MKS GMW-25 User manual

OPERATION MANUAL
Manual Order Number: 1050-001 Copyright © 1996 MKS Instruments, Inc. All rights reserved.
Revision Level: B 10/07/04 MATCHWORK ®is a registered trademark of MKS Instruments, Inc.
GMW-25
RF Plasma Generator
HIGH RF VOLTAGES MAY BE PRESENT AT THE OUTPUT OF THIS
UNIT. All operating personnel should use extreme caution in handling
these voltages and be thoroughly familiar with this manual.
CFC's
DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE
MAINTENANCE OF THIS PRODUCT. In recognition of our responsibility to protect
the environment, this product has been manufactured without the use of CFC's. The
no-clean flux now used in all soldering operations may leave a small inert residue that
will not affect the performance of the product. The use of CFC's for cleaning or
maintenance may result in partial liquification of the no-clean flux residue, which will
damage the unit and void the warranty.
ISO 9001
QUALITY
SYSTEM
This product is manufactured at an MKS Instruments’ ISO-9001:2000-Quality-
System-compliant facility.
Notice
The material contained in this manual is subject to change without notice. No part of this manual may be
reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying or
electronic transmission or other means of reproduction or distribution without prior written consent of MKS,
ENI Products. The drawings, specifications and other technical information contained in this manual are the
property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as
the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products.

Warranty
MKS, ENI Products warrants to the original purchaser for a period of one year from the date of
delivery, each instrument to be free from defects in materials and workmanship. For a period of one
year, MKS, ENI Products will, at its option, adjust, repair, or replace defective parts, without charge to
the original purchaser, so that the instrument performs according to its specifications.
When warranty service is required, the instrument must be returned, transportation prepaid, to
the factory or to one of MKS, ENI Products' designated service centers. If, in our opinion, the
instrument has been damaged by accident, unreasonable use, buyer-supplied software or interfacing,
improper site preparation or maintenance, or abnormal conditions of operation, repairs will be billed
at standard rates. In this case, an estimate will be submitted before the work is started.
THIS LIMITED WARRANTY IS EXCLUSIVE AND MKS, ENI PRODUCTS MAKES NO OTHER
WARRANTIES, EXPRESS OR IMPLIED, AND ALL OTHER EXPRESS ORAL OR WRITTEN
WARRANTIES AND ALL WARRANTIES IMPLIED BY LAW, INCLUDING ANY WARRANTIES OF
MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR OTHER WARRANTY OF
QUALITY ARE EXCLUDED AND DISCLAIMED. IN NO EVENT SHALL MKS, ENI PRODUCTS BE
LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES RESULTING
FROM BREACH OF ANY WARRANTY, WHETHER EXPRESS OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, OR
FROM ANY CAUSE WHATSOEVER, INCLUDING NEGLIGENCE. Buyer's sole and exclusive
remedy under this warranty shall be repair or replacement as set forth above, or if MKS, ENI
Products is unable to repair or replace the defective part within a reasonable time, a refund of the
price of the part or goods that give rise to the warranty claim.
Service And Technical Assistance
For Service or Repair contact the closest Customer Service Department with the following
information:
• Model and serial number
• Purchase order number
• Detailed description of malfunction
• Your company's "Bill To" and "Ship To" address
You will receive a RMA (Return Materials Authorization) number, the warranty status of the unit to be
returned and estimated repair charge, if any. The RMA number is your authorization number. Please
type this number on your purchase order and shipping label. After MKS, ENI Products receives the
unit, a firm quote and estimated date of completion will be given.
For Technical Assistance for your particular application, contact the nearest MKS, ENI Products
Sales and Service Center. The following information will help us provide you with prompt and
efficient service:
• All of the information contained on the unit's nameplate.
• Names and telephone numbers of important contacts.
• Detailed description (i.e. physical damage and/or performance anomalies, quantitative
and/or qualitative deviation from specifications), including miscellaneous symptoms, dates
and times.
• The environment and circumstances under which the issue developed.
• Supporting test data and/or records that can be provided.
• Any previous, related conversations and/or correspondence with MKS, ENI Products.

Sales & Service Locations
ROCHESTER, NY MKS Instruments, Inc.
100 Highpower Road
Rochester, NY 14623
Toll Free USA Sales Hotline:
Toll Free USA Service
Hotline:
Tel:
Fax: [phone] [phone]
1-800-267-5362
1-800-724-ENI1 (3641)
SAN JOSE, CA MKS Instruments, Inc.
70 Rio Robles
San Jose, CA 95134
Tel:
Fax: [phone] [phone]
AUSTIN, TX MKS Instruments, Inc.
1321 Rutherford Lane
Suite 200
Austin, TX 78753
Tel:
Fax: [phone] [phone]
ENGLAND 1 Anchorage Court
Caspian Road
Altrincham, Cheshire
WA14 5HH, England
Tel:
Fax: [phone]
GERMANY Sielminger Str. 63
D-70771 Leinfelden-
Echterdingen (Stetten)
Stuttgart, Germany
Tel:
Fax: [phone]
JAPAN 1-21-15 Aoyagi Kunitachi
Tokyo 186-0013
Japan
Tel:
Fax: [phone]
KOREA 1ST Floor, DK Plaza-I
375-1, Geumgok-dong City
Bundangogu, Seongnam
Kyonggi-do, Korea 463-805
Tel:
Fax: [phone]
SINGAPORE Blk 4010 Techplace 1
#01-07/08/09
Ang Mo Ko Ave 10
Singapore 569626
Tel:
Fax: [phone]
TAIWAN 2F, No. 47, Ln. 2, Sect. 2
Kuang Fu Rd.
Hsinchu 300
Taiwan, ROC
Tel:
Fax: [phone]
P.R. of CHINA West end of 2nd floor,
No. 3 building (T20-3)
No. 258 Jinzang Rd.,
Shanghai Jin Qiao Export
Processing Zone
Pudong, Shanghai 201206
P.R. of China
Tel:
Fax:
86-21-5834-7934 or
86-21-5834-7914
86-21-5834-7794
Product and Applications information also available on the Internet at:
http://www.mksinst.com

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Contents
GMW-25 i
TABLE OF CONTENTS
Chapter 1 - Introduction................................................................1-1
1.1 About This Manual.......................................................................................1-2
1.1.1 Finding Your Way Around..............................................................1-3
1.1.2 Documentation Conventions..........................................................1-4
Commands .............................................................1-4
Definitions...............................................................1-4
1.2 Safety Considerations .................................................................................1-5
1.2.1 Operating and Maintenance Cautions............................................1-5
1.2.2 Shock Hazard Warnings................................................................1-5
1.2.3 Service ..........................................................................................1-6
1.2.4 Safety Labels.................................................................................1-7
RF Radiation Warning Label...................................1-7
Heavy Object Warning Label..................................1-7
1.2.5 Technical Support..........................................................................1-7
1.3 Name Plate ..........................................................................................1-8
1.4 Generator Options at a glance.....................................................................1-9
1.5 Getting Started Quickly..............................................................................1-12
Chapter 2 - System Installation ....................................................2-1
2.1 Unpacking/Inspection ..................................................................................2-1
2.1.1 Mechanical Inspection ...................................................................2-1
2.1.2 Claim for Damage..........................................................................2-1
2.1.3 Packaging for Reshipment.............................................................2-1
2.2 Installation Requirements............................................................................2-2
2.2.1 Dimension Requirements...............................................................2-2
2.3 Rack Installation..........................................................................................2-3
2.3.1 Installing into a Cabinet Assembly.................................................2-3
19-inch Cabinet.......................................................2-3

Contents
ii GMW-25
2.4 System Interconnect.................................................................................... 2-4
2.4.1 Standard 25-pin Analog I/O Interface (ENI P/N: 1050-235)........... 2-4
2.4.2 37-pin Analog I/O Interface (ENI P/N: 1050-295) .......................... 2-8
2.4.3 9-pin PL-2HF Analog I/O Interface (ENI P/N: 1050-290)............. 2-11
2.4.4 15-pin Analog I/O Interface.......................................................... 2-12
2.4.5 DeviceNet Pin Out....................................................................... 2-13
2.5 Remote Digital Interface............................................................................ 2-14
2.5.1 Communication Configuration ..................................................... 2-15
2.5.2 RS-422 Bussing........................................................................... 2-16
2.6 MATCHWORK®Interconnection............................................................... 2-17
2.6.1 MATCHWORK®Power Requirements......................................... 2-18
2.6.2 AC Power Cable Connections..................................................... 2-18
2.6.3 RF Power Connections................................................................ 2-19
2.6.4 Fiber Optic Control and Debug Cables........................................ 2-19
2.7 Safety Interlocks........................................................................................ 2-20
2.8 Panels and Controls.................................................................................. 2-22
2.8.1 Front Panel.................................................................................. 2-23
Display.................................................................. 2-23
LEDs..................................................................... 2-24
Controls................................................................ 2-25
2.8.2 Front Panel Options..................................................................... 2-26
Fully Functional Front Panel................................. 2-27
Remote Front Panel ............................................. 2-28
2.8.3 Rear Panel................................................................................... 2-29
Connections ......................................................... 2-29
Rear Panel Drawing ............................................. 2-30
2.9 Power Requirements................................................................................. 2-31
2.9.1 AC Mains Connection.................................................................. 2-31
2.10 Cooling Water Requirements .................................................................. 2-32
2.10.1 Water Fittings Connection ......................................................... 2-33
2.11 Maintenance & Cleaning ......................................................................... 2-34
2.12 System Check ........................................................................................ 2-35
2.13 Initial Power Up....................................................................................... 2-36

Contents
GMW-25 iii
Chapter 3 - GMW-25 Operation.....................................................3-1
3.1 Basic Operation ..........................................................................................3-1
3.1.1 Generator Operation through the Front Panel ...............................3-1
Turning on AC Mains Power...................................3-1
Ensuring that the Front Panel/Remote Front Panel is
unLOCKed..............................................................3-2
Setting the RF power..............................................3-3
Entering the frequency menu..................................3-3
3.1.2 Generator Operation through the ENI Monitor...............................3-5
Turning on the generator........................................3-5
Ensuring that the ENI Monitor has control..............3-5
Selecting the mode of operation.............................3-5
Changing the requested power...............................3-7
3.1.3 Matching Network Configuration for Generator Control.................3-8
Setting the MATCHWORK®up for Generator
control.....................................................................3-8
3.1.4 Matching Network Operation through the Generator ...................3-10
Activating the front panel to display MW
status/Readbacks.................................................3-10
3.1.5 Changing the Matching Network parameters...............................3-11
3.2 ENI Monitor Software Commands.............................................................3-12
3.2.1 Basic Monitor...............................................................................3-13
3.2.2 Generator Control........................................................................3-14
3.2.3 Generator Readback....................................................................3-15
3.2.4 MATCHWORK®Control...............................................................3-18
3.2.5 MATCHWORK®Readback via the Generator..............................3-19
3.3 Advanced Operation..................................................................................3-20
3.3.1 Generator Front Panel Operation ................................................3-20
Changing between Auto-Tune and Manual Tune
Mode.....................................................................3-21
Setting the Minimum Search Threshold................3-22
Setting the delay time...........................................3-22
Setting the start frequency....................................3-23
Menu Navigation and Exit.....................................3-23
3.3.2 ENI Monitor Generator Operation................................................3-23
3.3.3 MATCHWORK®Network Operation using the Generator
Front Panel.....................................................................3-23
3.3.4 MATCHWORK Operation using the ENI Monitor.........................3-23

Contents
iv GMW-25
3.4 Remote Control Interface Communication Protocol .................................. 3-24
3.4.1 Space Characters........................................................................ 3-24
3.4.2 Illegal Commands........................................................................ 3-25
3.4.3 Leading Zeros and Missing User Arguments............................... 3-25
3.4.4 Special Characters ...................................................................... 3-25
3.4.5 Power-up Message...................................................................... 3-26
3.4.6 Backspace Characters................................................................. 3-26
3.4.7 Escape from Indefinite Loops...................................................... 3-26
3.4.8 Link Release Character............................................................... 3-27
3.4.9 XON and XOFF........................................................................... 3-27
3.4.10 Key Level................................................................................... 3-27
3.4.11 Link Integrity Checking .............................................................. 3-28
Chapter 4 - Troubleshooting.........................................................4-1
4.1 Hardware Faults.......................................................................................... 4-2
4.2 System Faults .......................................................................................... 4-3
4.3 Analog Remote Interface Faults.................................................................. 4-4
4.3.1 RF OVERHEAT (Hard Fault)......................................................... 4-4
4.3.2 MAX POWER (Soft Fault).............................................................. 4-4
Appendix A - GMW-25 Specifications .........................................A-1
Appendix B - Glossary of Symbols .............................................B-1
Appendix C - Glossary of Terms .................................................C-1

Introduction
GMW-25 1-1
Chapter 1
Introduction
The GMW-25 Plasma Generator is a rugged, highly reliable RF power
source for plasma etching, CVD, and sputtering applications. Featuring
precise power control and digital interfacing and increased load-power
capability, the GMW-25 generator provides the exceptional reliability
and repeatability required for today’s demanding plasma processes.
Operating at a customer-specified frequency in the range of 1.8 MHz to
2.17 MHz, the GMW-25 generator produces 2500 W of power into a
50Ωload. The DSP-based control module automatically measures
forward RF power and reflected RF power, maintaining constant power
output within ±1% of set point over a Dynamic Power Range of 25 to
2500 watts.
Precise power calibration is traceable to NIST (National Institute of
Standards and Technology) through the ENI Power Standard. Low
harmonic distortion and spurious-free performance complement the
unit’s RF power output control and unconditional RF stability.
An extremely rugged and highly efficient RF power section ensures
greater power delivery into fixed match systems. The DSP-based
control constantly monitors internal subsystem status to maximize
system availability. Extensive built-in diagnostics and internal fail-safe
memory simplify maintenance requirements and increase system
uptime.
A new 9-pin digital interface provides remote control, monitoring and
diagnostic capability via the RS-232 serial link to a computer or host
terminal. Optional custom interface cards are also available.

Introduction
1-2 GMW-25
1.1 About This Manual
The manual provides all of the information required to safely install,
setup, and operate your generator. While every attempt has been
made to provide a concise set of installation and operating procedures
in the Getting Started Quickly section, detailed instructions are also
available.
It is essential that you become thoroughly familiar with the contents of
this manual prior to using your generator. If used properly, the
information contained in this manual will not only promote reliable
generator performance but will also encourage a safe operating or
service environment for all individuals.

Introduction
GMW-25 1-3
1.1.1 Finding Your Way Around
This manual is divided into five chapters and three appendices. The
main Table of Contents will help you to quickly locate the chapter that
contains the information you may be seeking. The following is a brief
description of each chapter.
Chapter 1 The chapter you are reading. This chapter provides information
on the content of the manual, the documentation conventions
used, safety considerations that need to be observed, and a
concise Getting Started Quickly section.
Chapter 2 This chapter acquaints the user with the GMW-25 Plasma
Generator. It covers major features and front and rear panel
descriptions.
Chapter 3 This chapter covers everything needed to install and set up your
generator from Unpacking and Inspection to Initial Power up.
Chapter 4 This chapter covers in more detail how to operate your generator
and take advantage of all of its features.
Chapter 5 This chapter details common troubleshooting situations and
solutions you may encounter when using your generator.
Appendix A This appendix provides complete physical and electrical
characteristics of your generator.
Appendix B This appendix provides a glossary of all the symbols used in this
manual and on the generator per UL, CSA, TUV, and CE
certifications.
Appendix C This appendix provides a glossary of new terms that have been
used throughout this manual.

Introduction
1-4 GMW-25
1.1.2 Documentation Conventions
To better emphasize important information in this manual, the below
methods of formatting have been used to call attention to this
information.
Commands
Many parts of this manual refer to computer commands and data. It is
important to recognize the conventions used in this manual in order to
understand the meaning of these commands.
Angle Brackets < > These brackets are shown for command parameters.
They are not part of the command and should not be
entered.
Rounded Brackets ( ) These brackets contain hex-equivalent numbers for
printable or non-printable characters. The lower-case "h
(h) stands for hexadecimal.
Square Brackets [ ] These brackets indicate a symbol name for special
control codes or non-printable characters. Examples of
commonly used control codes are listed below.
[LF] Line Feed (0Ah)
[CR] Carriage Return (0Dh)
[ESC] Escape (1Bh)
Definitions
This icon is used to set off a definition of a new term used in this
manual. Appendix C provides a complete list of all the new terms used
here.

Introduction
GMW-25 1-5
1.2 Safety Considerations
Certain safety considerations must be observed before operation of
this generator can be attempted. Safety labels are used in both the
manual and on the generator to alert operating and service personnel
to conditions that may cause personal injury or damage to the
equipment from misuse or abuse. Please read the labels and
understand their meaning.
1.2.1 Operating and Maintenance Cautions
The caution label is used in this manual to caution the reader that
failure to follow important operating or maintenance instructions could
adversely affect equipment reliability.
1.2.2 Shock Hazard Warnings
The warning label is used in this manual to warn the reader of a
procedure or practice that could result in personal injury if not followed
carefully.
The lightning bolt within a triangle is used to alert operating and service
personnel to the presence of un-insulated voltage within the enclosure
of sufficient magnitude to cause dangerous electric shock. Only
authorized service personnel with a schematic diagram and knowledge
of the voltages existing within the equipment shall remove covers or
panels bearing this symbol.

Introduction
1-6 GMW-25
1.2.3 Service
WARNING
WARNUNG
AVERTISSEMENT
-- SERVICE BY AUTHORIZED PERSONNEL ONLY
-- REFER TO INSTALLATION AND OPERATING INSTRUCTIONS
-- DISCONNECT POWER FOR ANY SERVICE WORK
-- SERVICE NUR VON FACHPERSONAL
-- INSTALLATIONS - UND GEBRAUCHSANWEISUNG BEACHTEN
-- BEI SERVICE ARBEITEN VOM NETZ TRENNEN
-- CONFIER LA MAINTENANCE A` UNE PERSONNE QUALIFEE
-- CONSULTER LA NOTICE D'INSTALLATION ET D'UTILISATION
-- COUPER L'ALIMENTATION AVANT TOUTE MAINTENANCE
!
Service Warning Marking
Figure 1.2.3
MKS, ENI Products is responsible for safety, reliability, and
performance of the equipment only if:
• Assembly operations, extensions, readjustments,
modifications, or repairs are carried out by authorized
personnel.
• The electrical installation is made in accordance with the
installation instructions provided and the room in which the
equipment is installed complies with the environmental
requirements.
• The equipment is used in accordance with the instructions
for use.

Introduction
GMW-25 1-7
1.2.4 Safety Labels
RF Radiation Warning Label
This label is used to caution the user that the unit produces RF
radiation that can be harmful.
Heavy Object Warning Label
This label is used to caution the user that the unit weighs over 35 lbs
(16 kg) and should be moved by two people.
1.2.5 Technical Support
On the back of the generator is a label with an "800" number for MKS,
ENI Products’ Technical Support. Should you have any difficulties with
your generator and have exhausted all possibilities in the
Troubleshooting Chapter, please feel free to call us.
1- 800- 724- ENI1 (3641)
TECHNICAL SUPPORT
Technical Support Label
Figure 1.2.5

Introduction
1-8 GMW-25
1.3 Nameplate
The GMW-25 Plasma Generator can be identified by a nameplate on
the back of the unit that contains the following information:
I
GMW-25 Serial Tag Label
Figure 1.3
A. ENI MODEL NUMBER:
The model number that uniquely
identifies the unit.
F. RF OUTPUT:
The output of the unit in watts and its
operating frequency.
B. PART NO:
The assembly number that uniquely
identifies the product configuration.
(See section 1.4 for more information
on the model number.)
G. CUST P/N:
A number that is specific to the
customer who ordered the unit and
that contains the customer's own part
number and revision level.
C. SERIAL NO:
The number that is sequentially
assigned as the product is
manufactured.
H. ENI REV:
The revision letter that identifies the
product configuration. Revision A is
the initial revision level.
D. SOFTWARE VERSION:
The version number that identifies the
software configuration.
I. DATE:
The date of manufacture in
MM/DD/YY format.
E. WEIGHT:
The weight of the unit.

Introduction
GMW-25 1-9
1.4 Generator Options at a glance
Before the unit is installed and powered up, it is important to ensure
that the correct unit was received. The model numbers of the Genesis
line of generators have been configured in such a way that it is easy to
tell what option has been installed on a specific unit. The number
generated from this matrix defines the configuration of that unit and
results in a part number that will be utilized throughout the
manufacturing process.
This matrix should be used to compare the configuration of the unit
that was initially ordered to the configuration of the unit received. If
they are different, contact the nearest MKS, ENI Products’ Sales or
Service location for assistance.

Introduction
1-10 GMW-25
-
-
G
N, H, C, L
BBlank
FFull Featured
D20 0.2MHz 2D9 2.9MHz
D27 0.27MHz 4D0 4.0MHz
D38 0.38MHz 12D 12.56MH
D40 0.4MHz 13D 13.56MHz
D80 0.8MHz 27D 27.12MHz
1D0 1.0MHz 40D 40.68MHz
2D0 2.0MHz
WWater
AAir
LLOW FREQ
MMID FREQ
HHIGH FREQ
Product Series
Frequency Range
Cooling
Frequency
AC Input Phase
Front Panel Configuration
Interface Card Configuration
Output RF Connector
Blank
For ENI Internal Use Only
GGENESIS
Reserved for Future Use
12 1.25kW 70 7.0kW
25 2.5kW 1D 10.0kW
50 5.0kW
Power
XSingle Phase North American
A3 Phase North American
YSingle Phase Europe
E3 Phase Europe
0None
19 Pin PL2-HF Emulation
215 Pin Analog
325 Pin Analog Emulation
437 Pin Analog Emulation
For ENI Internal Use Only
Genesis Part Number Interpreter
Figure 1.4

Introduction
GMW-25 1-11
This part number interpreter is comprised of 18 separate fields. In
these fields, letters and numbers are used to define the final
configuration of a unit.
The unit you have received should have the value “25“ in the fourth
and fifth fields of the final part number. Check the serial tag on the
back of the generator. If it doesn’t have “25” in the part number,
contact the nearest MKS, ENI Products’ Sales or Service location for
assistance.

Introduction
1-12 GMW-25
1.5 Getting Started Quickly
This section is intended to provide you with a set of instructions to
enable you to quickly set up and start running your generator.
References to more detailed information are provided at the end of
each step.
To quickly set up your GMW-25 generator, follow the procedure below:
1. Connect the solenoid valve plug.
(See section 2.10 for a description of the solenoid valve.)
2. Connect the water inlet and outlet hoses securely to the water
inlet and outlet connections on the rear panel of the generator.
(See section 2.10 for more information on the connectors.)
3. Once they are securely connected, turn both water valves to the
open position.
4. Insert the External Interlock plug into the interlock connector on
the rear panel marked “INTERLOCK.” AC Power will not engage
until this interlock is defeated (plugged).
(See section 2.7 for more information about the safety
interlocks.)
5. Make sure the AC Mains Circuit Breaker is in the OFF position
(The Osymbol should be showing).