LEYBOLD ECODRY Plus User manual

Part Nos.
161040V21
161040V22
161065V21
161065V22
ECODRY plus
Multi-stage Roots vacuum pump
Operating Instructions 300758785_002_C1

Contents
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Page
0 Important Safety Information 4
0.1 Mechanical Hazards 4
0.2 Electrical hazards 4
0.3 Thermal Hazards 4
0.4 Hazards Caused by Materials and Substances 4
0.5 Noise Hazard 5
1 Description 6
1.1 Supplied Equipment 6
1.2 Technical Data 6
1.2.1 Electrical Data 7
1.3 Ordering Data 8
1.4 Accessories 9
2 Transport and Storage 10
3 Installation 11
3.1 Placement 11
3.2 Conforming Use 11
3.2.1 Non-conforming Use 12
3.3 Connecting the Pump 13
3.4 Electrical Connection 14
4 Operation 15
4.1 Manual Operation 15
4.2 Interfaces 15
4.2.1 X1 Control Interface 15
4.2.2 X104 Serial RS-485 Interface 17
4.2.3 Frequency converter display 19
4.3 Gas Ballast 20
4.4 Switching off / Decommissioning 22
5 Servicing 23
5.1 Leybold Service 23
6 Troubleshooting 24
7 Waste Disposal 27
8 Certificates 27
EC Declaration of Conformity 28
Declaration of Contamination 29

Safety Information
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These Operating Instructions are a translation of the original German
Operating Instructions 300758785_001_C1.
Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold ECODRY plus has been designed for safe and efficient opera-
tion when used properly and in accordance with these Operating Instructions.
It is the responsibility of the user to carefully read and strictly observe all safe-
ty precautions described in this section and throughout the Operating
Instructions. Moreover, observe the information in all additionally supplied
Operating Instructions for switches or valves, for example.The pump must
only be operated in the proper condition and under the conditions described
in the Operating Instructions. It must be operated and maintained by trained
personnel only. Consult local, state, and national agencies regarding specific
requirements and regulations. Address any further safety, operation and/or
maintenance questions to our nearest office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
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0 Important Safety Information
0.1 Mechanical Hazards
1 Avoid exposing any part of the human body to the vacuum.
2 Select a secure place for the appliance (level surface).
3 The discharge port of the pump must not be blocked or constricted.
Never operate the pump with a seal-off stopper in place blanking off
the exhaust port. Operate the pump only with a connected vacuum
system to the intake flange.
4 With a closed exhaust pipe, the pump can generate up to 5 bar pres-
sure (absolute) on the exhaust. The exhaust pipes should be laid out
according.
5 Condensates from the pump can collect inside or at the exhaust,
escape and spill onto the floor, when operating the pump without an
exhaust line or during transport with an exhaust being not blanked off.
In this case there exists the risk of slipping.
6 Due to its weight the pump must only be lifted by duly trained and
qualified persons.
0.2 Electrical hazards
1 Housing parts must not be opened.
2 Connect the appliance only to a properly and professionally installed
mains outlet socket with protective earth connection.
3 Note the information on the IP type of protection.
0.3 Thermal Hazards
1 At the crane eye, the intake flange and the exhaust flange, the pump
may attain temperatures over 80 °C. There is the risk of suffering
burns. Note the danger symbols on the pump itself.
0.4 Hazards Caused by Materials and Substances
1 Fluoropolymers are used as sealants (FKM) and as lubricants (PFPE) in
the pumps. In case the pump suffers a severe mechanical failure, it
cannot be ruled out that toxic and/or corrosive substances may be
released due to thermal decomposition. Do not open the pump mod-
ule, and close off the inlet and exhaust flanges using blank flanges.
2 Before commissioning the pump, make sure that the media which are
to be pumped are compatible with each other so as to avoid hazard-
ous situations. Observe the instructions for proper and improper use of
the pump in Section 3.2.
3 When pumping hazardous gases we recommend a leak search on a
regular basis. Leaks in the pump cannot be ruled out under all circum-
stances. When pumping hazardous gases, the operator must ensure
that that leaks at the pump will not be a hazard. When pumping toxic
gases replace the gas ballast switch with a plug screw or connect a
gas supply to the gas ballast.
WARNING
DANGER
CAUTION
DANGER

Safety Information
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4 If required additional monitoring of the gas ballast quantities is neces-
sary from the side of the operator when a well-defined and ensured
dilution is necessary from the side of the process. The type of protec-
tion depends on the specific process and needs to be assessed by of
the customer.
5 When the pump has been used to pump hazardous gases, introduce
appropriate safety precautions before opening the intake or the dis-
charge connections. Before opening the pump, purge it for a longer
period of time with an inert gas. If necessary, wear suitable personal
protection equipment like gloves, breathing protection and protection
clothing, for example (see Material Safety Data Sheets for the sub-
stances in use, the chemical reactions and the by-products). Close off
the pump’s inlet and exhaust flanges using blank flanges.
6 When disposing of the pump, observe the applicable environment reg-
ulations.
0.5 Noise Hazard
1 The noise level of the pump during ultimate pressure operation corre-
sponds to the values stated in the technical data. In other operating
modes and depending on the connected vacuum system, higher val-
ues can be expected. Make sure that suitable protection measures are
taken to protect your hearing.
CAUTION

Description
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1 Description
The ECODRY plus is an eight-stage Roots pump. It is of the dry compressing
type and capable of evacuating chambers down to the medium vacuum
range.
The pump is connected to a single-phase supply using a mains power cable
and is powered via a built-in electronic drive unit. It is air-cooled. Bearings
and gears are lubricated using PFPE. The pump is therefore maintenance-
free from the customer’s perspective.
1.1 Supplied Equipment
The pump is delivered ready for use, except from a power cable. Inlet and
exhaust flanges are closed. The scope of delivery includes:
■2 centering rings, 2 clamping rings, 2 blank flanges for the inlet and
exhaust flanges
■D-sub 9-pin jumper for manual operation of the pump.
1.2 Technical Data
ECODRY plus 40 65 Tolerance
Maximum pumping speed without gas ballast 40 m³/h 55 m³/h ± 5 %
Ultimate partial pressure without gas ballast < 0.03 mbar
Ultimate partial pressure with gas ballast < 0.1 mbar
Maximum permissible inlet pressure 1050 mbar*
Max. perm. discharge pressure (relative to ambient) 200 mbar
Leak rate < 10-5 mbar∙l/s
Water vapour tolerance with gas ballast 20 mbar 20 mbar
Water vapour capacity with gas ballast 300 g/h 500 g/h
Permissible ambient temperature +5 to +40 °C
Storage temperature -20 to +60 °C
Typical noise level without silencer, at ultimate pressure
(acc. to DIN EN ISO 2151)
< 52 dB(A)
Relative ambient atmospheric humidity 95%, non-condensing
Max. installation height up to 3000 m (NHN)*
Cooling Air
Leakage current in accordance with IEC 61010-1 < 3.5 mA
Max. contamination grade acc. to IEC 61010-1 2
Speed 12 600 RPM
Protection class IP 42
Intake flange DN 25 ISO-KF DN 40 ISO-KF
Discharge flange DN 16 ISO-KF
Weight, approx. 43 kg ± 1 kg
* For installation heights above 2000 m, an inlet pressure of 50 mbar should not be permanently exceeded.

Description
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1.2.1 Electrical Data
ECODRY plus 120 V 200-240 V Tolerance
Rated voltage 120 V 200-240 V ± 10 %
Frequency 60 Hz 50/60 Hz ± 5 %
Network type TN
Phases 1-ph
Rated current 15 A 10 A
Rated power 1200 VA
Mains fusing / characteristic 15 A / slow blow 16 A / slow blow
Mains connection C 20 acc. to IEC 60320
Fig. 1.1 Typical pumping speed curves
0
10
20
30
40
50
60
70
0,01 0,1 1 10 100 1000
Saugvermögen (m3/h)
Einlassdruck (mbar)
ECODRY
65 plus
ECODRY
40 plus
Inlet pressure [mbar]
Pumping speed [m3/h]

Description
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160
287
160160
191
261
27
17
171
600
23
Schwerpunkt
Display
259
320
298
320
Gasballast
DN 16 ISO-KF
96
ECODRY 40 plus: DN 25 ISO-KF
ECODRY 65 plus: DN 40 ISO-KF
28
Fig. 1.2 Dimensional drawing, dimensions in mm
Gas ballast
1.3 Ordering Data
Part No.
ECODRY 40 plus (120 V) 161040V21
ECODRY 65 plus (120 V) 161065V21
ECODRY 40 plus (200-240 V) 161040V22
ECODRY 65 plus (200-240 V) 161065V22
Center of
gravity

Description
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1.4 Accessories
Inlet screen
DN 40 ISO-KF E41 170 121
DN 25 ISO-KF E41 170 206
Mains cables
EU (CEE 7/7 - C19, 2.0 m) 161810 EU
UK (BS 1363 - C19, 2.0 m) 161810 UK
US cables
US 120 V (NEMA 5-15P - C19, 2 m) 141103US
US 200-240 V (NEMA 5-15P - C19, 2.5 m) 161810US
Blank flange, aluminium
DN 16 ISO-KF 184 46
DN 25 ISO-KF 184 47
DN 40 ISO-KF 184 48
Centering ring, aluminium, FPM
DN 16 ISO-KF 182 06
DN 25 ISO-KF 182 07
DN 40 ISO-KF 182 08
Clamping ring, aluminium
DN 16 ISO-KF 183 41
DN 25 ISO-KF 183 42
DN 40 ISO-KF 183 43
Casing assembly mounting kit 161 831 A
Plug screw gas ballast 161 832 A
Purge gas adapter 161 833 A
DN 16 ISO-KF/12 mm hose adapter for exhaust flange 182 90
RS485/USB connecting cable for X104 interface, 1.8 m 161 820 USB
LEYASSIST software 230 439 V01
Replacement control interface jumper X1 161 823 A

Transport and Storage
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2 Transport and Storage
For transportation lift the pump at the crane eye or safely secured on a suita-
ble pallet.
The pump must not be tilted more than 30 degrees during transport.
For transports over short distances slightly lift the pump at the front side and
move it to the desired location.
Storage
Store the pumps only horizontally standing on their feet and castors.
The pump has been blanked off with blank flanges. Open the pump only
immediately before installing it.
Until putting the pump into service, store the pump in a dry place preferably
at room temperature blanked off with the supplied blank flanges.
The pump must be stored at the most for one year only. Longer storing with-
out turning the rotors will damage the bearings. Therefore, if you are storing
the pump for longer periods, it should be run once a year for at least 45 min-
utes and then returned to storage, as described in the following sections.
(The intake flange can stay sealed during this brief operation, the exhaust
flange must be opened.)

Installation
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3 Installation
3.1 Placement
Place the pump on a straight and level surface (max. tilt of 2°).
To ensure sufficient cooling of the pump, the fan openings of the pump must
not be obstructed, see fig. 3.2.
3.2 Conforming Use
The ECODRY plus has been designed to produce a vacuum. It is capable of
pumping clean, dry gases, which are free of particles, like air, nitrogen, oxy-
gen ≤ 21%, argon with inlet pressure < 100 mbar and helium. Moreover, it is
capable of evacuating vessels of vacuum systems down to the medium vac-
uum range.
The pump is suited for deployment as a backing pump for turbomolecular
pumps.
Organic solvents may only be pumped in traces/at low concentrations (con-
sult Leybold first) outside the flammability range. The pump is suited for
pumping water vapour within the limits given in the technical data.
Fig. 3.1 Connections and controls
Display of the
frequency converter
Foot
Crane eye
Intake flange
Gas ballast switch
Exhaust flange
Castors
See fig. 3.3

Installation
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3.2.1 Non-conforming Use
The ECODRY plus is not suited for use in short cycle pump processes with
high repetition rates (pick-and-place, loadlock, for example).
The ECODRY plus is not suited for pumping of:
■Radioactive substances
■Explosive substances
■Ignitable gas mixtures
■Pyrophorous gases
■Liquids
■Media condensing in the pump
■Solids/dusts
■ Oxidative substances with the exception of ≤ 21% oxygen in the air
■Toxic gases belonging to GHS category I and II*
Pumping of the following gases is only permissible after having consulted
Leybold first:
■corrosive gases
■toxic gases belonging to GHS category II and IV*
*Globally Harmonized System of Classification, Labelling and Packaging of Chemicals
DANGER
Fig. 3.2 Cooling air flow
Cooling air OUT
Air temperature < 70 °C
Cooling air IN
Cooling air IN
> 100 mm> 100 mm

Installation
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When pumping toxic gases replace the gas ballast switch with a plug screw
or connect a gas supply to the gas ballast.
3.3 Connecting the Pump
Remove the blank flanges. We recommend that you retain the blank flanges
for decommissioning of the pump.
During installation work on the intake and discharge lines do not subject
flanges to any stresses.
Intake side
At the intake side, connect a hose to the vacuum chamber. Do not damage
the sealing surfaces of the connecting flanges.
Do not allow the ingestion of any objects (screws, welding beads, nuts,
washers, pieces of wire, etc.) through the intake port of the pump.
The intake line must be clean. Deposits in the intake line can degas and
impair the vacuum. The connecting flanges must be clean and undamaged.
NOTICE
X1 PUMP
MAINS
Fig. 3.3 Connections and controls
Start/Stop switch
Control interface X1
with bridging plug
RS 485 interface X104
Mains connection
Mains switch

Installation
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Exhaust line
Connect the exhaust line with a hose to the pump, or when operating the
pump without a connected exhaust line, operate the pump only in a well
ventilated room. The operator must check, whether the pumped gases will
lead to safety risks on the environment if the pump is operated without an
exhaust line (i.e. risk of suffocation, risk of slipping due to condensing
vapours, etc.).
The cross-section of the exhaust line must at least match the inside diameter
of the connections.
Smaller cross sections may cause an undesirable overpressure within the
system. Do not start up the pump with a constricted or blocked exhaust.
Ensure that any valves or blocking devices in the exhaust line are open.
Clogged exhaust lines will reduce the available pumping speed, increase
temperature and cause overloading of the pump motor or a dangerous
overpressure within the system. There is the risk of bursting. The pump
can generate pressures up to 5 bar (abs.) at the exhaust, when the dis-
charge line is shut.
When pumping vapours we recommend connecting a condensate separator
at the exhaust.
The exhaust lines should be laid so that they drop down and away thereby
preventing condensate from flowing back into the pump. We recommend a
slope > 3°.
Connect the exhaust line to an abatement system with sufficient throughput,
if required by the process.
If within the system toxic substances or gases are being used, then the
operator will be responsible for ensuring that the corresponding safety pre-
cautions are introduced!
3.4 Electrical Connection
Read the data on the device nameplate carefully before connecting to mains
voltage. Plug in the power connector.
The pump is only intended for a TN systems network. For other types of net-
works please contact Leybold.
When using a residual current device (RCD) install type B or type F.
The plug is equipped with a cable pull-out protection. When plugging in the
mains plug, the pull-out protection mechanism engages. To pull out, press
finger on the yellow release lever, which will release the locking mechanism
again.
If required, connect the X1 control interface or the X104 RS 485 interface
(see Section 4.2).
DANGER
CAUTION
DANGER

Operation
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4 Operation
The ECODRY plus can be operated either manually or via an interface.
Switch the pump only on provided an exhaust line has been connected.
The exhaust of the pump must not be blocked or constricted. Never oper-
ate the pump with the seal-off stoppers in place blanking off the exhaust
port.
4.1 Manual Operation
For manual operation, connect the jumper supplied with the unit to the X1
interface.
Switch the pump on at the MAINS switch and wait for approximately two
seconds while the pump initialises. Now the pump can be started using the
start/stop switch (PUMP).
Following start-up, the pump requires a few seconds in order to reach its
rated frequency.
In this mode, the X104 interface can only be used for reading off operating
parameters.
4.2 Interfaces
4.2.1 X1 Control Interface
The pump can be incorporated within a plant control system by means of the
X1 control interface. To do this, set the start/stop (PUMP) switch to “1”. The
ECODRY plus can be started remotely by closing the pin 8 contact to pin 9
on the X1 interface. Opening the contact stops the unit.
In this mode, the X104 interface can only be used for reading off operational
parameters.
WARNING
X1 PUMP
MAINS
Start/Stop switch
Bridging plug
Mains switch

Operation
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Table: Pin assignment X1
Customer plug (pro-
vided with pump)
SUB-D 9 (female)
ECODRY plus X1
SUB-D 9 (male)
Description Pin Pin Description Limits Function
1 1 Analog Frequency
Monitor output 0 … +10 Vdc (2 mA)
Analog signal proportional to cur-
rent rotation frequency
(10 V = 210 Hz)
2 2 Digital Input / Low
speed
low active input (ref. to Digital
Common)
Bridge to pin 4 for lower speed
(170 Hz),
open for full speed (210 Hz)
3 3 Voltage supply for
analog input +10.5 V (max. 16 mA) Voltage supply for analog input A1
4 4 Digital Common
5 5 Digital Output
(Pump Status)
Optocoupler output open collec-
tor (supply by single resistor,
max. current 10 mA) (low active
ref. to optocoupler ground)
On: Frequency setting reached
Off: Frequency setting not reached
Jumper Pin 6
/ Pin 7: speed
control
deactivated
6 6 Analog Input
(Speed Control)
0 … +10 V
(20 kOhm)
Optional input, deactivated by
default*. Contact Leybold for
further information.
7 7 Analog Common
Jumper Pin 9
/ Pin 8: Run
Switch active
8 8 Digital Common
9 9 Digital Input /
RUN
low active input related to digi-
tal common
Bridge to pin 8 for RUN,
open for STOP
Hous-
ing
Hous-
ing
Pump housing,
PE
* When speed control is activated, operation is only possible if a voltage is applied between pins 6 and 7.
10 V correspond to maximum speed.
NOTICE: Do not apply external voltage to the digital input terminals because the internal optocouplers can be
damaged.
Do not exceed the stated voltage and current limits.

Operation
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4.2.2 X104 Serial RS-485 Interface
Alternatively, the X104 RS 485 interface can be used to operate the pump,
giving access to additional operational parameters for the frequency convert-
er.
The operating parameters can be accessed via MODBUS protocol or via the
LEYASSIST software (see Section 1.4. Accessories).
The following connection parameters are used for communication:
Protocol Modbus RTU
Baud rate 9600 bps
Data length 8 bit
Parity No parity
Stop bit 1 bit
Address 1
Modbus Register List
Description Read/
Write
Modbus
Register
Settings
Run Command Write 2000H Bit 1~0 01B: Stop
10B: Run
Bit 5~4 Always set to: 01B: FWD
Bit 14~13
Run command source:
00B: No function
01B: Digital keypad
10B: Operated by 00-21 Setting
11B: Change operation source
All other bits set to zero.
Frequency Command (Hz) Read 2102H
Frequency Command (Hz) Write 0400H
Output Frequency (Hz) Read 2103H
Output Current (A) Read 2104H
Output Voltage (V) Read 2106H
DC Bus Voltage (V) Read 2105H
Output Power (kW) Read 210FH
Drive Status Read 2101H Bit 1~0
AC motor status:
00B: Drive stops
01B: Drive decelerating
10B: Drive standby
11B: Drive operating
Source of operation command Write 0015H 1: External terminals
2: RS485 Communication
Error code Read 2100H Error codes listed in section „Troubleshooting“
Reset Write 2002H Set Bit 1 to 1 for Reset

Operation
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Description Read/
Write
Modbus
Register
Settings
Temperature of drive power module (°C) Read 220EH
Accumulated Run time (minutes) Read 051FH
Accumulated Run time (days) Read 0520H
Software revision/version Read 0006H
Table: Pin assignment serial interface X104
Customer plug
SUB-D 9 (male)
ECODRY plus Serial Interface X104
SUB-D 9 (female)
Description Pin Pin Description Comment
1 1 Not connected
Bridge to Pin 3 for
termination 2 2 Termination
Bridge to Pin 2 for
termination 3 3 Termination
4 4 Not connected
GND 5 5 Ground (GND)
6 6 Internally bridged w/ Pin 8
Tx/Rx+ 7 7 Receive + (Tx/Rx+) Bridged internally to Pin 9
Tx/Rx– 8 8 Send – (Tx/Rx–) Bridged internally to Pin 6
9 9 Internally bridged w/ Pin 7
Shield Hous-
ing
Hous-
ing Grounded

Operation
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4.2.3 Frequency converter display
After switching on the FC, the display will show the output frequency in Hz
with a preceeding „H“.
E.g.: the pump motor runs at 60 Hz
There are several LEDs to indicate the different pump‘s states:
STOP LED Flashing: Drive is in a warning mode.
On: Drive is in an error mode and the pump is being stopped.
REV LED On: Motor runs reverse
Off: Motor rotates forward
FWD LED On: Pump is ready or is running.
Off: Drive is in initialisation mode.
RUN LED Output frequency is shown in the display..
On: Drive is running.
Approx. 1,000 hours before reaching the recommended service interval, the
display will show the warning message „SEr“ and the remaining time indicat-
ed by a „d“ (for days).
The displays change constantly every 3 seconds:
If the recommended service interval is exceeded, the display toggles between
showing the frequency and the warning message „SEr“.
The displays change constantly every 3 seconds:

Operation
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4.3 Gas Ballast
If the process contains mainly permanent gases, the ECODRY plus may be
operated without gas ballast.
If the composition of the gases to be pumped is not known and if condensa-
tion in the pump cannot be ruled out, run the pump with the gas ballast valve
open.
Pumping of Condensable Gases and Vapours
If the gas ballast valve is open when the temperature is at operating level, the
ECODRY plus can pump water vapour within the limits specified in the tech-
nical data. If the vapour pressure rises above the permitted water vapour tol-
erance, the gasses condense to vapour in the pump.This can lead to corro-
sion and thus damage to the pump.
Before pumping out vapours, open the gas ballast valve and warm up the
pump for around 30 minutes with the inlet line closed.
Running under gas ballast has a detrimental effect on the ultimate pressure
which can be achieved.
Gasballast geschlossenGasballast geöffnet
Fig. 3.4 Gas ballast switch
Gas ballast closedGas ballast open
The operating area of the gas ballast switch can
be distorted contrary to the depiction.
Hexagon socket for
unscrewing the gas
ballast switch