)
Motorpower .................................................3 kW (4 hp)
Rotationalspeed:
60Hzoperation ........................................ 3600rpm
50Hzoperation ........................................ 3000rpm
Noiselevelwiththeexhaustlineconnected .... 64dB(A)
Coolingwaterrequirements,approx:
Atwatertemp.of15 °C(59°F).. 70 l · hr -1 (18 gal/hr)
Maximumcoolingwatertemp. ............. 25°C (77°F)
Coolingwaterpressure* ..... 2–10bar(14–130psig)
Cooling water connection, female threads NPT 1/2"
Inertgaspressure* .................... 4–10bar(43–130psig)
Inertgasconnection,femalethread ..................NPT3/8"
Inertgasconsumption ........................... RefertoTable2
Barriergaspressure* ............................. 1.5bar(7psig)
Purgegaspressure* ............................. 3.0bar(29psig)
Airpressureforactivating
exhaustshutoffvalve ............. 6–7bar(72–87psig)
Compressed-air connection, female thread .NPT 1/4"
Lubricantquantitygearbox .......................... 0.8 l (0.8 qt)
Maximumambienttemp. .......................... 40°C (104°F)
Weight .....................................................190 kg (419 lb)
Intakeport ..................................................DN 63 ISO-K
Exhaustport ....................................................DN 25 KF
*Allpressuresgiveninbarormbarareabsolutevalues.
DRYVAC Model 100S
Pumping Speed:
60Hzoperation ........................100 m3 · h-1 (59 cfm)
50Hzoperation ........................100 m3 · h-1 (59 cfm)
Ultimatepressure:
60Hzoperation ......≤1.5 · 10-2 mbar (1.1 x 10-2 Torr)
50Hzoperation ......≤1.5 · 10-2 mbar (1.1 x 10-2 Torr)
Maximumintakepressure
incontinuousoperation* .......... 150mbar(112Torr)
Motorpower ............................................4.0 kW (5.4 hp)
Rotationalspeed:
60Hzoperation ........................................ 3000rpm
50Hzoperation ........................................ 3000rpm
Noiselevelwiththeexhaustlineconnected .... 68dB(A)
Coolingwaterrequirements,approx:
Atwatertemp.of15 °C(59°F) ... 100 l·hr -1 (26gal/hr)
Maximumcoolingwatertemp. ............. 25°C (77°F)
Coolingwaterpressure* ..... 2–10bar(14–130psig)
Cooling water connection, female threads NPT 1/2"
Inertgaspressure* .................... 4–10bar(43–130psig)
Inertgasconnection,femalethread ..................NPT3/8"
Inertgasconsumption ........................... RefertoTable2
Barriergaspressure* ............................. 1.5bar(7psig)
Purgegaspressure* ............................. 3.0bar(29psig)
Airpressureforactivating
exhaustshutoffvalve ............. 6–7bar(72–87psig)
Compressed air connection, female thread .NPT 1/4"
Lubricantquantitygearbox .......................... 0.8 l (0.8 qt)
Maximumambienttemp. ............................ 40°C (104°F)
Weight ..................................................... 220kg (485lb)
Intakeport ..................................................DN 63 ISO-K
Exhaustport ....................................................DN 25 KF

9
DRYVAC 50/100 S ManualSection1—Description
Figure4 Pumpingspeedcurves
Dimensions in mm
abb
1b 2hh 1h 2II 1I 2I 3
50S 502 450 205 175 587 720 180 807 426 70 76
100S 476 450 170 187 598 720 203 866 410 70 66
Dimensionsininches
ab b
1b 2hh 1h 2II 1I 2I 3
50S 193/4173/481/16 67/8231/8283/871/8313/4163/423/43
100S 183/41723/32 623/32 73/8239/16 2811/32 834
3
/32 165/32 23/4219/32
h:upper edgeof intakeport
Figure5 Dimensionaldrawing
1.4 Ordering Data
DRYVAC with motor: 50S Catalog Number 100S Catalog Number
200 V, 50 Hz, 3 phase ............................................... 138 45 ....................................... 138 75
200 – 208 V, 60 Hz, 3 phase ..................................... 138 45 ....................................... 138 77
400 (380) V, 50 Hz, 3 phase ...................................... 138 46 ....................................... 138 76
RepairKit ........................................................................... 899553 .......................................899556
ExhaustsilencerSD ...........................................................13750 ....................................... 13750
FlushvalveFS ....................................................................13760 ....................................... 13765
StandbysetSBV ................................................................13770 ....................................... 137 70
LTO-Set ..............................................................................137 75 ....................................... 13775
Batterybackup ............................................................ Onrequest .................................Onrequest
Dryingcanisterforshippingandstorage .................... 200 78 563 ................................ 200 78 563

10
DRYVAC 50/100 S ManualSection2—Installation
2 Installation
2.1 Adapting the Pump
to the Process
Warning If the DRYVAC has pumped hazardous
gases, you must determine the nature
of the hazard and take the appropri-
ate safety precautions. Comply with
all safety regulations. Take adequate
safety precautions before opening the
intake or exhaust.
The DRYVAC is delivered set up for the processes of
group B in Table 2 – unless specified otherwise by the
salesorder .Thissetupopensthepurge-gassupplytothe
individualpumpstages.
If your process is in the “C” group in Table 2, install
the LTO set as described in Section 2.9.3.
If your process is in the “A” group in Table 2, seal off
thesupplyofpurge gas intothepumpstages as follows
(see Figure 6):
1. Open the four 1/4-turn retaining clips and take of f
the rear housing panel.
2. Remove the eight screws securing the plate (6/1)
to the interstage purge block; remove the plate.
3. Turn over the plate and reinstall it with the outside
in; when installed correctly for process A, the side
of the plate marked “ETCH” faces out and the side
marked “CVD” faces in.
4. Reinstall the rear housing panel.
2.2 Setting up the Pump
Set the pump on a flat even surface in a dry location.
Lockthecastersafterthepump is in place.
The ambient temperature must not exceed 40 °C
(104°F). Don’t obstruct the ventilation grids. If
installing the pump in an enclosed cabinet or system,
ensure that suf ficient ventilation is available.
Figure6 Rearconnectorsandoperatingcontrols(withrearpanelremoved)
Key to Figure 6
1 Purgecontrolplate
2 Thermostatvalve
3 Interface/Sub-Dconnectors(X18&X19)
4 DIPswitches
5 Mainpowerconnection
6 Compressedairconnection
7 Inertgasconnection
8 Coolingwaterinlet
9 Coolingwateroutlet
10 Exhaustport

11
DRYVAC 50/100 S Manual
Table 2 — Process Settings*
Process DIP Processes Thermo- Purge Option Inert Gas Pump
Group Switch stat Valve Control Required Consump- Operating
Setting Setting Setting Plate tion Temp.
A 5 ON Al-Etching, Si-Etching, 4 ETCH No 1000-1500 47-63°C
6, 7, & 8 OFF Poly-Si-Etching, SiO 2-Etching side out Nl/hr 117-145°F
Tungsten-Etching
B 6 ON MOCVD, PECVD-SiO24 CVD No 4000-5000 47-63°C
5, 7, & 8 OFF PECVD-Si3N4, PECVD-TEOS, side out Nl/Hr 117-145°F
PECVD-Poly-Silicon,
PECVD-PSG, PECVD-BPSG
PECVD-W, PECVD-WSi2,
LPCVD-SiO2, LPCVD-Si3N4,
LPCVD-Poly/Silicon,
LPCVD-TEOS, LPCVD-W,
Ionimplanter
C† 7 ON LTO, LPCVD-PSG, 2 CVD LTO-Set 6000-7000 27-43°C
5, 6, & 8 OFF LPCVD-BPSG side out Nl/hr 81-109°F
D† 8 ON LPCVD-WSi22 CVD No 4000-5000 27-43°C
5, 6, & 7 OFF side out Nl/hr 81-109°F
Section2—Installation
* ConsultyourLeyboldsalesrepresentativetoconfirmthecorrectprocesssettingforyourapplication.
† AdditionalDRYVACmodificationsmaybenecessaryfortheseapplications.ConsultyourLeyboldsales
representativeforadditionalinformation.
2.3 Electrical Connections
Warning Electrical connections should be
made only by a qualified and licensed
electrician. Disconnect the pump from
all voltages before beginning any as-
sembly or disassembly work. Take
measures to ensure that the pump
cannot be started.
ThefollowingarethestandardDR YVAC voltagesandfre-
quencies:
CatalogNumber Voltage,Frequency
13845 ....200 V, 50 Hz / 200–208 V, 60 Hz, 3 phase
13846 ..........................400 (380) V, 50 Hz, 3 phase
138 75 .....................................200V,50 Hz, 3phase
138 77 ........................... 200–208 V, 60 Hz, 3 phase
13876 ..........................400 (380) V, 50 Hz, 3 phase
Othervoltagesareavailableonrequest.
Catalog numbers 138 45 and 138 77 are preset at 208 V ,
while13846and13876arepresetat 380 V . Ifyourlocal
ACpowersourcevariesfromthesesettings,refertoSec-
tion2.3.1tochangethetransformersettings so that the
controlvoltageisasexactaspossible.
Connectthepump’sAC line cord toitsratedAC voltage
andfrequencythrough asuitablecircuit breaker(seethe
DRYVAC nameplate). Don’tturnON thebreakeruntil all
electricalandvacuumconnectionshavebeenmade.
DRYVAC Main power Max. current
50 S 3 PE AC 200 V, 50 HZ 13 A
3 PE AC 200-208 V, 60 Hz 13 A
3 PE AC 400 (380) V, 50 Hz 7.5 A
100 S 3 PE AC 200 V, 50 HZ 17 A
3 PE AC 200-208 V, 60 Hz 17 A
3 PE AC 400 (380) V, 50 Hz 9.5 A
Protectiveearth conductors(grounds)shallalwaysbein-
stalledinaccordance withapplicablecodesand shallbe
continuousanduninterrupted.

12
DRYVAC 50/100 S ManualSection2—Installation
Caution If you are adding a purge to the foreline,
install a solenoid valve that automati-
cally shuts off this purge when power
to the DRYVAC is disconnected. Other-
wise, the DRYVAC could be damaged
from excessive pressure after power is
disconnected.
Refer to Section 2.3.2 if you want to connect the
DRYVACtoan externalremotecontrol.
2.3.1 Setting the Pump to the
Operating Voltage
The DRYVAC’s transformer generates the voltages re-
quiredforcontrolandregulation.
DRYVAC model 100S catalog number 138 75 can be
set only to 200V – its transformer can’t be adjusted.
DRYVAC catalog numbers 138 76 and 138 46 are preset
at380V; ifyourlocal AC power sourceis390Vor400V ,
changethe transformersettingasdescribedbelow .
DRYVAC catalog numbers 138 77 and 138 45 are preset
at 208 V; if your local AC power source is 200V , change
thetransformersettingsasdescribedbelow .
Warning Disconnect the DRYVAC from yourAC
power source before making any elec-
trical connections. Electrical connec-
tions should be changed only by a
qualified electrician.
1. Turnof f the main switch andopenthefrontdoorwith
the power supply cabinet key (7/3). Note that the key
has been replaced with a screwdriver slot on recent
pumpmodels.
2. Change the connection ofablackleadatthe terminal
block(7/4)tomatchthevoltageof yourlocalACpower
source.
3. Ensure that the motor protection switches (7/1 and
7/2)andtheautomaticcircuitbreakers F1, F2, and F3
areturnedON. Then,closethefrontdoor .
Thepumpcanbemodified forusewithothersupply volt-
agesorfrequencies.ContactLeyboldfordetails.
Figure7 Openingthefrontdoor
Key to Figure 7
1 Motorprotectionswitchfordrivemotor
2 Motorprotectionswitchfortransformer
3 Powersupplycabinetkey*
4 Terminalblock
F1 Circuitbreaker
F2 Circuitbreaker
F3 Circuitbreaker
* YourmodeloftheDRYVACmaynot
haveacabinetkey. Thekeyhas
recentlybeeneliminatedandreplaced
withascrewdriverslot.

13
DRYVAC 50/100 S ManualSection2—Installation
Figure8 Contactsoftheparallelinterface
Note:Sub-DconnectorsX18andX19
arelocatedontherearpanel
(seeItem3ofFigure6).
Sub-D
connector
withpins
Max.contactrating:
26V,50mA
*RefertoTable3forthestatusofeachX18contact
duringinitialization,operation,andshutdown.
Sub-D
connector
withsockets
2.3.2 Connecting an External
Remote Control
The parallel interface allows the DR YVAC to be con-
nectedtoanexternalremotecontrol.The connection is
madeviatwo9-pin sub-Dconnectors(6/3).
ConnectorX18allowsyoutocheckthe DR YVAC opera-
tionalstatus.
ConnectorX19allows for remotecontrolofthe DR YVAC
bywayof floating (dry)contacts.
Thevoltagesourceforthecontrolcircuitsmustbe pro-
videdfromthe secondarywindingsof anisolationtrans-
former or from some other isolated source. In addition,
ensure that the control voltage applied to Terminal 4 of
X19doesnotexceed 24V(ACorDC),andthatthecon-
tact load of each switch connected to X18 does not
exceed 26 V AC/DC @ 50 mA.
TheDRYVAC’sinputandoutputsignalsmustbepositively
isolatedfrom potentiallyhazardousvoltagesindown-line
processing.Thisisolation shall beeffectiveevenif there
isadefect in theelectricalsystem.
Caution Do not connect equipment to termi-
nals other than the ones listed in the
following instructions.
Failure to connect the switches as de-
scribed may result in major damage to
the pump, and lead to a loss of war-
ranty.
Figure 8 shows the pin-out of the individual contacts of
thesub-Dconnectors.See Table3forthestatus of each
X18contactduringinitialization,operation,andshutdown
Thecustomer-suppliedlinesforplugs X18 andX19must
beshieldedcontrollines. Connecttheshieldingaccord-
ingtoFigure8.
StandbyContact
(appliesonlyifyouhavethestand-bysetoption)
Momentarilyclosingthecontactchangesthestatusofthe
purgevalves.It closesthepurge-gasvalves tothepump
stages if they were open; if they were closed, it opens
them.

14
DRYVAC 50/100 S ManualSection2—Installation
Table 3 — Interface (X18) Contact Status
Run
X18 Contacts Initialization/Ready to Start Wait Operation Rundown Off
1 & 7 (Fail) Close Close Close Close Open
1&8(Operation) Open Open Close Open Open
1 & 9 (Warning) Close Open Close Close Open
FlushContact
(appliesonlyifyouhavetheflush-valveoption)
Momentarilyclosingthecontactchangesthestatusofthe
flushvalve.Itclosestheflushvalveifitwasopen;itopens
theflush valveifitwasclosed.
DirectStopContact
Whenthedirectstopcontact closes,theDR YVACisshut
down immediately; there is no run-down phase. Use
thiscontactonlyinemergencies.
Signallamp
Asignallamp,which lights when theDR YVAC is operat-
ing,canbeconnected via contact 5ofconnectorX19.
Start/StopContact
TheDRYVACcanbe started via the Start/Stop contactif
thecontrolunithasn’treceivedanalarm message.
IfyoushutdowntheDR YVACatthecontrolunit, it won’t
restartautomaticallyevenifthe contact is closed. To re-
startthepump,openthecontactandcloseitagain.
If the DRYVAC doesn’t start (the signal lamp doesn’t
light),reviewtheerrorreportatthecontrolunit(referto
Section 3.7).
RemoteContact
When the remote contact is open, commands can be
givensimultaneouslyfromthe parallel interface andthe
control unit. When the remote contact is closed, all of
the buttons on the control unit are disabled except
REPORT. The DRYVAC can only be operated through
the remote control interface.
DisconnectingtheControlUnit
The control unit can be removed from the DR YVAC and
installedupto 2.5meters(8feet) awayasfollows:
1. Remove four screwsonthefront of thecontrolunitto
removeit fromthe pumpenclosure.
2. Disconnectthecableplugfrom thebackof thecontrol
unit.
3. Use the adapter cable supplied with the DR YVAC to
connectthecontrolunittothecable.
4. Installthe controlunitatitsnewlocation.Itsfrontpanel
dimensionsallow ittobemountedinhalfofastandard
19" rack (3 height modules). Don’t attempt to extend
thecable anyfarther thanits maximumpermissible ex-
tensionof2.5meters(8feet).

15
DRYVAC 50/100 S ManualSection2—Installation
2.5 Connecting the Inert Gas
and Compressed Air
Supply
RemovetheshippingsealfromtheDRYNITROGENfitting
(6/7)andconnectyourinertgassupply .Thesupplypres-
sureshouldbe4to10barabsolute(43 to 130 psig). Dry
nitrogenisnormallyusedas theinertgas.
Remove the shipping seal from the COMPRESSED AIR
fitting(6/6)andconnectyour compressedairsupply .The
airpressureshould be6to7 barabsolute(72to 87psig).
Ensure that the compressed air pressure remains
above 5 bar (58 psig) during operation. Even a brief
drop below 5 bar (58 psig) will cause the DRYVAC to
automatically shut down .
2.4 Connectingthe
CoolingWater
Thecoolingwatershouldhavethefollowingproperties:
pH .......................................7.0 to 8.5
Chloride(Cl –) ...................≤75mg/l=2.1mmol/l
Sulfate(SO 4––) ...................≤70mg/l=0.7mmol/l
Calciumions ................ >1.0mmol/l=100ppm
................ ≤2.7mmol/l=268ppm
Hydrogencarbonatehardness .......... 125to179ppm
Significantdeviationsfromtherecommendedvaluesmay
resultinprematurecorrosionordeposits.
Connectthecoolingwaterlines. Ensure that your water
supplylineisconnectedto the DR YVACwaterinlet (6/8)
and your drain line is connected to the DR YVAC water
outlet(6/9).
If you will be using a water-flowmeter , install it in the
water-supplylineratherthaninthedrainline.
Caution Operation without cooling water will
damage the DRYVAC.
Note:Specialmodificationsmayberequiredwhenusing
deionized(DI)water .ConsultyourLeybold sales or ser-
vicerepresentativeforinformation.
Note: Ifyouwillbeusingaclosed-loopcoolingsystem,
flushouttheDR YVAC’scoolingwater to remove anyre-
sidualrustbeforeconnectingthepumptoyourcooling
system;alsoaddarustinhibitorto thecoolingwater .
The DRYVAC is shipped without cooling water . Fill the
coolingchannelsasfollows:
1. Open the four 1/4-turnretainingclipsonthe rear of the
pumpandremovetherearpanel.
2. Openthe thermostatvalveallthewaydown.
3. Openthe coolingwatersupply andwaituntil thewater
flowsoutofthecoolingwateroutlet.
4. Setthethermostattotherecommendedsettingforyour
process(referto Table2).Contactyour Leyboldsales
orservicerepresentativeif youhavequestionsabout
thecorrectthermostat-valvesetting.
Caution Operating the DRYVAC with an incor-
rect thermostat valve setting may
cause premature failure of the pump
and void the warranty.

16
DRYVAC 50/100 S ManualSection2—Installation
Figure9 DIPswitches-typicalsettingsfor
ProcessBandnobatterybackup
2.6 Setting the Pump to
Match the Process
This section describes how to set each of the eight DIP
switches (6/4) on the rear of the DR YVAC. The setting
for switches 5 through 8 depends on your process as
listed in Table 2. Turn of f the main switch (10/2) before
settingtheDIPswitches.
DIP Switch 1: Response following a power failure.
Switch1 shouldalwaysbeswitchedON.
Switch 1 OFF – The pump remains off after a power
failure.
Switch1ON–Thepumpreturnstoitspreviousopera-
tionalstatuswhenthe powerreturns.“AUT OSTART”
appearsontheDR YVAC’s LCD display .
Exception: If a power failure occurs during run-
down, the pump remains off.
DIP Switch 2: Battery backup
Switch 2 is switched ON when the battery backup
optionisinstalled. RefertoSection2.9.4.
DIP Switch 3: Sets the timer for low oil pressure.
This switch is normally OFF; it must be reset to OFF
afterarepairasexplainedinSection3.4.4.
DIP Switch 4: Language on the display
SwitchOFF– Textonthedisplay isinGerman.
SwitchON– Textonthe displayisin English.
DIP Switches 5 to 8: Setting to match the process.
Refer to Table 2 to determine if your process is in
group A, B, C, or D. Only one process setting can be
ON;therest mustbeoff.
Process A – Switch 5 ON; Switches 6, 7, & 8 OFF .
Process B – Switch 6 ON; Switches 5, 7, & 8 OFF .
Process C – Switch 7 ON; Switches 5, 6, & 8 OFF .
Process D – Switch 8 ON; Switches 5, 6, & 7 OFF .
AftersettingtheDIPswitches, turnONthe mainswitch:
Initialization
is displayed for about 2 minutes while the DR YVAC
checksthesettings.Thepumpwon’trespondtoanycom-
mandsuntil itfinishesthisinternalcheck.
Onceitsinternal checkisfinished, theDR YVACdisplays
theprocesssetting;forexample:
PROCSETTING
PROCESS A
Confirm!
isdisplayed.
• If the process displayed is wrong,turnoffthemain
switchandresetDIPswitches5through 8according
to Table 2.
• If the process displayed is correct, confirm by
simultaneously pressing the REPORT and STOP
buttons.
Onceyouhave confirmed theprocess,theDR YVACdis-
playsthefollowing:
PROCESS A
Readyto start
Check the direction of rotation as described in Sec-
tion 2.7 before starting the pump.

17
DRYVAC 50/100 S ManualSection2—Installation
Key to Figure 10
1 Lockingcasters
2 Mainpowerswitch
3 Handle
4 Controlunit
5 Intakeport
6 Outletforhousingventilation
7 Middlesegmentoftopcover
8 Powersupplycabinetdoorlock
Figure10 Connectorsandoperatingcontrolsatfront
2.7 Checking the
Direction of Rotation
Warning If the pump previously pumped haz-
ardous gases, take appropriate pre-
cautions.
Caution Don’t remove the shipping seals until
you are ready to install the pump. The
pump’s interior must be protected
against humidity as long as possible.
Checkthe directionofrotationasfollows:
1. Remove the shipping seals from the intake port (see
Figure11)and ensure that the pump’ s intake and ex-
haustportsareopen.Savetheshippingsealsfor fu-
tureuse.
2. Loosenthe two 1/4-turnretaining clipsandremovethe
middlesegmentof thetopcover(10/7).
3. Briefly switch ON the pump and check whether the
motorfanturns inthedirection indicatedbythearrow
decalontopofthe motor;thenimmediatelyshutdown
the pump at the main switch. If the pump rotated in
the wrong direction,ensurethattheincomingpower
tothepumpisOFF andtheninterchangetwoof thein-
putleadsatthemotorjunctionbox.
Thepumpwillautomaticallyshutdown ifyouallowitto
runinthewrongdirectionformore than3seconds(re-
fer to Section 3.4.4).
4. Reinstallthecover .
Warning During operation, the pump’s tem-
perature can exceed 100°C (212°F). All
housing panels and covers must be
reinstalled to protect the operators
against contact with the hot pump.

18
DRYVAC 50/100 S ManualSection2—Installation
2.8 Connecting the Intake
and Exhaust Lines
Caution Air/moisture leaks in the system’s inlet
or exhaust line can cause deposits
and premature failure.
2.8.1 Connecting the Intake Line
Theintakelineshouldhavethe same or larger diameter
than the DR YVAC intake flange. The line must be clean
andoil-free.
Werecommendinstalling avalvebetween thepumpand
thevacuumchamber .Wirethe valvesothatitopens only
whentheDR YVACis intheOPERA TIONmode. A contact
(Sub-DconnectorX18, contact4)is availableattheinter-
faceforcontrolling thisinletvalve (seeFigure8).
A RUVAC WS/WSU 251/501 roots pump can be con-
necteddirectlyto theDR YVAC intakeport.
Connecttheintakeline totheintakeport; use bellowsto
eliminatetensionintheline.
Ifdirtmight enterthepump fromthevacuum chamberor
from the piping, ensure that the screened dirt trap is in-
stalledintheDR YVAC’sintakeflange.
When etching aluminum,werecommendthat the intake
line be at least 100 mm (4 inches) in diameter or be
heated to at least 80 °C (176°F).
LPCVDnitrideandTEOSapplicationsmayrequirespe-
cial configurations to ensure satisfactory DR YVAC op-
eration.Consultyour Leyboldsalesorservice represen-
tative.
2.8.2 Connecting the Exhaust Line
Connecttheexhaustline;usebellowstoeliminatetension
intheline.
Theexhaust lineshouldhavethesameorlargerdiameter
thantheDR YVACexhaustflange. The exhaust linemust
be able to withstand 1.5 bar absolute (7 psig) since the
DRYVACdoesn’tautomaticallyshutdownuntiltheexhaust
pressureincreasesto1.5bar(7psig).
Keep the exhaust line free of deposits. If the flow in the
exhaustlinebecomesrestricted,depositsoftencollect in
theDRYVAC.
Figure11 ShippingSeals
Key to Figure 11
1 Shippingcap
2 Dryingcanister
3 Gasket
4 Sealingdisc
Avoid connecting the DR YVAC together with oil-sealed
pumps to one central exhaust system. Using a common
exhaust line could result in condensate backstreaming
into the DR YVAC or in dust adhering in the exhaust line.
Special modifications may be necessary to eliminate
noiseandvibrationwhenconnectingseveralexhaustlines
toa singleplenum.ConsultyourLeyboldsalesorservice
representative.
Theoutletforthe ventilation air isonthetop of the DRY-
VAC; if necessary , you can place an exhaust hood over
thepump forcertainclean-roomapplications.
2.9 Options (Standby, Flush,
LTO, and Battery)
2.9.1 Standby Option
Whenthestandbysetisinstalled,theflowofpurgegas
into the pump stages can be stopped by pressing the
STANDBY buttonon the controlunit.
WhentheSTANDBY button is pressed,
STANDBY
isdisplayed.
The flow of purge gas to the 2nd, 3rd, and 4th pump
stagesisshutof f. Thestandbycontactatthe parallelin-
terfaceclosesandtheOPERA TIONcontactopens.

19
DRYVAC 50/100 S ManualSection2—Installation
Key to Figure 12
1 Purgecontrolplate
2 Filterhousing
3 Plugscrew
4 Signalreceptacles
5 Rightsidepanel
Figure12 InstallingthestandbysetonaDRYVAC50S(the100Smodelissimilar)
Pressing the ST AND BY button again restarts the
purge gas supply . If your DR YVAC is set to “PRO-
CESS A”, however , the purge gas supply to the
pump stages remains of f.
Thestandbysetconsistsof a purge-gas-valveplatewith
three electromagnetic valves. The DRYVAC control unit
can switch these three valves simultaneously .
You can determine if the standby option is installed by
pressing the REPOR Tbutton as described in Section 3.7;
“InstalledOptions” isthelastiteminthereportsequence.
Warning If the DRYVAC has pumped hazard-
ous gases, determine the nature of
the hazard and take the appropriate
safety precautions. Comply with all
safety regulations. Take adequate
safety precautions before opening the
purge control plate.
Disconnect the pump from your AC power source
before starting work.
Installthestandbysetasfollows:
1. Open the four 1/4-turn retaining clips and take off the
rearpanel.
2. Openthe 1/4-turnretainingclipsand removethecover .
3. Loosen the two wingnuts below the right side panel
(12/5)toremoveit.
4. Unscrew eight capscrewsandremovethe purge con-
trolplate(12/1).Inits place,installtheelectromagnetic
valves.Ensurethattherubbersealsfitproperly .
5. Connect each valve plug to its signal receptacle
(12/4) as listed below:
Purge gas valve Receptacle
2nd stage, Y17 2X 17
3rd stage, Y16 2X 16
4th stage, Y15 2X 15
6. Secure the electrical cables so they can’t contact
the pump casing or the exhaust.
7. Reinstall the side panel, the cover , and the rear
panel. Don’t forget to reinstall the ground cables.

20
DRYVAC 50/100 S ManualSection2—Installation
Key to Figure 13
1 Purgegastube,3rdstage
2 Retainerplate
3 Nozzle
4 Plugscrew
5 Rightsidepanel
6 Flowindicator
7 Retainingplate
8 Leftsidepanel
9 Exhaustsilencer
Figure13 InstallingtheflushvalveandLTOsetonaDRYVAC50S(100Sissimilar)
2.9.2 Flush Valve Option
When the flush option is installed, the pump can be
flushedwithpurge gas bypressingtheFLUSH button.
WhentheFLUSH buttonispressed,
FLUSH
is displayed. The flush valve is opened and purge gas
flowsbelowtheintake port intothepump.If the standby
setisinstalled,thepurgegas valves also open.
Theflushvalve closesautomaticallyafter 5minutes. You
cancloseit sooner bypressingtheFLUSH buttonasec-
ondtime.
You can determine if the Flush option is installed by
pressingtheREPORTbuttonasdescribedin Section3.7;
“InstalledOptions” isthe lastitem inthe reportsequence.
Warning If the DRYVAC has pumped hazardous
gases, determine the nature of the
hazard and take the appropriate
safety precautions. Comply with all
safety regulations. Take adequate
safety precautions before opening
the purge-gas tubing.
Disconnect the pump from the your AC power
source before starting work.
Proceed as follows to install the flush valve:
1. Remove the DR YVAC panels as follows:
a. Open the four 1/4-turn retaining clips and take
off the rear panel.
b. Open the 1/4-turn retaining clips and remove the
cover.
c. Loosen the two wingnuts below each side panel
(13/8 and 13/5) and remove the left and right side
panels.
2. Removeplug screw (13/4).Initsplace, screw thetube
completewith solenoidvalveintothethreadedholeon
theintake port.
3. Removeplugscrew (12/3)fromfilter housing(12/2).In
itsplace,connectthe tubefromtheflush kit. Connect
theother endofthistubetothesolenoidvalve/tubeas-
semblyinstalled instep 2.
4. Connect the valve plug to its signal receptacle (12/4)
(receptacle 2X 14).
5. Secure the electrical cables so they can’t contact the
pumpcasingortheexhaust.
6. Reinstallthesidepanels,the cover , andtherearpanel.
Don’t forget to reinstall the ground cables.