MKS 48 Series User manual

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For more information or literature, contact:
MKS Instruments, Inc.
5330 Sterling Drive
Boulder, CO 80301 USA
Phone: [phone]
Toll Free: 1-800-345-1967
Fax: [phone]
Email: [email protected]
Web: http://www.mksinst.com/vthome.html
© 2006 by MKS Instruments, Inc. All rights reserved.
2

Table of Contents
Package Contents . . . . . . . 4
Symbols Used in this Manual . . . . .
5
Safety Precautions . . . . . . . 6
Cleaning . . . . . . . . . 6
General Specifications . . . . . . 7
Examples of Applications for Series 48 Heaters . . 8
About the Series 48 Heater System . . . . 9
Installing Series 48 Heaters . . . . . 10
Controller Operations and Visual Signals (Base Model) . 17
LED Indications Chart . . . . . . 18
Display/Adjust Enabled Control Upgrades . . . 19
Operating Parameters Chart . . . . . 21
Communications Enabled Control Upgrades . . 22
Using LTA/HTA Function . . . . . . 24
Series 48 Heater Software . . . . . . 26
Accessories/Part Replacement . . . . . 28
Troubleshooting . . . . . . . 29
Modbus Register Assignments . . . . . 30
Limited Product Warranty . . . . . . 31
3

Package Contents
Before unpacking your Series 48 heater system, check all surfaces of the packing
material for shipping damage.
Be sure that your Series 48 heater system contains these items:
• Series 48 heaters as specified on packing slip, each equipped with a controller
and coiled cable. If ordered, optional control expansion items will also be included
with the heaters.
• Flange insulators (if required).
• Main power cable.
• CE Declaration of Conformity.
Inspect the components for visible evidence of damage during shipment. If anything
has been damaged, notify the carrier immediately. Keep all shipping materials and
packaging for claim verification. Do not return the product to MKS.
If any items are missing from the package, call MKS/HPS Customer Service at 1-
303-449-9861 or 1-800-345-1967.
MKS Instruments, Inc. Telephone [phone]
5330 Sterling Dr. Toll-Free [phone] (USA only)
Boulder, CO 80301 Facsimile [phone]
USA
4

Symbols Used in this Manual
CAUTION: Risk of electrical shock.
CAUTION: Refer to manual. Failure to heed message could result in personal
injury, serious damage to the equipment, or both.
Failure to heed message could result in damage to the equipment.
 Calls attention to important procedures, practices, or conditions.
Class 2 Construction. Ungrounded equipment with double or reinforced electrical
insulation.
5

Safety Precautions
Do not use heaters outdoors or in an explosive environment.
Electric shock or ignition of explosive vapors is possible.
Heaters are designed for use with metal piping.
Heater operating temperatures may exceed the melting point of other materials.
Check specifications.
Do not immerse the satellite controllers, cables, or heaters in water or liquid of
any kind.
Electrical shock may result. Permanent equipment damage may also occur.
Ground piping system according to U.S. National Electric Code or local
requirements or both.
A Ground Fault Equipment Leakage Circuit Interrupter (GFELCI) should be used.
Although grounded piping is not required, the performance of the GFELCI is
enhanced and risk of electrical shock is further reduced when the piping is
grounded. The heaters themselves are double-insulated devices and do not
require a ground.
Heaters must be secured to piping before operation.
Heaters may overheat, resulting in permanent damage, if not attached to piping.
Also, heaters should only be used on piping which matches a heater’s internal
diameter and shape.
Follow hazardous chemical safety procedures specified by the chemical supplier
when heating vacuum piping designed to conduct hazardous chemicals.
Cleaning
Clean base station, satellite controllers, cables and heaters with damp cloth and mild
detergent.
Do not immerse in water. There is a risk of electrical shock and damage to the
equipment.
Do not use solvents. Some of the plastic enclosures may be attacked.
6

General Specifications
Electrical rating 100 – 120 V~, 50/60 Hz, 12 A
200 – 240 V~, 50/60 Hz, 12 A
Electric duty cycle 6% to 85% depending on temperature set point and
supply voltage
Pollution Degree 1
Over-voltage category II
Environment Indoor use only
Relative humidity 0% to 90 % non-condensing
Pipeline temperature Adjustable 0-185°C, in 1 degree increments
Heater exterior surface 0-80°C, depending on temperature set point
Materials Heater: molded silicone foam, fiberglass-reinforced
silicone fabric, Teflon®insulated wire
Heater cable: polyurethane sheath, Teflon®insulated
core wires
Controller: polycarbonate enclosure
Weight Satellite controller: 0.05 kg
Heater: 0.1 to 2.5 kg
Safety Agency Testing
UL Listed File E52951 2JR
89/336/EEC EMC Directive
73/23/EEC LV Directive
7

Examples of Applications for Series 48 Heaters
Semiconductor Industry Applications
• Prevent solidification of ammonium chloride (NH4Cl) in a silicon nitride
LPCVD system
• Prevent solidification of aluminum chloride (AlCl3) in an aluminum etching
system
• Reduce solid buildup in other semiconductor processes, such as titanium
nitride, tungsten, and TEOS CVD
• Maintain uniform temperature environments in downstream semiconductor
and related processes and equipment
• Maintain gas temperature in gas delivery systems
Biopharmaceutical Industry Applications
• Prevent vapor condensation in sterile vent filters and piping systems
• Maintain or promote preferred material viscosities
Custom and R&D Applications
• Heaters for custom and R&D applications can be engineered to meet specific
requirements. Contact the MKS/HPS engineering group at 1-800-345-1967 for
assistance.
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About the Series 48 Heater System
The Series 48 Heater System is an integrated, electronically controlled line of heater
products. They have been designed to meet a variety of application requirements
while emphasizing personnel safety and equipment preservation. These heaters
reduce contamination; increase system uptime and product yield; and decrease
scheduled maintenance.
Series 48 heaters are designed to be easy to install, operate, and customize to meet
the needs of modern manufacturing processes. By using an optional upgrade
module, each of the controlling parameters of any heater can be individually
adjusted for complete heating system customization and control. This will permit
simple adjustments such as correcting a cold spot, creation of a thermal ramp
across the entire system, or anything in between. Control settings can be modified
“on the fly” without the need to interrupt power to the system.
The system can be operated and controlled locally, remotely, or both can be done
simultaneously. Optional upgrade modules allow for RS485 communications and
remote connectivity via Internet. User-friendly software has been created to allow
the adjustment of any of the control parameters, data logging, and heater
diagnostics. It has the ability to automatically assign individual addresses to each
controller. It is therefore not necessary to manually assign an address to each
controller prior to installation, although this can be done if desired.
Controlling devices such as thermostats, switches, and fuses, are subject to pre-
mature degradation and failure due to exposure to high temperatures. They are
typically installed within the heater in close proximity to that which is being heated,
resulting in component degradation and premature failure. These devices do not
exist in Series 48 heaters. All controlling and safety functions are located within the
control housing. This ensures that the user can expect the longest possible lifetime
from a heater. Over-temperature protection is performed within the controller; the
limit temperature is user adjustable and the circuit re-settable. In case of an over-
temperature event, the heater is not rendered useless. The operator simply re-sets
the heater control and normal operation resumes.
The molded silicone foam thermal insulation prevents heat loss and maintains the
external temperature within safe limits while the internal temperature is as high as
185°C. From room temperature, the heaters typically reach their set temperatures in
less than 30 minutes.
All materials used in the heaters and insulators are suitable for clean room use.
Based on Class 1 clean room tests conducted at HPS®, Series 48 heaters emit less
than ten 0.7µ particles per cubic foot per minute.
9

Installing Series 48 Heaters
1. Installation Overview
1.1. Inspect pipe system and heaters.
1.2. Install heaters
1.3. Install heater controllers
1.4. Daisy chain heater controllers using jumper cables provided.
1.5. Install optional control upgrade modules (if applicable).
1.6. Install RS485 communication cables (if applicable).
1.7. Apply power to heaters.
Completed heater assembly
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2. Detailed Installation Instructions
2.1. Inspect system and heaters for damage. Make sure that there are no burrs or
other protrusions on components to be heated that could cut the heater and
expose a live heater element wire.
2.2. Install the heaters on the system. Make sure to match the heater to the part
being heated. These are molded heaters specifically designed to heat
components of matching dimensions. In addition to diameter and length, it is
also important to match other component features such as bend radius and
bend angle. The fit should be snug to ensure good thermal contact between
the heater and the part to be heated. Only moderate insulation compression is
needed. Do not use any other device to hold a heater in place.
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Heaters for bellows and flexible hose are designed for a loose fit to allow
for modest bellows and hose movement. These heaters must be installed with
the heater’s lead exit in the up position with respect to gravity. Failure to follow
this instruction could lead to overheating and possible heater damage.
Wrap and secure insulators around flanges. Correctly sized flange insulators
must be used for bellows or hose installation. Special flange insulators are available for
covering connections from tubing to hose.
2.3. Install the heater controllers onto the heaters. Notice that each of the
controllers contains a white power receptacle on its right end, and black power
receptacle on its top side.
Black receptacle
White receptacle
Controller Receptacles
The white plug installed on the heater’s lead wire mates with the white receptacle
of the heater controller as shown below. (The connectors & receptacles are
keyed, so an improper connection is not possible.)
Installing controllers
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2.4.Daisy chain heater controllers using jumper cables provided. Starting at the last
heater controller (with respect to power), insert the black eight-position
connector of the terminating cable into the controller’s black eight-position
receptacle as shown below. It will click into place.
Terminating cable
Installing cables into controllers
Next, connect the white six-position connector of the terminating cable to the
mating white six-position connector of the upstream tee cable:
Tee Cable
Connecting power cables
Use only factory-supplied cables. Failure to do so may result in
heater or controller damage or failure.
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Now insert the tee cable’s black connector into the upstream heater controller’s
black receptacle. Repeat this process for all heaters until the connection of the
first heater controller is completed.
Completed basic installation
Please read sections 2.5 & 2.6 (control upgrade options), if they apply. If control
upgrade modules are not to be used, proceed to section 2.7.
2.5. Install optional control upgrade modules. Control upgrade modules, if required,
can be installed at any time (See “Control Upgrades” sections for more
information). There are three types of upgrades available: Display/Adjust;
Communication; and Display/Adjust/Communication. To install an upgrade,
use a coin or appropriate tool to remove the standard cover plate attached to
the base control unit. (Retain this cover plate if it needs to be re-installed at a
later time.) The control upgrade module is simply snapped into the place from
which the cover plate was removed, as shown below.
Cover Plate Removal
Upgrade Installation
 Be sure to install control upgrades in a careful manner, aligning the module’s
retention tabs with their respective holes in the base. Snap into place by
applying pressure evenly across the face of the upgrade.
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2.6. If required, install RS485 communication cables. Install appropriately equipped
control upgrade modules as described above (2.5). Data cables are equipped
with 6-position, 4-conductor RJ11 connectors. (Note: These are not standard
telephone cables!) Notice that there are 2 receptacles for data cables on each
module. Using a data cable of appropriate length, install one end of the cable
into either communications port on the control assembly of the first heater, and
the second end into either communications port of the control assembly of the
second heater.
Communications cable installation
Using another cable, install one end into the remaining communications port of the
second heater’s control, and the other end into either communications port of the
third heater’s control. Repeat this process until the last heater’s controller has a
single communications port occupied.
At this point, a data cable extending from the heater system to a remote
monitoring location (such as a laptop or PC) can be installed. The cable can
be installed into either the available communication port of the first heater, or
the available port of the last heater. It may be necessary to use an RS232-
RS485 converter for computer interface. This is available from MKS/HPS. For
a general functional description of the software interface, see “Series 48
Heater Software”.
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2.7. Apply power to the heaters. At this point, the heater assembly is completed
and the system is ready to be connected to the electrical supply. Using the
main power cable specifically designed for use with 48-Series heaters, mate
the cable’s six-position electrical connector with its counterpart on the jumper
cable inserted in the first controller. Included with most power cables and
extending from the rear of the six-position connector are three wires: one 16GA
green wire terminating with a ring; and two 22GA white wires terminating with
small connectors. The green wire is used for grounding the equipment on
which the heaters are installed, while the white wires are used for an optional
Low Temperature Alert / High Temperature Alert (HTA/LTA) circuit. For
instructions regarding the use of these wires, see “Using the LTA/HTA
Function”. Once all of the electrical connections have been made, the power
cable can be connected to the power supply. The heaters will begin operating
within their programmed parameters.
Ground piping system according to U.S. National Electric Code
(NEC), local requirements, or both.
 Tee and Terminating Cable information:
“Tee” Cables: Easily identifiable due to its T shape and three electrical connectors (2
six-position, 1 eight-position). It is to be used, with respect to power, on the first and
any intermediate heater assembly in a group of assemblies. (A heater assembly is
defined as a heater, a controller, a cable, and if it exists, an optional control upgrade.)
“Terminating” Cables: Identifiable as a cable with 2 electrical connectors (1 six-position,
1 eight-position). It is to be used, with respect to power, on the last (or only) heater in a
group of heater assemblies. This cable defines the end of an electrical chain from a
single power source. Its main purpose is to close the LTA/HTA circuit.
Lengths: Each of the above cables is available in two different lengths. A short cable
will contain about three circular convolutions per six-position connector, and should be
used on heaters of up to 12” in length. A long cable will contain about 11 circular
convolutions per six-position connector, and should be used on heaters greater than 12”
in length.
16

Controller Operations and Visual Signals
Base Model, #4800-1150
Base Controller: 4800-115
0
1. Control Structure: The Series-48 heater control unit contains two
microprocessors. One is dedicated to controlling and operation of the heater
within specified (modifiable – see “Control Upgrades” sections) parameters,
while the other is dedicated to safety. The control circuitry and safety circuitry
operate independently of each other, with the exception of comparing data to
ensure that both circuits are operating normally. Any discrepancies outside of
pre-determined tolerance will cause an automatic heater shutdown. The main
purpose of the safety circuitry is protection from an over-temperature event. If an
unlikely malfunction were to occur and cause an overheating condition, the safety
circuit will interrupt the power to the heater element via latching relay. This relay
will remain open until power to the heater is cycled (turned off and on) and
conditions are such that the latching relay should be closed once again. It is
important to note that conditions external of the heater and controller are the
usual cause of such an event (i.e. high temperature purge, cleaning cycle, etc.).
Each microprocessor has its own temperature sensor dedicated to it (two
thermocouples embedded within the heater), and therefore the controlling circuits
are completely independent and redundant.
2. HTA/LTA alert function: The High Temperature Alert/Low Temperature Alert
function provide both a local and remote notification that a heater is outside an
acceptable operating temperature window about the set point. Both the HTA and
the LTA values are independently adjustable, and are set as incremental values
to be computed from the set point temperature. Default settings are: HTA = 20;
LTA = 20. This means if the set point temperature is 150°C, the acceptable
operating range will be 130°C – 170°C. Remote notification originates as an
electrical signal from an external source (see ”Using the LTA/HTA Function”).
If the heater’s temperature is determined by the control microprocessor to be
within this operating range, a mechanical relay is then closed allowing the
electrical signal to pass thru the relay and onto the next controller. When all
heaters of the system are within the operating ranges determined by their
controllers, all such relays are closed, completing the signal circuit. An external
monitoring device, such as an LTA monitor, can then output a signal that all
17

heaters are within acceptable range. (This signal circuit is independent RS485
communications.)
A visual local signal is also produced on each heater controller’s front panel.
When a controller determines its heater’s temperature to be within acceptable
range, the amber “In Range” LED will illuminate. If it is outside of acceptable
range, the “In Range” LED will be off and the heater’s condition can be
interpreted from the LED signals. (See “LED Indications Chart” below.)
Therefore, the remote notification indicates the operating condition of a heater
group, while local notification indicates the operating condition of each individual
heater.
3. LED Signals: The visual signals of the three LED’s on the controller’s front panel
can convey a great deal of information regarding a heater’s or controller’s
operating status. “Output” (green) indicates that voltage is being supplied to the
heater. “In Range” (amber) indicates that the heater’s temperature is determined
to be in the acceptable operating range (as described above). “Alert/Alarm” (red)
indicates that there is a condition that should be investigated. The below chart
should be used to interpret the controller’s LED indications.
LED Indications Chart
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Display/Adjust Enabled Control Upgrades
Local User Interface - #4800-0001 & #4800-0003
Display/Adjust Upgrade: 4800-0001 Display/Adjust/Communications Upgrade: 4800-000
3
1. Installation of upgrade modules: A control module upgrade is a “plug-and-play”
device. Installation and/or removal of upgrade modules can be performed at any
time without interrupting power or heater/controller function. To install, remove
the protective cover plate from the base control unit (#4800-1150) using a coin or
other appropriate tool. Retain this cover plate for re-installation if the upgrade is
to be later removed. Then simply install the control upgrade module by snapping
it into the place from which the cover plate was removed. A small amount of
pressure will be required in order to snap the retention tabs into the base
controller. Upgrade module removal is performed in the same manner as cover
plate removal.
2. Initial function of upgrade: If the upgrade module is installed while the
heater/controller is operating, the display will immediately illuminate. For three
seconds the upgrade will read the programmed operating parameters of the base
control, during which the display will read “EHG”. When the module has
completed this task, it will automatically display the heater’s current (sensed)
temperature. If power is not supplied to the heater when the upgrade is installed,
the upgrade module will perform the above steps when power is applied and
after the base controller performs a normal self-diagnostic. The diagnostic will
not take a noticeable amount of time.
3. Adjusting operating temperature: The most commonly adjusted parameter,
operating temperature, is the most easily accessible parameter. To access it,
press the middle teal-colored button. A small decimal point will illuminate in the
bottom-right corner of the display to advise that the set-point value is being
displayed rather than the sensed heater temperature. To adjust this value, press
either the up or down arrow button once, which notifies the upgrade that a
change in value is desired. Press the up or down arrow button again to begin
adjusting the value. The adjustment can be performed in increments by pressing
and releasing the button, or adjusted quickly (scrolled) for large changes by
pressing and holding the button. Once the adjustment is completed, press the
middle button to finish and the heater’s sensed temperature will once again be
19

displayed. If the middle button is not pressed, the upgrade will return to normal
operation using the new value after 5 seconds.
4. Adjusting other operating parameters: All other operating parameters can be
accessed by pressing and holding both the up and down arrow buttons for three
seconds. At this point the display will read “SLA”, which means “Set Point High
Limit Alarm”, or more commonly referred to as “Safety Limit Temperature”. This
particular parameter is the temperature at which, regardless of cause, the
controller will open its latching relay and cease operation pending operator
intervention. To view this value, press either the up or down arrow. To modify
this value, press the up or down arrow again. To return and advance to the next
parameter, press the middle teal button. All parameters (except operating
temperature) are adjusted in this manner. See “Operating Parameters Chart”
for a full listing of all parameters and information accessible from these user
interface modules.
5. Important note about upgrade modules with local adjustment capability: When an
upgrade module is used to adjust a controller’s operating parameters, the
information is written to the base controller’s non-volatile memory. The upgrade
module can therefore be removed from the base controller, and the controller will
continue to operate within the parameters specified. This is even true if the
heater controllers are completely powered down and re-started. It is therefore
possible to use a single upgrade module to set the operating parameters of any
number of heater controllers.
20