Murata MEMS User manual

Murata MEMS Evaluation
Unit User Manual
Murata Electronics Oy Subject to changes 1/34
www.murata.com Doc.Nr. 82175700 Rev.D
Murata MEMS Evaluation
Unit User Manual

Murata MEMS Evaluation
Unit User Manual
Murata Electronics Oy Subject to changes 2/34
www.murata.com Doc.Nr. 82175700 Rev.D
TABLE OF CONTENTS
1Introduction .........................................................................................................................4
2Quick start for using the Murata MEMS Evaluation Unit .................................................4
3Hardware overview..............................................................................................................5
4Installation ...........................................................................................................................6
5Using the Murata MEMS demo...........................................................................................7
5.1 Starting the GUI....................................................................................................................... 7
5.2 Views........................................................................................................................................ 8
5.3 Setup view............................................................................................................................... 9
5.3.1 Operation mode.................................................................................................................. 9
5.3.2 Temperature..................................................................................................................... 10
5.3.3 Zero offsets....................................................................................................................... 10
5.3.4 Data rate........................................................................................................................... 10
5.3.5 Saving output data to file .................................................................................................. 10
5.3.6 Decimate saved output data............................................................................................. 11
5.3.7 Standard deviation............................................................................................................ 12
5.3.8 Reset demo system.......................................................................................................... 12
5.3.9 Changing moving average filter sample count .................................................................. 12
5.3.10 Read all status registers................................................................................................... 13
5.3.11 I/O-pin control................................................................................................................... 13
5.4 Accelerometer view .............................................................................................................. 14
5.4.1 Output data values............................................................................................................ 14
5.4.2 Sensor status indicator ..................................................................................................... 15
5.4.3 Changing the chart range ................................................................................................. 15
5.4.4 Chart data points .............................................................................................................. 16
5.4.5 Zooming the chart............................................................................................................. 16
5.4.6 Taking a snapshot of the chart.......................................................................................... 17
5.4.7 Data rate indicator ............................................................................................................ 17
5.5Accelerometer and gyroscope view .................................................................................... 17
5.6 Inclinometer view.................................................................................................................. 18
5.7 Sensor status view................................................................................................................ 19
5.8 Register setup view .............................................................................................................. 20
5.9 Macro commands view......................................................................................................... 21
5.10 About view............................................................................................................................. 22
5.11 Application menus................................................................................................................ 23
5.12 Advanced data logging......................................................................................................... 24
6Troubleshooting................................................................................................................25
6.1 GUI won’t start ...................................................................................................................... 25
6.2 No evaluation boards found................................................................................................. 25
6.3 Cannot open connection to evaluation board..................................................................... 26

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6.4 No output data....................................................................................................................... 26
6.5 Power supply voltage error.................................................................................................. 26
6.6 Cannot send macro in Macro Commands view .................................................................. 27
6.7 Cannot check the syntax for macro command................................................................... 27
6.8 Wrong output values or axis directions .............................................................................. 27
6.9 Installing Java ....................................................................................................................... 27
6.10 Installing FTDI drivers........................................................................................................... 27
7Uninstalling the GUI and FTDI driver...............................................................................29
8Device connector ..............................................................................................................30
8.1 Chip carrier............................................................................................................................ 30
8.2 16-pin connector for external board.................................................................................... 31
9Electrical characteristics..................................................................................................32
9.1 Power supply......................................................................................................................... 32
9.2 USB........................................................................................................................................ 33
9.3 IO lines................................................................................................................................... 33
9.3.1 Analog IO ......................................................................................................................... 33
9.3.2 Digital IO........................................................................................................................... 34

Murata MEMS Evaluation
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1 Introduction
The Murata MEMS Evaluation Unit is a tool for evaluating component functionalities and key
properties for several different sensor families. The main features of the Murata MEMS demo
graphical user interface (GUI) include:
View output data values on charts and on numeric indicators
Change chart ranges, freeze, zoom and take snapshots
Data averaging and standard deviation calculations
Save output data to file
View sensor status registers
Read and write other sensor registers
Send macro commands to the evaluation board
This document covers the actions needed to install the necessary drivers and the Murata MEMS
demo GUI software. The document also shows the different features of the GUI and how to use
them. The GUI supports both Windows and Linux operating systems using 32- or 64-bit processor
architectures. A USB connection is required for data transfer between the evaluation board and the
PC. In addition to the Hardware overview section, the end of this document covers more detailed
hardware information.
To ensure you have the latest GUI version please check for updates on page
http://www.murata.com/en-eu/products/sensor/accel/demokit.
2 Quick start for using the Murata MEMS Evaluation Unit
Please follow the steps below:
1. Insert the accompanied USB memory stick into the PC
2. Set up the hardware
- Turn on the external power supply (if necessary –depends on product to be
evaluated)
- Connect USB cable to USB connector on evaluation board and to PC's USB port
3. After the PC has found the device, wait until device driver installation is complete
4. Install the GUI software
- Copy the Murata MEMS demo folder from the USB memory stick to a folder on
your hard drive (for example C:\Murata MEMS demo)
5. Start the GUI software
Windows operating system:
- Double-click file start.bat to start the GUI
Linux operating system:
- Double-click file install.sh to configure USB device permissions (this step is
required only once after the installation)
- Double-click file start.sh to start the GUI
When using the Murata MEMS demo GUI software:
The evaluation board should be connected to the PC before the GUI software is started
Exit the GUI software before unplugging the evaluation board from the PC
After the GUI software has closed, the evaluation board can be unplugged from the PC
The demo software can be operated without network access (but network access is required if
Online sensor information menu item is selected from the Help menu).

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3 Hardware overview
The MEMS Evaluation Board is shown in Figure 1. The sensor is connected to the evaluation
board with a chip carrier PCB or by using an external interface board. If an external board is used
(see Figure 2), it is connected to a 16-pin extension connector. For extension boards with analog
inclinometer and accelerometer sensors an additional external power supply (from 7 to 15 VDC) is
needed. The external power can be connected to the screw terminals on the MEMS evaluation
board or on the extension board. The USB cable is connected to the USB connector. For more
detailed hardware information, refer to the Device connector and Electrical characteristics sections.
Figure 1. MEMS Evaluation Board
Figure 2. Extension board (SCA10xT PCB)
Sensor soldered
on PCB
16-pin cable
connector
Screw
terminals for
external power
supply
Temperature
sensor
Sensor soldered
to chip carrier
Reset button
16-pin cable
connector for
extension board
USB connector
Screw terminals
for external
power supply

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4 Installation
The demo GUI uses Java programming language, so the Java Runtime Engine (JRE) must be
installed. To install the GUI, just copy the Murata MEMS demo folder from the removable drive to a
suitable directory in your hard drive (for example C:\Murata MEMS demo). If the demo GUI was
distributed as a ZIP package, create a folder and extract all files and folders to this new folder.
To create a shortcut for the GUI on the Windows desktop, right-click the start.bat file and select
Send to -> Desktop (create shortcut). The Murata MEMS demo folder also contains an icon for the
shortcut (AppIcon.ico). This can be set for the shortcut by right-clicking the created shortcut on the
desktop and selecting Properties -> Change Icon and then browsing to the Murata MEMS demo
folder and selecting the AppIcon.ico file.
Note: Do not use any special characters in the GUI installation path.
Note: Linux users must execute install.sh script after installing the FTDI drivers and
connecting the demo board to the PC. This will configure the access permission for the
FTDI USB devices using the UDEV module (this was tested using Ubuntu 12.04 LTS).
Note: If the demo GUI was distributed as a ZIP package, the user must also change file
permissions in Linux to be able to execute .sh script files since the ZIP archive does not
store file permissions. This can be done using the command: chmod +x start.sh.

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5 Using the Murata MEMS demo
5.1 Starting the GUI
To start the GUI, browse to the Murata MEMS demo folder and execute start.bat or start.sh file
depending on your operating system. This will first show the splash screen and then the view
shown in Figure 3.
Figure 3. Initial start view
This view can be used to select the evaluation board and sensor types and open the connection to
the board. To start the demo GUI:
Select the connection type: USB or Virtual COM port (VCP)
Select the evaluation board hardware and the board ID from the list; if the ID list is empty,
click on Rescan to rescan for evaluation boards
Open the connection to the evaluation board by clicking the Connect button
Select the sensor type by using the controls product family and product type; if the sensor
supports auto detection of the sensor type, the Auto detect sensor type check box will be
enabled
Start the demo by clicking on Start demo

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The connection can be either USB or serial port (VCP). The user must manually connect to the
evaluation board by clicking on Connect before proceeding. Note that the preferred connection type
is USB because this will provide the fastest and most stable communication. The serial port must
be used if the device is used over a Bluetooth connection. Images of the evaluation board and
sensor are shown on the UI after these are selected. Figure 4 shows an example of the UI after
selecting and connecting to an evaluation board and after selecting an SCA3100 sensor.
Figure 4. Initial setup view after selecting an SCA3100 sensor
If more than one USB device is connected, all devices will be listed in the Select demo board ID
field. If the user does not know the ID of the board, please disconnect all other USB devices and
click on Rescan to update the list (the list includes all devices using an FTDI chip).
5.2 Views
When the Start demo button is clicked, the application loads a sensor specific user interface. Each
sensor will have a Setup view that contains controls for measurements, for example to change
operating modes or the sample rate and to save output data to a file in the selected format. Each
sensor will also have an About view that shows application- and hardware-specific information.
Other views are sensor specific, for example a view to show output data values in sensor-specific
format. Each of the following subsections explains the features of these views.

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5.3 Setup view
The purpose of the Setup view is to provide controls for setting up the measurements and data
calculations. Controls in this view are specific for the sensor type, i.e. an accelerometer will have
different controls compared to a combination sensor with accelerometer and gyroscope. Also,
some controls might be disabled if the sensor does not support these features. All parameter
values are stored to an initialization file and they are reloaded automatically during the next start up
(except the controls Zero offsets and Save output data to file).
Figure 5. Setup view
5.3.1 Operation mode
The Operation mode control lists all possible operation modes for the selected sensor. Figure 6
shows an example of the SCA3100 sensor. Additional operation modes typically include power
saving modes or special measurement modes. Changing the mode will first write the sensor’s
"mode" register, then flush the status registers, and finally reload the measurement setup (macro).
Note that this control is not visible if there is only one operation mode for the selected
sensor.
Figure 6. Control to change the operation mode

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5.3.2 Temperature
The Read temperature check box is used to enable or disable reading of the sensor temperature
values. This will modify and reload the measurement macro that reads the sensor output values.
Note that some sensors might read the temperature even if this check box is deselected; in this
case the measurement macro contains the commands to read the temperature but the returned
values are not processed. SCA10x-T sensors that are used with an extension board will
receive temperature from an on-board external temperature sensor.
5.3.3 Zero offsets
The Zero offsets check box can be used to measure offset values and then to decrease those
automatically from the output data. Note that some operations will clear these values and then read
new values for the offset. For example, the offset might change after changing the operation mode,
so it must be updated for the new mode. This parameter value is not stored to the initialization file.
When the zero offsets feature is enabled, the data buffer for the moving average data will be
cleared. The next received output data samples are then used as offset values for any subsequent
data samples.
5.3.4 Data rate
The Data rate control is used to change the rate at which the output data is read. This feature uses
a specific measurement macro to produce a delay between macro execution cycles, and the exact
execution rate might vary. Note: when the previous hardware version (Demo Kit)is used, this
control is changed to Measurement loop delay (us) control because the older interface
board macro language does not support the macro delay command needed to implement
the data rate feature.
Figure 7. Control to change data rate
5.3.5 Saving output data to file
To begin storing measurement data to a file, first select the data format using the Save output data
to file control. The user can choose to store raw output data values in HEX format, i.e. using the
same format in which the values were received from the sensor, or to store averaged data in
decimal format. Note that status information is stored within output values when the Raw mode is
used. The user can also press CTRL-S in any view to begin saving data in decimal format.
Figure 8. Control to save output data to file
When one of the data formats is selected, the GUI will then query the path and file name for the
new data file. If the file already exists, a confirmation to overwrite the file is shown.

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Figure 9. Confirmation to overwrite existing file
After selecting the file, data streaming to the file begins and an alert dialog view is shown. Other
views, except the output data view, are blocked while streaming data to file. Stopping the data
streaming will enable the other views again. This is done to prevent accidental changing of the
measurement parameters while streaming the data to the file.
Figure 10. Dialog shown while data is saved to file
Clicking on the End data streaming button will end the data streaming. The GUI will then show how
many samples were saved and how long the sampling took.
Figure 11. Information shown after saving data
The format of the output data file depends on the selected sensor and data format (raw vs.
decimal). The data file starts with a file header containing information on the time and date, the GUI
version and various GUI parameter values. Comment lines start with the ‘#’ character. The
statistics shown in the dialog when streaming ended are also appended to the end of the file. Each
data value is separated with whitespace, and each line ends with a system-specific new line
character(s).
Note: Because the amount of output data may be very large, data is split into several files,
each file containing 3 million lines of data. These files will have the original file name
appended with an underscore character (_) and an index number.
5.3.6 Decimate saved output data
This control is used to decrease the number of saved output data samples. The purpose is to
reduce the data log file size by selecting only every nth data sample to be saved in case of very
long data logging sessions. For example, if the data rate is set to 1 Hz and the output data is
decimated by 60, the output data is saved once per minute.

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5.3.7 Standard deviation
Shown below are the controls for standard deviation calculation (STDEV). The user can enable or
disable the STDEV calculation and also define the number of samples used for the STDEV.
STDEV is calculated from averaged sample values (refer to Moving average sample count in
section 5.3.9).
Figure 12. Control to change STDEV sample count
5.3.8 Reset demo system
The Reset demo system button can be used for restarting the data collection from the sensor. This
might be needed, for example, if something goes wrong after sending measurement macro
commands manually and the sensor does not operate as it was supposed to. After clicking this
button, the sensor is reset (if applicable), configuration registers are reinitialized, the status
registers are flushed, the operation mode is set, and the measurement macro to read output data is
reloaded and executed.
Figure 13. Button to restart data collection
5.3.9 Changing moving average filter sample count
It is possible to use moving average filtering for the sensor output data. The GUI takes a selected
amount of previous samples and calculates their average. The averaged values are then added to
the charts and optionally saved to file when using the decimal data format. Note that using a
moving average has no effect on the output data rate.
The user can change the number of samples for the moving average filter. The valid range is from
1 (no averaging) to 2000. The value is changed either by clicking on the small down arrow and
selecting a new value from the predefined list or by typing the value directly in the combo box. The
GUI checks the validity of the typed value and gives an error message if necessary. Gyroscopes,
inclinometers and combination sensors will have a similar control for the moving average sample
count.
Figure 14. Control to change sample count for the moving average filter

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5.3.10 Read all status registers
The user can read and store all sensor status register values along with output data. When Read
all status registers checkbox is selected, the measurement macro is modified to read every status
register specified for the selected sensor type. This checkbox can be found from the General panel
in Setup view as shown in Figure 15.
Figure 15. Checkbox to enable or disable reading of sensor status registers.
The Sensor status view (see 5.7) will update and show these register values. Status register values
are also saved to data files if data logging is activated. If the user wants to reset status register
errors in the Sensor status view, the user has to press Read status registers button to reset status
registers to their initial values.
5.3.11 I/O-pin control
The Murata MEMS demo can wait for an external trigger input before reading the output data.
Figure 16 shows the controls for I/O-pin configuration. The user can specify the pin and level for
the external trigger. Trigger pin defines the trigger input pin and Trigger level the condition which
will trigger the measurement. When the trigger condition is met, the evaluation board sends the
output data to the GUI. The evaluation board waits for trigger pin condition every time before
sending data to the GUI. Please note that there is no timeout for the external trigger so the
evaluation board will always wait until the pin condition is met.
Figure 16. I/O-pin control panel
The Murata MEMS demo can also record the level of a specified I/O-pin. The Read pin state
selection is used to select the I/O-pin to read. The pin level is read after reading the output data
sample and it is also stored to data files when logging data.
Note: Please ensure that the input signal is at the same level as the digital supply voltage.

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5.4 Accelerometer view
5.4.1 Output data values
Shown below is the output data view for accelerometer sensors. The GUI can show output data
values on charts, as well as on numeric indicators. The output data values (possibly averaged by
the moving average filter; see 5.3.9) are added to chart traces (each trace is a line on the chart).
The numerical values Average, Minimum and Maximum are calculated for the data points currently
shown on the chart. In addition to the output values for each axis, the numeric values include
standard deviation (if enabled in Setup view) and possibly a resultant value. The resultant is
calculated according to the following formula:
Resultant =
222 zyx 
The output data view also shows indicators for the data rate, sensor temperature and sensor
status. The amount of data points on the chart can be changed using the Data points control and
the range of the chart using the Chart range control. Note that the amount of data points affects
only the number of output data values on the chart and not the averaged output value.
Figure 17. Output data view for accelerometer sensors
Note: The sensor axis count and axis directions are determined by the selected sensor type,
and output data values are shown only for these axes. If the sensor type was auto detected
and the wrong axis information is shown, check the About view to see if the sensor type
was correctly detected.

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5.4.2 Sensor status indicator
The Sensor status indicator shows the current status for the sensor. If the status color is green
there are no status errors. Red means there are status errors and they should be read by using the
Sensor status view. Typically the status errors are latched until the status registers are cleared
(read). If the status color is black, the sensor status is not read from the sensor. Sensor status
information (ok / fail) is also appended to the decimal data file while saving the data to a file.
5.4.3 Changing the chart range
The Chart range control contains predefined sensor specific ranges, as well as Automatic and
Manual modes. The Automatic mode scales the chart range according to the minimum and
maximum values shown on the chart. Use the Manual mode to set an arbitrary range between
predefined minimum and maximum values.
Figure 18. Chart range control
If the Manual mode is selected, the following dialog is shown (showing previously set values for
manual mode if they exist):
Figure 19. Dialog to set chart range manually
The user can then set the minimum and maximum values for the range. If the values are not valid,
an error message is shown. The Ok button accepts the new values and the Cancel button discards
the changes and restores the previous range. There is also a check box to use the current
minimum and maximum values from the chart (the values are taken from the chart when the dialog
is shown).
Note: Dot (.) character must be used as a decimal separator.

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5.4.4 Chart data points
This control specifies how many samples will be visible on the chart. Note that this control will have
an effect on the performance of the application when a large amount of data is visible on the
charts.
Figure 20. Dialog to set number of data points for the chart
5.4.5 Zooming the chart
The chart cannot be updated while zooming, so the user must first freeze the chart, then the left
mouse button can be used to zoom the chart. After zooming, the GUI shows data markers
according to the mouse position on the chart and their numeric values in a tool tip message. The
figures below show the chart before and after zooming. Use the Reset zoom button to zoom out.
Use the Update chart button to zoom out and start updating data points for the chart.
Note: Do not zoom outside the chart panel or the zoom will automatically reset!
Figure 21. Chart before zooming
Figure 22. Chart after zooming

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5.4.6 Taking a snapshot of the chart
The user can save the chart view as an image to a file by right clicking the chart and selecting Save
image. You can then select the file name and path for the image.
Figure 23. Menu to take a snapshot
5.4.7 Data rate indicator
The output data view also contains an indicator for the data rate (Samples / second). The Data rate
control in the Setup view can be used to change the rate. If the difference between the Data rate
control value and the resulting data rate value is greater than ± 5%, the color for the data rate
indicator is changed to red.
5.5 Accelerometer and gyroscope view
The Accelerometer and gyroscope view shows the output data values for combination sensors.
The accelerometer and gyroscope will have their own charts and numeric values. Below is an
image for a sensor with a 3-axis accelerometer and an X-axis gyroscope. Each sensor axis is
determined according to the selected sensor type.
Figure 24. View for combination sensors

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This view has similar controls for the charts as described in the previous section for the
Accelerometer view. The view can also show the temperature from each ASIC. If the combination
sensor has only one ASIC then the same temperature is shown in both indicators.
Note: The Freeze / Update chart buttons will have an effect on both charts in this view, so
the charts will freeze simultaneously.
5.6 Inclinometer view
The Inclinometer view shows output data for 1- and 2-axis inclinometers. If the sensor uses the
differential measurement mode the numerical indicators Differential output [g] are shown. If the
sensor has separate X and Y axes the numerical indicators OUT(x) are shown to indicate
acceleration and the UI will show the calculated inclination angle for each axis separately. Figure
25 shows the UI for the SCA103T inclinometer.
Figure 25. View for differential inclinometer sensors
When the Start demo button is selected in the initial Setup view, the following dialog is shown if the
MEMS evaluation board supports several different extension board versions for the selected
inclinometer sensor. The user must then select the extension board type used for the specific
sensor. The extension board is connected to the 16-pin extension connector on the evaluation
board.
Figure 26. Dialog for selecting the extension board type

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Inclinometers have some additional controls in the Setup view. These controls can be used to
enable or disable power supply voltage measurement or to change the sample count for A/D-
conversions.
The A/D-conversion sample count specifies the number of samples averaged before the averaged
value is sent to the GUI software (i.e. this averaging is done in the embedded software of the
MEMS evaluation board). Because of this, the selected value has an effect on the data rate (refer
to Moving average sample count in section 5.3.9). If Read power supply voltage is enabled, the
GUI will receive a supply voltage value for every measurement data sample. This value is used to
scale the output values for ratiometric sensors.
Figure 27. Inclinometer controls in Setup view.
5.7 Sensor status view
The Sensor status view can be used to view latched status errors. When the Murata MEMS demo
GUI identifies a status error (either by using SPI-frame bits or by reading a status register) it adds
an event to the status log. The user must then use the Read status registers button to read all
status register values to clear latched status errors. Tooltips can show more detailed information for
the sensor status register bits as shown in Figure 28.
Figure 28. View to check sensor status registers

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If the bit color in the Status registers panel is green, the bit value is 1; if black, the value is 0. If the
bit color is red, it means the bit indicates a status error but the value can be either 0 or 1 depending
on the specific sensor type.
The Clear log button does not read anything from the sensor; it will only clear the Status log
indicator.
5.8 Register setup view
The Register setup view contains controls to read and write sensor-specific registers. There are
separate indicators for data read from the sensor and data to write to the sensor. The user must
select the memory and register from the drop down menus. The view will read the register
automatically when the register is selected from the menu. The Read register and Write register
buttons can also be used to read or write the register.
After writing the register, the Murata MEMS demo GUI will automatically read the register back to
verify that the data was correctly written to the register. If the write was not successful, the Data
from sensor indicator will show a different value compared to the Data to write indicator.
Figure 29. View to read and write sensor registers
The Macro command field will show the last command generated for register operations. The text
can be copied to the Macro Commands view for modification, and later the modified command can
be sent manually.